Lisa PorterDirector (’15–’16)

Michael D. WilliamsDirector (’15–’16)

Steven M. GeorgeImmediate Past-President

Anna BeluDirector (’14–’15)

Susan BurkettDirector (’14–’15)

David SurmanPresident-Elect

Joe GreeneClerk/Secretary

Gregory J. ExarhosTreasurer

Ivan G. PetrovPresident

AVS2015 Board of Directors

James M. Fitz-GeraldDirector (’15–’16)

Timothy A. GessertDirector (’14–’15)

Peter SheldonChair (’13–’15)

Yves Chabal(’14–’16)

Lynnette Madsen(’14–’16)

Ian Gilmore(’15–’17)

Shirley Chiang(’13–’15)

AVS2015 Awards Committee

Donald Baer(’15–’17)

Ivan G. PetrovAVS President

Peter SheldonAVS Awards Chair

Welcome to the AVS 62nd Symposium and Exhibition Awards Ceremony and Reception.

We thank you for being here with us for this prestigious event where we recognize

and celebrate our 2015 awardees.

We hope you will enjoy the evening, and we ask that you join us as we say,

“Congratulations AVS Awardees!”

AVS STAFF

2

Yvonne TowseManaging Director –

NY Office

Keith MitchellIT Systems/Web

Administrator – NY Office

Ricky BaldeoOffice Services

Coordinator – NY Office

Nancy SchultheisPublications OfficeManager – NC Office

Angela KlinkMember Services

Administrator – NY Office

Della MillerMarketing Communications / Events Manager – CA Office

Estella StansburyEditorial Assistant –

NC Office

Jeannette DeGennaroExhibition & Sales Manager – NY Office

Peter BurkeFinancial

Administrator – NY Office

Heather KorffEvents / Office

Coordinator – CA Office

Tonya YandleSSS Editorial Assistant –

NC Office

Jennifer SchreinerBiointerphases

Editorial Assistant –NC Office

AVS PRESIDENTS1953–54 Joseph B. Merrill1954–55 Rudy A. Koehler1955–56 John R. Bowman1956–57 Andrew Guthrie1957–58 Medard W. Welch1958–59 A. John Gale1959–60 Wilfrid G. Matheson1960–61 Benjamin B. Dayton1961–62 Luther E. Preuss1962–63 Donald J. Santeler1963–64 Charles H. Bachman1964–65 George H. Bancroft1965–66 Hans A. Steinherz1966–67 Hubert W. Schleuning1967–68 Paul A. Redhead1968–69 James M. Lafferty1969–70 William J. Lange1970–71 Rointan F. Bunshah1971–72 Daniel G. Bills1973 Maurice H. Francombe1974 Dorothy M. Hoffman1975 Lewis W. Hull1976 N. Rey Whetten1977 Richard W. Hoffman1978 Leonard C. Beavis1979 Charles B. Duke1980 John L. Vossen, Jr.1981 Theodore E. Madey1982 John A. Thornton1983 John R. Arthur, Jr.1984 Edward N. Sickafus1985 Donald M. Mattox1986 Jack H. Singleton

1987 Paul H. Holloway1988 John W. Coburn1989 Joseph E. Greene1990 David W. Hoffman1991 Lawrence L. Kazmerski1992 James S. Murday1993 H. Frederick Dylla1994 John R. Noonan1995 John H. Weaver1996 William D. Sproul1997 Gary E. McGuire1998 Jerry M. Woodall1999 Stephen M. Rossnagel2000 Paula J. Grunthaner2001 Bruce D. Sartwell2002 Rudolf Ludeke2003 Dawn A. Bonnell2004 Robert A. Childs2005 David E. Aspnes2006 Christie R.K. Marrian2007 Neal D. Shinn2008 John N. Russell, Jr.2009 Gregory J. Exarhos2010 David G. Castner2011 Angus A. Rockett2012 Alison A. Baski2013 Susan B. Sinnott2014 Steven M. George2015 Ivan G. Petrov

3

AVSFORTY-YEAR MEMBERS

2001 Charles T. Adams2004 Richard O. Adams2012 Alain P. Adnot2012 Kenya Akaishi1993 Colin Alexander*2001 Daniel Alpert2008 S. John Archer2013 James G. Armstrong2004 Paul C. Arnold2008 Arnold J. Aronson2007 John R. Arthur1999 C.A. Baer2015 Donna Bakale2011 John M. Baker1995 George Bancroft*2004 A.S.D. Barrett*2004 Alfred E. Barrington*2009 Edward G. Barth2008 Ernst G. Bauer1993 Arthur Beach1998 Leonard C. Beavis2006 George A. Beitel2014 Cristoforo Benvenuti 2009 Lyle E. Bergquist*2008 Louis A. Biagi1998 L. Bianchi2013 Lowell E. Bitter2015 John Blakely2004 John V. Blaze*2010 Henry K. Blazek2013 George L. Blomberg2000 Wolfgang Bode*

2007 Henry R. Bolin2012 Hans P. Bonzel2004 Eugene N. Borson*2014 Manuel Braun 2011 William C. Brown2008 Franklin R. Brumwell2014 Christopher R. Brundle 2009 R.W. Buckman1999 Rointan Bunshah*2013 James M. Burkstrand2009 Andras F. Cserhati2001 Peter Clarke*2012 James H. Craig2010 Charles K. Crawford2015 Charles Crider2008 Kenneth R. Cross2011 Jon W. Culton2013 Jerome J. Cuomo2004 Alvin Czanderna2009 Fortunato A. Damiano*2008 Roy Dancey2006 Philip M. Danielson2011 Lawrence Evan Davis2012 Paul R. Davis2003 William Davis2004 Stanley A. Dawkins1993 Benjamin Dayton1994 Sarah Agnes Decker*1998 Paolo della Porta*2014 Ronald W. Dennison 1993 Richard Denton*2007 Jose L. de Segovia

