VEGA3 SEM

Next Generation of AnalyticalScanning Electron Microscopes

Established: 1991Location: Brno, Czech Republic

100% Growth, Fastest Growing SEM Company in NA.

Main Products:! Scanning electron microscopes! High resolution Schottky FE-SEMs! FIB/SEMs! Detectors and accessories for SEMs! Over 1000 SEMs installed Worldwide

Brno, Czech Republic! 2nd largest city in Czech Rep.! 6 Universities with 40,000 students; 15 Institutes of Academy of

Science

Electron Microscopy in Brno! Over 60 years tradition of electron microscopy in Brno! Former leading supplier of electron microscopes for Eastern

Europe! Location of other SEM manufacturers

About TESCAN - Basic Info

VEGA SEM 3rd Generation Features

! Scanning & Acquisition Unit (16k x 16k Images)

! Fastest Detectors on Market (YAG Crystals)

! Largest Mag. Range in World (1.5X-1,000,000X)

! Remote Control & Operation

! Live 3D Imaging

! Final Aperture is electronic (No manual changing)

! Scripting for user-defined applications & total control

Introducing 3rd Generation

Available Scanning Modes for MIRA

Resolution Depth Field Wide Field Channeling

Wide Field Optics™! Unique Tescan four-lens column design offering a varity of

working a displaying modes! IML - Intermediate lens for beam aperture optimization! No physical final aperture; ALL electronically controlled

Modern Optics!Minimized distortion effect!Ultra-fast scanning rates down to 20 ns/pixel!Automated alignment- NO need of mechanical adjustment

SEM Column

In-Flight Beam Tracing™! Newly implemented for high precision computation of optimal

parameters

! Probe Current and Probe Diameter Easily Specified by User

!SEM Can Capture 16k x 16k Images (Competitors Charge over $24k for this option; standard for Tescan)!These extremely large images can then tiled into massively high-resolution image (Over a Gigapixel)!Area of interest can be clicked; user can zoom in with full resolution.!It‘s like Google Earth for the SEM

Huge Image Montaging

From Centimeters…to Nanometers! Wide Field Mode (in centimeters)! Extra-low magnification (down to 1-2x)! Extra wide scanning angle (up to 45°)! Magnification up to 1,000,000x! Can Take Accurate Measurements!

Tescan SEMs = World’s Largest Mag. Range

Wide Field OpticsTM

Top: Entire Monkey Skull, Harvard U.,J.Weaver; Bottom: High Res. Test

Wide Field OpticsTM

“Fisheye” Mode, Noticeable Distortion

Wide Field Optics, No Distortion

Right: Taken directly fromsoftware manualFrom Competitor’s SEM.

It is recommended not tomake any measurements

YAG crystal Detectors! High efficiency – low noise! Fastest on market! Unlimited lifetime; traditional detectors will need to

be replaced! Standard for ALL Detectors: BSD, VP, & SE

Fig. Real Time SE/BSE signal mixing

Dwell/pix 1Mpix 100 fields

analysis

50 us 50 s > 1 hour

200 ns 0.2 s < 5 min

TV Rate Backscatter ImagingNow Possible!!

Everhart-Thornley SE with YAG

Fastest imaging rate (20ns/pix)

First Class Detectors

YAG Crystals

Fig. Phase identification by materialcontrast

BSE – Robinson with YAG! High speed (close to Real Time)! High material contrast (0.1 Z)! Best Signal-to-Noise Ratio! Retractable design – for „COMPO“ or „TOPO“

imaging! 16-bit ADC! Possibility of calibration to determine atomic species

Tescan R-BSE detector

First Class Detectors

Low Vacuum SE Detector with YAG! Patented modified Everhart-Thornley that is

pumped! True secondary electron detecting! Microlens differential barrier

Backscattered Image of Steel

LVSTD Image of Uncoated Insect

Preliminary ServiceDiagnostics

RemoteOperations

Distance Learning/Outreach

All Microscope functionscan be controlled andviewed via Internet

Remote Control and Diagnostics

…via Touchscreen …via Control Knob Panel

EDS Micrometer

EDS Micrometer! Offers adjustable analytical working distance! 10-60 mm in 0.1 um intervals! Can be adjusted under vacuum! Won’t have to cut samples to get EDS Spectra

EDS Micrometer

AWD = 10mm AWD = 60mm

EDS Micrometer-- Sample Parts

Live Stereoscopic Imaging! Patented 3D Beam - tilt of

beam (no stage tilt)

! Navigation ofmanipulators in Z-axis

! TEM lamella handling /alignment

! Align lamella on grid is easyw/ live stereoscopic scan.

! Make 3D Images;roughness & depthmeasurements

Live 3D Beam Technology

Live Stereoscopic Imaging! Patented 3D Beam - tilt of

beam (no stage tilt)

! Navigation ofmanipulators in Z-axis

! TEM lamella handling /alignment

! Align lamella on grid is easyw/ live stereoscopic scan.

! Make 3D Images;roughness & depthmeasurements

Live 3D Beam Technology

TESCAN CUSTOMERS

Jacksonville

TESCAN provides a guaranteed 48 hour response time(Goal is 24 hours)

& guaranteed 95% uptime.

Robert Bosch Installations

Most Flexible Geometry

XM can hold 8 kg sample full tilt/xyz