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STORAGE RELIABILITY OF MISSILE MATERIEL PROGRAM U.S. ARmY miSSILE RESEARCH MONOLITHIC BIPOLAR SSI/MSI DIGITAL C. AlD "& LINEAR INTEGRATED CIRCUIT ANALYSIS DEVELOPmEnT COIT~I1 flDLC-78-ICI JANUARY 1978 -. '-I ' . . * , Redstone Arsenal, Alabama 35809 PRODUCT ASSURANCE DIRECTORATE DM1 FOWI4 1M00. 1 APR 17 .. ', ;

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Page 1: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

STORAGE RELIABILITY

OF

MISSILE MATERIEL PROGRAM

U.S. ARmYmiSSILERESEARCH MONOLITHIC BIPOLAR SSI/MSI DIGITAL

C. AlD "& LINEAR INTEGRATED CIRCUIT ANALYSIS

DEVELOPmEnTCOIT~I1 flDLC-78-ICI JANUARY 1978

-.'-I ' . . * ,

Redstone Arsenal, Alabama 35809

PRODUCT ASSURANCE DIRECTORATE

DM1 FOWI4 1M00. 1 APR 17

.. ', ;

Page 2: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

$TORAGE RELIABILITY

OF

MISSILE MATERIEL PROGRAM

MONOLITHIC BIPOLAR SSI/MSI DIGITAL& LINEAR INTEGRATED CIRCUIT ANALYSIS

LC-78-IC1 JANUARY 1978

Prepared by: Dennis F. Malik

Project Director

C. R. Provence

Product Assurance Directorate

HEADQUARTERSU. S. ARMY MISSILE RESEARCH & DEVELOPMENT COMMAND

REDSTONE ARSENAL, ALABAMA

IN COMPLIANCE WITH

CONTRACT NO. DAAK40-74-C-0853 IDATED 4 JUNE 1974

DATA ITEM SEQUENCE NO. 3

RAYTHEON COMPANYEQUIPMENT DIVISION

LIFE CYCLE ANALYSIS DEPARTMENTHUNTSVILLE, ALABAMA

_rnidlutr~bu~ioa i• unlh,,itod,.

....... ~...

Page 3: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

ABSTRACT

This report documents findings on the non-operating

reliability of Small Scale Integration (SSI) and MediumScale Integration (MSI) Monolithic Bipolar Digital andLinear Devices. Long term non-operating data has beenanalyzed together with accelerated storage life test dataand integrated with surveys of device users. A non-operatingprediction model has been developed which measures the effectof storage temperature and environmental stress on the de-vices.

In the comparison of non-operating to operating devicecharacteristics, several data banks and operational predic-tion models have been analyzed and are also summarized herein.

This report is part of a progranm whose objective is the

development of non-operating (storage) reliability predictionand assurance techniques for missile materiel. The analysis

results will be used by U. S. Army personnel and contractorsin evaluating current missile programs and in the design of

future missile systems.The storage reliability research program consists of a

country wide data survey and collection effort, acceleratedtesting, special test programs and development of a non-operating reliability data bank at the U. S. Army Missile R&DCommand, Redstone Arsenal, Alabama. The Army plans a con-tinuing effort to maintain the data bank and analysis reports.

This report is one of several issued on missile materiel.For more information, contact:

Commander

U.S. Army Missile R&D CommandATTN: DRDMI-QS, Mr. C. R. Provence r .IBuilding 4500 ,Redstone Arsenal, AL 35809)

Autovon 746-3235

or (205) 876-3235

S. . . . . . .. .. . •..... . . ..... ... . . . .. .. ••

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TADLE OF CONTI-:N'/I',)

SECTION NO. PAGE NO,

1 INTRODUCTION 1-12 SUMMARY 2-I3 DEVICE AND FAILURE MECHANISM CLASSIFICATIONS 3-i1

3.1 Device Construction 3-1

3.2 Long Term (20 yr.) Failure Mechanism

Analysis 1-243.3 Device Level Product Assurance 3-29

3.4 Model Assembly and System LevelProduct Assurance 3-39

3.5 Device Function and Complexity Classi-

f fication 3-393.6 Use Environment 3-42

4 STORAGE DATA ANALYSIS 4,-.

4.1 General, Data Analysis Discussion 4-14.2 Real Time Storage Data and Variance 4-2

4.3 Principle Failure Mechanisms 4-7

4.4 Failure Rate Factor Development 4-94.5 Source Data Discussion 4-37

5 STORAGE FAILURE RATE PREDICTION MODEL 5-1

6 OPERATIONAL FAILURE RATE ANALYSIS 6-I6.1 MIL-UDBDK-21711 Digjital IC Model 6-.6.2 MTf-IL-DBK-2l713 Lincar IC Model

6.3 Rel.iability Analysis Center i"ailureRate Data bank

6.4 GIDEI' Failure Rate Data Bank -7

6.5 Ope rational/Non-Opera t ional FailureoRatt.Ž Compatison ,-.O

7 CONCLUSIONS AND RECOMMENDATIONS 7-I13I11LIOGRAP IY

ii

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LIST OF ILLUSTRATIONS

PAGE NO.,

2-1 Prediction Model for SSI/MSI Monolithic BipolarDigital & Linear IC's Non-Operating Reliability 2-2

3-1 Typical Planar Microelectronic Device Cross Section 3-24-1 Arrhenius Fit for Aluminum Metal/Aluminurr. Wire

System 4-i)

4-2 Arrhenius Fit for Aluminum Metal/Gold Wire System

4-3 Complexity Correlation for Aluminum Metal/

Aluminum Wire System (Class C) 4--14-4 Complexity Correlation for Aluminum Metal/Gold

Wire System (Class C) 4-2Q4-5 Test Duration Correlation for Aluminum Metal/

Aluminum Wire System (Class C) 4-214-6 Test Duration Correlation for Aluminum Metal/

Gold Wire System (Class C) 4-21

4-7 Function and Logic Type Correlation for AluminumMetal/Aluminum Wire System (Class C) 4-26

4-8 Function and Logic Type Correlation for AluminumMetal/Gold Wire System (Class C) 4-27

4-9 Package Type Correlation for Aluminum Metal/Aluminum Wire System (Class C) 4-28

4-10 Package Type Correlation for Aluminum Metal/Gold

Wire System (Class C) 4-30

4-11 Monolithic Bipolar Digital and Linear (SSI/MSI)

Failure Rate Prediction (Aluminum Metal/AluminumWire System) 4-35

4-12 Monolithic Bipolar Digital and Linear (SSI/MSI)

Failure Rate Prediction (Aluminum Metal/Gold Wire

System) 4-36

5-1 Monolithic Bipolar SSI/MSI Digital and Linear

Device Failure Rate Prediction Model (AluminumMetallization/Aluminum Wire System) 5-4

5-2 Monolithic Bipolar SSI/MSI Digital and Linear

Device Failure Rate Prediction Model (Aluminum

Metallization/Gold Wire System) 5-5

iii

Page 6: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

LIST OF ILLUSTRATIONS (cont'd)

6-1 MIL-HDBK-217B Operational Failure Rate Prediction

Model for Monolithic Lipolar Digital SSI/MSIIntegrated Circuits 6-2

6-2 MIL-HDBK-217B Operational Failure Rate Prediction

Model for Monolithic Bipolar Linear SSI/MSI Devices 6-66-3 Sample of RAC Microcircuit Generic Failure Rates

Publication 6-86-4 Sample of GIDEP Summaries of Failure Rate Data 6-96-5 Monolithic Bipolar Digital levice Operational/

Non-Operational Failure Rate Comparison 6-12

6-6 Monolithic Bipolar Linear Device Operational/

Non-Operational Failure Rate Comparison 6-13

iv

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L1,15' 01"' 'rA13LI:t;

TABLE. NO. AG; ',.

3-I Device Classification

3-2 Monolithic Device Failure Mechanisms 3--

3-3 Process Control Points 3-31

3-4 Quality Conformance Testing -

3-5 MIL-SSTD-883 Screening Procedure Summary

(Method 5004) 3

3-6 Digital Microcircuit Complexity J-'.i

3-7 Linear Microcircuit Complexity

4-1 Digital/Linear Non-Operating Data for Devices

with Aluminum Metallization, Aluminum Wire 4-

4-2 Digital/Linear Non-Operating Data for Deviceswith Aluminum Metallization, Gold Wire

4-3 Digital Non-Operating Data for Devices with

Gold Metallization/GolkI Wire 4

4-4 Digital Non-Operating Data for Gold Beam

Sealed Junction Devices 4-U

4-5 Field Failure Rate Data 4-6

4-6 Special Storage Environment Data 4-•'

4-7 Principle Failure Mechanisms 4-i1

4-8 Aluminum Metal/Aluminum Wire Complexity Data

(Class C) 4-11.4-9 Aluminum Metal/Gold Wire Complexity Data

4-10 Aluminum Metal/Aluminum Wire Test Duration

Failure Data (Class C) 4-22

4-11 Aluminum Metal/Gold Wire Test Duratica Failure

4-12 Aluminum Metal/Aluminum Wire Functici, and LogicType Data (Class C) 4-2k,

4-1.3 Aluminum Metal/Gold Wire Function and Logic

Type Data (Class C) -

4-14 ALuminum Metal/Aluminum Wire Package Type Data 4-.:'.

4-15 Aluminum Metal/Gold Wire Package 2ype Data 4- 3i0

4-16 Aluminum Metal/Aluminum Wire Die Attach DaLa 4

4-17 Aluminum Metal/Aluminum Wire Glassivat.ion Data 4

4-18 Aluminum Metallization/Alumninum Wire Failure

Rate Model Results 4

V

Page 8: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

LIST OF TABLES (cont'd)

TABLE NO. PAGCE NO.

4-19 Aluminum Metallization/Gold Wire Failure

Rate Model Results 4-344-20 Source A Data (Field & Test) 4-424-21 Source B Field Data 4-424-22 Source D Special Test Data 4-424-23 Source G Field Data 4-434-24 Source H Special Test Data 4-444-25 Source I Special Test Data 4-454-26 Source J Field Data 4-454-27 Source K Special Test Data 4-454-28 Missile H Field Data 4-464-29 Missile I Field Data 4-466-1 Temperature Factor Values for Bipolar Beam

Lead and Bipolar ECL Digital Devices 6-46-2 Average Operating to Non-Operating Failure

Rate Ratio & 6-14

vI

Page 9: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

SECTION 2

SUMMARY

Approximately .wenty billion hours of storage or non-

operating data has been gathered together with an additional

247 million hours of high temperature storagce tLest dau £wý

monolithic bipolar small scale integcration (SSi) und i',ur,

scale integration (MSI) digital and linear: inLuL; rated L

A failure rate prediction model has been developed

similar to the MIL-HDBK-217B model:

N• LQ [ATCl+nEC2 ]

where X is the device storage reliability

1i is the learning factoriI, is the quality factor

11 is the temperature factor

11 is the application environment factor

C1 and C2 are the base failure rates f"or time/

temperature effects and mechanical stress

effects respectively.

Failure rates at 250C ambient temperature in a ground fixed

environment range from a low of 0.875 fits (failures per

billion hours) for MIL-STD-883 Class A devices with aluminum

metallization/aluminum wire systems to a high of 1178 fits

for commercial quality devices with aluminum metallization/

gold wire systems.

The development ot the models is described in Section 4

and the factors are given in Section 5. Figure 2-1 presents

a summary of the models.

The analysis identified a distinct difference in the

device storage reliability depending on the metals used in

the metallization/interconnection system. Mono-metal 6ystems

at the wire bond interface are recommended for hiqh storaige

reliability.2-1

Page 10: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

CC> C

In MW

00 C

A00c 00,

NI E-4 CL

H

1- 0~ 43c. T..

U 0

H;O 0 LLa

0 0

0 004W

z LU

N 2 0 A 0 AM L

Q Or -j L&J II.

4 Is I ~.2-2

Page 11: ARmY miSSILE - Defense Technical Information Center · storage reliability of missile materiel program u.s. army missile research monolithic bipolar ssi/msi digital c. ald "& linear

Analyses of device complexity, packaging, aging, quality

level, logic type, use temperature, die attach method and

glassivation have been performed. Primary reliability charac-

teristics identified from these analyses are storage tempera-

ture and the device quality level.

Device construction, failure mechanisms, procurement and

use characteristics are identified and are used to classify

devices in Section 3.

Principle storage mechanisms are identified and screen

and/or quality conformance testing to minimize these defects

are listed.

Existing operational failure rate data sources have been

reviewed and are described in Section 6. Average operating

to non-operating ratios were calculated and range from apprQxi-

mately 5 to 71 for SSI and MSI digital devices and 14 to 71 for

linear devices with aluminum metallization and aluminum wire

systems. Average operating to non-operating ratios for devices

with aluminum metallization/gold wire systems range from approxi-

mately 0.5 to 7.1 for SSI and MSI digital devices and 1.4 to 7.1

for linear devices. These ratios are based on the MIL-HDBK-217B

prediction model and the non-operating models developed in this

report.

2-3

... •......

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SECTION 3

DEVICE AND FAILURE MECHANISM CLASSIFICATION

Microelectronic device reliability depends primarilyupon construction; process control, screening, qualification;and use characteristics. A review of the literature was per-formed to identify these characteristics which are listed inTable 3-1. The collected data was classified against thesecharacteristics where possible. The classifications will beused to store data in the MICOM Storage Reliability Data Bank.3.1 Device Construction

For convenience, device construction was broken intoseven major areas: Bulk materiel and diffusion, oxide;metallization; glassivation; die bonding; chip connections;and packaging characteristics. Each of these areas identifiedin Figure 3-1 were analyzed for failure mechanisms whichwould be applicable in a missile's use environment fromacceptance into the inventory to firing. Therefore, all im-portant characteristics whether operational or storage depend-ent were included. Major device failure mechanisms aresummarized in Table 3-2.3.1.1 Bulk Materiel and Diffusion Characteristics

The primary reliability considerations in an operationalenvironment associated with bulk phenomena are those whichgovern temperature of the device during operation. Devicesare generally rated in terms of maximum allowable power dis-sipation. This power coupled with various thermal resist-ances and ambient temperature, determines the junction tempera-ture of the device. Steps must be taken to maintain a con-trolled and uniform temperature since device degradation andfailure modes, in most cases, are accelerated by increasedtemperature.

For most devices, the power requirements are not ex-cessive and junction temperatures are controlled by usingsuitable heat-sink packages. For high-power devices, waferdesign may include junction-temperature control considerationsto prevent localized high currents and resultant "hot spot"

formation.3-1

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Table 3-1. DEVICE CLASSIFICATION

CONSTRUCTION ASSEMBLY AND SYSTEM LEVEL PRODUCT

DIE PROPERTIES ASSURANCE TESTS

OXIDE COMPLEXITY

METALLI ZATION

GLASSIVATION LOGIC TYPE

DIE BOND USE ENVIRONMENT

CHIP CONNECTION TRANSPORTATION AND H., OLING

PACKAGE TEMPERATURE

DEVICE LEVEL PRODUCT ASSURANCE HUMIDITY.IL-ITl-8i3 QUALIT LEE i i STORAGE CONTAINER & LOCATIONMIL-STD-883 QUALITY LEVEL

SCREENS FIELD TEST DURATION & FREQUENCYDERATING

QUALITY CONFORMANCE INSPECTION

PROCESS CONTROLS

7• I IF awide Iwindo stopI,.-bon

bu~k materi~z_(R t~ype)

• eo=•0agng .~aes "'

FIGURE 3-1. TYPICAL PLANAR MICRO-

ELECTRONIC DEVICE CROSS SECTIONZead

3-2

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.3.1.1.1 Bulk Defects

Bulk defects account for only a minor portion of thcoperational and storage failures. Primary areas of concern

include dislocations (crystal lattice anomalies); impuritydiffusions and precipitations; resistivity gradients; and

cracks in the bulk materiel. These defects usually rerult

during crystal preparation and are accelerated by mechanical,

nuclear and thermal stresses.The steep concentration gradients found in epitaxial

diffusion result in crystal lattice strain which is subse-quently released by the formation of dislocation structures.

These structures contain edge components perpendicular to

the concentration gradient. The chip is structurally weaker

at the dislocation fault plane and failure can be triggered

by mechanical stress.

Deviations in epitaxial growth, resulting in impuritydiffusions, are another source of bulk failures. Tmpuritydiffusion is more likely along edge dislocations, particular-

ly along the arrays of edge dislocations that form smallangles grain boundaries. The precipitation of impurities at

the resulting crystal-lattice-orientation fault planes lowers

the reverse breakdown voltage.

