Focused Ion Beam - Scanning Electron Microscopy FIB-SEM Adnan Hammud Contact: [email protected] During the last decades, Focused Ion Beam (FIB) has evolved into a key technology in a wide range of applications in materials science. Supplemented with a Scanning Electron Microscope (SEM), FIB-SEM systems have become a powerful tool and a versatile instrument for imaging as well as material sputtering and deposition at the nanoscale 1 . In addition to the target preparation of electron transparent high quality samples for Transmission Electron Microscopy (TEM), we also focus on nanostructuring and prototype nanofabrication. In our research we are particularly interested in the nanofabrication of metallic tips used in plasmon-induced processes like in Scanning Tunneling Microscopy (STM) 2 and Tip-Enhanced Raman Spectroscopy (TERS) 3 in order to control and tune their plasmonic properties. In this regard we are in very close collaboration with several research groups at other departments in our institute, e.g. with the research group Nanoscale Surface Chemistry and the research group Ultrafast scanning Probe Microscopy from the Department of Physical Chemistry. References: [1] Volkert C.A. and Minor A.M. Focused Ion Beam Microscopy and Micromachining. MRS Bulletin, volume 32, May 2007, www/mrs.org/bulletin. [2] Böckmann H., Liu S., Müller M., Hammud A., Wolf M., Kumagai T. Near-Field Manipulation in a Scanning Tunneling Microscope Junction with Plasmonic Fabry-Pérot Tips. Nano Letters 2019, 19, 6, 3597-3602. [3] Liu S., Müller M., Sun Y., Hamada I., Hammud A., Wolf M., Kumagai T. Resolving the Correlation between Tip-Enhanced Resonance Raman Scattering and Local Electronic States with 1 nm Resolution. Nano Letters 2019, 19, 8, 5725-5731. Figure 1. A choice of FIB applications: a) Cross section in TiO2 nanotubes after Si CVD deposition b) Cross section in Li-ion battery anode c) Spiral-shaped STM Au tip d) FIB structured grating on an STM Au tip e) FIB prepared STM Au tip with nano-groove f) FIB prepared TEM sample. a) b) c) d) e) f)

Focused Ion Beam - Scanning Electron Microscopy FIB-SEM

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Focused Ion Beam - Scanning Electron Microscopy

FIB-SEM

Adnan Hammud

Contact: [email protected]

During the last decades, Focused Ion Beam (FIB) has evolved into a key technology in a wide range of applications in materials science. Supplemented with a Scanning Electron Microscope (SEM), FIB-SEM systems have become a powerful tool and a versatile instrument for imaging as well as material sputtering and deposition at the nanoscale1.

In addition to the target preparation of electron transparent high quality samples for Transmission Electron Microscopy (TEM), we also focus on nanostructuring and prototype nanofabrication. In our research we are particularly interested in the

nanofabrication of metallic tips used in plasmon-induced processes like in Scanning Tunneling Microscopy (STM)2 and Tip-Enhanced Raman Spectroscopy (TERS)3 in order to control and tune their plasmonic properties.

In this regard we are in very close collaboration with several research groups at other departments in our institute, e.g. with the research group Nanoscale Surface Chemistry and the research group Ultrafast scanning Probe Microscopy from the Department of Physical Chemistry.

References:

[1] Volkert C.A. and Minor A.M. Focused Ion Beam Microscopy and Micromachining. MRS Bulletin, volume 32, May 2007, www/mrs.org/bulletin.

[2] Böckmann H., Liu S., Müller M., Hammud A., Wolf M., Kumagai T. Near-Field Manipulation in a Scanning Tunneling Microscope Junction with Plasmonic Fabry-Pérot Tips. Nano Letters 2019, 19, 6, 3597-3602.

[3] Liu S., Müller M., Sun Y., Hamada I., Hammud A., Wolf M., Kumagai T. Resolving the Correlation between Tip-Enhanced Resonance Raman Scattering and Local Electronic States with 1 nm Resolution. Nano Letters 2019, 19, 8, 5725-5731.

Figure 1. A choice of FIB applications: a) Cross section in TiO2 nanotubes after Si CVD deposition b) Cross section in Li-ion battery anode c) Spiral-shaped STM Au tip d) FIB structured grating on an STM Au tip e) FIB prepared STM Au tip with nano-groove f) FIB prepared TEM sample.

a) b)

c) d)

e) f)