1

Pre

cisi

on

Im

ag

ing

Mu

ltil

ayer

Op

tics

for

So

ft X

-Ra

y a

nd

Ex

trem

e

Ult

rav

iole

t R

an

ges

Inst

itu

te f

or

Ph

ysic

s of

Mic

rost

ruct

ure

s R

AS

, G

SP

-105

Niz

hn

y N

ovg

oro

d,

Ru

ssia

Nik

ola

yI.

Ch

kha

lo, N

iko

lay

N. S

ala

shch

enko

Nan

oan

d G

iga C

hall

enges

in

Ele

ctro

nic

s, P

hoto

nic

s an

d R

enew

ab

le E

ner

gy

Mosc

ow

-Z

elen

ogra

d, R

uss

ia, S

epte

mb

er 1

2-1

6, 2011

22

OU

TL

INE

1.

Wh

at

is t

he

op

tics

an

d m

ost

ser

iou

s

PR

OB

LE

MS

wh

en C

HA

RA

CT

ER

IZIN

G a

nd

MA

NU

FA

CT

UR

ING

th

e o

pti

cs

2.

La

test

DE

VE

LO

PM

EN

TS

in

th

e fi

eld

of

inte

rest

are

con

du

ctin

g i

n I

PM

RA

S

3.

Ap

pli

cati

on

s th

e o

pti

cs i

n s

cien

ce a

nd

tech

no

log

y

4.

Co

ncl

usi

on

3

Mo

tiv

ati

on

I.U

sin

g s

ho

rt w

av

elen

gth

fo

r

ach

iev

ing

na

no

met

er s

cale

sp

ace

res

olu

tio

n

Sp

ace

res

olu

tio

n o

f a

len

s

wh

ere

NA

is a

nu

mer

ical

aper

ture

, λ

is a

wav

elen

gth

,α

–h

alf

of

a an

ex

it a

per

ture

ang

le a

nd

nis

a r

efra

ctio

n i

nd

ex.

λ=

193 n

m δ

x≈

100 n

m

In t

he

XE

UV

wav

elen

gth

ran

ge

λ=

2-

20

nm

δx

<<

10

0 n

m

(λ=

3n

mN

A=

0.3

δ

x≈

6 n

m)

2α

αsi

nn

NA

⋅=

2/

)/(

61

.0

λλ

δ≈

⋅=

NA

x

4

Dou

ble

p

att

ern

ing

Dou

ble

exp

osi

ng

Imm

ersi

on

Siz

e R

edu

ctio

n L

ith

og

rap

hy

Ten

s of

sup

erfl

uou

s p

rod

uct

ion

op

erati

on

on

a c

hip

are

rem

oved

!

“A

des

ign

er k

now

s h

e h

as

ach

iev

ed p

erfe

ctio

n n

ot

wh

en t

her

e is

noth

ing l

eft

to a

dd

, b

ut

wh

en t

her

e is

noth

ing l

eft

to t

ak

e aw

ay.”

-A

nto

ine

de

Sain

t-E

xu

per

y

Lit

hog

rap

hy

at

13

.5 n

m(6

.7 n

m)

5

Ima

gin

g o

pti

cs f

or

spec

tra

l ra

nge

of

2-6

0 n

m

PR

OB

LE

MS

!

Ind

ex o

f R

efr

act

ion

n≅ ≅≅≅

1an

d a

tten

uati

on

len

gth

l~

0.0

1-5

µm

wid

e

ran

ge

λ<

3 n

m

λ<

0.5

nm

wid

e r

ange

Op

era

tin

g

sp

ectr

al

ran

ge

wid

e

ran

ge

~100 µ

100 m

m

wid

e

range

wid

e

range

Fo

cu

s

len

gth

hig

h

mo

dera

te

low

low

NA

Mu

ltil

ayer

op

tics

Fre

sn

el

zo

ne p

late

s

Refr

active le

nses

Mirro

r and C

ap

illary

optics

Kin

d o

f o

pti

cs

4321#N

an

om

ete

r scale

re

so

luti

on

Usab

ilit

yfo

r so

ft

X-r

ays

yes

yes

yes

yes

yes

no

only

in h

ard

X

-ra

y r

egio

nyes

6

Mu

ltil

ay

er i

nte

rfer

ence

str

uct

ure

s fo

r sp

ectr

al

ran

ge

of

2-6

0 n

m

N=

20-1

000

N=

200-5

00

λϑ

=si

n2

d3

01

2/

÷=

≅λ

dnm

Nd

d/

1/

<δ

%2.