Resistivity gradients may be caused by a heat differen-

tial between the center and outer surface of the chip; bylarge local stresses caused by mechanical shock or vibration;

and by neutron bombardment.Cracks in the bulk silicon frequently result from thermal

shock during processing. Although these defects are usually

eliminated by normal quality control procedures, occasionally

hidden cracks may either propagate to critical regions or

result in breaks from additional shock or cycling.The failure modes resulting from bulk defects include

deviations in voltage breakdown and other electrical charac-

teristics; secondary breakdown or uncontrolled p-n-p-nswitching; or opens or shorts in the subsequent metallization.

3-3

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3.1.1.2 Diffusion Defects

Diffusion defects account for approximately 5 to 15%

of operational and storage failures. Other than those

diffusion problems associated with bulk materiel defects, the

primary area of concern is the diffusion process itself.

These include mask alignment; contamination; mask defects;

cracks in the oxide layer; and improper doping profiles.

Diffusions that are due to misalignment of masks reduce the

base and emitter or base and collector junction spacings.

Other faults include discontinuous isolation diffusions and

odd shapes or edges of diffusions. Diffusion defects are

primarily accelerated to failure by thermal cycling and

high temperature. Principle failure modes resulting from

diffusion defects include deviations in device characteristics

and shorts between the emitter and base.

3.1.2 Oxide Considerations

Junction passivation of silicon devices is generally

accomplished by using thermally grown silicon dioxide (SiO,).

Other devices use phosphorous pentoxide (P 2 05 ) over the SiOC

layer. Beam Lead Sealed Junction (BLSJ) devyqeq utilize a

layer of silicon nitride (Si 3 N4 ) glass deposited over the

grown Sio2 . Both P 2 0 5 and Si 3 N4 overcoatings have been found

to improve the surface stability of bipolar devices. These

materials act as gettering agents for sodium ions, thus

making the contamination far less mobile. The stability of

the structural and electrical properties of the oxide play

* an important role in determining the electrical characteris-

tics and reliability of the passivated device.

3.,1.2.1 Oxide Defects

Oxide defects are significant contributors to digital

device failures. Approximately 5 to 50% of operational

failures are attributed to these defects. Current data on

non-operating failures indicates that approximately 5 to 35%

of storage failures are attributable to oxide defects.

Primary areas of concern are pinholes, cracks, thin oxide

areas, and oxide contamination.

3-4

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Pinholes can be caused by faulty oxide growth, : damaged Imask, poor photo resist or an undercut by the etching proces.They vary in depth and in the worst case, expose the silicon

to the metallized interconnections. Where the pinhole or

metallization does not extend completely to the surface of the

silicon, a time-dependent migration or low voltage breakdown

mechanism may occur. Where the oxide is overcoated with asecond layer, the frequency of pinhole defects decreases.

Oxide cracks occur as a result of the mismatch in the

thermal expansion rate of silicon and silicon dioxide. Dif-fusion of metal to the silicon is then possible. Thin oxide

aaid oth'..r oxide difficiencies cause electrical breakdown inthe surface passivation from the metal conductor to componentareas in the silicon. All of these defects lead to increasedcurrent leakages or shorts from the metallization to diffusion

areas or substrate.Ionic impurities in the oxide may cause inversion layers,

channeling, and other related phenomena creating lower thres-hold voltage. Ionic contamination is generally a significant

contributor to total oxide charge. The ions are usuallymobile and, by drifting under the influence of an electricfield, can cause appreciable device parameter instability.

Silicon nitride has been shown to be an effective barrierto sodium migration. In Beam Lead Sealed Junction (ELSJ)devices, the silicon nitride seals the devices from sodiumand since the platinum silicide and titanium metals alsooffer very low mobility to the alkaline ions, the BLSJ isinert to sodium.

Inversion and channeling phenomena occur only with anelectric field present. Bipolar linear and MOS devices areaffected by this phenomena greater than bipolar digital de-vices.3.1.3 Metallization Considerations

A rather large number of metallization systems havebeen used on monolithic bipolar digital devices. The primarymetals used have been aluminum, molybdenum-gold, and titanium-platinum-gold.

3-5

-"ý~, .......

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Aluminum is by far the most cormnonly used materiel for

metallization. It is easily vacuum-evaporated and chemicallyetched, adheres well to the silicon and silicon dioxide andalso forms a good ohmic contact to low resistivity silicon.Typically, a layer on the order of 1 micron thick is depositedby evaporation.

Gold is a better conductor than aluminum and is consider-ably more resistant to corrosion. However, it does not havesufficient adherence to silicon or glass surfaces to be usedalone as a practical metallization system. Consequently, a i

'I two or three layer metallization system is required with theother material(s) forming an ohmic contact with the silicon.

The gold adheres to the contact layer to form the conductorlayer.

The molybdenum-gold metallization system is the oneused most frequently.

The primary Beam Lead Sealed Junction process uses aplatinum silicide to make the pre-ohmic contact, The nextstep is to deposit a layer of titanium metallization whichprovides contacts to the platinum silicide and silicon nitride.With this structure, gold will not diffuse to the junctions,but gold will not adequately bond to the titanium. Therefore,platinum is deposited on the titanium and then the gold isplated on to the platinum. Other multi-metal systems usedinclude Platinum Silicide-Molybdenum-Gold; Platinum Silicide-Titanium-Palladium Gold; and Titanium Tungsten-Gold-TitaniumTungsten.3.1.3.1 Metallization Defects

Failures related to metallization defects range from 7to 26% in operational devices and current storage data in-dicates approximately 15% of the failures related to metalli-zation.3.1.3.1.1 Aluminum Metallization Systems

Aluminum metallization defects result from manufacturingdeficiencies and also from mechanisms inherent to the metal

system.

3-6

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Processing deficiencies which subsecjquuntly result in

device failures include thin metal layers, poor metal-to-

oxide adhesion due to oil or other impurities on the wafer,

undercutting of Al during etching ofthe metallization pattern,

bridging of Al-betweenrconductors due to,.unremoved photoresist,

smears and scratches in conductor stripes, misalignment of

masks, insufficient deposition at oxide steps, oxide stepo

too steep, incomplete removal of oxide, etc.

These defects are accelerated to failure primarily by

thermal stresses and result in open and shorted conductors.

Mechanisms inherent to the aluminum metal system include

electromigration formation, aluminum silicon eutectic, and

intermetallic compound formations with gold.

Electromigration, or current induced mass transport,

is the movement of mass in a conductor when sufficient elec-

tric current is passed through the conductor. Since voids

move through the conductor in a direction opposite to that

of the mass transport, at a sufficient current density and/

or temperature, a conductor will eventually open. Electro-

migration is currently a relatively minor reliability problem.

The most direct way to eliminate electromigration is by de-

sign. The device power requirements and the interconnect

cross-sectional area (including proper width-to-thickness

ratios) should be balanced to keep maximum current density

below 2 x 105 A/CM2 . Most of the actual device failures from

electromigration in past years can be attributed to thin in-

terconnect metallization due to lack of deposition-thickness

control.

The aluminum-silicon eutectic formation (Kirkendall

effect) creates a shift in the interfaces between the two

alloys. The shift is due to a greater number of atoms from

the silicon flowing to the aluminum than there are flowing

in the reverse condition. The unbalanced flow rate causes

voids under the metallization. This can cause seapration of

aluminum from the die and eventual open circuit under mechan-

ical stress.

3-7

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Intermetallic compound formations can occur when goldwire is bonded to aluminum metallization. Some of the re-sulting compounds provide weak or brittle bonds or increasedcontact resistance. The Kirkendall effect further weakensthe bond due to the formation of voids in the aluminum. Bothroom temperature and elevated temperature diffusions havebeen reported. Reliable gold-aluminum bonds can be made. Itis necessary to minimize the total mass of aluminum availablefor diffusion and to keep to a minimum the cumulative time-

temperature product experienced by the device in both manu-facture and use.

3.1.3.1.2 Gold Metallization Systems

Many of the failure mechanisms observed in molybdenum-gold metallization systems can be attributed to processingproblems. These include failures due to unsatisfactory ad-

hesion of molybdenum to the silicon dioxide and of the goldlayer to the molybdenum layer. These can be attributed tocontamination of the surface and oxidation of the molybdenumlayer prior to deposition of the gold. Other processing

problems include: molybdenum undercutting during etching;scratches which expose the molybdenum to oxidation and sub-sequent opens, and corrosion of molybdenum from impuritiesintroduced in the processing.

Gold-silicon eutectics can occur if pinholes exist in

the molybdenum layer.Failure mechanism data on Platinum Silicide-Titanium-

Platinum.-Gold metallization systems is just becoming avail-able. Improved or eliminated failure modes include wire bonddefects, alkali ion contamination, metallization corrosion,and aluminum migration. Possible failure mechanisms identi-fied for these devices are all due to processing deficiencies.

They include pinholes in the silicon nitride, thin siliconnitride, shorted metallization, platinum migration into thesiliconý gold or titenium migration resulting from thinplatinum, and conitamination.

3-8

".................................... ...,,,., ............ ...=..*,•'.I. ZII I I.. . . . 1 I1 I

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3.1.4 Glassivation Considerations

Both silicon nitride a/nd phosphosilicate glass over-coatings have been found to greatly enhance the reliabilityof bipolar digital devices. These glassivation materielsact as gettering agents for sodium ions and when depositedover the total surface, including the metallization, themateriel provides an excellent protection against metalliza-tion scratches and loose particle shorts.3.1.4.1 Glassivation Failure Mechanisms

Inversion and increased metal migration are two fail-ure mechanisms that have been reported caused by glassiva-tion. These new mechanisms are not fully understood but somecauses have been postulated.

The induced inversion formation may result from somedefects or contamination in the oxide layer which allow highfields to accumulate electronic charge over the underlyingsilicon. A poor interface between the oxide and glass thenallows lateral charge movement along the interface. Thelateral charge movement can induce inversion extensive enoughto form a conducting channel which can cause device instabil-ity. The increased metal migration is not as well understood

but appears to be caused by the high pressure on the metalbetween the thermal and deposited glasses. Generally, themetal migration is associated with damage to the glass. Bothaluminum and gold migration have occurred through the damagedglass to the adjacent conductor causing device failure.

A third possible failure mechanism has been discussedwhere condensation from any moisture in a package tends tocontentrate on a crack in the glassivation, normally on themetal strips. This tends to increase the susceptibility formetal corrosion along the crack.3.1.5. Die Bond Considerations

Die bonds provide mechanical support; in most cases,electrical contact; and also provide the principle path bywhich heat flows out of the silicon chip. Three techniquesare in general use for attaching semiconductor devices to the

3-9

.

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paickage substrate: alloy mount, frit mount and epoxy mount.

The alloy mount uses a thin layer of gold to form a

eutectic alloy with the silicon and at the same time bond

to the package substrate.

The frit mount uses a low-melting devitrifying glass in

place of the gold.

The epoxy mount uses an epoxy cement to hold the semi-

conductor wafer to the substrate. Where an electrically con-

ducting mount is needed, an epoxy filled with metal, usually

silver, is used.

Beam Lead Sealed Junction devices do not use a die to

header bond. Instead, the bonding of the beams provides the

mechanical and thermal protection.

3.1.5.1 Die Bond Failure Mechanisms

Low strength chip-to-header bonds have been reported to

result in approximately 2-7% of device failures, in both

operational and storage environments.

The failure mechanisms include diffusion of the gold into

the silicon producing void formations; brittle frit mountsresulting from impurities in the glass or improper firingcycles used for devitrification; mechanical stresses inepoxies where the temperature goes through the glass-transi-

tion temperature of the epox'y, and outgassing of organicmateriel and separation of metal particles due to incomplete

curing of the epoxy.

3.1.6 Chip Connection Considerations,

Device connections are created by connecting wire leads

to the device package, or through the use of beam lead or

aluminum bump techniques. Wire bonding is accomplished pi--marily by thcrmcomprcssion or by u].trasonic bonding tc-hniOuCe.

Thermocompression bonding required thait the two mi'atC: iteto be, bonded be breught into intimate contact at an ele\ated

tomperatuvro such that solid state di.',fusion can take placeacross the inter'face. The most wide ly used t ,, rocomtres siO,

bond is tle, bondin(q ot" qoid wires , tvypicall.. L ' i] in 0 ýi,ame Ic

3-10

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to aluminum bonding pads using ball bonds. Wedge bonds anu

stitch bonds are also used. Thermocompression bonding is

also used to attach gold wires to molybdenum-gold metalliza-

tion, for bonding beam lead devices; and for wedge bonding

of aluminum wire to aluminum metallization.

The ultrasonic bonding technique is the most popular for

attaching aluminum wire to aluminum metallization. In ultra-

sonic welding, two parts are bonded together through the

simultaneous application of a clamping force that holds the

two parts together and an ultrasonic vibrational force parallel

to the place of the weld.

Both the gold and aluminum wires used for bonding must

be hardened to facilitate handling during device assembly.

Gold is work-hardened during wire drawing, then stressed re-

lieved to a suitable tensile strength and elongation. Alumi-

num wire is hardened by additions of silicon and magnesium.

3.1.6.1 Bond Failure Mechanisms

Wire bond defects are reported to account for 15 to 45%

of all device failures in an operational environment. Storage

or non-operating data currently indicates from 19 to 76% of

all device failures are bond related.

The principle failure mechanisms are process deficiencies

including underbonding, overbonding, misaligned bonds# con-

taminated bonding pads or wire, and wire nicks, cuts orabrasions.

Thermocompression bonding of aluminum wires has a his-

tory of cracks at the heel of the bond, which later failedunder power cycling.

The gold wire bonding to aluminum metallization has

been a major concern in microelectronic devices. Intermetallic

compound formations between these two metals combined with

the formation of voids in the aluminum from the Kirkendall

effect create high resistance or weakened and brittle bonds.

Formation of the compounds and voids is accelerated by thermal

3-11

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stresses. Design and processing criteria have been developukl

to minimize the occurrence of these formations. They include

controlling the purity of the gold and providing thinner

metallization at the bonding pad.

The aluminum wire bond to the gold header post has not

been a significant contributor to device failures and is attrib-

uted to two factors: 1) the ratio of aluminum to gold is small,

and 2) the bonds are not exposed to the same temperature as

the gold wire to alumin•un bonds on the chip during operation.

Failure mechanism data on beam lead sealed junction de-

vice bonding is limited. Processing deficiencies would beexpected to be the primary problem, however, these are sig-

nificantly reduced since the chip connection is made in the

beam forming process which leaves only bonding of the beams

to the header. All of the bonds of a single device are madesimultaneously.

3.1.7 Package Considerations

Bipolar digital devices are packaged in a variety of

materiels and configurations. These materials include: metal,

ceramic, glass, metal ceramic, epoxy, phenolic and otherplastics. Package configurations include cans, flatpacks,

,.Iinline and dual inline.

The main function of the package is to maintain a dryand inert atmosphere. Therefore, the primary reliability

consideration is the hermetic seal of the package.

For metal-can packages, the seal is created by weldin9a nickel can or a nickel-plated steel can to a Kovar or

steel header which is gold-plated. Glass is used to seal thepackage at the electrical leads and to isolate Lhese leads

from themselves and the header.

Ceramic package seals are formed by glass, brazed moly-

manganese metallization or so-called "solder glasses."The plastic package, formed by molding the semiconductor

device in molten plastic, is not a hermetic package. Plastics

used are, for the most part, epoxy materials.

3-12

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3.1.7.1 Package and Lead Failur., MechanismsDevice failures attributed to package defects have been

reported from 8 to 28% of operational failures. In many casesof failure reports, the resulting contamination and corrosionis reported and not the seal defect. Special test programson devices have shown hermeticity problems to be substantial.

Failure mechanisms besides the seal leaks are fracturedpackages due to improper handling, loose solder balls formedin sealing the package which later short conductors, currentleakage between leads from formation of lead from lead oxidein the glass, broken or burnt external leads and impropermarking. All of these are process defects.

3-22

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3.1.8 Linear Device Characteristics

Certain construction characteristics and resulting failure

mechanisms described for the digital devices exhibit a greater

degradation on linear devices and therefore are briefly dis-

cussed below.

Most digital device families utilize components on thechip in a saturated switching mode. This allows the variouscomponents to have wide ranges of values and undergo con-siderable drift and still maintain proper circuit operation.The linear circuit however, is much more sensitive to varia-tions in individual component characteristics. The lineardevice usually requires operation of all transistors in the.

active region and may have a high voltage gain. Both ofthese factors mean that any slight drift in the various com-ponent parameters especially in the input stage can resultin out of tolerance failure modes.

Although this instability can result from a number of

causes, the primary failure mechanisms are surface relatedproblems. They include ionic contamination and defects inpassivation, metallization and glassivation layers.