2006 Neelkanth G. Dhere2008 Francois M. Dheurle2013 J. Thomas Dickinson2014 Rodney O. Dillon 2003 Kenelm Doak2008 Richard F. Donovan*2004 Lawrence F.J. Doo2009 Charles B. Duke1993 John Durant*2013 H. Frederick Dylla2003 W. Dyrkacz*1993 William Eaton*1995 Ken Ehlers2003 Gert Ehrlich2015 Richard Eisfeller2009 Ronald James Ekern2004 Walton P. Ellis2014 Alan T. English 2010 Peder J. Estrup2014 Charles S. Fadley2005 Dewey L. Farrington2007 Seymour Feuerstein*2007 Stanley Firestone2004 Robert N. Forrest1995 Ellis Foster, Jr.*2003 Maurice Francombe*2012 David B. Fraser2012 Joseph E. Greene2002 Stanley Goldfarb1998 Marsbed Hablanian2006 Paul H. Hall2009 Dan N. Harpold

4

*deceased50 Year Member 60 Year Member

AVSFORTY-YEAR MEMBERS

2000 David Harra2009 Georg H. Hass1997 Chikara Hayashi2011 Russell J. Hill2014 Theodore R. Hillyer 2008 Arthur K. Hochberg2013 David W. Hoffman1994 Dorothy Hoffman*1994 Richard Hoffman*2000 Leslie Holland*2012 Paul H. Holloway2009 Lorn Howard1999 W.K. Huber*2005 John B. Hudson1993 Lewis Hull1997 Arnold Huntress2004 John R. Hutcheon2009 Curtis M. Jackson2015 Heribert Jahrreiss2014 Joseph A. Jarrell 2009 J.W. Johnson2010 Douglas L. Jones2010 William R. Jones2004 Karl W.R. Johnson2011 Robert S. Juntz2009 Alex E. Jvirblis2009 Manfred S. Kaminsky2005 Eric Kay2014 Lawrence L. Kazmerski2004 William J. Kearns2008 Matt Keehan2000 Bruce Kendall

2009 Derek F. Klemperer1993 Rudy Koehler2014 Michael L. Kottke 2015 Sol Krongelb1999 Thomas LaBounty*1999 Jim Lafferty*2011 Max G. Lagally2001 William J. Lange*2014 Robert A. Langley 2010 Ronald N. Lee*1996 Gerhard Lewin2014 Reuel B. Liebert 2012 Ernst Loebach2012 Joseph S. Logan2008 Louis B. Loubet2004 Chih-Shun Lu2015 Paul Luscher2013 Robert J. Madix2004 Allen R. Manthei2015 Giorgio Margaritondo2013 Charles Mariano2011 Donald M. Mattox2007 Vivienne Harwood Mattox2013 Gary E. McGuire2012 Robert McKoon2005 Walter M. McCain*2004 James C. McLane2007 Paul S. McLeod2009 Russell Messier2004 Irving Michael2010 Hillard C. Miller2011 Norman C. Miller

1997 N. Milleron2002 Boude C. Moore*2002 Warren F. Moore2008 Dale E. Morton2009 Sakhamuri V. Narasaiah2015 Gerald Nelson1997 H.G. Noller2005 Welville B. Nowak2004 Daniel W. Oblas2004 William A. Owen2013 Real Paquin2012 Howard G. Patton2009 Robert T. Payne2007 Roy Norman Peacock*2004 Charles R. Pearce1995 Ed Peterson2015 Bradway Phillips2007 William B. Phillips2006 Alan H. Plaisted2009 Daryl J. Pocker2005 Neil M. Poley2005 Helmut R. Poppa2012 Cedric Powell1995 Luther Preuss2011 James Lyn Provo2005 Arthur A. Rasch2015 Russell Rauch1998 Paul Redhead*2000 Thor Rhodin*2004 Jay L. Richman2004 Elmar G. Ritter2011 John E. Rowe

5

*deceased50 Year Member 60 Year Member

AVSFORTY-YEAR MEMBERS

2014 Larry J. Rowton2011 James R. Ruhe2012 Robert R. Rye*2002 James P. Sackinger2010 William Sajnacki2007 Howard M. Saltsburg1993 Donald Santeler*2013 Bruce D. Sartwell2015 William Scaife1993 Thomas Scatchard*2006 Paul M. Schaible2014 Carl P. Schalansky 2005 Albert Schoolcraft1993 Hubert Schleuning*2010 Lanny D. Schmidt2012 Juergen M. Schroeer2010 Ronald E. Shalkhauser2011 Alex R. Shimkunas2005 Vern D. Shipman2009 Hideo Sibata2001 Jack Singleton

1995 Hugh Smith*2014 James S. Solomon 2004 Stanley J. Solomon2009 Rodney J. Soukup2000 Walter Steckelmacher*2014 Christoph O. Steinbruchel 2013 Daniel L. Stoltz2013 Yoshitaka Suezawa2004 John J. Sullivan2015 Marylin Taylor2004 Ronald A. Thiel*2015 Charles Tilford2005 M. Tom Thomas2004 Albert R. Toft2012 Harland G. Tompkins2013 Luisito L. Tongson2006 Frederick T. Turner2012 George Tzanavaras2011 Ralf W. Vanselow2010 Abraham Venezia2004 Richard H. Vogt

