BS EN ISO 14644-3

BS EN ISO BS EN ISO 14644-314644-3Cleanrooms & associated controlled Cleanrooms & associated controlled

environments-environments-Part 3:Part 3:Metrology and test methods Metrology and test methods

DISDIS

Current StatusCurrent Status1. DIS was issued by ISO in September 021. DIS was issued by ISO in September 022.2.UK comments to BSI to be made by end UK comments to BSI to be made by end

December 02December 023. LBI/30 will consider all UK comments by 3. LBI/30 will consider all UK comments by

end January 03 end January 03 4.4.BSI vote to CEN/ISO by end February 03BSI vote to CEN/ISO by end February 035. DIS is valid and can be referred to and used 5. DIS is valid and can be referred to and used

until it is superseded.until it is superseded.6. Likely time when revised DIS will be 6. Likely time when revised DIS will be

available - mid 2004available - mid 2004

BS EN ISO 14644-3BS EN ISO 14644-3Metrology & Test MethodsMetrology & Test Methods

14644-1:199914644-1:1999 Classification of air cleanlinessClassification of air cleanliness14644-2:200014644-2:2000 Specifications for testing and Specifications for testing and

monitoring to prove continued compliance monitoring to prove continued compliance with -1with -1

14644-3:DIS14644-3:DIS Metrology and test methodsMetrology and test methods14644-4:200114644-4:2001 Design, construction & start-upDesign, construction & start-up14644-5:FDIS14644-5:FDIS OperationsOperations14644-6:CD14644-6:CD Vocabulary/terminologyVocabulary/terminology14644-7:FDIS14644-7:FDIS Separative devicesSeparative devices14644-8:CD14644-8:CD Classification of Airborne Molecular Classification of Airborne Molecular

ContaminationContamination


Current Status of BS 5295Current Status of BS 5295BS 5295 Part 0: General Introduction BS 5295 Part 0: General Introduction - -

CurrentCurrentBS 5295 Part 1: ClassificationBS 5295 Part 1: Classification - -

WithdrawnWithdrawnBS 5295 Part 2: DesignBS 5295 Part 2: Design - -

WithdrawnWithdrawnBS 5295 Part 3: OperationBS 5295 Part 3: Operation - Current- CurrentBS 5295 Part 4: ComplianceBS 5295 Part 4: Compliance - -

WithdrawnWithdrawn


Current Status of BS 5295Current Status of BS 5295BS 5295 Part 0: General Introduction BS 5295 Part 0: General Introduction - Current- CurrentBS 5295 Part 1: ClassificationBS 5295 Part 1: Classification - 14644-1/3- 14644-1/3BS 5295 Part 2: DesignBS 5295 Part 2: Design - 14644-4- 14644-4BS 5295 Part 3: OperationBS 5295 Part 3: Operation - Current- CurrentBS 5295 Part 4: ComplianceBS 5295 Part 4: Compliance - 14644-2- 14644-2

Some of BS5295 Part 1 is not addressed currently Some of BS5295 Part 1 is not addressed currently and PD6609:2000 is being revised to ‘bridge and PD6609:2000 is being revised to ‘bridge the gap’.the gap’.

Part 3:Operation will be covered by 14644-5:FDIS Part 3:Operation will be covered by 14644-5:FDIS


This part of BS EN ISO 14644 may be used for the This part of BS EN ISO 14644 may be used for the characterisation of a cleanroom as described and characterisation of a cleanroom as described and specified in other parts of BS EN ISO 14644.specified in other parts of BS EN ISO 14644.

Not all cleanroom parameter test procedures are Not all cleanroom parameter test procedures are shown.shown.

Other standards may be considered to be applicableOther standards may be considered to be applicableThe annexes to this document are ‘informative’. Ie The annexes to this document are ‘informative’. Ie

they are not compulsory, but form a they are not compulsory, but form a ‘recommendation’ for compliance with the ‘recommendation’ for compliance with the standard.standard.

Consequently, throughout the document references Consequently, throughout the document references are made to ‘or as agreed between customer and are made to ‘or as agreed between customer and supplier’supplier’


SUMMARY OF ESSENTIAL CONTENTS:SUMMARY OF ESSENTIAL CONTENTS:1. Scope1. Scope - ISO standard text and also states - ISO standard text and also states

that alternative methods can be used based on that alternative methods can be used based on agreement between customer and supplier.agreement between customer and supplier.