The contamination most often reported as the cause ofinversion has been the sodium ion. This positively eharged ion isextremely mobile in the usual silicon dioxide passivation andquickly moves close to the silicon where it can easily induce aninversion. Because of its positive charge sodium is responsiblefor the inversion of p-type materiel, inverting the bases ofnormal NPN integrated transistors and causing failure. Bias

changes can redistribute the positive ion concentration resultingin unstable device electrical characteristics.

Doping the silicon dioxide with phosphorous or depositinga phosphorous doped glass over the thermal silicon dioxide hasbeen used to decrease the mobility of the sodium ion. Siliconnitride layers are also being used for the same purpose.

Defects such as cracks and crazing of passivation andglassivation layers have also been reported to result in the in-version phenomenon.

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'r, !ll of these cass, the inversion layers or channelsare created with an applied bias. Once bias is removed, the ioncontaminants or surface inversion layers tend to disperse. Ithas been reported that devices exhibiting these inversion charac-teristics have been missed in the reverbe bias screen and go un-detected until operation. This occurs when bias is removed beforethe devices are cooled down or the parameter tests are performeda considerable period after the bias has been removed. In eachof these cases, the inversion phenomenon has disappeared.

For the storage environment, the inversion phenomenon couldonly be generated if the devices were contaminated by some ex-ternal source, or a defect in a phosphorous doped layer or siliconnitride layer allowed ionic contaminants to concentrate in asingle area. Once this occurred a certain amount of operatingtime (typically 1 hour up to 1 day) would be required for the in-version to form. For highly contaminated devices, several minutesmay be all that is required. Generally, in the missile appli.-cation, operating times are short and the inversion phenomenon has

not been reported as a major problem- in the field data.

3.2 Long Term (20 year) Failure Mechanism AnalysisThe data analyzed in this report is on devices stored for

up to nine years. A separate study has been conducted on micro-electronic failure mechanisms for up to twenty years storage timeby the Georgia Institute of Technology. This report, preparedfor the U. S. Army Missile Research and Development Command,

considers physical and chemical proporties of the electronicdevices and the environments in which a device may be subjectedfrom processing through twenty years of field storage. Conclu-sions from this report concerning bipolar devices are containedbelow. For details, the reader is referred to Report DD14-23,

"Reliability Factors for Electronic Components in a Storage

Environment," by B. R. Livesay and E. J. Scheibner, Applied

Sciences Laboratory, Engineering Experiment Station, Georgia

Institute of Technology, September, 1977.

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1. The most important environmental forcing functions, orstresses, in storage are mechanical, chemiral and low thermal.Mechanical stresses ovcur due to thermal-mechanical interactionsand residual stresses. Chemical stresses result from contaminantsasuch as residual process chemicals and environmental gases whichare introduced through improper or failed seals. Although purolythermal stresses have much less importance in storage than oper-ating environments, certain low temperature reaction rates anddiffusion processes are temperature dependent.

2. The synergism of the three primary storage stresses is crit-ical. Any one of the three acting alone may not be particularlydamaging but the combined effect of two or three forcing functionsacting together is likely to cause device failures.

3. Environmental extremes for Army missiles in storage have in-volved temperatures of -50 0 C to +750C, diurnal cycling of 700C,100 percent relative humidity, direct sea spray, industrialpollutants, some mechanical shock and fungus.

4. The failure mechanisms of greatest importance in storage havebeen identified as those related to various marginal manufacturingmistakes, corrosion processes and mechanical fracture. Electricalor potential current induced degradation processes should notbe important in the storage environment. Moisture within apackage is probably the most important factor for both corrosionand mechanically induced failures in storage. Chemicals includingmoisture trapped within a package due to improper cleaning orbecause of evolution from materials such as polymers are acritical concern for long-term reliability. The package seal isalso critical for keeping out atmospheric contaminants. Thermal-mechanical stresses aided by chemical agents will cause crackpropagation in seals, passivation layers, bonds, metallizationlayers and the silicon chip.

5. New manufacturing methods such as the Tape Automated Bonding

technology should be continually evaluated to determine if thereare potential storage failure mechanisms. For example, are theredetrimental effects in a storage environment from probable im-purities introduced during bump plating and bonding operations?

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6. The presence of defects such as impurities, dislocations,microcracks, interfacial faults and grain boundaries in thematerials of a microcircuit structure can result in failuredue to low temperature atomic diffusion processes.

7. Particulate matter is one of the dominant concerns as astorage failure mechanism.

8. The hermeticity of microelectronic packages is an importantconcern for long-term storage conditions. The screen tests fordetermining the effectiveness or hermeticity of the packageseals includes a fine leak rate test. The maximum allowableleak rate specified for this test should be lowered to 10"10

atm cm sec for devices that are expected to be stored becauseof the exchange of gases between the initial package ambient andthe external storage environment for packages with a finite sizeleak.

9. All microcircuit packages should be vacuum bakes at 1500Cfor at least 4 hours and sealed in dry nitrogen without everbeing exposed to moisture containing gases such as air. The

moisture content of the nitrogen sealing chamber should be lessthan 100 ppm.

10. Significant improvements are needed in the measurementtechnology for moisture and other gases in microcircuit packages.Current methods are too expensive and complicated while providinginsufficient sensitivity and wide variations in numerical valuesfor supposedly identical gas contents.

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11. The use of plastics introduces high risks of differentialexpansion problems which result in mechanical damage such aspulling apart leads.

12. Missiles placed in storage should never contain electronicparts employing polymers for package seals. Polymers willtransmit moisture and other gases.

13. Screening and accelerated testing procedures of Armymissiles must have steps determined by potential storage failure-porcesses. There is doubt that the screening sequence contain~ain MIL-STD-883A is fully appropriate to the storage environment.

14. There is widespread controversy about the optimum number ofcycles in a temperature cycling screen test. Opinions vary from25-300 cycles for effective screening but the use of only 10cycles is not considered to be of any value. Results of theRockwell International screen test program have not resolvedthis question.

15. Thermal shock should never be used as a screen test stressfor hermetic devices placed in stored missile systems.

16. The metallurgical consequences of an upper limit of 1500vs. 1250C for temperature cycling and stabilization bakes withregard to solders should be investigated.

17. The philosophy necessary for developing meaningful screen

testing parameters is to concentrate on determining the stress-duration levels required to reveal well defined device faults.The capability is therefore needed fox fabricating devices withdeliberate defects of desired type, severity and number.

18. Only general environmental data are currently available forthe temperature, environmental gases, vibration, etc. expectedin storage. There is need for specific informatioii concerningthe interior of a missile in storage in order to make judgmentsconcerning future reliability factors. The chemical factorsassociated with moisture, evolved gases and fungus need to bedeveloped at four levels:

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I. Within the storage structure (igloo, shed, utc.)

2. Within the missile container

3. Within the missile electronic system compartment

4. Within individual component packages

A measurement program should be established so that actual data

will be available concerning these factors.

19. The effectiveness of desiccant materials used within Armymissiles should be evaluated. This topic was not pursued duringthis program but questions were raised by several organizations.

20. The various types of missile storage containers should beevaluated to determine how well they protect missiles from stor-age environments most critical to the electronic systems.

21. Procedures should be in effect to close the loop concerningthe detailed analysis of parts failing in service and manufacturingparameters. Failures in field environments are generally moresevere than indicated by initial predictions. Feed-back fromservice failures should be available to guide design decisions

of future systems.

22. Measurements of permeabilities, diffusion coefficients, andsolubilities of water in representative polymers should be made

so that good data are available and effects of temperature,pressure, mechanical strain, previous sorption, and synergism oftwo or more penetrants be understood. Data of thermal expansion,

glass transitions, and viscoelastic responses of polymer encap-sulants and adhesives are too meager for design of circuit

systems. Measurements are needed here.

23. Age sensitive materials used in missile systems must bewell characterized. Missile storage reliability is determined

by the stability of the materials used to fabricate individualparts within the system while exposed to the storage environment

of a tactical missile. There is a strong need for compilingmaterial degradation data from the technical literature, directedexperiments and theoretical calculations.

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3.3 Device Level Product Assulrance

The manufacturing controls and procurement methods for

military equipment are normally determined by the criticality

of the device in the system and the uniqueness of the device.

Procurement specifications determine, to a significant degree,

the reliability of the device in the field.

For standard devices in high volume production with es-

tablished reliability, the parts may be procured according to

the specifications in MIL-STD-883 and MIL-M-3G5iO or equiva-

lent manufacturer specifications. The three quality levels

defined in the military specifications are:

Class "A" - Devices intended for use where maintenance

and replacement are extremely difficult or impossible, and

reliability is imperative.

Class "B" - Devices intended for use where maintenance

and replacement can be performed, but are difficult and ex-

pensive, and where reliability is imperative.

Class "C" - Devices intended for use where maintenance

and replacement can be readily accomplished and down time is

not a critical factor.

A Class "D" level has also been defined in this report

to identify the manufacturer's commercial quality level.

In the procurement of standard and non-standard devices,

a second method is to use specific user specifications. The

user specifications are generally closely related to the

military specifications but tailored for the specific use

requirements.

A third method in use is the procurement of devices

according to a particular quality level (MIL-STD-883, MIL-M-38510, and/or user specification) and the performance of

additional qualification and screening at the system con-

tractors, subcontractors or government facilities.

The so called "captive line" is being used as a fourth

method of procuring high reliability parts. In this case,

the devices are built to the user's specifications and no

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part ot the qualified process and line can be changod with-

out approval of the procuring organization.

All of these techniques require some form of manufacturing,

quality conformance certification and may include procurinq

organization periodic inspection or continuous monitoring of

the production lines.

3.3.1 Process Cont:oln

Various combinations of process control techniques arc.

used on manufacturing lines. The techniques may include in-

process lot acceptance, process monitoring, process audit/

surveillance, and operator certification.

In process lot acceptance is a sampling tcst, made to

a specific acceptable quality level (AQL). It is used es-

pecially in high throughput points, such as those in the early

stages of device manufacturing.

Process monitoring keeps track of variables such as

bonding temperature, gas flow rates, furnace temperature, and

rinse times. Process monitoring may also be used to measure

operator performance and to insure product control where in-

process lot acceptance is not performed.

Audits anC general surveillance of both the process and

the product may be performed at regular intervals to assure

adherence to the manufacturing specifications.

For operator" certification, production operal ors and

int;pectors may bt" rt,'qularly rahlod and classified. In thikl

case, the work of the best ope.ato's i is nubjoct to no in-spection or a minimum' amount of inspect ion. The work of

the next best operatolr is sample-tested and Cor t.he poorest.

ope•rator's work, 100 percent t e,;ting may be prto1ined.Typioi'a] procesjs point:s whore Hiuso, typesm of o'ontr:oli imly

"bW inl ti.tot. ,d ;11Ve co t• lnod n 'la'j l1 3-31.

3.3. 2 DOv i 0,ic Level Product, As;str,inck, Adi)? dti i o L on Ion the aI0 1O1011t- o1r p oI-oduIct. I I I i ca I i on *IA 1

:kl tknOi i nq to bo, pt,. It Ormod 1.i dep lndtent- ot i ll I quI , I t.y and

VOU. i, hility requ 'emnt t. (i o' the 11pp111 i c ti koil A.

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TABLE 3-3. PROCESS CONTROL POINTS

MATERIAL PROCESSING

STARTING SLICE CONTROLSORIENTATION, RESISTIVITY, THICKNESS, BOW, TAPER

MECHANICAL POLISH CONTROLSTHICKNESS, TAPER, SURFACE FINISH, DISLOCATIONS

OXIDATION CONTROLSTHICKNESS, PINHOLES, CLEANLINESS

EPITAXIAL DEPOSITION CONTROLSTHICKNESS, RESISTIVITY, STACKING FAULTS

PHOTORESIST CONTROLSDIMENSION, ALIGNMENT, ETCH COMPLETENESS

DIFFUSION CONTROLSFURNACE CONTROL, DIPFUSION DEPTH, RESISTIVITY,ELECTRICAL TESTS

METALLIZATIONEVAPORATOR CONTROL, THICKNESS ADHERENCE, PATTERNDEFINITION, SEM EXAMINATION

BACK GRIND OF SLICEGRINDER CONTROL, THICKNESS, CONTAMINATION

BAR INSPECT LOT ACCEPTANCEPROBE AND SCRIBE DAMAGE, PEELING METAL, CRACKS

ASSEMDL1•

HEADER INSPECTIONBCNDABILITY, DISCOLORATION

ALLOY MOUNTALLOY COMPLETENESS, BAR ORIENTATION, PARTICLES,ADHERENCE

BONDINGMACHINE CONTROL, BOND STRENGTH, WORKMANSHIP

PRE-CAP LOT ACCEPTANCE

WELDER CONTROLPARTICLES, MOISTURE LEVELS

HERMETICITY

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determining factor is the life cycle cost trade-off of de-

tecting defects at the part level versus detecting them at

the board or module level during assembly versus detecting

them in the system field use.

MIL-STD-883 and MIL-M-38510 primarily control the

military part level product assurance requirements. Therequirements include manufacturer certification, qualification

inspection, quality lot conformance inspection and screening.

3.3.2.1 Qualification Certification

In the specifications, the microcircuit manufacturer is

required to have his product assurance program certified foreach quality level: A, B, and C. For Class A devices, manu-

facturer line certification is also required.

3.3.2.2 Qualification InspectionA certified manufacturer must qualify individual device

types or groups of related devices by subjecting them to, and

demonstrating that, they satisfy all the groups A, B, and Crequirements for the specified device class and type of micro-

circuits. This qualification inspection must be repeated at

intervals no greater than three months unless otherwise

specified.

3.3.2.3 Quality Lot Conformance Inspection

Quality lot conformance inspection is required by the

military specifications for all three quality levels. Samples

from each lot are drawn and electricai and environmental tests

performed on subgroups of the sample. The sample size and

number of failures allowed in the tests are determined statis-

tically from the size of the lot and the required reliability.

In the statistical analysis, the reequired reliability is con-

verted into a factor denoting the lot tolerance percent de-

fective (ULTP1) . The number of failures allowed in the tests

is based on the sample size and the LTPD ftor that test. The

lot is acceýpted if the observed 11u1m1be1I: of det7! Ct iv(e'5 -.0 equal

to or less than the preselected acceptance, number for t he

sample size. Specific tests required are s;unari zd in Tabi c

3-4.3-321

3 -- mug,

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The group A tests include static, dynamic, functional andswitching parameter electrical testing. All devices used inthe group A tests that comply with the requirements may be re-

turned to the lot.The group B tests assess the physical, bond and lead

strength of the devices. The group B tests are considereddestructive and all devices used in these tests must be re-moved from the lot.

The group C tests are environmental tests which subjectthe devices to environmental extremes in order to detectweak devices or drifting parameters. The thermal, mechanicaland salt atmosphere tests are considered d6structive and de-vices used in these tests must be removed from the lot. Alldevices in the High Temperature Storage, Operating Life and,Steady State Reverse Bias Tests that comply with the require-ments may be returned to the lot.

As indicated in Table 3-4, the primary distinction in

quality levels for conformance testing is the number ofdefectives allowed in the sample. Also for Class A devices,operating life tests and steady state reverse bias testsare required.3.3.2.4 Screening

The screening or testing of 100 percent of the devicesvaries among programs. The primary concern of screening isis to weed out the weak devices without creating defects or

weaknesses in good devices. MIL-STD-883 specifies the soreentype and method to be used but generally leaves the severityof the screen up to the procuring organization to fit the userequirements. As stated previously, users may modify therequired screens by the vendor, or may perform additionalscreens at his own facilities. Table 3-5 summarizes the basicscreening procedures specified in MIL-STD-883.

The principle differences in screening for Class A, U

and C devices are indicated in Table 3-5.

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TABLE 3-4. QUALITY CONFORMANCE TESTING

GROUP A TESTS

TEST CONDITION CLASS A CLASS B CLASS CLTPD LTPD LTPD

Subgroup 1 Per 5 5 5Static Tests at 25*C. applicable

Subgroup 2 procurement 7 10document.7 iStatic Tests at maxc.rated operating temp.

Subgroup 3 5 7 10Static Tests at min.rated operating temp.

Subgroup 4 55Dynamic Tests at250C.

Subgroup 5 5 7 10Dynamic Tests at min.operating temp.

Subgroup 6 5 7 10Dynamic Tests at min.operating temp.

Subgroup 7 3 5 5Functional Tests at250C.

Subgroup 8 5 10 15Functional Tests atmax. & min. ratedoperating temp.

Subgroup 9 5 7 10Switching ParameterTests at 250C.

Subgroup 10 5 10 15Switching ParameterTests at max. ratedoperating temp.

Subgroup 11 50 15

Switching parameter'rests at min. ratedoperating temp,

3-34

.. ......