2006 Richard W. Vook2001 Robert Waits2002 Isidore Warshawsky2004 David B. Webb2002 Kimo Welch2004 William R. Wheeler1999 N. Rey Whetten2014 Charles E. Wickersham 2009 H.H. Wieder2013 John C. Wiesner1998 Norm Wilson2006 Harold F. Winters2006 James R. Woodyard2004 Samuel T. Yanagisawa*2010 John T. Yates2008 Arthur M. Yelon2009 James R. Young2015 Ming Yu2004 Eugene D. Zak*

6

*deceased50 Year Member 60 Year Member

IN RECOGNITION OF

James SolomonAVS Science Educators’ Workshop Coordinator

1990 – 2015

Jim is retiring this year after serving as the coordinator of the AVS Science Educator’s Work-shop since it began in 1990. Under Jim’s careful guidance, this program has touched over450 secondary science teachers from at least 32 states. Jim was recognized as Fellow of theSociety in 1998 for his commitment to educational outreach and his research contributionsin characterizing technologically important materials.

Jim has served the AVS in many capacities over his career. At the national level, he was aDirector and chaired both the Constitution and By-laws committee and the Education com-mittee. He served twice as the Ohio Chapter chair and has continued to be active with hislocal chapter.

Jim invested many hours of effort in the Science Educators’ Workshop. His attention todetail and his continuous efforts at improving the experience for teachers who attendedwere reflected in the very positive comments that the teachers offered about the value of theworkshop.

We sincerely thank him for his many years of dedicated service to AVS, in particular to hiscoordination of the Science Educators’ Workshop, and we look forward to his continuinginvolvement with AVS activities.

Thank You Jim!!!

7

NOTES

8

GRADUATE STUDENT AWARDS

9

There are five (5) top-level named Graduate Student Awards and three (3) Graduate Research Awards, described below. The recipientsof these awards are determined after a general competition with all the graduate research applicants and a presentation to the Awards Committee at the International Symposium.

The finalists are:Wei Bao, University of California, Berkeley Antonio R. Bighetti Mei, Univ. of Illinois, Urbana-Champaign

Elena Maria Echeverria Mora, Univ. of Nebraska-Lincoln Luan Nguyen, University of Kansas

Leeya Engel, Tel Aviv University Holly Walen, Iowa State University

Andrada-Oana Mandru, Ohio University Jiayu Wan, University of Maryland, College Park

The Nellie Yeoh Whetten Award was established in 1989, in the spirit of Nellie Yeoh Whetten, to recognize and encourage excellenceby women in graduate studies in the sciences and technologies of interest to AVS. A fund to support the award was established by Timothy J. Whetten, friends and family of Nellie Yeoh Whetten, and AVS. The award consists of a cash award, a certificate, and reimbursed travel support to attend the International Symposium.

The Russell and Sigurd Varian Award was established in 1982 to commemorate the pioneering work of Russell and Sigurd Varian. It is presented to recognize and encourage excellence in graduate studies in the sciences and technologies of interest to AVS. Theaward is supported by Varian, Inc. It consists of a cash award, a certificate, and reimbursed travel support to attend the International Symposium.

The Dorothy M. and Earl S. Hoffman Award was established in 2002 to recognize and encourage excellence in graduate studies in thesciences and technologies of interest to AVS. It is funded by a bequest from Dorothy M. Hoffman, who was president of AVS in 1974and held other positions of responsibility in the Society. The award consists of a cash award, a certificate, and reimbursed travel support to attend the International Symposium.

The Graduate Research Awards were established in 1984 to recognize and encourage excellence in graduate studies in the sciences andtechnologies of interest to AVS. Each consists of a cash award, a certificate, and reimbursed travel support to attend the InternationalSymposium.

The Dorothy M. and Earl S. Hoffman Scholarships were established in 2002 to recognize and encourage excellence in graduate studies in the sciences and technologies of interest to AVS. They are funded by a bequest from Dorothy M. Hoffman. The scholarshipsconsist of a cash award, a certificate, and reimbursed travel support to attend the International Symposium.

2015 NATIONAL STUDENT AWARD FINALISTS

DOROTHY M. AND EARL S. HOFFMAN AWARD

NELLIE YEOH WHETTEN AWARD

RUSSELL AND SIGURD VARIAN AWARD

GRADUATE RESEARCH AWARDS

DOROTHY M. AND EARL S. HOFFMAN SCHOLARSHIPS

Alison BaskiVirginia Commonwealth University“For contributions to the fundamentalinvestigation of semiconductor surfacesusing scanning probe techniques and forSTEM leadership within the university,community and profession”

Charles “Chip” R. Eddy, Jr.US Naval Research Laboratory“For exceptional contributions to electronic materials growth and processing, especially for III-V semiconductors, with particular attention to defect reduction/eliminationenabling enhanced performance of advanced devices”

Lara J. GambleUniversity of Washington“For continued development of novelbiomedical surface analysis tools and methodology for advancing our understanding of diagnostic devices and biological materials”

Reza GhodssiUniversity of Maryland“For outstanding leadership in microsystems technology achieved bycombining knowledge of materials andprocessing, innovative device concepts,and diverse applications”

Aubrey T. HanbickiUS Naval Research Laboratory“For seminal work enabling robust spin injection from ferromagnetic metals into semiconductors and for sustained contributions to the field ofsemiconductor spintronics”

Jay HendricksNIST“For exceptional contributions to vacuum science and for developing newand revolutionary vacuum standardsand methods through promoting excellence in vacuum measurement as well as being a mentor to early career scientists and engineers”

10

FELLOWS

Please see pages 16-19 for a complete list of AVS Fellows.