2. Normative2. Normative - Reference to standards- Reference to standardsReferenceReference

3. Terms and3. Terms and - Helps understanding, and- Helps understanding, andDefinitionsDefinitions allows document to exist alone allows document to exist alone

4. Testing4. Testing - Recommended tests with procedures - Recommended tests with procedures

ProceduresProcedures and apparatus and apparatus5. Test Report5. Test Report - Reporting & documentation- Reporting & documentation


Item 4 forms the crux of this section of the Item 4 forms the crux of this section of the standard.standard.

Recommended tests are listed in table 1. Each Recommended tests are listed in table 1. Each test has a procedure in Annex B and a test has a procedure in Annex B and a corresponding set of apparatus in Annex C. corresponding set of apparatus in Annex C. The section of the standard referencing the The section of the standard referencing the test is also given.test is also given.

Selecting and scheduling of these tests is Selecting and scheduling of these tests is discussed in Annex A.discussed in Annex A.


ANNEX A (Informative) Choice of recommended tests of an installation and ANNEX A (Informative) Choice of recommended tests of an installation and the sequence in which to carry them outthe sequence in which to carry them out

A1 A1 Recommended test proceduresRecommended test proceduresChoice of testsChoice of testsTable A1: Test checklist for installation propertiesTable A1: Test checklist for installation propertiesTable A2: Test checklist for sequencingTable A2: Test checklist for sequencing

The checklists are useful in that they can be taken from the The checklists are useful in that they can be taken from the standard and used as a tool.standard and used as a tool.

BS EN ISO 14644-3BS EN ISO 14644-3Metrology & Test Methods Metrology & Test Methods

Annex AAnnex A

Choose which tests are Choose which tests are requiredrequired

Put them in a logical order for Put them in a logical order for your applicationyour application

Where not applicable put N/AWhere not applicable put N/A Review the schedule of testsReview the schedule of tests


Annex AAnnex ATest Selection & Sequence Test Selection & Sequence

ChecklistChecklist

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB1B1 Airborne Particle Count (for classification)Airborne Particle Count (for classification)B2B2 Ultrafine Particle Count (for characterisation)Ultrafine Particle Count (for characterisation)B3B3 Macro Particle Count (for characterisation)Macro Particle Count (for characterisation)B4B4 Airflow TestAirflow TestB5B5 Pressure Difference TestPressure Difference TestB6B6 Installed Filter Leakage TestInstalled Filter Leakage TestB7B7 Flow VisualisationFlow VisualisationB8B8 Airflow Direction TestAirflow Direction TestB9B9 Temperature TestTemperature TestB10B10 Humidity TestHumidity TestB11B11 Electrostatic & Ion Generator TestElectrostatic & Ion Generator TestB12B12 Particle Deposition TestParticle Deposition TestB13B13 Recovery TestRecovery TestB14B14 Containment Leak TestContainment Leak Test


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test Methods

Each section comprises items on:Each section comprises items on:

Principle - what and whyPrinciple - what and why

Recommended test procedure - howRecommended test procedure - how

Recommended apparatus - with whatRecommended apparatus - with what

Test report - detailed resultsTest report - detailed results


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB1B1 Airborne Particle Count (for classification)Airborne Particle Count (for classification)

Airborne test for size distributions with thresholds Airborne test for size distributions with thresholds between 0.1 and 5 microns to certify or verify between 0.1 and 5 microns to certify or verify cleanliness classificationcleanliness classification


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB2B2 Ultrafine Particle Count (for Ultrafine Particle Count (for

characterisation)characterisation)

Airborne test for particles with size distribution Airborne test for particles with size distribution thresholds less than 0.1 micron for thresholds less than 0.1 micron for characterisation of the cleanroomcharacterisation of the cleanroom


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB3B3 Macro Particle Count (for characterisation)Macro Particle Count (for characterisation)

Airborne tests for particles with size distribution Airborne tests for particles with size distribution thresholds greater than 5 microns for thresholds greater than 5 microns for characterisation of the cleanroomcharacterisation of the cleanroom


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB4B4 Airflow TestAirflow Test

Tests to evaluate airflow velocity, uniformity of Tests to evaluate airflow velocity, uniformity of airflow velocity and supply air volume depending airflow velocity and supply air volume depending on classification.on classification.