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TABLE 3-4. QUALITY CONFORMANCE TESTING

GROUP B TESTS

TEST CONDITION CLASS A CLASS B CLASS CLTPD LTPD LTPD

Subgroup 1 External 10 15 20Physical Dimensions

Subgroup 2a. Marking 4 devices (no failu"reS)

Permanancyb. Visual & Internal & 1 device ( no failures )

Mechanical Externalc. Bond Strength

l.Thermocompression Bond Sheer or 5 15 .20Wire Pull

2.Ultrasonic or Bond Sheer orWedge Wire Pull

3.Flip Chip Bond Sheer4.Beam Lead Bond Sheer or

Bond Pull

Subgroup 3 Soldering Temp 10 15 15Solderability of 260+100C.

Subgroup 4Lead Fatigue 3 bending 10 15 15

cyclesthrough a90' arc.

Seala. Fineb. Gross

SROUP C TESTS

Subgroup 1 10 15 15Thermal Shock 15 cycles min.

at -550C to1250C'.

Temperature -650C to 1506CCycling (cycles as

specified)Moisture ResistanceSeala. Fine1. Gross

End Point Electrical per applicableParameters procurement

document.

3-35

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TABLE 3-4. QUALITY CONFORMANCE TESTING

GROUP C TESTS ( CONTINUED)

TESTS CONDITION CLASS A CLASS B CLASS CLTPD LTPD LTPD

Subgroup 2 10 15 15Mechanical Shock 5 pulses at

1500 G levelVibration, variable 20-200Hz, 20GFrequency acceleration,

16 minutes minin each plane.

Constant Accelera- 30,000 G level.tionSeala. Fineb. Gross

End Point Electrical per applicableParameters procurement

document.Subgroup 3 10. 15 15

Salt Atmosphere 24 hours at350C.

Subgroup 4 +50, 77High Temperature 150 •0 CStorage Storage,

1000 hours.End Point Electrical per applicableParameters procurement

document.Subgroup 5

Operating Life Test 1000 hours per 7applicable pro-curement docu-ment

End Point ElectricalParameters

Subgroup 6Steady State Reverse 72 hours at 150 0 C 7Bias per applicable

procurementdocument.

End Point ElectricalParameters

3-36

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The internal visual (precap) test checks the internal

physical construction, marking and workmanship before capping

the device.Class A devices are examined for metallization scratches,

voids, corrosion, bridged interconnections, misalignment andincomplete window coverage, oxide defects, incomplete Junc-

tion coverage, improper contact cuts, and chipped oxide be-tween the bond or metallization periphery and the edge of the 4

chip, diffusion faults, foreign materiel, incorrect bond size

or location, damaged wires., incorrect wire length, extra wiremateriel, insufficient distance between wires, improper chiporientation, and packago defects.

The Class B device internal visual requirements are lessstringent and include examination for metallization scratches,voids and bridged interconnections, chipped oxide betweenbond or metallization periphery and the edge of the chip,foreign material, incorrect bond location, incorrect wiretension, cracked die and improper chip orientation.

No Class C internal visual is required for monolithicdevices.

The stabilization bake temperature cycling and sealtests are the same for all quality levels. Recommendedtemperature extremes of exposure for specific metallizationsystems are -65 0 C to 2009C for aluminum/aluminum systems;-650C to 1500C for gold/aluminum systems; and -650C to 3000Cfor gold/gold systems.

Thermal shock, mechanical shock, reverse bias burn-in,and radiographic inspections are required for Class A devices

only.The constant acceleration test stresses two planes of

the Class A devices while only one plane of the Classes B and

C.Burn-in tests of 240 hours for Class A devices and 168

hours for Class B devices are required. No burn-in is requiredfor Class C.

3-37

. . I I | I I'.'

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TABLE 3-5. MIL-STD-883 SCREENINGPROCEDURE SUMMARY (Method 5004)

SCREEN CONDITION - SREE NSAMPLE,CLASS A CLASS B LSCI-I III I- , - I

Internal Visual See text for 100% 100% 100%(Precap) Class A, B & C.

Stabilization 24 hours minimum at 100% 100% 100%Bake 750C minium.

Thermal Shock 15 cycles minimum at 100% -.-- ..-0 to 1000C minimum.

Temperature -650 to 1500C min. 100% 100% 100%

Cycling Cycles as specified.Mechanical 2P,000 G level (peak) 100%

Shock oie pulse shock in Y,plane only or 5 shocipulses at 1500 G level(peak) in Y2 plane.

Constant 30,000 G level in Y 100% 100% 100%Acceleration plane, then Y plani for

Class A. Y1 ilane onlyfor Classes B & C.

Seal 100% 100% 100%a. Fineb. Gross

Interim Per applicable pro- 100% ---...

Electrical curement document.Parameters

Burn-in Test 240 hours at 1256C (C1.A) 100% 100%168 hours at 1250C (Cl.B)

Interim Per applicable procure- 100% ---Electr:ical ment document. (test re-Parameters quired only when reverse

b.as burn-in is used)Reverse Bias 72 hours at 150 0 C min. 100%

Burn-in (when specified for MOSor linear devices).

Final ElectricalTesfsa.Static Per applicable pro- 100% 100% 100%

254d curement document.max/min Temn 100% 100% ---b.Dynamic '' 100% 100% ---C.Functional 100% 100% 100%

Radiographic 100%

External Visual1 100% 100% 100%

3-38

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The Class A and B final electrical tests include static,dynamic and functional tests at 250C with static tests at

maximum and minimum rated operating temperatures also. TheClass C final electrical tests require only static and func-tional tests at 250 C.3.3.2.5 Device Level Product Assurance Classification

The primary product assurance classifications whicheffect the device reliability are the MIL-STD-883 qualitylevels: Class A, B and C plus the commercial quality leveldesignated as Class D. Quality conformance inspections andscreens over and above these levels are used to also identifythe quality level. Special considerations such as captivelines are further used to classify the quality level.

3.4 Module,_ Assembly and System Level Product AssuranceAdditional screens and qualification tests performed

at the module, assembly and system level also effect thedevice reliability in its use environment. Typically a

major item may be subjected to operating times at high andlow temperatures, shock, and vibration. For purpose ofclassifying the devices for reliability, such screens areidentified where data is available.3.5 Device Function and Complexity Classification

Bipolar digital devices consist of various logicfamilies developed over the years with certain new typesvirtually replacing older ones. The complexity of the do-vice which has generally increased during the years dependson the use function.

RTL or resistor-transistor logic is one of the earliesttypes of logic and its use i.s declin:ing clue to increased useof later developed circuits. Its immunity to external noiseis less than the newer families.

uTL or diode transistor logic use is also declining innew system design. It features noise imnvunity and hasmoderate speed.

TTL or transiat-or-transiator logic ii much faster than

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DTL. More complex functions are available in this family

than in any of the logic families. Its immunity to externalnoise is very good.

A special type of TTL called Schottkey TTL operates atfaster speeds.

ECL or emitter-coupled logic has a very high logic speed.Transistors are not allowed to saturate and switching isperformed at relatively constant current.

Other logic types include: CTL (complementary-transistorlogic); RCTL (Resistor-capacitor-transistor logic); DCTL(direct coupled transistor logic); and CML (current-modelogic).

The main complexity classifications are small scale

integration (SSI) which includes devices with up to 11 gates;mdeium scale integration (MSI) which includes devices withfrom 11 to 99 gates; and large scale integration (LSI) which

includes devices with over 100 gates.Table 3-6 presents a sample of some digital functions

and their complexities.

3-41

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TABLE 3-6. DIGITAL XICROCIRCUIT COY2 LEXITY

COMPLEXITY FCTION COMLEXITY FUNCTION

SSI Simple Gate MSI JK ?lip Flop(up to 5 Dual Gate (12 to 99 Dual Exclusive ORgates) Simple Buffer gates) One Shot Multivibrator

Dual Buffer 3K/RS Flip FlopSimple Expander Dual Simple Flip FlopDual Inverter RS Flip Flop/Converterý

Ripple ConvertersSSI Triple Gate Dua_ JK Flip Flop(6 to 11 Quad Gategates) Exclusive OR Gate

AdderDual ExpanderTriple ExpanderQuad Inverter DriverHex InverterSimple Flip FlopPulse Exclusive OR

Bipolar linear devices consist of various functions. Thecomplexity of the device depends on Lhe use function.

The main complexity classifications are small scale inte-gration (SSI) which includes devices with up to 44 transistors;medium scale integration (MSI) which includes devices with from45 to 400 transistors; and large scale integration (LSI) whichincludes devices with over 400 transistors.

Table 3-7 presents a sample of some linear functions andtheir general complexity levels.

TABLE 3-7. LINEAR MICROCIRCUIT COMPLEXITY

COMPLEXITY FUNCTION

SSI IF AmplifierDual Differential Amplifier

(up to 20 transistors) Volt RegulatorDifferential AmplifierRF AmplifierLine DriverVideo AmplifierDual-line ReceiverPower Amplifier

SS I Operational Amplifier

(20 to 44 transistors) Voltage ComparatorDual Voltage ComparatorD. C. AmplifierDemodulator

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3.6 Use Environment

A missile system may be subjected to various modes of

transportation and handling, temperature soaks, climatic ex-

tremes, and activated test time and "launch ready" time in

addition to a controlled storage environment. Some studies

have been performed on missile systems to measure these en-

vironments. A summary of several studies is presented in

seport BR-7811, "The Environmental Conditions Experienced By

Rockets and Missiles in Storage, Transit and Operations"

prepared by the Raytheon Company, dated December 1973.In this report, skin temperatures of missiles in con-

tainers were recorded in dump (or open) storage at a maximum

of 1659F (740C) and a minimum of -446F (-420C). In non-

earth covered bunkers temperatures have been measured at amaximum of 1160F (470C) to a minimum of -31OF (-350C). In

earth covered bunkers, temperatures have been measured at amaximum of 1030F (399C) to a minimum of 230F (-50C).

Acceleration extremes during transportation have been

measured for track, rail, aircraft and ship transportation.

Up to 7 GQs at 300 hertz have been measured on trucks; 1 Gat 300 hertz by rail; 7 G's at 1100 hertz on aircraft; and1 G at 70 hertz on shipboard.

Maximum shock stresses for truck transportation have beenmeasured at 10 G's and by rail at 300 G's.

Although field data does not record these levels, where

available, the type and approximate character of storage andtransportation are identified and used to classify the devices.

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SECTION 4"STORAGE DATA ANALYSIS

The data collection effort for monolithic bipolar digitaland 1'.near devices has gathered approximately 20 billion hoursof storage or non-operating field data with 270 device failures

reported. In addition, 247 million plus hours of high tempera-ture storage life data was collected with 711 device failures

reported.Teon data sources were used, two of which were reliability

data banks, with the othersorepresenting specific programs.

Field data included storage of missiles, warheads, satellitestandby data and special parts testing programs.

4.1 General Data Analysis DiscussionThe intent of the data analysis was to develop a stress

level model which would be used to predict monolithic bpolardigital device failure rates in a non-operating environment.The MIL-HDBK-2l7B Model used to predict operational failurerates for monolithic bipolar digital and linear SSZ/MS1 deviceswas used as a starting point for the non-operating model. The217B model includes factors for learning, quality, temperature,application environment, and complexity as follows.

XP n LA0 [C I T+C 2 A32

where:Aý is the device failure rate.1L is the learning factor.lQ is the quality factor.lT is the temperature acceleration factor.n E is the application environment multiplier.C1 , C2 are the circuit oompleýity factors.

4-1

_____________________________. .... ..'.,, ......

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A C i r,; t chavac t.or iza Lion of 01 Ii' urlc o lln-upc "4 ill,

data i dent ifiod a definite. correlation between t-lkh device

failure rate and the device quality a~id.termporature. No oitj-

nificant difference was measured between the non-operating data

for diqital and linear device. Insufficient data was availabie

Lo determinei the affect of a lca~rnintj factor 01' an application

environment factor. The data onl device complexity was analy,.ed

but no significant differunces; were rioted between the storakIc

failure rate and tiw complexity of the device for 3SS1MSI dcvicc6. D

During the first characterization of the non-operating

data, the failure experience indicated a sufficient difforcnce

between devices with alumintim mot:all i.zation/aluminum wireel

systems and aluminum met--lxI,izatI~cn/ijold wire systems to re-

quire searegatlon of the data sets. This led to the segroqa-

tion of datLa sots fvr other meitalll~zationi/iiftorconnection

systems even though sufficient data was not available to

completely characterize, them.

The initial data characterization dividod the data into

several data sets with tho Prime catecgory being metallization/

interconnection systems, the first subcatogory being quality

level, and the second subcategory being ambient temperature.

The data is shown in Tables 4-1. thr~ough 4-4 for devicos with

aluminum metal, 1izaition/aluminum wire; aluminlum xneta li zation/

gold wire; qold met-al lizati on/qIold wire; and tgold beam lC-16

IFol lowinq this; chaI-ac to ri. .zatl on, soer:al. Other poten:.li-ial

ruliabil~ity facto.rs were investiclated. The result's of the

invost igat ions i ndicatc~id that. no significant reliability

differnce, wasl apparent *ill t~ho data f~or: storage durati~on , lokI.1 AC

typeo, or p. ckaq e typo . 1111u d a t.I was~ t 1 :.c.e tok de~tOIrm i n

Olny I actors fo r t~h dio at.t: ach methlod ort s~t~t ~

i'or dk'v icesi wit au i nn iri e m ta I /1, I umiim w~il- h (1*~

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TABLE 4-1. DIGITAL/LINEAR NON-OPERATING DATA FOIl, U1VXCI.I !

WITH ALUMINUM METALLIZATION/ALUMINUM WIRE

QUALITY AMBIENT FUNCTION STORAGE NUMBER FAILURE ,ATLLEVEL TEMPEIRATURE HOURS X i0o6 FAILED IN FITS*

Class A 25-300C Digital 5,861.4 5 .85Linear -

Combinod 5,861.4 5 .35125 0 C Dicgital .113 0 (.6,G50.)

Linear .Combined .113 0 (<8850.,

150Cc Digital - -Linear .114 0 (3772.)Combined .114 0 (8877Z.2

Cla;s B 25-30 0 C Digital 4,653.5 13 2.79Linear 2,018.8 9 4.46Combined 6,672.3 22 3.30

125 0 C Digital .176 0 (•5682.)Linear - -

Combined .176 0 (5682.)150 0 C Digital 4.046 1 247.

Linoar .139 0 (<7194.)Combined 4.185 1 239.

Class C 25-30 0 C Digital 2,103. 8 3.8Line a r - - -Combined 2,103. 3.8

125 0 C Digital .400 0 (k2500.)Linear -

Combinad .400 0 (<2;00.)1500C Digital 71.567 26 363.

Linear 10.039 4 398.Comlbined 81. 606 30 368.

175 0 C DigiLt1 - - -li near 0. 2139 8 1272.

Comibinod 6.289 8 1272.1800C Digital .11i0 0 (<909 I.)

Linear 7.959 0 (%,i6.Combined 8.069 0 (<1.24.)

200 0 C Digital 5.954 16 2 (i7.I incal- 3.034 2 330.Comlb [ nod 18.9 81 8 .17 1 i19.2500C 0 ic0 tA. 3. 100 23 7420.

Ii •,t •3 ti 3 8 7 •/6.Com hi nod 3.4 38 2671300"c l g~i. Lal 3.0ti,)( 59

2, 9 , ",. 3 "1 .11Cmoilwd 3.949 62 15 70l.

3.)0bO 1) ".! L3 t L, L 2 . I ".2, 1•,18 6 67 6 0.

l.4 5 .i0 9).Cot i Icd 2.221 152 684 J.

* ji L. U•. -1 ULt ri I I in hours.

4-3

I. . . . .. ... . .. .. . ..... ..... .... . .. . . .. .- ,.. . .:: .i..-. .... ..... " ... .. .... ... . .. .. .L . •

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TABLE 4-1. (Continued)

QUALITY AMBIENT FUNCTION STORAGE 6 NUMBER FAILURE RATELEVEL TEMPERATURE HOURS X 10_ FAILED IN FXTS

Class D 25-300C Digital 4.61 0 (<217.)Linear - - -Combined 4.61 0 (<217.)

1000c Digital - -Linear .01 0 (<i00000.)Combined .01 0 (<100000.)

125 0 C Digital 2.953 5 1693.Linear - - -Combined 2.953 5 1693.

1500C Digital 53.702 46 857.Linear 15.496 19 1276.Combined 69.198 65 939.

1750C Digital 1.643 9 5479.Linear " -Combined 1.643 9 5479.

180 0 C Digital .205 0 (04878.)Linear - -Combined .205 0 C14878.S

2000C Digital 6.472 3 463.Linear - - -Combined 6.472 3 403.

3000C Digital .788 43 54358.Linear .131 9 6870".Combined .919 52 56574.

