Turbo Molecular Pumps Series of Turbo Molecular Pumps Turbocdn055.yun-img.com/static/upload/ribovac/download/202007040826… · Turbo Molecular Pumps Turbo Molecular Pumps Turbo Molecular

Compound Molecular Pumps

5

Compound Molecular Pumps Compound Molecular Pumps

3



13


10

12

11 4



7 89 6

Osaka Vacuum, Ltd. Osaka Vacuum, Ltd.

Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Controller


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

307φ

356φ

115 43

81

111183

85.5

77

Oil sump

Connector

Purge gasInlet ISO-G1/4

8-M10DP12PCD340

KF40

Cooling water Inlet/Outlet

A

DE

B

C

ISO-B250

VG250 21

16

425

425

363

363

A B C D E

φ350

φ335

B

CF200

ISO-B200

VG200 20

16

25

A B C

392

392

407

330

330

345

D E

φ300

φ253

φ285

C

A

DE

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

Connector

14-M8 Dp.13Purge gasInlet ISO-G1/4


Oil sump

B

C

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

A

DE

Connector



Oil sump

CF160

ISO-B160

VG150 16

16

22

421

421

421

359

359

359

A B C D E

φ235

φ203

φ225

VG500 25

A B C

560

D

530

E

φ625

100

83

φ516

φ570

Oil sump

KF50

Oil level sensor

150

156

175


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

C

D

B A

E

φ140

30ﾟ30ﾟ85

100

25

6036

φ89

25 53

11

PCD 128

Purge gasInlet ISO-G1/4 ISO-Rc3/8

Connector

KF25KF25


3-M8 DP17

Oil sump

φ140

30ﾟ30ﾟ85

φ89

45ﾟ

120

□120

75

PCD 128


53

Connector

KF25

Air cooling fan

3-M8 DP10

Oil sump

AB

C

E

E

D

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

238

236

238

D

φ185

φ152

φ130

E

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

226

224

226

D

φ185

φ152

φ130

AB

C

ED

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

AB

C

D E

ISO-B250

VG250 21

16

A B C

454.5

454.5

D

392.5

392.5

E

φ350

φ335

ISO-B320

VG300 16

19

A B C

411.5

406.5

D

349.5

344.5

E

φ400

φ425

AB

C

D E

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

ISO-Rc3/8

150

156

175

8-M20DP22PCD540


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

100

φ516

KF50

φ570

Oil sump

83

Oil level sensor

AB

C

D E

TG5500 Water cooling


A

ED

B

C

74

85.5

77

ISO-Rc3/8

PCD238

φ223

φ256

150

102

Connector

Purge gas


10-M8 DP20

Inlet ISO-G1/4

95

22

KF40

Oil sump

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5

100

43

1.6

3027

0

416

FANSpa

ce fo

r ca

ble

conn

ectio

ns

100

149

6

24.5

24.5

480460

Space for cableconnections

209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections


Gas throughputVolume flowrate

N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG203 TG203

Sf = 160L/min Sf : Volume flow rate of backing pump



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG553


TG553



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410 TG1003 TG2410 TG1003



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1


TG1303 TG1303




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG1813 TG1813



N2N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


TG2813 TG2813

Sf = 1500～3000L/minSf : Volume flow rate

of backing pump


of backing pump

TG2810

N2


of backing pump

N2

TG2810


of backing pump

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

TG3213


of backing pump

TG3213


of backing pump


[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

N2



of backing pump


of backing pump

TG2413 TG3413


of backing pump


of backing pump

TG2410 TG3413

N2

Gas throughput

N2

Volume flowrate

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

TG2810 TG5500 [Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


of backing pump


of backing pump


of backing pump


of backing pump

TG2410 TG5500

TG203

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

200

140

150

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）543

4-6

4-6

550（4.1）80

70

11

TC203

TG553 TG1003

TG1303 TG1810/1813 TG2813TG3213

1 14

TC203

（Punel cut：128H×104W）

TC553 / TC1003 / TC1813 / TC3213


T u r b oMolecularP u m p s

OSAKA VACUUM

180-25390-121 / 180-253

8.2

400

610

800

2.7

TC203 TC553 TC1003 TC1813 TC3213 TC5500

50/60

Single

340 500

10

360

180-242

1200 1600 30002200

Oil free pumping Durable structure

Small and medium-sized compound molecular pumpsA selection of pumps with pumping speeds of 200～1,800L/s.Corrosive resistant types for corrosive gases.