Kerry W. HippsWashington State University“For pioneering work in the applicationof electron tunneling to the understand-ing of physisorbed transition metal complexes, and for the extension ofthese studies to quantitative kinetic and thermodynamic measurements”

Sergei V. KalininOak Ridge National Laboratory“For development of revolutionaryscanning probe microscopy techniquesand application to transformative scientific discoveries in physics, chemistry, and materials sciences”

Michael StueberKarlsruhe Institute of Technology“For significant contributions to the development and application of diamond-like carbon and carbon-basednanostructured coatings”

Amy V. WalkerUniversity of Texas at Dallas“For development of ionic liquid matrix-enhanced SIMS and numeroustechniques for selective deposition onorganic substrates”

11

FELLOWS

12

Marc Landry graduated from Woonsocket (R.I.)High School in 1973 and began a plumbing appren-ticeship shortly thereafter. He was introduced to theworld of vacuum technology in 1977 after joiningC.I. Hayes, in Cranston, R.I., inventors of graphitelined, high temperature vacuum heat treating andcarburizing furnaces. During his 7 years working asa construction mechanic, he learned the skills andtechniques required in the machine building trades,such as welding and brazing, steel fabrication,industrial vacuum technology (tooth-rattling Stokesand Kinney piston pumps), Roots and diffusionpumps and gauging, as well as hydraulic, pneumaticand process gas systems design, fabrication andassembly.In 1984, Marc moved to Boulder, Colorado.

Marc’s transition to the world of high tech camewhile employed for two years as a sales engineer forVacuum Inc., under the tutelage of Ted VanVorous,co-inventor of the planar magnetron sputtering cath-ode. During that time, Marc spent considerable timevisiting the national labs of the western states, sup-plying vacuum equipment for research on a diversevariety of technologies, such as chemical lasers,semiconductor processing equipment, metal linedvacuum furnaces, and sold piston, rotary vane, cryo-genic and turbo pumps, vacuum feedthroughs, leakdetection, CF flanges and chambers, and pump

fluids. He also serviced and modified vacuum weld-ing chambers, sputtering cathodes, and many othervacuum related systems.In January of 1987, Marc joined a small amor-

phous silicon thin film startup, Glasstech Solar, Inc.(“GSI”), whose business model was to commercial-ize the production of a-Si:H solar modules on glass.Marc’s skills soon allowed him to lead the R&Dsystems division of GSI, designing and assemblingmulti chamber UHV Plasma Enhanced CVD sys-tems used for research on many different thin filmdevices.Marc’s skills in plumbing allowed him to become

an expert in designing and fabricating complex gasdelivery and vacuum pumping systems and becom-ing an early adopter of orbital tube welding technol-ogy. His experience as a sales engineer led him tobecome director of sales and marketing for GSI,(which today is First Solar). Marc traveled theworld installing systems built at GSI.In 1993, Marc joined The National Renewable

Energy Labs in Golden, Colorado as a MasterResearch Technician, where he transitioned into theworld of silicon crystal growth, designing newexperimental systems and upgrading FZ and CZcrystal growth systems, as well as many new experi-mental projects. Marc’s familiarity with the localColorado vacuum industry helped launch the former

GE PrimeStar thin film CdTe startup. Marc hasbeen an advocate at NREL of transitioning manyold oil sealed vacuum pumps and systems to mod-ern dry pump technology.As a senior member of the Engineering and Infor-

matics Group at NREL, Marc is responsible formentoring the next generation of technicians as wellas continuing to work on many UHV, CVD, andPVD deposition and diagnostic tools such as RBS,XPS, and other related material science techniques.While at NREL, Marc has been involved in many

aspects of research on all of the various solar PVtechnologies, such as GaAs, CdTe, CIGS, thin filmand bulk silicon, MBE, TCO research, and toxic and pyrophoric gas delivery systems and compo-nents. Marc has 1 patent for solar breeder reactortechnology.In 2014, Marc received a Graduate Certificate in

the Business of Renewable Energy from the Univer-sity of Colorado, and conducts informative tours ofthe PV areas of NREL.Marc is an expert telemark skier, and he and his

wife of 31 years, Susan Early, and teenage daughter,Helen, enjoy rafting on the rivers of the West. Marchas also been a part-time fitness instructor at NRELfor more than 20 years, and is an accomplished finger-style and blues guitarist and singer, perform-ing regularly in Boulder County, Colorado.

GEORGE T. HANYO AWARDThe George T. Hanyo Award was established in 1996 by the Kurt J. Lesker Company in the memory ofGeorge T. Hanyo, a highly skilled, long-time employee of the company. The award is presented to recognizeoutstanding performance in technical support of research or development in areas of interest to AVS. It rec-ognizes valuable contributions made by persons outside normal professional circles. Typical nomineesshould have received mention in the “Acknowledgments” sections of the published papers but, with thepossible exception of papers describing new apparatus or procedures, would rarely have been authors orco-authors. The award consists of a cash award and a plaque setting forth the reasons for the award.