Airflow velocity and uniformity tests are described Airflow velocity and uniformity tests are described for use principally in unidirectional systems.for use principally in unidirectional systems.

Air volume tests are described for unidirectional, Air volume tests are described for unidirectional, non unidirectional or supply air duct systems.non unidirectional or supply air duct systems.

NB Political correctness avoids terms such as NB Political correctness avoids terms such as laminar and turbulent flow systemslaminar and turbulent flow systems


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB5B5 Air Pressure Difference TestAir Pressure Difference Test

Verification of capability of installation to maintain Verification of capability of installation to maintain the specified PD between it and it’s the specified PD between it and it’s surroundings.surroundings.


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB6B6 Installed Filter Leakage TestInstalled Filter Leakage Test

Particle Counter and Photometer tests are both Particle Counter and Photometer tests are both describeddescribed

Photometer method for ISO 5 and less (ie typically Photometer method for ISO 5 and less (ie typically non-unidirectional), and for MPPS Filters with non-unidirectional), and for MPPS Filters with penetrations > 0.005% (H14 and lower to BS EN penetrations > 0.005% (H14 and lower to BS EN 1822) Acceptance criteria is 0.01% for all grades.1822) Acceptance criteria is 0.01% for all grades.

DPC method more sensitive unidirectional systems. DPC method more sensitive unidirectional systems. Evaluation of scan rate and allowable particle Evaluation of scan rate and allowable particle counts is based on BS EN 1822 part 4 and DIN counts is based on BS EN 1822 part 4 and DIN 24184.24184.


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB6B6 Installed Filter Leakage TestInstalled Filter Leakage Test

Note error on B6.3.5 formula for scan rateNote error on B6.3.5 formula for scan rate

Sr <= Cc.Ps.K.Dp.Fs/Np is equivalent toSr <= Cc.Ps.K.Dp.Fs/Np is equivalent toSr = 472 Cc.Ps.K.Dp/Np Sr = 472 Cc.Ps.K.Dp/Np Units should be (cm/s)Units should be (cm/s)


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB7B7 Flow VisualisationFlow Visualisation

Tests to demonstrate airflow characteristics in the Tests to demonstrate airflow characteristics in the installation.installation.

Techniques described are by thread, tracer Techniques described are by thread, tracer injection or image processing (CFD)injection or image processing (CFD)


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB8B8 Airflow Direction TestAirflow Direction Test

Tests to demonstrate airflow directional Tests to demonstrate airflow directional characteristics in the installation.characteristics in the installation.

Techniques described are by thread, tracer Techniques described are by thread, tracer injection or image processing (CFD)injection or image processing (CFD)


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB9B9 Temperature TestTemperature Test

Tests to demonstrate temperature characteristics Tests to demonstrate temperature characteristics in the installation.in the installation.

Techniques described are for general or more Techniques described are for general or more exacting measurement requirements.exacting measurement requirements.


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB10B10 Humidity TestHumidity Test

Tests to demonstrate the humidity characteristics Tests to demonstrate the humidity characteristics of the installation using measurements of dew of the installation using measurements of dew point or relative humiditypoint or relative humidity

Humidity tests should be performed in conjunction Humidity tests should be performed in conjunction with the temperature test.with the temperature test.


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB11B11 Electrostatic & Ion Generator TestElectrostatic & Ion Generator Test

Tests to evaluate the level of electrostatic charge Tests to evaluate the level of electrostatic charge and dissipation rate in the installation.and dissipation rate in the installation.

Techniques for the measurement of surface Techniques for the measurement of surface voltage and resistance as well as ioniser voltage and resistance as well as ioniser performance are suggestedperformance are suggested


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB12B12 Particle Deposition TestParticle Deposition Test

Tests to evaluate the level of particulates that can Tests to evaluate the level of particulates that can be deposited on work or surfaces in the be deposited on work or surfaces in the installation.installation.