3500C Digital - - -Linear .041 29 710784.Combined .041 29 710784.

4-4

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TABLE 4-2. DIGITAL/LINEAR NON-OPERATING DATAFOR DEVICES WITH ALUMINUM METALLIZATON/GOLD W:aR

QUALITY AMBIENT FUNCTION STORAG 6 NUMBER FAILURE r ATZLEVEL TEMPERATURE HOURS x 10 FAILED IN FITS

Class A 2500C Digital .01 0 (<100000.)Linear - -Combined .01 0 c 100000.)

300 0 C Digital .01 0 ( 100000.)Linear - - -

Combined .01 0 ( 100000.)3506C Digital .01 0. (<100000.)

Linear - - -

Combined .01 0 (< 100000.)Class B 25-300C Digital 2604.11 77

Linear 114.0 6 53.Combined 2718.11 83 31.

Class C 1500C Digital 15.848 50 3155.Linear 2.88 6 2083.Combined 18.728 56 2990.

175 0 C Digital .282 0 (<3546.)Linoar - - -

Combined .282 0 (<3546.)200gC Digital .758 9 11873.

Linear - - -Combined .758 9 11873.

2500C Digital .315 13 41270.Linear - - -

Combined .315 13 41270.Class D 25-30*C Digital .268 0 (-3731.)

Linear -Combined .268 0 (0731.)

1250C Digital .307 0 (<3257.)Linear - - -Combined .307 0 (<3257.)

1500C Digital 20.02.5 31 1549.Linear .896 4 4463.Combined 20.911 35 1674.

1800C Digital .086 7 81112.Linear -...-Combined .086 7 81112.

200 0 C Digital .119 40 336417.Linear ....

Combined .119 40 336417.2506C Digital .068 99 1462000.

Linear - -

Combined .068 99 1462000.

4-5

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TABLE 4-3. DIGITAL NON-OPERATING DATA FOR DEVICES-WITH GOLD METALLIZAT:ON/GOLD WIRE

QUALITY AMBIENT STORAGE 6 NUMBER FAILURE RATELEVEL TEMPERATURE HOURS X 10 FAILED IN FITS

Class B 25-306C .354 0 (c2825.)

Class C 25-306C 8.689 0 (<115.)

Class D 25-300C 8.689 0 (.115.)

TABLE 4-4. DIGITAL NON-OPERATING DATA FOR GOLDBEAM SEALED JUNCTION DEVICES

QUALITY AMBIENT STORAGE 6 NUMBER FAILURE RATELEVEL TEMPERATURE HOURS X 10 FAILED.. IN FITS

Class B 1509C .045 0 (-22200.)Class D 1506C 2.41 0 (<415.)

2006C 2.13 1 469.3000C .062 0 (<16200.)

TABLE 4-5. FIELD FAILURE RATE DATA

QUALITY FAILURE RATE IN FITSTYPE LEVEL BEST ESTIMATE 90% ONE-SIDED LIMIT

Aluminum Metal/ Class A .85 1.6Aluminum Wire Class B 3.3 4.4

Class C 3.8 6.2Class D (<217.) 501.

Aluminum Metal/ Class AGold Wire Class B 31. 35.4

Class CClass D (<3731.) 8617.

Gold Metal/ Class A -Gold Wire Class B (<2825.) 6500.

Class C (<115.) 266.Class D (<115.) 266.

TABLE 4-6. SPECIAL STORAGE ENVIRONMENT DATA*

QUALITY AMBIENT STORAGE NUMBER FAILURE RATE:LEVEL TEMPERATURE FUNCTION fiRS. X 16 FAILED IN FITS

B-A 22 0 C Digital 127Y2.6 97 76.2

B-A 22UC Linear 291.4 21 72.1

*Stored in Nitrogen Atmosphere.

4-6

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A failure rate is 0.85 fits (failures per billion hours). The

Class B devices show a failure rate approximately 3.5 times

the Class A device and Class C devices approximately 4.5 times*'4 the Class A device. The only device quality level having .ui-

cient failures to show a range were the Class B devices. Fordata sets indicating failures, the data ranged from 1.3 to 14.5fits for digital devices and from 2.7 to 8.5 fits for linear

devices.One group of data was separated due to its special storage

environment and is shown in Table 4-6. See the discussion ofdata source H in Section 4.5.

For devices with aluminum metal/gold wire, only Class Bdevice data was sufficient for prediction at 31.0 fits. Thefailure rate for Class B devices ranged from 18.2 to 65.3fits in data sets which indicated failures. These devicesare older devices and may not be representative of currentAl/Au devices. However, data from recent programs on lowcomplexity hybrid devices with Al/Au interfaces at the inter-connections show continued problems with wire bonds. Oneprogram included 10,580 devices (approximately quality Class A)stored in an environmentally controlled nitrogen atmospherefor 1.4 years with 2 wire bond failures. The other was amissile program with 36,138 devices (Class B) stored inthe field for 1.5 years with 19 wire bond failures. Theseprograms show failure rates of 14.8 fits and 40.0 fits

respectively.

Insufficient real time storage data is available on goldmetal, gold wire devices to make a detailed estimate. Poolingall the quality level data results in a failure rate of loss

than 56,0 fits.4.3 Principle Failure Mechanisms

Little detailed data on failure mechanisms was available

for the 132 field failures reported. Those reported included;

4 oxide defects, 5 wire bond defects due to Kirkundall voidingand intermetallics, and 3 cracked dies. Seventy seven failures

were categorized as catastrophic, 15 as contamination and 0ne

as metal corrosion with no further details.

4-7

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in addition, 31 failures were noted as a vendor re-lated problem with interconnection wires contacting the chipperiphery. The data set with these 31 failures was excludedfrom the analysis since they did not represent the generalclass of these devices.

User surveys indicated the following as principlefailure mechanisms: wire bonding, metallization corrosion,intermetallic compound formations, oxide defects, and shortsfrom loose conductive particles in the package.

Failure mechanisms for 28 of the 372 high temperaturestorage life test failures of aluminum metallization/aluminumwire devices were reported. Principle problems were oxidedefects and wire bond failures. Other mechanisms reportedincluded diffusion defects, surface inversion, aluminum-gold post bond failures, die bond failures and lead failures.The percentage of each of these is presented in Table 4-7.

Both the oxide defects and wire bond failures are pri-marily a result of process defects. Strict control of sur-

faces, masks, etc., for cleanliness and control of etch times,bonding times, process temperatures, pressures, etc., prevent Amost of these defects from occurring. However, the screensmust be capable of weeding out those defects which slip pastthe controls. The primary screen or quality conformancetesting used to detect oxide defects include: visual inspec-tion, operating D. C. and temperature, operating A. C. andtemperature, high temperature reverse bias, power cycling,and elevated temperature storage. For aluminum wire bonddefects, the tests include: Temperature Shock/Cycle,operating D. C. and temperature, elevated temperature storaqe,centrifuge, mechanical shock, and bond pull tests. Each of

these screens must be used with care, however, to preventfatigue and degradation of good devices.

Failure mechanisms for aluminum metallization/gold wire

devices are also presented in Table 4-7. In this case, failure

4-8

7 7 7

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mechanisms for 155 of the 243 high temperature storage life

test failures were reported. The wire bond problem accounting

for almost 80% of these failures.The gold wire to aluminum bond suffers from interface

problems between dissimilar metals. The time/temperature ef-

fects of intermetallic compound formation and voiding aroundthe bond as a result of the Kirkendall effect require strictdesign and process control for the device. Studies have indi-cated that these effects are reduced significantly when thegold wire thickness at the heel is greater than six times themetallization thickness. The purity of the gold is also re-ported as an important factor in gold wire-aluminum bonds.

Screening and quality conformance tests used to detectand weed out weak gold-aluminum bonds include: temperatureshock/cycle, elevated storage temperature, operating D. C.and temperature, mechanical shock, centrifuge, and bond pulltests. Temperature shocks and thermal cycling at temperaturesabove 200 0 C have been reported to degrade good bonds.

The field data is insufficient to quantify the ratio offailure mechanism occurrences. However, the user survey andhigh temperature storage life test data indicates that theratio of occurrence is not significantely different than thoseexperienced in the operating environment. No mechanisms pe-culiar to storage have been identified.4.4 Failure Rate Factor Development

The non-operating data was classified where possibleaccording to the device classifications identified in Section3. Data primarily was available on quality level, storage

temperature, complexity, test or storage duration, logictype, die attach method and glassivation. The following

sections describe the data for each of the 217B factors andthese additional factors and correlate it with the device fail.-ure rate.4.4.1 Learning Factor (n

The learning factor, nL' used in MIL-HDBK-217B, adjuststhe failure rate where: 1) a new device is in initial produc-tion; 2) where major changes in design or process have occurredi;

4-9

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and 3) where there has been an extended interruption or achange in line personnel. For each of these situations,the 217B model uses a H factor of 10 for up to 6 months ofproduction. Otherwise the factor is i.

Of the non-operating data collected, either an establishedproduction line was identified or no identification of theproduction stage was given. Therefore, a 11L factor of 1 wasassumed on all data collected.4.4.2 Quality Class

Four quality classes or levels are defined in this data.Classes A, B and C refer to MIL-STD-883 quality levels andClass D is used for the manufacturer's commercial qualitylevel. The classes are described in Section 3.3.

The major differences in Classes A, B and C are in thescreening procedures and quality conformance testing.

Screens required for Class B which are not required forClass C include precap visual, burn-in testsl static tests atminimum and maximum operating temperatures, and dynamic tests.Screens required for Class A which are not required for ClassB include: thermal shock, mechanical shock, reverse biasburn-in (when specified for Class A), and radiographic exam-inations. Also the precap visual, constant accelerationand burn-in tests are more seve..e for Class A than Cless B.

The types of quality conformance testing for the threequality classes are practically identical except that operatinglife tests and steady state reverse bias tests requi.red forClass A devices are not required for Class B and C devices.The primary difference in the quality conformance testingis the number of defectives allowed in each test. The mostdefectives are allowed in Class C while the least defectivesare allowed in Class A.

Class A devices also require a certified production line.While the majority of the data collectod identified do-

vices according to a quality level (A, B, C, or D), some ofthe data included detailed procurement specifications. Com-parison of the specifications to MIL-STD-883 indicated thatthese particular devices were equivalent to Class B devices

4-10

....... .. ...... . .. ......... ..............

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TABLE 4-7. PRINCIPLE FAILURE MECHIANISMS

Aluminum Metallization Altiminum Wire, Gold Pot

Oxide Defects (31%)

Wire Bond (19%)

Diffusion Defects (16%)

Surface Inversion (13%)Al-Au Post Bond (12&)

Die Bond (3%)

Lead Failures (6%)Aluminum Metallization, Gold Wire, Gold Post

Wire Bond (76%)

Resistive Output (16%)

Oxide Defects (4%)

Die Bond (2%)Wire Short (2%)

Cracked Die (1%)

with extra testing. Xn the data analysis, these devices wereincluded as Class B because the extra testing did not bringthem up totally to Class A requirements. Failure experience

on these devices was insifficient to measure the effect ofthe extra testing.

4.4.2.1 Alum~num Metal/Aluminum Wire System Quality Factors

(ni )At ambient temperatures of 25 to 300 centigrade, Class

A devices exhibited a failure rate of 0.00085 failures permillion hours, Class B devices at a rate of 0.0033 failures

per million hours, and Class C devices a rate of 0.0038failures per million hours. Using Class A as the base, theClass A [EQ factor was defined as 1. The Class B n Q factorwas then calculated as approximately 3.5, and the Class C Rfactor as 4.5. Tnsufficient field data was available for

Class D devices, however, comparisons of Class C and D deviceswere made for the 1500C and 300 0 C high temperature storage

tests. These indicated a factor of approximately 2.5 betweenClass C and Class D. Using Class A as base, the Class D IiQfactor equivalent was determined to be approximately 11.25.

4-11

• L:1

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rc

4.4.2.2 Aluminum Metal/Gold Wire System Quality Factors (9Q)

Data on aluminum metal/gold wire failures for each

quality level contained too few failures to make a dirot cal-

culation of all these factors. For the difference betweenClass C and Class D, the high temperature storage tests at

2000C and 200 0 C and 2504C were compared. These indicated a

factor of approximately 30 between Classes C and D. Initial

estimates were made on Class B and Class C 11 factors con-

sistent with that of the all-aluminum system. Setting the

Class A Ht factor equal to 1, the Class B 11 factor equal to

3.5, and the Class C n0 factor equal to 4.5, the Class D 11

factor was calculated to be approximately 135.

4.4.2.3 Gold and Gold Beam Lead System Quality Factors (TI)

Data collected on gold and gold beam lead metallization/

interconnection systems contained only one reported failure.

No attempt was made to estimate quality factors for these de-

vices.4.4.3 Temperature Effects

Analysis of the collected data indicated that the Arrhenius

model commonly used for all semiconductors is appropriate to

use with the storage data. This model is the so called "lawof thermal degradation" which says that the natural log of

the basic failure rate is a function of the negative recipro-cal of the absolute junction temperature. The form of the

temperature effect used in MIL-HDBK-217B is:

TILfQClInT

where: nL is the learning factor,

fl1 is the quality factor.C1 is the complexity factor.

1 =0.1 exp [-a( 1 - 1 )]

T '+ T7 3a is a constant depending on the device type.T is the junction temperature iii degrees centigrade.

4-12

.......

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The failure rate model of MIL-HDBK-217B assum.4 theeffects of temperature and application environment are addi-

tive and independent, An analysis of the model indicatesthat at 250C the application environment (mechanical stress)effects are the dominant element of the failure rate and thetemperature effect gradually becomes the dominant elementat temperatures of 750 C and higher depending on the device.

The storage data analyzed contained data at 25-300C in

the field and high temperature storage life data from 125 0Cto 3500C. Based on the 217B model analysis, the data points

Sat 25-300C were omitted in the nT calculation. Followingcalculation of the Arrhenius model factors, it was verifiedthat the failure rates at 25-306C were higher than thoseprojected from the Arrhenius fit to the high temperature data.This indicated that the field failures are a function of thetemperature plus the mechanical stresses experienced in theapplication environment.4.4.3.1 Aluminum Metal/Aluminum Wire System Temperature

Factor

Figure 4-1 presents the Arrhenius model fit to the high

temperature storage life test data for devices with aluminummetal/aluminum wire systems. All of the high temperaturestorage data was normalized to Class A via the fii factors andused to calculate the model. Calculating the coefficient ofcorrelation between the Class C data points and the Arrheniusfit gave a coefficient of 0.98. For the Class D data points,a coefficient of correlation of 0.53 was calculated. The hightemperature data on Class A and B devices was insufficient todetermine a correlation to the Arrhenius model.

The temperature factor, A for devices with aluminum

metal/aluminur, wire systems is defined as follows for thisreport:

4-13

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T Q* P ex C-6608 1with a complexity factor, Ci, of 0.0011s,5

Figure 4-1 presents the Arrhenius model for Class C &Class D based on the n T and the nQ factors calculated in

Section 4.4.2.4.4.3.2 Aluminum Metal/Gold Wire System Temperature Factor

(T)

Figure 4-2 presents the Arrhenius model fit to the high

temperature storage life test data for devices with aluminum

metal/gold wire systems. In this case, more Class D data

was available than Class C. Normalizing the Class D data to

Class C based on the quality factor, , an Arrhenius fit was

made to both Class C and Class D data. The coefficient of

correlation for the Class C data points to the Arrhenius fit

was calculated as 0.81 and for the Class D data points as

0.96. High temperature data on Class A and Class B deVices

was insufficient to determine a correlation to the Arrheniusmodel.

The temperature factor, RT , for devices with aluminummetal/gold wire systems is defined as follows for this report:

m l go 0.1 exp [-10502( 1 "1T T+273 - 7 )

with a complexity factor, C1 , of 0.000034Figure 4-2 presents the Arrhenius model for Class

C and Class D based on the RQ factors calculated in Section4.4.2.

4. 4.3.3 Gold and Gold Beam Lead Systems Temperature Factors(RT)

The data collected on gold and gold beam lead systems doesnot have enough failure experience to estimate a temperature

factor.

4-14

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4.4.4 Application Environment Factor (gE)

The non-operating data collected was primarily fixedgroun4 storage with little detail on the effects of trans-portation, handling, etc. One set of data identified thetransportation environments but no failures were =eported inthat data set.

An application environment factor, aE' of I was used inthe data analysis, consistent with the MIL-HDBK-217B ground,fixed environment factor.4.4.5 Temperature Complexity Factor (C)

The MIL-HDBK-217B model defines complexity factors in anoperational environment for both temperature accelerated

failures and environment accelerated failures. These factorsindicated a failure rate of 2 to 6 times for a high complexitydevice (up to 100 gates) versus a low complexity device. Thefactors depend on the device type, environment and temperature.