Marc D. Landry, National Renewable Energy Laboratory“For continued, longstanding, and enthusiastic technical support of the research efforts

at NREL by design, fabrication, installation and repair of vacuum-based growth, deposition, processing, and measurement tools primarily for photovoltaic R&D”

13

Petro Maksymovych is a Research Staff Member at theCenter for Nanophase Materials Sciences at the Oak RidgeNational Laboratory. Petro received his BS in PhysicalChemistry from the Kiev Taras Shevchenko University inUkraine. He earned his Ph.D. in Physical Chemistry at theUniversity of Pittsburgh, Surface Science Center under thesupervision of Prof. John T. Yates, Jr. His thesis workfocused on molecular-level understanding of chemical reac-tions on solid surfaces, revealing organometallic chemistry asthe guiding motif for chemisorption and self-assembly ofubiquitously used organosulfur molecules on noble metal sur-faces. For this contribution he was awarded a 2006 AVSMorton Traum Award.After completing his Ph.D., Petro received a Eugene P.

Wigner Fellowship from the Oak Ridge National Laboratory,to pursue nanoscale electron transport in ternary oxides,including ferroelectric perovskites and colossal magnetoresis-tive compounds. His work has revealed polarization-con-trolled electron transport mechanisms in electric-field switch-able solid-state materials, such as ferroelectric oxides, and anovel and almost universally applicable mechanism for elec-trochemical and electronic phase transformations in complexoxides with pressure-gradients. He continues to investigatereversible hot-electron reactions on metal surfaces enabled by

proximity and crowding effects in molecular assemblies, andmost recently the emergence of complex correlated electronproperties in organic solids. He developed several new scan-ning probe microscopy techniques, most notably a determinis-tic methodology for analysis of thermopower and temperaturegradients in tunneling and point-contact junctions that can beused to probe thermoelectric materials, electron and thermaltransport at the nanoscale.Non-thermal chemical reactions in molecular and solid-

state materials occur within the “pre-breakdown” regime oflarge electric and mechanical stress fields. The control oversuch reactions will advance atomic manipulation techniquesbeyond well-characterized surfaces and onto chemical path-ways with large activation barriers, thereby allowing fordeterministic control of realistic materials for electronic andenergy applications. Controlled electronic excitation exhibitsoften surprising chemical reactions that are not accessible bythermal activation, paving the path toward electron catalysis.Petro was awarded the ORNL Early Career and Director’sAwards for Scientific Accomplishment in 2011 for his workon nanoscale ferroelectric oxides. He organized several sym-posia on oxide electronics for the Materials Research Society.He has authored over 60 peer-reviewed publications, severalbook chapters and patents.

Petro Maksymovych, Oak Ridge National Laboratory“For high level frontier chemical and physical contributions to nanoscience”

The Peter Mark Memorial Award was established in 1979 in memory of Dr. Peter Mark whoserved as Editor of the Journal of Vacuum Science and Technology from 1975 to 1979. The awardis presented to a young scientist or engineer (35 years of age or under) for outstanding theoreti-cal or experimental work, at least part of which must have been published in an AVS Journal. The award consists of a cash award, a plaque, and an honorary lectureship at a regular sessionof the International Symposium.

PETER MARK MEMORIAL AWARD

Alfred Grill is an IBM Fellow at the IBMT.J. Watson Research Center in YorktownHeights, NY. He received his Ph.D. inApplied Physics from the Hebrew Universityin Israel. After doing postdoc studies at theRuhr Universitat Bochum in Germany andthe University of British Columbia inCanada, Dr. Grill joined the Materials Engi-neering Department of the Ben-Gurion Uni-versity (BGU) in Israel, where he reachedthe positions of full professor and Chair ofthe Department. During his tenure at BGUhe spent sabbaticals at NASA-Lewis (nowGlenn) Research Center, Cleveland, OH andat IBM T.J. Watson Research Center, York-town Heights, NY. He then moved to IBMResearch as a regular employee.Dr. Grill has authored and coauthoredmore than 330 publications cited 14663times with an h-index of 61, published thebook “Cold Plasma in Materials fabrication:From Fundamentals to Applications” and co-edited 3 conference proceedings. He is aninventor and co-inventor of 161 US issuedpatents and was recognized as the 2011Inventor of the year by the Eastern NewYork Intellectual Property Law Association.

Alfred is a Member of the National Acad-emy of Engineering and a MRS Fellow.During a career of more than 40 years, Dr.Grill has investigated the synthesis and prop-erties of materials covering the entire gamutfrom semiconductors to insulators, to oxidesand metals, to the study of two dimensionalmaterials such as graphite. He has studiedamong others the crystal growth and proper-ties of magnetic ferrites, modeling solidifica-tion of metals, ferroelectric materials andtheir contacts to silicon. Dr. Grill is an expertin plasma assisted chemical vapor deposition(PECVD) of thin films and his main interestsare in the development and fundamentalstudies of new electronic materials and theirimplementation in manufactured products.He made his strongest scientific and techni-cal impacts in the areas of diamond-like car-bon (DLC) and of low-k and ultralow-kdielectrics for in-chip interconnects, espe-cially the ground-breaking, pivotal impactsto the interconnect dielectrics.In the 1990s, Dr. Grill developed DLCfilms and studied their tribological andchemical properties developing processesleading to their

implementation as protective coating for thinfilm magnetic storage disks and the thin filmmagnetic read/write heads of the hard diskdrives (HDD). His patented DLC inventionshave been used across the magnetic storageindustry.Since 1997 Dr. Grill’s research hasfocused on the development and implemen-tation of interconnect dielectrics for ULSImicroprocessors and he made seminal contri-butions in this field. Using his expertise inPECVD materials, he invented in 1998 thePECVD deposited organosilicate SiCOHdielectrics with low-k values which havebeen successfully integrated by the entiresemiconductor industry into reliable micro-processors at the 90 nm technology node andbeyond, replacing SiO2 as the interconnectinsulator. He then extended his innovationsto porous pSiCOH ultralow-k dielectricswith further reduced dielectric constant forthe subsequent technology nodes. His crucialand fundamental inventions and develop-ment of the SiCOH and pSiCOH materialshave lead them to become the industry stan-dard for interconnect dielectrics and enabledthe extension of Moore’s law into nanoscale.

