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DOCUMENT: Leica INM200 Optical Microscope Operation Procedure Version: 1.0 March 3, 2017 Leica INM200 Optical Microscope OPERATING Procedure Version: 1.0 Feb-2017 UNIVERSITY OF TEXAS AT ARLINGTON Nanotechnology Research Center (NRC)

Leica INM200 Optical Microscope OPERATING Procedure · The Leica INM200 inspection microscope is an optical microscope capable of bright field and dark field inspection. The microscope

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Page 1: Leica INM200 Optical Microscope OPERATING Procedure · The Leica INM200 inspection microscope is an optical microscope capable of bright field and dark field inspection. The microscope

DOCUMENT: Leica INM200 Optical Microscope Operation Procedure Version: 1.0 March 3, 2017

Leica INM200 Optical Microscope

OPERATING Procedure Version: 1.0 Feb-2017

UNIVERSITY OF TEXAS AT ARLINGTON

Nanotechnology Research Center (NRC)

Page 2: Leica INM200 Optical Microscope OPERATING Procedure · The Leica INM200 inspection microscope is an optical microscope capable of bright field and dark field inspection. The microscope

DOCUMENT: Leica INM200 Optical Microscope Operation Procedure Version: 1.0 March 3, 2017

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TABLE OF CONTENTS 1. Introduction…………………………………………….…………..2

1.1 Scope of Work…………………………………….…......3

1.2 Description…………………………………….…….……3

1.3 Safety……………………………………………....……..3

2. Hardware..............................……………………………….….....4

3. Requirements……………………………………..….….…….…..4

3.1 Training…………………………………….……..…...….4

3.2 System Restrictions………………………...……..…....4

4 Operating Procedures.………………………..…..…………......5

4.1 System Pre-Checks………………………….…....…….5

4.2 Operating the Leica INM200 …………………………...7

4.3 Tucsen Image software ………………………………. .9

1.0 INTRODUCTION

1.1 Scope

These procedures apply to the Leica INM200 inspection system. All maintenance should follow the procedures set forth in the manufacturer’s maintenance and operations manuals. This document is for reference only. Users must be trained by NRC staff before operating this equipment.

1.2 Description

The Leica INM200 inspection microscope is an optical microscope capable of bright field and dark field inspection. The microscope is equipped with TEK-Reps HD camera and Tucsen image capture software capable of image capture and critical demission measurement. The Leica INM200 sits on top of a vibration isolation table.

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1.3 Safety

1.3.1 This machine is connected to HIGH VOLTAGE. Be very careful and remain aware of electrical hazards. If you encounter any electrical malfunctions, contact NRC staff immediately

1.3.2 Users are NOT Allowed to open the lamp housing to change the bulbs. HIGH VOLTAGE IS PRESENT IN THE LAMP HOUSING.

1.3.3 Do not place any combustible material or flammable chemical such as Acetone, Methanol or IPA near the lamp housing.

1.3.4 Read any posted NRC Engineering Change Notices (ECN) for any

hardware, process or safety changes before running the tool.

Variable Magnification Dial

Image Shutter Knob

CCD HD Camera

Automatic controller

Microscope Power Switch

Focus knob

Illumination control knob

Mechanical Stage drive knob

DriveKKnobs

Lamp Housing

Rotatable stage assembly

Tiltable Eyepiece

Stage Stop Knob

Microscope computer

with image software

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2.0 HARDWARE

2.1 Leica INM200 microscope

2.2 Vibration Isolation Table

2.3 TEK-Reps HD camera, computer, and Tucsen image software

2.4 The microscope is equipped with 5X, 10X, 20X, 50X, 100X and 150X objective.

3.0 REQUIREMENTS

3.1 Training

All users must be trained and authorized on the Leica INM200 microscope, CCD camera and image software to use this system. Training is supplied by a NanoFab staff member please contact the tool owner to schedule training.

3.2 System Restrictions

3.2.1 The Leica INM200 microscope with CCD camera and image software system located in Bay4 is strictly restricted to inspecting Semiconductor substrates, devices, glass slide, thin flat materials for photolithography, etch and final inspection. Very thick (>2 cm) pieces of material may contact the objective lenses and cause scratches on the lens. Be aware of light absorbing films and inspect only clean dry samples.