Techniques using witness plates or a fall out Techniques using witness plates or a fall out photometer are suggested.photometer are suggested.


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB13B13 Recovery TestRecovery Test

Test to evaluate the capability of the clean air Test to evaluate the capability of the clean air system to recover from a particle generating system to recover from a particle generating event principally in non-unidirectional event principally in non-unidirectional applications.applications.


Annex BAnnex B

ANNEX B (Informative) - Test MethodsANNEX B (Informative) - Test MethodsB14B14 Containment Leak TestContainment Leak Test

Test to evaluate the intrusion of contaminated air Test to evaluate the intrusion of contaminated air from surrounding areas using DPC or Photometer from surrounding areas using DPC or Photometer methods.methods.


Annex BAnnex B

Annex C (Informative) - Test InstrumentsAnnex C (Informative) - Test Instruments

Describes test apparatus that should be used for the Describes test apparatus that should be used for the corresponding recommended tests in Annex B. There is a corresponding recommended tests in Annex B. There is a recommendation that apparatus should be subject to recommendation that apparatus should be subject to agreement between the customer and the supplier.agreement between the customer and the supplier.

The information provided is not limiting, it represents a sensible The information provided is not limiting, it represents a sensible minimum requirement. Ie Equipment that becomes available minimum requirement. Ie Equipment that becomes available through improvements in measurement technology are not through improvements in measurement technology are not restricted by this Annex. restricted by this Annex.

Equally alternate equipment may be suitable and may be used Equally alternate equipment may be suitable and may be used subject to agreement.subject to agreement.

BS EN ISO 14644-3Metrology & Test Methods

Annex C

Annex C (Informative) - Test Instruments - exampleAnnex C (Informative) - Test Instruments - exampleC1.C1. Discrete Particle Counter (DPC).Discrete Particle Counter (DPC).C2.C2. Condensation Nucleus Counter (CNC).Condensation Nucleus Counter (CNC).C3.C3. Microscope, Cascade Impactor, DPC, Time of Flight.Microscope, Cascade Impactor, DPC, Time of Flight.C4.C4. Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood.Anemometers - Thermal, Ultrasonic, Vane, Pitot, Hood.C5.C5. Manometers - Electronic, Inclined, Mechanical.Manometers - Electronic, Inclined, Mechanical.C6.C6. Photometer, DPC, Aerosol Generator, Photometer, DPC, Aerosol Generator, C7.C7. Anemometers, Tracers, Aerosol generator.Anemometers, Tracers, Aerosol generator.C8.C8. Anemometers, Tracers, Aerosol generator.Anemometers, Tracers, Aerosol generator.C9.C9. Liquid in Glass thermometer, Electronic thermometer.Liquid in Glass thermometer, Electronic thermometer.C10.C10. Humidity meters; Capacitive, Hair.Humidity meters; Capacitive, Hair.C11.C11. Voltmeter, Ohmmeter, Charged plate monitor.Voltmeter, Ohmmeter, Charged plate monitor.C12.C12. Microscope, Fall-out Meter.Microscope, Fall-out Meter.C13.C13. Discrete Particle Counter (DPC). Discrete Particle Counter (DPC). C14.C14. Discrete Particle Counter (DPC), Photometer, Aerosol Discrete Particle Counter (DPC), Photometer, Aerosol

Generator.Generator.

BS EN ISO 14644-3Metrology & Test Methods

Annex C

UK public comments on this section to BSI UK public comments on this section to BSI need to be made in written form and in an need to be made in written form and in an approved format by end December 02 approved format by end December 02 otherwise they will not be considered.otherwise they will not be considered.


This presentation has been preparedThis presentation has been preparedand delivered by:-and delivered by:-Wander ter KuileWander ter KuileMcLeod Russel UK LtdMcLeod Russel UK Ltdc/o Vokes Ltdc/o Vokes LtdHenley ParkHenley ParkGuildfordGuildfordSurrey, GU3 2AFSurrey, GU3 2AFUKUK

tel 01483 207236tel 01483 207236fax 01483 235384fax 01483 235384e-mail [email protected] [email protected]

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BS EN ISO 14644-3