14

Alfred Grill, IBM T.J. Watson Research Center“For seminal contributions to the invention, development and implementation of the PECVD low-k andultralow-k dielectrics for ULSI interconnects, enabling continued wire scaling beyond the 90 nm node”

JOHN A. THORNTON MEMORIALAWARD AND LECTURE

The John A. Thornton Memorial Award and Lecture was established in 1989 as a memorial to Dr. JohnA. Thornton for his devotion to science, his singular contributions to the generation and study of thinfilms, his effectiveness as an educator, and his unfailing humility, which won him the uncommon esteemand affections of his colleagues. It is presented to recognize outstanding research or technological inno-vation in the areas of interest to AVS, with emphasis on the fields of thin films, plasma processing, andrelated topics. The award is conferred biennially. It consists of a cash award, a plaque, and an honorarylectureship at a regular session of the International Symposium.

Charles T. Campbell is the Rabinovitch Endowed Chair inChemistry at the University of Washington, where he is alsoAdjunct Professor of Chemical Engineering and of Physics. Hehas coauthored of over 300 publications and two patents on surfacechemistry, catalysis, physical chemistry and biosensing, with over17,000 citations and an h-index of 68. He is an elected Fellow ofboth the ACS and the AAAS, and an elected Member of the Wash-ington State Academy of Sciences. He received the Arthur W.Adamson Award of the ACS and the ACS Award for Colloid orSurface Chemistry, the Gerhard Ertl Lecture Award, the RobertBurwell Award/Lectureship of the North American Catalysis Soci-ety, the Ipatieff Lectureship at Northwestern University and anAlexander von Humboldt Research Award. He served as Editor-in-Chief of Surface Science for ten years. He now serves as Editor-in-Chief of Surface Science Reports, and on editorial boards for theJournal of Physical Chemistry, Catalysis Reviews, Catalysis Lettersand Topics in Catalysis.Campbell received his BS in Chemical Engineering at the University of Texas in 1975 and his PhD in Chemistry there in1979 under the guidance of Prof. J. Michael White. He then didpostdoctoral research in Munich, Germany with Prof. Gerhard Ertl(winner of the 2007 Nobel Prize in Chemistry), supported by post-doctoral fellowships from the National Science Foundation and theAlexander von Humboldt Foundation. Before the University ofWashington, he worked at Los Alamos National Labs (1981–1985)and Indiana University (1986–1989). He has served as the mainresearch advisor for over 35 postdocs, 30 PhD students, and 50undergraduate students.

Campbell is perhaps best known for his use of surface analyticalmethods to clarify catalytic reaction mechanisms on solid surfaces,and structure–function relationships in catalytic materials. He alsohelped develop several methods for characterizing surface reac-tions. He developed the world’s most sensitive adsorptionmicrocalorimeters for studying well-defined surfaces, and appliedthem to measure the energetics of elementary surface reactions ofimportance in catalysis and metal adsorption and adhesion to oxidesupports. By combining careful surface structural control of modelcatalysts, detailed surface characterization and challenging cat-alytic rate measurements, often at high pressures on single crystals,he helped to uncovered many mechanistic details of industrially-important catalytic reactions, including CO oxidation, ethyleneepoxidation, water-gas shift, methanol synthesis, and varioushydrocarbon conversion reactions. His experimental studies ofcatalyst poisons and promoters, bimetallic surfaces and metalnanoparticles on oxide surfaces included many first-time observa-tions of phenomena that soon became well-known as fundamentaleffects in surface chemistry.He introduced the ‘degree of rate control’, a widely-used mathe-matical method for analyzing microkinetic models to determinewhich adsorbates’ and transition states’ energies most criticallycontrol catalytic activity and selectivity. It is the basis for his fastnew method for computational screening of catalytic materials.His methods for quantitative analysis of adsorption kineticsusing surface plasmon resonance are widely used. He applied themto the first measurements of sticking probabilities under liquidsolutions and high-throughput methods for studying biomoleculebinding in micro-array format.

15

MEDARD W. WELCHAWARD

The Medard W. Welch Award was established in 1969 to commemorate the pioneering efforts ofM.W. Welch in founding and supporting AVS. It is presented to recognize and encourage outstand-ing research in the fields of interest to AVS. The award consists of a cash award, a medal, a plaque, and an honorary lectureship at a regular session of the International Symposium.