0/

<d

dδ

Ty

pic

al

mu

ltil

ay

er

mir

rors

pro

du

ced

in I

PM

RA

S. M

ore

than

20 p

air

s of

dif

fere

nt

mate

rials

is d

eposi

ted

on

fla

t

or

curv

ed

sub

stra

tes

wit

h

dia

met

ers

from

a

few

up

to 3

00 m

m

Mu

ltil

ay

er I

nte

rfer

ence

Str

uct

ure

Req

uir

emen

ts t

o t

he

dep

osi

tio

n p

roce

ss a

re F

AN

TA

ST

IC

7

Th

e p

rese

nt

lev

el o

f m

ult

ila

yer

no

rma

l-

inci

den

ce o

pti

cs

�In

flu

ence

on

ref

lect

ion

of

inte

rfa

cia

l tr

an

siti

on

lay

ers

in

mu

ltil

ay

er s

tru

ctu

res

r ≈ ≈≈≈

r 0·e

xp(-

2π

2σ

2/d

2)

σsh

ou

ld b

e a

t a

lev

el o

f 0.1

-0.2

nm

,w

hic

h i

ncl

ud

esro

ug

hn

ess

an

d m

ixin

g o

f th

e la

yer

mate

ria

ls

So

th

e p

rob

lem

of

incr

easi

ng

of

the

refl

ecti

on

coef

fici

ents

an

d m

ov

ing

to

wa

rds

the

sho

rter

wa

ve-

len

gth

s is

a p

rob

lem

of

INT

ER

FA

CE

S!!

!!

24

68

10

12

14

16

18

20

22

0,0

0,1

0,2

0,3

0,4

0,5

0,6

0,7

0,8

C

r/S

c

C

r/C

L

a/B

M

o/B

e

W

/Si

exp

er.

R

u/Y

Z

r/A

l

Reflectivity

Wavele

ng

th, n

m

8

Req

uir

emen

ts t

o t

he

surf

ace

sh

ap

e an

d r

ou

gh

nes

s of

the

mir

rors

MS

FR

sc

att

eri

ng

10

-61

x1

0-5

1x1

0-4

10

-31

0-2

10

-11

00

10

11

02

10

3

Sp

ace

fre

qu

en

cie

s, µ

m-1

14

/λ

≤o

bj

RM

ST

he

Mare

ssh

al

crit

erio

non

lim

itin

g a

ber

rati

on

)1

4/(

1N

RM

Sλ

≤S

hap

e acc

ura

cy i

nN

-mir

ror

syst

ems

Forλ=

3n

m a

nd

N=

2 R

MS

obj≈

0.2

nm

an

d R

MS

1 ≈

0.1

4n

m

9

Pro

ble

ms

wit

h t

rad

itio

na

l ap

pro

ach

es t

o c

hara

cter

ize

the

surf

ace

pro

per

ties

Com

mer

ciall

y a

vail

ab

le

inte

rfer

om

eter

s w

arr

an

t

mea

sure

men

t acc

ura

cy o

f

surf

ace

sh

ap

e at

a l

evel

of

RM

S1 ≈

20-3

0n

m

21

8

34

56

7

10

-4

10

-3

1

0-2

0.1

1 1

0

100

ν, m

cm

-1

10

-3

10

-5

10

-7

10

-9

10

-11

PSD1D, mcm3

21

8

34

56

7

10

-4

10

-3

1

0-2

0.1

1 1

0

100

ν, m

cm

-1

10

-3

10

-5

10

-7

10

-9

10

-11

PSD1D, mcm3P

SD

1D

fu

nct

i-

on

so

f S

iO2

sub

stra

te

mea

sure

d

in

IPM

R

AS

(1

)

an

d

Rig

ak

u(2

-

8)

by

d

iffe

ren

t

meth

od

s:

1

–

XR

DS

an

d

AF

M,

2 –

AF

M,

3

–8

–

Zy

go

inte

rfe

ren

ce

mic

rosc

op

e w

ith

ma

gn

ific

ati

on

1.2

5x

, 4

–2

.5x

, 5

–5

x,

6 –

10

x, 7

–20

x a

nd

8 –

40

x.

