Design and Analysis of a Tri-Axis Gyroscope Micromachined by
Surface Fabrication
BIOFLUID ACTIVATED MICROBATTERY FOR DISPOSABLE MICROSYSTEMSECE
8620 ADVANCE MEMS
OutlineMotivationIntroductionBackgroundApplicationsDesign
Principle of OperationFabricationResultsConclusion
MotivationIntegrated circuit (IC) designers stress on ultra-low
power systems that can be turned on using only a fraction of a
volt.Ultra-low Power DevicesCapable of gathering, analyzing, and
transmitting data.This fueled the search for new disposable
system.Battery manufacturers are still not delivering disposable
and biocompatible power sources at micro scale.
IntroductionMicro batteryIn recent decades, electronics have
gotten small. The thinking parts of computers have gotten small.
And the battery has lagged far behind.At an average power
consumption of 100 mW, you need slightly more than 1 cm3 of lithium
battery volume for 1 year of operation, assuming you can use 100%
of the charge in the battery.
BackgroundSammoura et al. fabricated a water-activated
microbattery for BioMEMS chips by using a one mask MEMS process
with 1.44 cm2 electrode area .The first on-demand paper battery
activated by urine was previously demonstrated by Lee with 18 cm2
total area.Another example of an on-demand and biocompatible
battery was proposed by Jimbo and Miki in which the gastric fluid
in the stomach was used as the activation electrolyte.The first 3-D
rechargeable Lithium-ion thin-film microbattery was developed in
2005 by Nathan et al. BatteryConvert the chemical energy stored in
its active components into electric energyThere are three major
components in a cell: anode or negative electrode, cathode or
positive electrode, and electrolyte.The electrolyte is responsible
for providing the conductive medium for the ionic charge transfer
between positive and negative electrode.
ApplicationsLab-on-a-chip applicationsFood sensorsElectronic
RFID tagging devicesMedical Implants
ApplicationsLab-on-a-chip applicationsFood sensorsElectronic
RFID tagging devicesMedical Implants
ApplicationsLab-on-a-chip applicationsFood sensorsElectronic
RFID tagging devicesMedical Implants
ApplicationsLab-on-a-chip applicationsFood sensorsElectronic
RFID tagging devicesMedical Implants
Design
Principle of OperationMicrobattery can be activated with a range
of different biofluids, such as blood, urine, saliva, water, milk,
and any other aqueous solution containing the hydroxide ion
Principle of OperationThe self-discharge due to the parasitic
corrosion of the electrodes when the electrolyte is present is
eliminated using liquid electrolyte.Large scale batteries based on
aluminum-silver oxide have found use as power sources in military
underwater applications due to their high energy density and
prolonged storage periods.Al was chosen as the anode due to its
electrochemical properties, easy of fabrication and potential use
as a biocompatible material.Fabrication
Fabrication
Fabrication
Fabrication
Fabrication
Fabrication
Fabrication
Fabrication
Results
XEDS spectrum and SEM micrographs. A) Al anode. B) AgO
cathode.
ResultsMicrobattery experimental efficiency. A) Voltage output
for different loads for battery S75. B) Experimental efficiency as
a function of current density
ResultsVoltage output for microbatteries activated using
different electrolytes. A) Battery activated using urine. B) Saliva
C) Blood
ResultsFig Performance comparison
ConclusionDesigned, fabricated, and tested seven microbatteries
having different footprint areas.The smallest microbattery measured
2.6 mm in length, 4.86 mm in width, and 8 m in thickness.
Microbatteries can be activated with a wide range of physiological
fluids, such as blood, urine, and saliva for on-demand
operation.Microbatteries achieved a maximum output voltage of 1.75
V, capacity of 7.17 Ah, load current of 0.55 mA, and a maximum
efficiency of 46%.Future ScopeFor integrating our microbattery with
CMOS integrated circuits in order to develop microsystems for
biomedical application.
BiomedicalApplicationTHANK YOU