Charles T. Campbell, University of Washington“For seminal contributions to determining accurate adsorption energetics andfor developing key concepts for the analysis of important catalytic reactions”

AVS FELLOWS2004 John R. Abelson2002 Cammy Abernathy2004 Ilesanmi Adesida1995 Richard K. Ahrenkiel1995 Carolyn R. Aita2013 Morgan R. Alexander2005 David L. Allara1995 Roland Allen1994 Daniel Alpert2003 Mariano Anderle2011 André Anders2003 Masakazu Aono2007 Paul Arnold1993 John R. Arthur, Jr.1996 David E. Aspnes2004 Daniel J. Auerbach1997 Phaedon Avouris2005 Eray S. Aydil1999 Samuel D. Bader2001 Donald R. Baer1998 Scott A. Barnett2015 Alison Baski1994 Ernst Bauer2000 Leonard C. Beavis2006 Stacey Bent1997 Soren K.S. Berg1999 Victor M. Bermudez2001 Steven L. Bernasek2009 Flemming Besenbacher2009 John J. Boland2005 Dawn A. Bonnell2010 Jean-Paul Booth1995 Alexander Bradshaw

1993 Leonard J. Brillson1994 Christopher R. Brundle2005 Charles E. Bryson, III1994 Rointain Bunshah*2010 Nancy A. Burnham2011 David Cahen1998 David G. Cahill1996 Donald C. Carmichael*2014 Robert W. Carpick1995 Emily Ann Carter2011 James E. Castle1999 David G. Castner2003 Richard Cavanagh2008 Joseph L. Cecchi1999 Linda Ephrath Cecchi1994 Robert J. Celotta1995 Yves Jean Chabal

1996 Scott Alexander Chambers2013 Jane P. Chang1993 Robert P. H. Chang2010 Francis Chen2008 Jingguang G. Chen2012 Lee Chen2001 Lih J. Chen2006 Shirley Chiang2010 Stephen Y. Chou2006 Paul Kim-Ho Chu2000 Yip-Wah Chung1998 Peter J. Clarke*1994 John Coburn1997 John S. Colligon1995 Richard J. Colton1998 Timothy J. Coutts

2004 Harold Craighead1994 Jerome J. Cuomo1995 Alvin W. Czanderna1996 Guy Donald Davis1994 Paolo della Porta*2003 Neelkanth G. Dhere1994 Francois M. D’Heurle1993 J. Thomas Dickinson2001 Alain Charles Diebold2005 Ulrike Diebold1997 Vincent M. Donnelly2007 Peter A. Dowben1994 Charles Duke1995 H. Frederick Dylla2003 Demetre Economou2015 Charles “Chip” R. Eddy, Jr.1996 Gert Ehrlich1995 Theodore L. Einstein2011 Robert E. Ellefson2013 Mark H. Engelhard2005 James R. Engstrom2010 Ali Erdemir1993 Peder J. Estrup2003 Gregory J. Exarhos1994 Charles Fadley1994 Randall M. Feenstra1996 Peter J. Feibelman1995 Leonard C. Feldman2005 Ellen R. Fisher2004 Galen B. Fisher1994 Maurice Francombe*1998 David B. Fraser1993 John L. Freeouf

16

*deceased

AVS FELLOWS2008 Julia Fulghum2007 Calvin T. Gabriel2015 Lara J. Gamble2004 Joseph A. Gardella1994 Barbara J. Garrison1999 Stephen M. Gates2007 Joseph D. Geller2012 Andrew Gellman2000 Steven M. George2011 Timothy A. Gessert2015 Reza Ghodssi2008 Lucille A. Giannuzzi2009 Ian S. Gilmore2012 Rachel S. Goldman1998 D. Wayne Goodman*1994 Richard Alan Gottscho1994 John T. Grant2010 Vicki H. Grassian2001 David Barry Graves1993 Joseph E. Greene2005 Michael Grunze1994 Marsbed Hablanian2011 Satoshi Hamaguchi1994 Robert John Hamers2015 Aubrey T. Hanbicki2009 Luke Hanley1998 Howard R. Harker1995 James M.E. Harper*2011 Judith A. Harrison1994 George Hass1998 Chikara Hayashi2004 Gregory A. Hebner2013 Tony F. Heinz

1997 John Helmer2008 Ulf Helmersson1998 John C. Hemminger2004 Michael A. Henderson2015 Jay Hendricks1995 Victor E. Henrich2014 Gregory S. Herman2012 Mark Hersam1999 Noah Hershkowitz2007 James J. Hickman2001 Robert F. Hicks1994 Franz J. Himpsel2013 Melissa A. Hines2015 Kerry W. Hipps1994 Paul S. Ho1993 J. Peter Hobson*1993 David Hoffman2005 Siegfried Hofmann1994 Leslie Holland*1993 Paul Holloway2014 Carol Jean Hirschmugl1999 Yasuhiro Horiike1997 Karsten Horn1996 Frances Anne Houle1994 Jack E. Houston2006 Lars Hultman1998 Huey-Liang Hwang1999 Harald Ibach2006 Shingo Ichimura1997 Eugene Irene1994 Hajime Ishimaru*2008 Chennupati Jagadish1998 Berend T. Jonker

1999 Antoine Kahn1994 William J. Kaiser2015 Sergei V. Kalinin1994 Harold R. Kaufman2000 Bruce D. Kay1994 Eric Kay1994 Lawrence L. Kazmerski1997 Gary Lee Kellogg2008 Michael A. Kelly2000 Bruce R.F. Kendall1999 Larry L. Kesmodel2013 Aart W. Kleyn1999 Bruce E. Koel1999 Jacqueline Krim2005 Silai V. Krishnaswamy2010 Richard L. Kurtz1999 Mark Kushner1994 Max G. Lagally1995 William Lange*2003 Robert Langley1996 Gerald Lapeyre2014 Graham J. Leggett2014 John S. Lewis, III2000 Michael A. Lieberman2014 Matthew Linford2004 John P. Looney1995 Toh-Ming Lu1995 Gerald Lucovsky2000 Joseph W. Lyding2014 Roya Maboudian1993 Theodore E. Madey*1994 Charles W. Magee2008 Toshiaki Makabe