A like correlation was investigated in the non-operatingdata, The data was segregated into three complexity levelswithl level 1 representing devices with up to 5 gates/20 tran-sistors (SSI); level 2 from 6 to 11 gates/21 to 44 transistors(SSI); and level 3 from 12 to 20 gates/45 to 80 transistors

with a few data points at 25 and 60 gates (MSI).4.4.5.1 Aluminum Metal/Aluminum Wire System Complexity

CorrelationFigure 4-3 presents a plot of the data points of three

device complexity levels with an,aluminum metal/aluminum wiresystem. These data points represent Class C devices and theline plotted in Figure 4-3 is the Arrhenius fit for the ClassC data. As indicated in the figure, the level 3 data points

tend to show a lower failure rate rather than the expectedhigher failure rate. The data used for this plot is pre-sented in Table 4-8.

Calculating a coefficient of correlation between the

data points and the Arrhenius model gave coefficients of 0.97for level 1; 0.99 for level 2 and 0.76 for level 3 devices.From this analysis, the complexity factor, C1 , is determinedto be constant and equal to 0.00135 as calculated in Section

4.4.3.1. 4-17

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4.4.5.2 Aluminum Metal/Gold Wire System Complexity Corre(1tio:nFigure 4-4 presents a plot of the data points of threeu

device complexity levels with an aluminum metal/gold wiresystem. These data points represent Class C devices and the

line plotted in Figure 4-4 is the Arrhenius fit for theClass C data.

In the figure, the data points at 150*C and 250*C in-dicate a possible correlation between failure rate and com-plexity. However, this data is insufficient to make any posi-tive correlation. A comparison of Class D data was also radewhich also indicated a possible correlation. The calculatedfailure rates for various device classes and temperaturesyielded factors of 1.8 to 3.5 between complexity level I andlevel 3 devices. The data used for this comparison is pre-sented in Table 4-9.

For this report, it was detevined to use a constantcomplexity factor for C1 which was calculated as 0.000034Section 4.4.3.2,4.4.6 Time Dependency

The storage or non-operating models analyzed assume aconstant failure rate over the device storage period and thepredicted reliability distribution is exponential. Usinathe high temperature storage life test data, this assumptionwas investigated. Figures 4-5 and 4-6 present plots of non-operating failure rates calculated for different test dura-Lions for aluminum metal/aluminum wire and aluminum metal/gold wire systems respectively. Tables 4-10 and 4-11 list

the data used for these plots. The high temperature storagedata included durations of 1000 hours to 2-1/3 years. Nosignificant trend is apparent from the data to indicate thatthe failure rate is not constant.4.4,.7 Logic Type and Function Correlation

The data collected was primarily on three logic types:Transistor-Transistor Logic (TTL), Diode-Transistor Logic(DTL) and Resistor-Transistor Logic (RTL). An investigationof the high temperature storage life test data was made to

4-19

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TABLE 4-11. ALUMINUM METAL/GOLD WIRE

TEST DURATION FAILURE DATA (CLASS C)

FAILURE

TEST STORAGE HOURS NU14BER RATETEMPERATURE DURATIONC ) X 10 6' P ?LED M 'ITS

150 0 C 1000 17.626 54 3064.1500 .816 1 1225.2000 .286 1 3496.

175 0 C 3000 .282 0 C3546.)200 0 C 4000 .188 2 10638.

4500 .57 7 12281.

2506C 1000 .095 6 63158.'5000 .22 7 31818.

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determine if the logic type or function had any effect on the

failure rate. Figures 4-7 and 4-8 present plots of non-operating

failure rates calculated for different logic types and functions

for aluminum metal/aluminum wire and aluminum metal/gold wire

systems respectively. Tables 4-12 and 4-13 list the data used

for these plots.For aluminum metal/aluminum wire systems, the DTL devices

tended to have a lower failure rate than the RTL, TTL and linear

devices. However, the with the scatter, no definite correlation

was made.For the aluminum metal/gold wire systems, no discernable

difference was apparent between TTL, DTL and linear devices.

4.4.8 Package Type CorrelationIn report MCR-72-169, "Long-Life Assurance Study for

Manned Spacecraft Long-Life Hardware" dated December 1972,

the TO-type can and the flat pack were the only packages

recommended for high reliability, long life use. The dual-in-line package was not recommended due to 1) excess strain

in the glass seal area from the heavy lead materiel, 2) exces

torque on the seal during insertion or flexing of the circuitboard and 3) thermal conduction through the leads since the

body is not in contact with the surface.The non-operating data was investigated to determine

if any difference in reliability could be determined for thevarious package types. Figures 4-9 and 4-10 present plots

of non-operating failure rates calcvlated for differentpackage types for aluminum metal/aluminum wire and aluminum

metal/gold wire systems recpectively. Tables 4-14 and 4-15

list the data used for these plots.The abbreviations in the figures and tables are definad

as: CAN (TO type metal can); CDIP (Ceramic Dual in-line);

EDIP (Epoxy dual in-line); CMDIP (Ceramic metal dual in-line);

PDIP (phenolic dual in-line); SDIP (silicone dual in-line);

FPCM (flat pack ceramic); FPM (Flat pack metal); and FPG

(flat pack glass).

4-24

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The plots indicate no significant difference in thefailure rates for the various package types. Both plotsindicate a higher failure rate for dual-in-line packages at1500C, however, this point in Figure 4-9 is based on only52,000 hours with one failure and in Figure 4-10 on only326,000 hours with 2 failures. Class D data on package

types is also included in Tables 4-13 and 4-14 since moredata is available on these type packages. The most data ondual in-line packages is Class D at 1500C and 3006C for theall-aluminum system and Class D at 1500C for the aluminum/gold system. In one case# the dual in-line failure rate ishigher than the flat pack or can, in another case lower andin the third case less than the can but higher than theflat pack. With this scatter# no difference in the failurerate of dual in-line packages can be determined.

Data on phenolic and epoxy dual in-line packages are alsopresented in Tables 4-13 and 4-14. This limited data onplastic packages seems to be in the same ball park as thehermetic packages except for, the data for Class D all-aluminum system at 1500C. Here the phenolic dual in-linepackage shows a higher failure rate, although the sample of3 failures is small. At the same temperature, the epoxydual in-line package shows no failures after one millionhours.

From this investigation, no significant difference canbe identified at this time in the failure rates for varioustype packages.

4-25

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4.4.9 Die Attach Method

The data analyzed covered three die attach methods; o.•ut~cct.c

alloy, glass frit, and epoxy mounts. However, over 99 percent of

the data was on eutectic alloy mounts.

Only 53,000 hours of data was available on epoxy mounts andno suitable statistics could be calculated,

For glass frit mounts some data was availablo for devices

with all-aluminum systems. For Class D devices at 150 0 C, 6.11

million hours of non-operating time with 4 failures showed a

slightly lower failure rate than the eutectic alloy mounts at thý,ttemperature. Also for Class D devices at 300 0 C, 0.17 million houl• iw

of non-operating time with 4 failures again showed a lower fai!i.)

rate than the eutectic alloy mounts. Table 4-16 presents thiis kat .

for Class C and D devices.More non-operating time on epoxy and glass frit mounts will

be required to determine if the material or the process affects

the device storage reliability.

4.4.10 GlassivationSixtean percent of the data analyzed indicated that the

devices were protected with a glassivation layer. Most of the datawas available for Class D devices of the all-aluminum system andis presented in Table 4-1:. This data shows glassivated devices

with a slightly higher failure rate at 1500 and 1750C than non-

glassivated devices and a significantly lower failure rate at 300*C.Data for Class D devices with aluminum metal/gold wire systems

at 150*C shows glassivated devices with a higher failure rate bya factor of 4 over non-glassivated dtvices.

As a result of this scatter, no glassivation effect on otorugitj

reliability can be determined at this time.

4-31

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TABLE 4-16. ALUMINUM METAL/ALUMINUM WIRE DIE ATTACH DATA

QUALITY STORAGE 6 NUMBER FAILURE RATECLASS TEMP DIE ATTACH HOURS X 10 FAILED IN PITS

C 1500C ALLOY 74.259 29 391.EPOXY ,044 0 (<22700.)

D 150 0 C ALLOY 51.907 50 963.GLASS 6.114 4 654.

300eC ALLOY .749 48 64073.GLASS .17 4 23500.

TABLE 4-17. ALUMINUM METAL/ALUMINUM WIRE GLASSWVATION DATA

STORAGE 6 NUMBER FAILURE RATE

TEMP GLASSIVATION HOURS X 10" FAILED IN FITS100"C YES .01 0 (<100000.)

1250C YES 2.953 5 1693.1500C YE6 14.186 30 2115.

NO 41.514 24 578.

1750C YES 1.203 7 5820.NO .44 2 4545.

180 0 C YES .205 0 (,4878.)

2000C YES .253 0 (03952.)NO 6.218 3 482.

300 0 C YES .687 16 23300.NO .233 36 155000.

3500C NO .041 29 711000,

43

4-32

.1 . • .L . _ _ . . ,5

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4.4.11 Application Environment Complexity Factor (C2 )

The model assumption that the temperature effect andapplication environment effect are additive allows a direct

calculation of the application environment complexity factor,

C2. The failure rate is defined as:

x 10 -6

L [!,f 0 Tl CI +H Q ~E 2

For Class A all-aluminum system, the failure rate at

250 to 300C was calculated as .00085 per million hours. Sub-stituting the values for H , l# and n. gives afactor of approximately 0.00074. The following comparison oYthe model results with the other quality class data was madeas shown in Table 4-18.

For the aluminum aetallizatioal/gold wire syst, thesame calculations were performed using the data collectedfor quality Class B giving an application environment com-plexity factor, C2 , of 0.10872. This yielded the results inTable 4-19.

The resulting models for the two metallization Systems

are depicted in Figures 4-11 add 4-12.

4-3

4-33

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TABLE 4-18. ALUMINUM METALLIZATION/ALUMINUM WIREFAILURE RATE MODEL RESULTS

(Failures per billion hours)

QUALITY PREDICTION DIGITAL LINEAR COMBINEDLEVEL MODEL DATA DATA DATA

Class A .875 .85 - .85

Class B 3.06 2.79 4.46 3.30Class C 3.94 3.8 - 3.8

Class D 9.84 (4217.) - (<217.)

TABLE 4-19. ALUMINUM METALLIZATION/GOLD WIREFAILURE RATE MODEL RESULTS

(Failures per billion hours)

QUALITY PREDICTION DIGITAL LINEAR COMBINEDLEVEL MODEL DATA DATA 4DATA

Class A 8.7 - - -

Class B 30.5 30.0 53.0 31.0

Class C 39.3 -..

Class D 1177.7 (<3731.) - (C3731.1

4-34

..... .......

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r]w H

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ZOi-I

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4.5 Source Data DiscussionWhere identified, the real time data collected represented

up to eight years storage durations. Tables 4-20 through 4-29give the data by source and details are presented below.

4.5.1 Source A Data

The data under Source A includes over 9.5 billion storage

hourd for digital devices and 770 million storage hours forlirtear devices representing numerous missile and space prograia5.Twenty one failure were reported including lifted ball bondsdue to intermetallics and Kirkendall voiding, metal corrosion,cracked dies, oxide defects and contamination. The data repre-sents Class A, B, and C quality level devices. No details worQavailable on storage environments or durations.

4.5.2 Source B Data

The storage data under Source B actually represents standbydata in an orbiting satellite environment. No failures wereindicated in 30 million hours. The devices were classified asapproximately Class A devices since it was a space application.4.5.3 Source D Data

The storage data under Source D represents lot samples placedin storage for three to four years. These devices have beentested approximately every 6 months and critical parameters havebeen recorded. The storage has been in an environmentally con-trolled facility. Evaluation of parameter changes indicated nosignificant trends. Out of 350 digital devices and 210 lineardevices, no failures have been reported.

4.5.4 Source G DataThe storage data under Source G includes field data from

four missile programs and one laboratory environment test. Thedate of the data sources range from 1967 thcu 1970 and represent6the only identifiable data on monolithic digital devices with

aluminum metallization and gold wires (Al/Au) and on devices with

gold metallization and gold wires (Au/Au).

4-37

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Out of 2.7 billion part storage hours, 83 failures were

reported for the Al/Au devices. No failure modes or mechanismswere provided other than the fact that the failures werecatastrophic and not drift related. Moro recent data isavailable on Al/Au hybrid devices showing the same relatively

high failure rate with wire bonds being the major problem

(see Section 2.3).Out of 290 million part storage hours, two failures

were reported for AI/Al devices but no failure details wereavailable.

No failures were reported in 18 million part storagehours for the Au/AI% devices.

Storage durations for AI/Al devices indicated 2.4 years,and for Au/Au devices, 4 years. No storage durations wereavailable on the Al/Au Ievices.

4.5.5 Source H Data

The storage data under Source H represents a specialparts procurement and storage program. Parts are procured

to the highest specification available from the vendor. Theprocuring agency then performs quality sampling on each lotincluding construction analysis and puts the device throughan extensive rescreening approximating MIL-STD-883 Class Arequirements. Under this procedure, 47,340 device3 havebeen rejected and sent back to vendors out of 324,319 parts

procured or an average of 14.E% rejects.The devices passing the screens are placed in airtight

storage tanks under controlled temperature and humidity con-ditions. The interior atmosphere of, the tank contains nitro-gen.

Samples from each lot are stored separately under iden-tical conditions as control groups. The control groups aretested approximately three times a year. Parameter trends

are evaluated from these tests. The main portion of each lotis not tested until required for program use or if control

4-38

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group parameters are drifting significantly. At this time,no significant drifts have been indicated.

Currently 118,467 monolithic digital & linear bipolardevices have been stored and tested. Ages of these devices rangefrom one month to 8 years with an average of 1.5 years. 118failures have been reported in these devices, however no failureanalysis is available. One group of devices was removed from thUanalysis.

The data group removed was not considered representativeof the general part class since all failures in the deviceswere related to a specific vendor's process. The group con-sisted of 12,774 devices stored for an average time of 1.3

years. Thirty one devices were reported failed after thestorage period. Failure mechanisms were identical for alldevices. The clearance of the interconnect wire to thechip was insufficient. After storage the wire contacted thechip periphery and shorted the device.4.5.6 Source I Data

The storage data under Source I represents a specialtest program in 1974-75 to evaluate dormancy and cycling

effects on microcircuits.One thousand IC's were tested for 18 months with the

following test profile:Group Profile

1 160 units, 2 days off, I hour on2 160 units, 4 days -ff, 1 hour on3 160 units, 7 days off, I hour on4 160 units, 9 days off, 1 hour on5 160 units, 12 days off, 1 hour on

6 200 units, control group, continuously operatingNo &aiiures were recorded in the SS/1.I/4 TTL devicem

tested.

4-39

... .. .-.

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4.5.7 Source J DataThe storage data under Source J represents field data

from two warhead programs. Devices were procured under cap-tive line provisions and are approximately equivalent toMIL-STD-883 Class A specifications. Of the 504 million partstorage hours, no failures were reported. Storage durationsranged up to two years.

4.5.8 Source K DataThe storage data under Source K represents SSI RTL

devices stored in an environmentally controlled area foreight years (1967 thru 1975). Three failures were recordedin the 10,027 devices all of which were analyzed as resultingfrom defects in the oxide. 4

Parameter analysis was performed on 2573 of these devicesand compared with those measurements in 1967 to attempt toidentify any trends over long term storage. The analysisconcluded; "Parameter drift trends proved negligible inthe resistance and transistor leakage characteristics.Transistor gain was the only parameter that exhibited a sig-nificant loss of performance during the eight years of storage,This is the one parameter that may have to be controlled toobtain a 10-2d year shelf life on these RTL devices."

Of the parts which showed degradation, the most signifi-cant performance losses were in those devices whoso originalperformance was more than one standard deviation below the1967 mean. The loss of performance was significant enoughto class 24 parts as "incipient failures." There are partswhose performance has degraded near specification limits and

could fall out of spec within the next few years of storage.The shelf-life drift observed was attributed to one

or a combination of following mechanisms:1) Changes in the gold doping process, which is used

to control the "parasitic transistor" condition, as well asto increase part switching speed.

4-40

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2) Growth of a "parasitic transistor" condition due tomigration of contaminants, or to changes in gold dopinV proces.

4.5.9 Missile H DataMissile H data represents field data from a recent army

missile program fielded in the 1970's. The major item in whichthe devices were assembled was subjected to operating times athigh and low temperatures, shock and vibration. The missileswere transported overseas and stored for various lengths oftime. No tests were run until the missiles were removed fromstorage and returned to the states. Storage durations variedfrom 6 months to 6 years with an average time of 1.8 years.Storage environments included cannister time in a controlledenvironment, cannister time subjoct to outside elements andmassile time on pallets and on launchers. A number of sampleswere also run through road tests under field conditions.