1.

Lim

itin

g r

an

ge ν

2*10

-2-1

02 µ

-1

2.

On

ly f

lat

surf

ace

s

10

Key

tec

hn

olo

gie

s re

qu

ired

fo

r m

an

ufa

ctu

rin

g a

nd

cha

ract

eriz

ati

on

of

the

op

tics

�S

up

er p

oli

shin

g o

f su

bst

rate

s an

dm

etro

logy o

f su

rface

rou

gh

nes

s

in l

ater

al s

cale

s of

1 n

m –

1 m

mw

ith s

ensi

tivit

y (

qu

ali

ty)

r.m

.s.≈

0.1

nm

�In

terf

erom

etry

for

mea

sure

men

t of

wav

e fr

ont

aber

rati

ons

of

lens

and o

pti

cal

elem

ents

wit

h p

reci

sion

R.M

.S.≈

0.1

nm

�P

hysi

cal

met

hod

s of

corr

ecti

on

(fi

nis

hin

g)

of

op

tica

l su

rface

s

wit

h p

reci

sion

R.M

.S.≈

0.2

-0.4

nm

�D

eposi

tion

an

d p

reci

sion

ref

lect

om

etry

of

mult

ilay

er m

irro

rs o

n

subst

rate

s w

ith c

urv

edsu

rfac

e sh

ape

and w

ith a

dia

met

er u

p t

o a

few

hundre

ds

of

mm

�D

eform

ati

on

-fre

e m

ou

nti

ng

of

the

pre

cisi

on o

pti

cal

elem

ents

into

met

alli

c fr

ames

11

Su

per

po

lish

ing

an

d r

ou

gh

nes

s.T

he

bes

t m

easu

red

res

ult

s on

effe

ctiv

e ro

ugh

nes

s σ

effin

sp

ectr

al

ran

ge

of ∆ν=

0.0

2-6

4 µ

-1of

sup

er p

oli

shed

su

bst

rate

s fr

om

dif

fere

nt

man

ufa

ctu

rers

0.6

2S

i w

afer

fro

m S

outh

-Eas

t A

sia

0.2

0S

ap

ph

ire

(IC

RA

S, M

osc

ow

)

0.5

3Z

erodur

(Edm

und I

ndust

rial

Opti

cs)

0.3

6C

r/S

c M

LS

on S

i(I

PM

RA

S, N

.No

vgoro

d)

0.3

3Q

uar

tz(G

ener

al O

pti

cs)

0.3

8Q

uar

tz (

Kom

posi

t, M

osc

ow

)

0.3

7Q

uar

tz(G

ener

al O

pti

cs)

0.2

2S

i w

afe

r fr

om

Sou

th-E

ast

Asi

a

0.4

3S

i (G

ener

al O

pti

cs)

σef

f, n

mM

ate

ria

l

12

Ph

oto

of

vacu

um

inte

rfer

om

eter

Ch

ara

cter

iza

tio

n a

ber

rati

on

s an

d s

urf

ace

sh

ap

e o

f th

e o

pti

cs.

Inte

rfer

om

eter

wit

h d

iffr

act

ion

ref

eren

ce w

ave

≈0

,25

µ

N.I

. C

hk

halo

, et

al.

A s

ou

rce

of

a r

efer

ence

sph

eric

al

wave

base

d o

n a

sin

gle

mode

opti

cal

fiber

wit

h a

narr

ow

ed e

xit

ap

ertu

re.

RS

I V

. 79. 033107. 2008.

Ex

per

imen

tal

setu

p f

or

stu

dy

ing

the

wav

e fr

on

t d

efo

rmati

on

s of

the

sou

rces

of

sph

eric

al

wave.

(λ=

530

нм

)

RM

S,

nm

IPM

RA

S

AL

S,

Ber

kel

ey

NA

0.3

0.1

30

.07

0.0

2

0.7

0.4

0.2

0.0

8

0.4

0.3

0.2

0.1

13

PD

I In

terf

erom

eter

Ion

-bea

m e

tch

ing f

aci

lity

Su

rface

map

aft

er c

orr

ecti

ng

Su

rface

map

bef

ore

corr

ecti

ng

Co

rrec

tin

g p

roce

du

re

Ion

gu

n

Mask

Pro

cess

ed

sam

ple

14

14

Co

nca

ve

asp

her

ic m

irro

r

Co

nv

exasp

her

ic m

irro

r

Bes

t ch

ara

cter

isti

cs o

f o

pti

cs m

an

ufa

ctu

red

in

IP

M R

AS

.