3.2.2 Do not transfer contamination such as dust, dirt, photoresist from sample to the lens surface. This will prevent a clear view to the sample surface.

3.2.3 Users are not allowed to clean the eyepiece lenses and objective. If eyepiece

lenses or objective lenses are deemed dirty, contact NRC personnel for cleaning.

3.2.4 Never attempt to adjust the Stage Stop Knob.

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3.2.5 Users must log into the computer using assigned UTA NET ID and password. Once inspection and data capture is completed, user must log off the computer. Users are not allowed to lock the main computer.

3.2.6 Users are not allowed to change the calibration standard data for any objective in

the Tucsen image capture software. Calibration data can only be changed by NRC personnel.

3.2.7 Images can only be exported and saved to “T” drive. 3.2.8 Reservation is required to access this tool.

3.2.9 Start focusing with the lowest objective lens (5X) to avoid scratching the lens

surface. If higher resolution is needed, rotate the lens, using the Automatic controller from lowest to highest magnification and refocus using the focus knob.

4.0 OPERATING PROCEDURES

4.1. System Pre-Checks

4.1.1. Check to ensure the microscope rotatable stage assembly surface is free of contaminant. If contaminant is observed, clean with IPA.

Stage Stop Knob

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4.1.2. Check to ensure main power switch is on.

4.1.3. Check to ensure the 5X objective is in the optical path. IF not, press the number “1” button on the automatic controller to move the 5X objective in place.

4.1.4. Check to ensure the Variable Magnification dial is set to 1X.

Rotatable Stage

Assembly

Main Power

Switch

Automatic controller

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4.1.5. Check to ensure the image shutter knob is depressed all the way in. This will let light through to only the eyepieces.

4.2. Operating the Leica INM200 microscope

4.2.1 If you have not completed the System Pre-Checks in steps 4.1.1 – 4.1.5 then

you must complete those before proceeding. 4.2.2 Load your sample on the stage and turn the illumination up by turning the

illumination control clockwise.

Variable

Magnification Dial

Image shutter knob

Illumination Control

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4.2.3 Move the stage to the area of interest by using the X/Y stage knob and focus the sample using the focus knob. At this point, you should be on the 5X objective lens.

4.2.4 Adjust illumination once more the get the desire brightness.

4.2.5 If higher resolution is needed, rotate objective lens from lowest to highest and refocus on your sample

4.2.6 If dark field inspection is needed, press the DK button on the automatic controller to move from bright field to dark field and again to move back to bright field. Dark field is not available for the 5X objective.

4.2.7 The eyepiece image has a zoom factor of 1X, 1.6X and 2.5X. This can be changed by turning the variable magnification dial. Standard inspection is 1X. This does not affect the camera image in the image capture software.

Focus knob

X/Y stage knob

Press “DK” button to change

from bright field to dark field

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4.2.8 Once inspection is completed, move the 5X objective back into optical light path and unload your sample.

4.3 Tucsen Image software capture Note: some commonly used function of the software will be covered in this section. For more comprehensive detailed instruction of the software, please refer to help function.

4.3.1 Log on the computer using UTA EID and password.

4.3.2 Double click on “TC Capture icon” to open the software.

4.3.3 Pull the image shutter knob hallway out. This will let light pass to the camera and the eyepiece.

Variable magnification

dial

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4.3.4 At this point, an image should appear on the TC image software program. Focus

and adjust illumination for optimum focus and brightness. The image that appears will have 5X increase in magnification from the eyepiece image. This is not adjustable.

4.3.5 To save an image, click on capture tab and click on capture. Ensure all files are saved to the “T” drive.

4.3.6 To measure a feature from pre-existing saved image, go to the image tab and select the image that needs to be measure.

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4.3.7 Click on the measure tab to open the measurement controls.

4.3.8 Click on the calibration table and the select the correct magnification cal. The correct magnification Cal must be used with the corresponding objective to ensure proper CD measurement. This calibration is NIST traceable. Do not attempt to change this calibration data.

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4.3.9 After calibration data has been selected, measurements can be taken using the

line measurement icon.

4.3.10 Save the image with measurement by clicking on the save tab on the bottom right of the screen. All images must be saved to the “T” drive.

4.3.11 Once inspection and all pictures are saved, log off the computer, turn illumination all the way down and ensure the 5X objective is in the optical path.