Four failures have been reported in 1.9 billion partstorage hours. No analysis of the failures is available.

The devices include SSI and MSI TTL & SSI Linear devicesand were procured to better than MXL-STD-883 Class C specifica-tions. The user performed 'sample construction analysis on thedevices and screened the parts to better than MIL-STD-883 ClassB specifications.4.5.10 Missile I Data

Missile I data consists of 2,070 missiles stored forperiods from 1 month to 40 months for an average storage periodof 14 months. Approximately 80 percent of the missiles were

storedin the U. S. depots while the remainder were stored atvarious bases around the country.

Eight failures have been reported in 1.6 billion partstorage hours. No analysis of the failures is available. Thedevices include SSI and MSI TTL and SSI linear devices whichwere procured to MIL-STD-883 Class B specifications.

4-41

...

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TABLE 4-20. SOURCE A DATA (FIELD & TEST)

FUNCTION PART FAILUREOR LOGIC COM- QUALITY METAL/ NUMBER HOURS NUMBER RATE

TYPE PLEXITY LEVEL WIRE DEVICES X 106 FAILED IN FITS

DIG. - A - - 5328.2 5 0.9DIG. - B - - 2269.7 5 2.2DIG. - C - - 1952.9 8 4.1

LIN. - A - - 535.5 1 1.87LIN. - B - - 235.5 2 8.49

TABLE 4-21. SOURCE B FIELD DATA

FUNCTION PART FAILUREOR LOGIC COM- QUALITY METAL/ NUMBER HOURS NUMBER RATE

TYPE PLEXITY LEVEL WIRE DEVICES X 106 FAILED IN FITS

DIG. A - 7903 30.2 0 (,33.1)

TABLE 4-22. SOURCE D SPECIAL TEST DATA

FUNCTION PART FAILUREOR LOGIC COM- QUALITY METAL/ NUMBER HOURS NUMBER RATE

TYPE PLEXITY LEVEL WIRE DEVICES X 106 FAILED IN FITS

TTL SSI B Al/Al 30 .8 0 (<1250.)TTL SSI B Al/Al 20 .7 0 (<1429.)TTL SSI B Al/Al 30 .7 0 (<1429.)TTL SSI B Al/Al 10 .3 0 (43333.)TTL SSI B Al/Al 10 .3 0 (<3333.)TTL SSI B Al/Al 10 .3 0 (<3333.)TTL SSI n Al/Al 10 .3 0 (<3333.)TTL SSI B Al/Al 5 .1 0 (410000.)TTL SSI B Al/Al 5 .1 0 (410000.)TTL SSI B AI/Al 5 .1 0 (.10000.)TTL SSI B Al/Al 30 .8 0 (<1250.)TTL SSI B Al/Al 20 .5 0 (<2000.)TTL SSI B Al/Al 20 .5 0 (ý2000.)TTL SSI B Al/Al 5 .1 0 (<10000.)TTL MSt B Al/Al 5 .1 0 (<10000.)TTL SSI B Al/Al 10 .2 0 (<50004)TTL SSI B Al/Al 10 .2 0 (,5000.)TTL SSI B Al/Al 5 .1 0 (<10000.)TTL SSI B Al/Al 5 .1 0 (<10000.)TTL SSI B Al/Al 30 .8 0 (<1250.)

•TTL SSI B Al/Al 20 .5 0 (<2000.)TTL SSI B AI/Al 20 .5 0 (<2000.)TTL ,SI B Al/Al 5 .1 0 (<10000.)TTL NSI B Al/Al 5 .1 0 (<10000.)TTL SSI B Al/Al 10 .2 0 (;5000.)TTL SSI B A1/Al 10 .2 0 (<5000.)TTL SSI B Al/Al 5 .1 0 (<10000.)OP AMP SSI B AI/Al 40 1.2 0 (<837.)OP AMP SSi B Al/Al i10 3.7 0 (-26b.)OP AMP SSI B Al/Al 10 .4 0 (<2890.)OP AMP SSI B Al/Al 10 .2 0 (<4484.)OP AMP SSI B Al/Al 40 .9 0 (<1157.)

4-42

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TABLE 4-23. SOURCE G FIELD DATA

FUNCTION PART 2AILURZOR LOGIC CObI- QUALITY METAL/ NUMBER HOURS NUMBER RATE

TYPE PLEXITY LEVEL WIRE DEVICES X 106 FAILED XN FITS

TTL MSI B AI/Au - 3.6 0 C<277.)DTL SSI B Al/Au - 1240. 49 39.5DTL SSI B Al/Au - 119. 5 42.0TTL SSI D Al/Au - .3 0 (43333.)CML SSI B Al/Au - 16.2 0 (<62.)RTL SSI B Al/Au - 15.3 1 65.3RTL SSI * B Al/Au - 1210. 22 18.2DTL MSI B Al/Al - 138. 2 14.5DTL SSI C Al/Al - 150. 0 (<6.6)RTL SSI D Al/Al 216 4.6 0 (<217.)RCTL SSI B Au/Au - .4 0 (<2500.)RCTL SSI C AU/AU 55 1.9 0 (<518.)RCTL SSI C Au/Au 23 .8 0 (<1244.)TCTL SSI C Au/Au 10 .4 0 (<286.)RCTL SSI C Au/Au 41 1o4 0 (<64.)RCTL SSI C Au/Au 53 1.9 0 (<538.)RCTL SSI C Au/Au 3 .1 0 (<9524.)RCTL MSI C AU/AU 63 2.2 0 (<455.)RCTL SSI D Au/Au 55 1.9 0 ("518.)RCTL SS1 D Au/Au 23 .8 0 (<1244.)RCTL SSI D Au/Au 41 1.4 0 (<699.)RCTL SSI D Au/Au 53 1.9 0 (<540.)RCTL SSI D Au/Au 10 .4 0 (12857.)RCTL SS.L D Au/Au 3 .1 0 (<9524.)RCTL MSI -D Au/Au 63 2.2 0 (<455.)AMP FAMILY - B Al/Au - 114. 6 52.6

*14 4

4-4

i~

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TABLE 4-24. SOURCE H SPECIAL TEST DATA

FUNCTION PART FAILUREOR LOGIC COM- QUALITY METAL/ NUMBER HOURS NUMBER RATE

TYPE PLEXITY LEVEL WIRE DEVICES X 106 FAILED IN FITS

DTL SSI B-A* Al/Al 517 5.9 0 (<169.5)DTL SSI B-A* Al/Al 22548 346.4 4 11.5DTL SSI B-A* Al/Al 17643 252.9 0 (<3.95)DTL SSI B-A* Al/Al 11852 170.1 25 147.0DTL SSI B-A* Al/Al 3015 29.7 4** 134.7DTL SSI B-A* Al/Al 2603 41.0 2** 48.8DTL SS1 B-A* Al/Al 963 14.4 2** 13.9DTL SSI B-A* Al/Al 1597 16.7 1** 59.9DTL SSI B-A* Al/Al 4596 44.4 22** 495.5DTL MSZ B-A* Al/Al 175 1.0 0 (41000.)DTL MSI B-A* Al/Al 313 1.0 0 (<4000.)DTL MSI B-A* Al/Al 413 4.5 2 444.4DTL MSI B-A* Al/Al 138 1.9 0 (<526.3)DTL MSI B-A* Al/Au 63 0.2 30 150000.RTI, SSI B-A* Al/Al 846 12.8 0 (78.1) .RTL SSI B-A* Al/Al 4454 52.3 0 (<19.1)RTL SS1 B-A* Al/Al 1215 22.5 0 (<44.4)RTL SSI B-A* Al/Al 982 12.4 0 (,80.6)RTL SSI B-A* Al/Al 5172 90.1 0 (<1.i)TTL SSI B-A* Al/Al 4086 41.1 0 (<24.3)TTL SS1 B-A* Al/Al 3835 42.7 0 (<23.4)TTL SSI B-A* Al/Al 329 4.7 0 (<212.8)TTL SSI B-A* AI/Al 714 7.0 2 285.7TTL SSI B-A* AI/Al 1998 12.6 0 (79.4)TTL SSI B-A* Al/Al 2277 16.0 1 62.5TTL SSI B-A* Al/Al 560 3.6 0 C(277.8)TTL SSI B-A* Al/Al 1572 9.5 1 105.3TTL SSI B-A* Al/Al 39 .1 0 (410000.)TTL SSI B-A* Al/Al 373 2.7 0 (<370.4)TTL SSI B-A* Al/Al 416 3.3 0 (<303.0)TTL SSI B-A* Al/Al 522 3.9 0 (-256.4)TTL SSI B-A* Al/Al 133 .6 0 (<1666.7)TTL SSI B-A* Al/Al 374 2.3 0 (<434.8)TTL MSI B-A* Al/Al 457 1.3 2 1538.5TTL MSI B-A* Al/Al 56 .4 0 (<2500.)TTL-PROM MSI B-A* Al/Al 37 .6 30 50000.DC AMP SSI B-A* Al/Al 2666 57.2 0 (<17.5)OP AMP SSI B-A* Al/Al 4948 80.3 9 1.12.1DUAL COMP SSI B-A* Al/Al 7521 88.9 1 11.2LIN. SSI B-A* Al/Al 1371 22.0 1 45.5DC AMP SSI B-A* Al/Al 1285 9.0 0 (<111.1)VOLT REG SSI B-A* Al/Al 439 6.8 0 (<147.1)VOLT COMP SSI B-A* Al/Al 611 5.7 0 (<175.4)OP AMP SSI B-A* Al/Al 543 4.6 0 (<217.4)LIN. SSI B-A* Al/Al 314 2.9 1 344.8OP AMP SSI B-A* Al/Al 90 2.8 3 (<1071.4)VOLT COMP SSI B-A* Al/Al 159 4.4 0 (;227.3)OP AMP SSI B-A* At/Al 321 1.7 0 (<588.2)LIN. SSI B-A* Al/Al 1316 5.1 6 1176.5*Special Testing - See Text

**Vendor Peculiar Problem - See Text4-44

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TABLE 4-25. SOURCE I SPECIAL TEST DATA*

PART FAILURELOGIC COM- QUALITY METAL/ NUMBER HOUR@ NUMBER RATETYPE PLEXITY LEVEL WIRE DEVICES X 10 FAILED IN PITS

TTL SSI B Al/Al 200 2.6 0 (<385.)TTL MSI B Al/Al 200 2.6 0 (<385.)TTL MSI B Al/Al 200 2.6 0 (<385.)TTL SSI B Al/Al 200 2.6 0 (<385.)*Cycled.

TABLE 4-46. SOURCE J FIELD DATA

PART FAILURELOGIC COM- QUALITY METAL/ NUMBER HOUR§ NUMBER RATETYPE PLEXITY LEVEL WIRE DEVICES X 10 FAILED IN FITS

DIG. - A Al/Al 7700 31. 0 (032.3)DIG. - A Al/Al - 472. 0 ((2.1)

TABLE 4-27. SOURCE K SPECIAL TEST DATA

PART FAILURELOGIC COM- QUALITY METAL/ NUMBER HOURI NUMBER RATETYPE PLEXITY LEVEL WIRE DEVICES X 10 FAILED IN eITS

RTL SSI B Al/Al 1250 87.6 0 (<11,4)RTL SSI B Al/Al 2382 166.9 1 6.0RTL SSI B Al/Al 1002 70.2 0 (414.2)RTL SSI B Al/Al 949 66.5 2 30.1RTL SSI B Al/Al 1002 70.2 0 (<14.2)RTL SSI B Al/Al 450 31.5 0 (<31.7)RTL SSI B Al/Al 2992 209.7 0 (<4.8)

4-45

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TABLE 4 -28.MISSILE H FIELD DATAFUNCTION

OR PART FAILURELOGIC COM- QUALITY METAL/ NUMBER HOUR• NUMBER RATETYPE PLEXITY LEVEL WIRE DEVICES X 10 FAILED IN FITS

TTL SSI B Al/Al 5355 85.1 0 (<11.8)TTL SSI B Al/Al 7497 119.1 1 8.4TTL MSI B Al/Al 19278 306.3 0 (<3.3)TTL SSI B Al/Al 1071 17.0 0 (<58.8)TTL SSI B Al/Al 7497 119.1 0 (<8.4)TTL SSI B Al/Al 8568 136.1 0 (<7.3)

OP AMP SSI B Al/Al 37485 597.6 1 1.67DC AMP SSI B Al/Al 14994 239.0 1 4.18DC AMP SSI B Al/Al 18207 290.3 1 3.44

TABLE 4-29. MISSILE I FIELD DATA

FUNCTIONOR PART FAILURE

LOGIC COM- QUALITY METAL/ NUMBER HOURS NUMBER RATETYPE PLEXITY LEVEL WIRE DEVICES X 106 FAILED IN PITS

TTL SSI B Al/Al 16560 164.7 1 6.1TTL MSI B Al/Al 4140 41.2 0 (024.3)TTL MSI B Al/Al 26910 267.7 1 3.7TTL SSI B Al/Al 16560 164.7 0 (<6.1)TTL SSI B Al/Al 10350 103.0 0 (<9.7)

OP AMP SSI B Al/Al 51750 514.8 2 3.9OP AMP SS B Al/Al 2070 20.6 1 48.5OP AMP SSI B Al/Al 8280 82.4 2 23.7DUAL COMP SSI B Al/Al 26910 267.7 1 3.7

4-46

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SECTION 5

STORAGE FAILURE RATE PREDICTION MODEL

The prediction models presented here apply only tomonolithic bipolar digital and linear integrated circuits with

complexity ranges of small scale integration and medium scaleintegration (up to 100 gates). Failure rates prediction ofmultilayer interconnect devices is not included. Secondaryfailures caused by abusive voltage conditions or errors inmaintenance and trouble shooting, procedures are also not in-

cluded.

The model is similar to that presented in MXL-HDBK-217Sfor operational failure rate predictions. Xt assumes that

the predominant failures result from two primary use 'factors:time/temperature phenomena and mechanical stress phenomena(handling, vibration, temperature cycling, etc.). The modeltherefore is defined as follows:

s t mwhere

A- the device storage failure rateA" the device storage failure rate due to the

time/temperature phenomenaA - the device storage failure rate due to mechanical

stress phenomena

The time temperature phenomena results in failure mechan-isms such as: surface inversion, degradation of bonds between

dissimilar metals, corrosion, Kirkendall diffusion, degrada-tion of feed throughs, dielectric degradation at flaws, ohmic

contact degradation and junction bridging by diffused aluminum.

The mechanical stress phenomena results in failuremechanisms such as: open bonds, shorted bond wires, crackedchips, metal opens at oxide steps, degradation or bridging ofdielectric, die bond separation, lead wire fatigue fracture,

seal failure and gross package damage.

5-1

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Both phenomena are affected by the procurement technique

which defines the quality level of the device. Also the

maturity of the device design and process affects the failure

rate.The prediction model is therefore broken in to these

factors:

s C[nL T C + iLt i H C2 x 10 6

or -r RL (Q[T C + E C2 x 10

where:

U is the learning factor9 is the quality level factor

RT is the temperature factor

RE is the application environment factorC1 and C2 are base failure rates for the time/temperature

phenomena and the mechanical stress phenomena respectively

The factors for monolithic bipolar SSI/MSI digital de-vices with aluminum metallization/aluminum wire systems are

defined in Table 5-1 and for devices with aluminum metalliza-

tion/ gold wire systems in Table 5-2.The values for the learning factor, nL' and application

environment factor, nEl are used as defined in MIL-HDBK-217B.The values for the temperature factor, n To are based on

an Arrhenius model. Por devices with aluminum mmtallý.zation,aluminum wire systems, the temperature factor is defined as:

iT = 0.1 exp 1- 6608 ( T - )

where T is the ambient temperature, in degrees centigrade.For devices with aluminum metallization gold wire systems, the

temperature factor is defined as:T 0.31 exp [-10502( 1 - 11

5-2

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The tI factors represent MIL-STD-883 quality claisuz andwere measured for the all-aluminum devices but are esti,ý,iated

for the gold/aluminum devices.Models for devices with all gold metallization/inter-

connection systems and beam lead sealed junction systemsare not given at this time due to lack of data.

5-3

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SECTION 6

OPERATIONAL FAILURE RATE ANALYSIS

Two reliability data banks and a reliability predictionmodel were reviewed for operational failure rate predictions.The prediction model in MIL-HDBK-217B was considered anacceptable source for predicting operational failure rates forstandard monolithic, bipolar, digital & linear devices. Forsome non-standard devices, such as beam lead sealed junctiondevices, more specific prediction methods may be required.Access to the Reliability Analysis Center and GIDEP data bankscan provide specific data on similar non-standard devices forreliability prediction.