Pro

ject

ive

ob

ject

ive

(NA

=0

.3)

for

EU

V l

ith

ogra

ph

er

PV

= 8

9.6

nm

RM

S=

17

.8n

mA

s-p

rep

are

d s

urf

ace

Aft

er 2

7th

corr

ecti

ng

PV

= 7

.7n

m

RM

S=

0.9

nm

15

15

Ref

eren

ce s

ph

eric

al

mir

ror

wit

h N

A=

0.2

5fo

r

cha

ract

eriz

ati

on

of

ob

ject

ives

As-

pre

pare

dZ

YG

O r

efer

ence

:

P-V

=42.6

nm

, R

MS

=7.3

nm

Aft

er12-t

hco

rrec

tin

g:

P-V

=6.7

nm

, R

MS

=0.6

nm

Inte

rfer

om

eter

Ob

ject

ive

Ref

eren

ce m

irro

r

16

Ap

pli

cati

on

th

e O

pti

cs i

n S

cien

ce

an

d T

ech

no

log

y

17

18

�M

ult

ilay

er o

pti

cs a

nd

ap

pa

ratu

s f

or

cha

ract

eriz

ati

on

pla

sma d

isch

arg

e E

UV

rad

iati

on

so

urc

es a

nd

op

tics

co

nta

min

ati

on

�F

ree-

sta

nd

ing m

ult

ilay

er f

ilte

rs f

or

XE

UV

sp

ectr

osc

op

y a

nd

Sp

ectr

al

Pu

rity

Fil

ters

cu

ttin

g l

on

g-w

av

elen

gth

ra

dia

tio

n w

ith

hig

h w

ith

sta

nd

ab

ilit

yto

hea

t lo

ad

s

in α

-a

nd

β-

ma

chin

e

�P

rop

ose

d n

ew w

av

elen

gth

6.X

nm

fo

r n

ext

gen

erati

on

EU

VL

(2

008

)

Main

Con

trib

uti

on

s of

IPM

RA

S i

nto

th

e A

SM

L E

UV

Lit

hogra

ph

y D

evel

op

men

ts

In-b

and

ref

lect

om

ete

rfo

r m

easu

rem

ent

of

refl

ecti

vit

y l

oss

es d

ue

to

con

tam

inat

ion

an

d f

ilte

r tr

ansp

aren

cy

In-b

and

con

tou

r-ad

apte

d

det

ecto

r: L

ook

ing

at

the

EU

V s

ou

rce

thro

ug

h a

“s

pec

tral

win

do

w o

f m

ult

i-m

irro

r E

UV

L o

pti

cs”

SP

Ffo

rα

-

an

d β

-to

ols

T13.5

>7

0%

Top

er>

80

0º

C

19

19

A s

tan

d o

f E

UV

-lit

hog

rap

her

wit

h a

des

ign

ed r

eso

luti

on

of

30

nm

(I

PM

RA

S)

�D

esig

ned

res

olu

tio

n2

7 n

m

�F

ield

of

vie

w o

n a

mask

3× ×××

3 m

m2

�D

emag

nif

icati

on

5× ×××

Ob

ject

ives

�D

emo

nst

rati

on

th

at

in

Ru

ssia

th

ere

exis

t

un

iqu

e te

chn

olo

gie

s fo

r

dev

elo

pin

g E

UV

na

no

lith

og

rap

hy

�A

sta

nd

fo

r

dev

elo

pm

ent

an

d

op

tim

iza

tio

n

ph

oto

resi

sts

for

13

.5 n

m

20

Mo

tiva

tion

II.

Usi

ng

a r

eso

nan

ce c

ha

ract

er o

f in

tera

ctio

n

of

the

XE

UV

ra

dia

tio

n w

ith

a m

att

er i

n a

co

mb

ina

tio

n

wit

h n

an

om

eter

-sca

le r

eso

luti

on * A

n a

dva

nta

ge

in u

sing

of

nan

om

eter

-

scal

e re

solu

tion

opti

cs i

s fo

rced

by a

reso

na

nce

ch

ara

cter

of

inte

ract

ion

of

the

XE

UV

radia

tion

wit

h a

ma

tter

. D

ue

to l

ow

sca

tter

ing

, lo

w a

bso

rpti

on

bef

ore

and

str

on

g a

bso

rpti

on

bel

low

ab

sorp

tio

n e

dg

es, w

e ca

n s

tud

y t

hic

k,

>10

µ, b

iolo

gic

al

(org

an

ic)

sam

ple

s

wit

h a

hig

h a

bso

rpti

on

con

tra

stof

pro

tein

s (c

arb

on

).