17

*deceased

AVS FELLOWS1994 Dennis Michael Manos1998 Giorgio Margaritondo1998 Christie R.K. Marrian2007 C. Mathew Mate1995 Donald M. Mattox1997 Thomas M. Mayer2009 Gary E. McGuire 1999 Michael R. Melloch1996 Russell Messier2007 Meyya Meyyappan2000 Terry A. Michalske2012 Christian Mitterer2014 David R. Mullins1993 Shyam P. Murarka1997 James S. Murday2005 Falko P. Netzer2006 David Norton1993 Peter R. Norton2007 Ralph Nuzzo1998 Gottlieb S. Oehrlein1994 John F. O’Hanlon2006 Fumio Ohuchi1996 Marjorie Olmstead2000 Robert L. Opila2014 Lawrence Overzet1998 Paul W. Palmberg1999 Christopher J. Palmstrom1999 Stella W. Pang2005 Carlo G. Pantano1993 Robert Park2005 Gregory N. Parsons2014 Joerg Patscheider1995 R. Norman Peacock*

2001 Stephen J. Pearton2000 Charles H.F. Peden1997 Anthony J. Perry2001 Ivan Petrov1994 Daniel T. Pierce

2000 Jean-Jacques Marie Pireaux2001 E. Ward Plummer1994 Cedric J. Powell1996 J. Wayne Rabalais1997 David E. Ramaker2013 Ganpati Ramanath2002 Anant Krishan Ramdas2014 L. Ramdas Ram-Mohan2009 John Randall 1993 Buddy D. Ratner1993 Paul Redhead*2006 Fan Ren1998 Angus A. Rockett2009 Bridget R. Rogers1998 J.W. Rogers, Jr.2013 Frances M. Ross1994 Stephen M. Rossnagel1994 John Jack E. Rowe1993 Pradip K. Roy1993 Gary W. Rubloff2006 John N. Russell, Jr.2011 Sherman L. Rutherford2007 David Ruzic2003 Miquel Salmeron2009 Seiji Samukawa 1994 Donald Santeler*2007 Bruce D. Sartwell2001 Herbert H. Sawin

2013 Jochen M. Schneider1994 Martin Pengton Seah2012 Sudipta Seal2007 Karen L. Seaward2001 Edmund Seebauer1998 Stephen Semancik1996 Federico Sequeda1998 Yoram Shapira2014 Paul E. Sheehan2001 Peter Sheldon2003 Peter M.A. Sherwood2005 Edward N. Sickafus2004 David S. Simons2009 Irwin L. Singer2005 Susan B. Sinnott2010 Vincent S. Smentkowski2007 Kevin E. Smith2008 Richard J. Smith1998 James Solomon1994 William E. Spicer*2002 William D. Sproul2002 Philippe G. Staib2003 Frederick A. Stevie2012 William F. Stickle2002 Roger L. Stockbauer1997 Joseph A. Stroscio2015 Michael Stueber2002 Eric Stuve1995 Jan-Eric Sundgren2010 Sefik Suzer1997 Brian S. Swartzentruber2010 Donald M. Tennant2007 Bruce D. Terris

18

*deceased

AVS FELLOWS2009 Jerry D. Tersoff2010 Suntharampillai Thevuthasan2000 Patricia A. Thiel1996 Charles R. Tilford2013 Roger G. Tobin2000 Harland G. Tompkins2002 Michael Trenary2006 Rudolf Tromp2004 Charles W. Tu2007 Richard M.C.M. van de Sanden2009 Chris Van de Walle 1994 Michel Andre Van Hove2010 Andrey A. Voevodin1994 John L. Vossen*2006 Kathryn J. Wahl

2015 Amy V. Walker2007 Robert M. Wallace2013 Klaus Wandelt1997 Gwo-Ching Wang2011 Stephanie Watts Butler2000 John H. Weaver1994 G.K. Wehner*1993 W. Henry Weinberg2000 Kimo M. Welch2007 Paul S. Weiss2001 John F. Wendelken1996 William R. Wheeler1998 Christine B. Whitman2005 Lloyd J. Whitman1994 H.H. Wieder

2012 Roland Wiesendanger1993 Ellen Williams2002 Nicholas Winograd1997 Harold Winters2014 Colin Wolden1994 Jerry Woodall1994 David P. Woodruff2006 John Woollam2014 Martin Wuest2011 Jory Yarmoff1994 John T. Yates, Jr.1994 Russell Young2009 Edward Yu2005 Francisco Zaera

19

*deceased

NOTES

20

Lisa PorterDirector (’15–’16)

Michael D. WilliamsDirector (’15–’16)

Steven M. GeorgeImmediate Past-President

Anna BeluDirector (’14–’15)

Susan BurkettDirector (’14–’15)

David SurmanPresident-Elect

Joe GreeneClerk/Secretary

Gregory J. ExarhosTreasurer

Ivan G. PetrovPresident

AVS2015 Board of Directors

James M. Fitz-GeraldDirector (’15–’16)

Timothy A. GessertDirector (’14–’15)

Peter SheldonChair (’13–’15)

Yves Chabal(’14–’16)

Lynnette Madsen(’14–’16)

Ian Gilmore(’15–’17)

Shirley Chiang(’13–’15)

AVS2015 Awards Committee

Donald Baer(’15–’17)