6.1 MIL-HDBK 217B Digital IC Model

The prediction model in MIL-HDBK-217B, dated 20 September1974, for monolithic bipolar digital SSI/MSI devices is pre-

sented in Figure 6-1.The temperature factor, H T' is defined as follows:

n 0.1 exp [ -4794T27

where T% is the Junction temperatureIf the junction temperature is unknown, the following approxima-

mation is used:TJ = ambient T + 100C, if the number of transistors is less

than or equal to 120T - ambient T + 25OC, if the number of transistors is

greater than 120The complexity factors, C1 and C2 , are defined as follows:

C1 - 1.29 (10)- 3 (N ) 0.677

C2 = 3.89 (10) 3 (NG0.359

where NG - number of gates (assume 4 transistors/gate)

6-1

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44

CV N. ol pW)k)

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These complexity factors apply to devices in packagescontaining up to 22 pins. For larger packages the CI, C2

values are multiplied by:

No. of Pins Multiplier

24 to 40 1.1

42 to 64 1.2

264 1.3

This model applies to all monolithic bipolar digitaldevices except bipolar beam lead and bipolar ECL. For these

devices, a different temperature factor, RT, is used and is.

defined as follows:

n 0.1 exp t -8121 (C

where Tj is the junction temperature

Typical temperature factor, nT' values for these devices

are presented in Table 6-1.

In the 217B model, the learning factor estimates the

effect of now production lines with the typical experiencerelationship in which unit cost decreases and reliability

increases with larger production runs.The quality factor estimates the effect of process con-

trol, screening, and quality conformance testing on the

device reliability.The junction temperature factor reflects one of the

principle degrading factors for semiconductor devices. Thefailure rate to temperature relationship is the Arrheniusmodel which says that tha natural log of the basic failurerate is a function of the negative reciporcal of the absolute

junction temperature.

6-3

--- -'- ,.---. . .

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Table 6-1.

TEMPERATURE FACTOR VALULS FOR

BIPOLAR BEAM LEAD AND BIPOLAR ECL DIGITAL DEVICES

25 .10

35 .24

45 .56

55 1.20

65 2.50

75 5.0085 9.60

95 18.00

105 32.00

115 56.00

125 94.00

135 155.00

145 250,00

155 390.00

165 610.00

175 920.00

The application environment factor estimates primarily

the mechanical stress effects on the device failure rates.

These stresses include vibration, shock, acceleration, andtemperature cycling.

The complexity factors both for temperature and appli-cation environment represent a number of reliability factors.These include the device strength as a function of package

size; thc number of interconnections; the density of activeelements on the chip and resulting metallization runs; and

the thermal conduction capability from the chip to external

heat sinks.

6-4

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6.2 MJI,-ILfLIK-217B1 Linear IC Model

The prediction model in MIL-HDBK-217B, dated 20 September

1974, for monolithic bipolar linear SSI/MSI devices is presented

in Figure 6-2.

The temperature factor, AT' is defined as follows:

- 0.1 exp (-8121 ( - )

whore T is the junction temperature

If the junction temperature is unkn,.i, the followingapproximation is used:

T3 - ambient T + 100C, if the number of transistors isless than or equal to 120

T- ambient T + 25 0C, if the number of transistors isgreater than 120

The complexity factors, C1 and C2 , are defined as follows:

C1 - 00056 (NT) 0.763

C2 - .0026 (NT 0.547T

where N - number of transistors

This model applies to all monolithic bipolar lineardevices.

In the 2171 model, the learning factor estimates the effectof now production lines with the typical experience relationshipin which unit cost and reliability decrease with larger produc-

tion runs.The quality factor estimates the effect of process control,

screening, and quality conformance testing on the device reliability.The junction temperature factor reflects one of the principle

degrading factors for semiconductor devices. The failure rate totomporature relationship is the Arrhonius model which says thatthe natural log of the basic failure rate is a function of thenegative reciprocal of the absolute Junction temperature.

6-5

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The application environment factor estimates primarily tnki

mechanical stress effects on the device failure rates. Thesestresses include vibration, shock, acceleration, and temperaturocycling.

The complexity factors both for temperature and applicationenvironment represent a number of reliability factors. Theseinclude the device strength as a function of package size; thenumber of interconnections; the density of active elements on thechip and resulting metallization runs; and the thermal conductioncapability from the chip to external heat sinks.

6.3 Reliability Analysis Center Failure Rate Data BankThe largest published reliability data bank for microcircuit

reliability is maintained by the Reliability Analysis Center (RAC)at Rome Air Development Center. A comparison between data in theRAC data bank and the MIL-HDBK-217B model for bipolar digitaldevices was made in MDR-l "Digital Generic Data," 1975. A similarcomparison was made for linear devices in MDR-6 "Linear/InterfaceData," 1977. This comparison indicated a close correlation be-tween the RAC data and the MIL-HDBK-217B predictions. A samplepage from the RAC publication is presented in Figure 6-3. Theuser requiring an operational failure rate prediction can relatethe device and usage with similar devices in the publication.The relationship can include device screen class, operationaltype, function, application environment, and design and processfactors.6.4 GIDEP Failure Rate Data Bank

The Government-Industry Data Exchange Program (GIDEP)reliability data bank maintained by the Department of the Navy,Fleet Missile Systems Analysis and Evaluation Group, for allservices, contains another large source of operational data forbipolar digital microcircuits. A sample page from the GIDEPSummaries of Failure Rate Publication is presented in Figure 6-4.

6-7

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6.5 Operational/Non-Operational Failure Rate ComparisonA comparison of the failure rates for non-operational and

operational environments was made using the non-operatingmodel developed here and the MIL-HDBK-217B operational model.The comparison is presented in Figures 6-5 and 6-6. Failure ratesfor several operating conditions were predicted to present arange for comparison. The non-operating prediction was made ata nominal ambient temperature of 25 degrees centigrade.

Comparing the digital devices with aluminum metallizationand aluminum wire gave an operating to non-operating ratio of6 and 8 for Class A, small scale integration (SSX), digitaldevices at two operating junction temperatures; 350C and 759C;for Class B the ratios were 3 and 5; for Class C devices, 22and 29; and for Class D, 82 and 108.

For medium scale integration (MSI), the ratios for Class Awere 15 and 24; Class B, 8 and 14; Class C, 51 and 84; andClass D, 193 and 317.

Comparing the linear devices with aluminum metallizationand aluminum wire gave an operating to non-operating ratio of10 and 25 for Class A, small scale integration (SSI), lineardevices at two operation junction temperatures: 350C and 75°C;for Class B the ratios were 6 and 14; for Class C devices,36 and 88; and for Class D, 133 and 329.

For medium scale integration (MSI), the ratios for Class Awere 37 and 125; Class;B, 21 and 71; Class C, 133 and 443; and

Class D, 501 and 1662.Failure rates for digital devices with aluminum metalliza-

tion and gold wire were also compared. Since MIL-HDBK-217B usesone prediction model for both metallization systems, theoperating failure rates are the same. For the non-operatingfailure rate, the aluminum metallization, gold wire systemsexhibitud a significantly higher failure rate, therefore the

ratios are considerably different - so different that in some

cases, the non-operating failure rate is higher than the

6-10

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operating failure rate. The ratios for Class A, SSI Digital

devices at the two junction temperatures are 0.6 and 0.8;for Class B, 0.4 and 0.51 for C, 2.2 and 2.9 and for Class D,

0.7 and 0.9.For MSI devices, the ratios for Class A were 1.5 and 2.4;

Class B, .8 and 1.4; Class C, 5.2 and 8.5; and Class D, 1.6

and 2.6.Failure rates for linear devices with aluminum metalliia-

tion and gold wire were also compared. For the non-operatingfailure rate, the aluminum metallization, gold wire systemsexhibited a significantly higher failure rate, therefore the

ratios are considerably different - so different that in somecases, the non-operating failure rate is higher than theoperating failure rate. The ratios for Class A, SSX lineardevices at the two junction temperatures are 1.0 and 2.5; forClass B, 0.6 and 1.4; for Class C, 3.6 and 8.8 and for Class D,

1.1 and 2.8.For MSI devices, the ratios for Class A were 3.8 and 12.5;

Class B, 2.2 and 7.1; Class C, 13.4 and 44.4; and Class D, 4.2and 13.9.

Since most missile materiel are in the Class B or Class Aquality range, average operating to non-operating factors canbe defined as presented in Table 6-2.

6-11

•!. ........ .. .. •... .... ... :.• ....-I l

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6-13

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TABLE 6-2.

AVERAGE OPERATING TO NON-OPERATING FAILURE RATE

RATIO ALUMINUM METALLIZATION/

ALUMINUM WIRE

COMPLEXITY AVERAGE OPERATING TO NON-LEVEL OPERATING FAILURE RATE RATIO

--- Digital--- --- Linear---

SSI 5 14

MSI 14 71

ALUMINUM METALLIZATION/GOLD WIRE

COMPLEXITY AVERAGE OPERATING TO NON-LEVEL OPERATING FAILURE RATE RATIO

--- Digital--- --- Linear---

SSI .5 1.4

MSI 1.4 7.1

The quality factors in the non-operating prediction model

for a device with aluminum metal/gold wire systems were esti-mated from the aluminum metal/aluminum wire system.

6-14

?.. I.L.....

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SECTION 7

CONCLUSIONS AND RECOMMENDATIONS

The models developed can be used for predicting failurerates for monolithic bipolar SSI/MSI digital and linear inte-grated circuits.

The analysis indicates that a single metal should be usedfor the contact metallization and interconnection interface.The all-aluminum system shows a definitely more reliable storagecapability than the aluminum metallization/gold wire system. Dataon the Beam Lead Sealed Junction device with gold beams is notavailable on the linear devices.

In both user surveys and high temperature storage tests,

wire bond failures were prominent.For the aluminum metallization/aluminum wire systems, the

principle problems were wire bonds and oxide defects or contamina-tion.

Screens or tests reconmended for wire bonds include centri-fuge, temperature shock/cycling, power cycling, mechanical shockand bond pull tests. Due to the low mass of aluminum wires, thetemperature shock/cycle, power cycle, and bond pull tests wouldbe most effective.

Screens or tests recommended to weed out oxide defects include:Operating AC and DC with temperature; high temperature reverse

bias; power cycling; elevated temperature storage; and visualinspection.

In the MIL-STD-883 screen, temperature cycling is requiredfor Class A, B and C devices while temperature shock is only re-quired for Class A devices. Burn-in and final electrical testsat maximum and minimum operating temperatures are required forClass A and B devices. Reverse bias burn-in is only required forClass A MOS and linear devices when specified. Visual inspectionis required for Class A and B devices.

7-1

Al2

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In quality conformance testing, bond pull tests, thermalshock, temperature cycling and high temperature storage arerequired for all quality classes.

Depending on whether Class A, B or C devices are specifiedin the procurement, it may be desirable to specify more screensand/or quality conformance tests which are related to wire bondand oxide reliability.

Field data has been collected for assemblies and missilesystems indicating test equipment faults, mishandling, over vol-tage conditions during check out, etc. These result in assemblyreturns to depots or contractor repair facilities although nodevice failure or only secondary device failures are involved.This data will be analyzed in later reports; however, a prelimi-nary evaluation indicates that the periodic checkout or cyclingeffects reliability primarily due to system test equipment andmaintenance related problems rather than problems with the devices.

The evaluation assumes that the system design protects thedevices from voltage surges or spikes inherent in the system andthat the devices are derated to nominal values of 60 to 80% ofoutput current and 60 to 75% of operating frequency.

7-2

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BIBLIOGRAPHY

RADC-TR-70-232, Reliability Characterization and Predictionof Integrated Circuits, the Boeing Company, D. C. Porterand W. A. Finke, dated November 1970, AD 878235

TM-72-1, Microcircuit Wire Bond Reliability, ReliabilityAnalysis Center, T. R. Meyers, dated July 1972, AD 746315

MCR-72-169, Long Life Assurance Study for Manned SpacecraftLong-Life Hardware, Martin Marietta, R. W. Burrows,dated September 1972

RADC-TR-67-l08, Vol. I1, RADC Reliability Notebook, HughesAircraft Co., Clifford M. Ryerson, et al, dated September1967

RADC-TR-65-330, Reliability Physics Notebook, dated October 1965

RADC-TR-73-248, Dormancy and Power On-Off Cycling Effects onElectronic Equipment and Part Reliability, MartinMarietta, a. A. Bauer, et al, dated August 1973

GIDEP Summaries of Fatlure Rate Data, dated January 1974(Supplement dated September 1975)

MDR-1, RAC Microcircuit Device Reliability, Digital Genericlailure Rates, Dated,Summer,1975

MDR-6, RAC Microcircuit Device Reliability, Linear/InterfaceData, dated,Autumn, 1977

RADC-TR-69-350, Failure Rate for Complex Bipolar Microcircuits,AFSC, Peter F. Manno, dated October 1969, AD 861045

RADC-TR-72-55, Reliability Problems with S102 Passivation andGlassivation, RADC, Clyde H. Lane, dated March 1972,AD 741765

MIL-M-38510A, General Specifications for Microcircuits,dated 3 July 1972

MIL-STD-883, Test Methods and Procedures for Microelectronics,dated 3 July, 1972

N71-19422, Beam Lead Technology, GTE Labs, T. W. Fitzgerald,et al, dated 15 March 1971

RADC-TR-71-294, Microcircuit Bond Screening Study, Raytheon,John Gaffrey and Bennie Bonomi, dated December 1971,AD 892498

99900-6735-PO-00, Appraisal of Microelectronic IntegratedCircuit Performance, TRW, G. A. Van Hoorde, datedOctober 1968.

"V, .. ......i .. ....... ..... .. .. . .. ' " .• ''' " -:

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BR-7811, The Environmental Conditions Experienced by rocketsand Missiles in Storage, Transit, and Operations, Raytheon,James M. Durben and Edward T. Smith, dated December 1973.

EPIC-IR-81, Materiels and Interface Factors Limiting LSIPerformance and Reliability, Hughes Aircraft, ThomasC. Hall, et al, dated August 1972

Metallurgical Failure Modes of Wire Bonds, George G. Harmon,National Bureau of Standards, 12th Annual ProceedingsIEEE Reliability Physics Symposium, 1974

ML-HDBK-217B, Reliability Prediction, dated 20 September 1974

Aging Effects in Gold Thermocompression Bonds to ComplexMetallizations, J. H. Anderson, Jr., et al, IEEE Trans-actions on Reliability, Vol. R-19, No. 1, February 1970

Elements of Semiconductor-Device Reliability, C. GordonPeattre, et al, Proceedings of the IEEE, Vol. 62, No. 2,February 1974

Reliability Assurance of Individual Semiconductor Components,Raymond F. Haythornthwaite, et al, Proceedings of theIEEE, Vol. 62, No. 2, February 1974

Failure Analysis of Oxide Defects, G. H. Ebel and H. A.Engelke, llth Annual Proceedings IEEE Reliability PhysicsSymposium, 1973

Metallization and Bonds - A Review of Failure Mechanisms, G.L. Schnable and R. S. Keen# Sixth Annual ReliabilityPhysics Symposium Proceedings, 1967

Raytheon Memo No. DATA:77:059, from A..D. Luna, Subject:Dormant Failure Rate Update No. 9, dated 23 March1977

Telecon Report, Mr. Bill Johnson, General Electric, S'ibject:Site Defense System Study, dated 6 March 1975

Sandia Letter from Mr. J. A. Hood, Subject: SemiconductorReliability Assessment, dated 23 September 1974

UCLA - ENG. 7359, Interface Phenomena in Integrated CircuitOxides, C. R. Viswanathan, University of California,Los Angeles, July 1973

Taclrtical Note 1972-20, Procurement of Reliable SemiconductorDevices for Military Space Applications, Alan G. Stanley,Massachusetts Institute of Technology, 3 April 1972

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The Storage of Microelectronic Integratcd CircuitM, Wuaon1

Quality Engineering Center, Naval Weapons Support Center,Crane, Indiana, July 1977

Report No. DD14-23, Reliabili*y Factors for Electronic Compo-nents in a Storage EnvironmentB. R. Livosay, E. J. Scheibnor,Georgia Institute of Technology, Sept. 1977 Itre

Report LC-76-IC1, Monolithic Bipolar SSX/MS1 Digital Integrated

Circuit Analysis, D. Malik, Raytheon Co., May 1976

Report LC-76"-IC2, Monolithic Bipolar SSI/MSI Linear IntegrtetdCircuit Analysis, D. Malik, Raytheon Co., May 1976

N1

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.~.AW~3ract (cOntJinuL'd)

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