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rese

nce

of

stro

ng a

bso

rpti

on

ju

mp

s d

ecre

ase

the

requ

ired

ill

um

inati

on

do

seb

y

a fe

w o

rder

s of

mag

nit

ud

e. I

t m

ean

s th

at n

ot

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rd X

-rays,

not

elec

tron

s, o

nly

soft

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ays

allo

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ven

liv

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bio

log

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cell

s, o

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g n

an

om

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org

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ics

in a

th

ick

mat

rix

.

21

Vie

win

g s

pin

str

uct

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s w

ith

so

ft X

-ra

y m

icro

scop

y

Images

rec

ord

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t 15n

m s

pati

al

reso

luti

on

of

the

dom

ain

evolu

tion

in

(Co

0.8

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r 0.1

7) 8

7P

t 13

all

oy

fil

m a

s fu

nct

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of

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pli

ed m

agn

etic

X-r

ay m

icro

sco

py o

f th

e do

mai

n

confi

gu

rati

on f

or

the

ON

/OF

F s

wit

ch

sett

ings.

Pet

er F

isch

er.V

iew

ing s

pin

str

uct

ure

s

wit

h s

oft

X-r

ay m

icro

scopy

.M

ater

ials

today

. (2

010).

V.1

3. N

. 9.

Pp. 14-2

2.

22

22

Ex

tra

terr

estr

ial

XE

UV

ast

ron

om

y.

Th

e T

ES

IS

pro

ject

(P

.N. L

ebed

evP

hIA

S)

Ph

oto

gra

ph

s of

the

mir

rors

for

the

SE

C

010

20

30

40

50

0.0

0

0.0

5

0.1

0

0.1

5

Microns

Rad

ius, m

m

Op

tica

l sc

hem

e of

the

tele

scop

e

Ph

oto

of

the

Su

n a

t λ=

30.4

nm

, ta

ken

wit

h a s

ate

llit

e

Coro

nas-

Ph

oto

n(2

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olu

tion

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Fo

r d

evel

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Pro

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KA

th

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solu

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An

asp

her

ical

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file

23

Con

clu

sion

1.

Dif

fract

ion

qu

ali

ty X

EU

V o

pti

cs o

pen

s u

p n

ew p

oss

ibil

itie

s in

nan

o-l

ith

ogra

ph

y a

nd

mic

rosc

op

y, in

basi

c p

hysi

cs o

f

non

lin

ear

med

ium

s an

d n

an

o-e

lect

ro-m

agn

etis

m.

2.

Sta

te-o

f-th

e-art

tec

hn

olo

gie

s of

gro

win

g m

ult

ilayer

mir

rors

an

d s

ub

stra

te m

an

ufa

ctu

rin

g a

llow

solu

tion

a n

um

ber

of

the

men

tion

ed a

bove

task

s.

3.

Th

e m

ain

pro

ble

ms

slow

ing d

ow

n w

ide

usi

ng o

f th

e op

tics

are

lim

itin

g c

ap

ab

ilit

ies

of

the

poin

t d

iffr

act

ion

in

terf

erom

etry

for

test

ing h

igh

-NA

asp

her

ical

op

tics

an

d r

elati

vel

y p

oor

surf

ace

rou

gh

nes

s o

f su

bst

rate

s an

d i

nte

rface

s in

sh

ort

-dM

LS

.

4.

Worl

d l

evel

lab

ora

tory

tec

hn

olo

gie

s an

d i

nst

rum

enta

tion

for

man

ufa

ctu

rin

g a

nd

ch

ara

cter

izati

on

of

dif

fract

ion

qu

ali

ty

imagin

g o

pti

cs f

or

XE

UV

ran

ge

are

dev

elop

ed i

n I

PM

RA

S.

24

MA

NY

TH

AN

KS

for

YO

UR

AT

TE

NT

ION

!!!