DGL XY Series - akribis-sys.de · DGL XY Part Numbering DGL XY Akribis systems V-75 / V-76 Note: that granite mass is approx. 240Kg. Module Configuration Effective Stroke Moving Mass

Akrib

is systems

V-69 / V-70

DGL XY SeriesXY dual linear guide cantilever stage

SpecificationsDGL XY

Dimension Drawing

Module Configuration

(mm) (Kg) (Kg) (mm) (mm)

AUM3-S2

AUM3-S3

AUM3-S4

AUM4-S2

AUM4-S3

AUM4-S4

Hard Stopper Position

DGL180 Top 200 - 300 Ref to Table 2 Ref to Table 3 Stroke + 4

Stroke + 4

Stroke + 20

Stroke + 20

Sensor PositionModel Axis

Effectiv Stroke Total Moving Mass Total MassMotor

DGL200 Bottom 200 - 600 A B

A = Table 2(Bottom axis) + Table 3 + 6.12 (Interface mass, Kg)

B = A + Table 4Direct drive,

zero cogging, zero backlash

linear motor

High accelerations and speeds

Smooth motion at low speeds

(low velocity ripple)

Precise homing through encoder

index pulse

Stages & System

s


Part NumberingDGL XY

Akrib

is systems

V-71 / V-72

Axis Moving Mass

Total mass for Bottom axis

Performance Parameter

Carriage size S2 S3 S4

Top Axis (Kg) 2 2.5 2.7

Bottom Axis (Kg) 2.4 3.1 3.4

Total mass for Top axis

Stroke/Top axis Mass (Kg) 200 300

Motor Coil size S2 17.04 20.44



Stroke/Bottom axis Mass (Kg) 200 300 400 500 600

Motor Coil size S2 16.4 19.8 22.3 25.7 29.1

Motor Coil size S3 18.9 22.3 24.9 28.3 31.7

Motor Coil size S4 20.1 22.6 26.1 29.5 32

Specification Parameter Unit

Repeatability (1µm resolution)

Repeatability (0.5µm resolution)


Repeatability (Analogue)

X-Y Orthogonality Arc-sec

DGL180

±3µm/25mm

NTE±10µm/300mm

±3µm/25mm

NTE±10µm/300mm

±3µm (40µm scale pitch)

±1.5µm (20µm scale pitch)

±1µm(20µm scale pitch)

±5 counts

10

µm

DGL200




±5 counts

10

±3µm/25mm, NTE±10µ

m/300mm

±3µm/25mm, NTE±10µ

m/300mm

Straightness1

Flatness1

Motor ModelDGL180

module XY stack

Motor ModelDGL200

Bottom Axis Stroke300

Bottom Axis Motor ModelB1=AUM4-S-S2-J-H9D-V4B2=AUM4-S-S3-J-H9D-V4B3=AUM4-S-S4-J-H9D-V4

Motor Cable (m)1.0-5.0

Encoder Option (type)R22，R10

Cover OptionC

RailT，B，I

SFB-D20-300-B1-3.0-R2201-C-T-D18-300-T1-3.0-R2201-C-T

Top Axis Stroke300


Cover OptionC

RailT，B，I


Top Axis Motor ModelT1= AUM3-S-S2-J-H9D-V3T2= AUM3-S-S3-J-H9D-V3T3= AUM3-S-S4-J-H9D-V3

3

Available for 1 um only.3

Note:All measurement taken when module is mounted on a 5 micron flat granite table

Motor cable is the length of cable measured after the bottom axis carriage.1

Stages & System

s

Stages & System

s

Akrib

is systems

V-73 / V-74

DGL XY SeriesXY Dual Guide Stage with clean room cover

DimensionsDGL XY

Dimension Drawing

Mounting Holes for Customer

Direct drive, zero cogging, zero backlash

linear motor

High accelerations and speeds



Precise homing through encoder

index pulse

Clean Room strip cover

Note: Additional tapped/through holes are possible upon request.

Stages & System

s



Akrib

is systems

V-75 / V-76

Note: that granite mass is approx. 240Kg.

Module Configuration

Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position


AUM4-S2 300 3.1 29 304 320

AUM4-S3 300 3.4 29 304 320

AUM4-S3 300 24.9 103 304 320

AUM4-S4 300 26.1 103 304 320

Model Axis Motor

DGL200

Top

Bottom






X-Y Orthogonality

X-YOrthogonality Arc-sec

µm

DGCR 300 DGCRS 300

1Straightness1Flatness

±3µm/25mm, NTE±10µm/510mm





±5 counts

10






±5 counts

10

Top Axis Motor ModelAUM4-S-S2AUM4-S-S3

module XY stack

Bottom Axis Motor ModelAUM4-S-S3 AUM4-S-S4

Sensor TypeJ，K

Hall OptionH9D



Stroke300

RailT，B，I

Cover OptionCR

Cover OptionCR

SFB-D20U4SS3-J-H9D-3.0-R2201-300-CR-T-D20U4SS2 -J-H9D-3.0-R22-0.1-300-CR-T

Sensor TypeJ，K


Stroke300

RailT，B，I


Hall OptionH9D

2

All measurement taken when module is mounted on a 5 micron flat granite table.1

Motor cable is the length of cable measured after the bottom axis carriage.


2

Stages & System

s

Stages & System

s

Resolution 0.1,0.5,1.0

Akrib

is systems

V-77 / V-78

DGL XY SeriesXY Dual Guide Stage with bellow cover

DimensionsDGL XY

Dimension Drawing

Mounting Holes for Customer

Direct drive, no cogging,

zero backlash linear motor

High accelerationsand speeds



Precise homing through encoder index pulse

Full bellow cover

Note: Additional tapped/through holes are possible upon request.注

Stages & System

s



Akrib

is systems

V-79 / V-80

Effective Stroke

Note: that granite mass is approx. 260 Kg.

Effective Stroke Moving Mass Total Mass Sensor Position Hard Stopper Position


AUM4-S2 300 3.1 29 304 320

AUM4-S3 300 3.4 29 304 320

AUM4-S3 300 24.9 103 304 320

AUM4-S4 300 26.1 103 304 320

Model Axis Motor

DGL200

Top

Bottom






Repeatability (Analogue)

X-Y Orthogonality Arc-sec

µm

DGB300 DGBS300

1 Straightness

1 Flatness

±3µm (40µm scale pitch) ±3µm (40µm scale pitch)

±1.5µm (20µm scale pitch) ±1.5µm (20µm scale pitch)

±1µm(20µm scale pitch) ±1µm(20µm scale pitch)

±5 counts ±5 counts

10 10





Top Axis Motor ModelAUM4-S-S2AUM4-S-S3

module XY stack

Bottom AxisMotor ModelAUM4-S-S3 AUM4-S-S4

Sensor TypeJ，K

Hall OptionH9D



Stroke300

RailT，B，I

Cover OptionCR

Cover OptionC，R

SFB-D20U4SS3-J-H9D-3.0-R2201-300-B-T-D20U4SS2 -J-H9D-3.0-R2201-300-B-T

Sensor TypeJ，K


Stroke300

RailT，B，I


Hall OptionH9D

All measurement taken when module is mounted on a 5 micron flat granite table.1

Motor cable is the length of cable measured after the bottom axis carriage


2

Stages & System

s

Stages & System

s

Documents

DGL XY Series - akribis-sys.de · DGL XY Part Numbering DGL XY Akribis systems V-75 / V-76 Note: that granite mass is approx. 240Kg. Module Configuration Effective Stroke Moving Mass