※1 Except TC5500

02-TB-E-04

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG3413TG5000/5003TG5500/5503

TG203

TG553

TG1003

TG1303

TG1810 / TG1813

TG2813

TG3213

TG3413

TG5000 / TG5003

TG5500 / TG5503

TG203CA

TG203RA

TG203VA

TG203CW

TG203RW

TG203VW

TG553CW

TG553BW

TG553VW

TG1003CW

TG1003BW

TG1003VW

TG1303CW

TG1303BW

TG1303VW

TG1810BW / TG1813BW

TG1810VW / TG1813VW

TG2813BW

TG2813VW

TG3213BW

TG3213VW

TG3413VW

TG5000VW / TG5003VW

TG5500VW / TG5503VW

M1/TC-**M3/TC-**M5/TC-**M7/TC-**M10/TC-**M15/TC-**M20/TC-**F1/TC-S2

F3/TC-S2

F5/TC-S2

F7/TC-S2

F10/TC-S2

F15/TC-S2

F20/TC-S2

1m

3m

5m

7m

10m

15m

20m

1m

3m

5m

7m

10m

15m

20m

TG20 3※V A1 2 3 4 5 6

…TG203…TG553 / TG1003 / TG1303 / TG1810 / TG1813 / TG2810 / TG2813 TG3210 / TG3213 / TG3410 / TG3413

**※1　Please contact us with the exception of standard length.※2　Cables for TG5000 / TG5500 are built-to-order products.※3　Only for TG203.

S2M2

Series of Turbo Molecular Pumps

TC5500


TG203 TG553TG1003TG1303

TG1810TG1813

TG2813TG3213TG3413

TG5000TG5500

TG5003TG5503

■Corrosive resistant type for corrosive gases.

■Durable structure for air inrush.

■Sturdy, resists external impacts.

■Serial communication ※RS232C Serial interface

■Conforms to recognized safety standard NRTL / SEMI-S2 / CE

Large-sized compound molecular pumpsA selection of pumps with pumping speeds of 2,800～5,500L/s.Standard types for clean processes and corrosive resistanttypes are available.

VG350 20

A B C

380

D

318

E

φ450

AB

C

D E

VG450 25

A B C

600

D

570

E

φ575

CF160

ISO-B160

VG150 16

16

22

402

402

402

360

360

360

A B C D E

φ235

φ203

φ225

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

550

430

370

1×108

3×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）1500

8-13

8-11

300（2.3）250

260

41

TC553

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1000

940

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1300

1100

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1800

1700

1100

1×108

3×103

＜ 1×10-6

（＜ 7.5×10-9）2444

11-16

23-28

270（2）500

260

80

TC1813

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

2800

2600

2400

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3200

3000

2500

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3400

3200

2600

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1×108

5×103

＜ 1×10-6

（＜ 7.5×10-9）1200

25-35

30-40

200（1.5）1500

1000

250

TC5500

TG5000

5000

4700

4000

TG5500

5500

5200

4400

※TG5500

2

Korea/Seoul Office Shin Won Tech. Co., Ltd.

Taiwan/Cutes Corporation

China/Shanghai Osaka Vacuum, Ltd.

■ TMP service support center

France/Paris Liaison Office

Osaka Vacuum, Ltd.

Turbo Molecular Pumps

● Wide pressure range pumping

● High throughput

● Durable structure for air inrush

● Long lasting : Standard overhauls lead to　　　　　　　　a long useful life.

※Roots vacuum pump no longer necessary.

※Design duration of pump:100,000+hours.　Overhaul cycle:20,000～30,000 hours.

Serial communicationRS232C Serial interface

Conforms to recognizedsafety standard

NRTL SEMI-S2 CE

◎ TG-F series are available for clean processes.

Specifications

Performance curveDrawing of Outside dimension

Water cooling

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～40℃. The maximum temperature for the cooling water which assures the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings

●Corresponding gases　Depending on the gas to be evacuated, some may damage the pump. Please contact us for details on

corresponding gases.

※1：In case of the backing vacuum pump of 500L /min.

Volume flow rate

Max. compression ratio

Ultimate pressure

Max. throughput※1

Startup time

Shutdown time

Max. backing pressure

Recommended backing vacuum pump

Amount of lubrication oil required

Weight

Power Supply

N2

N2 (with protective screen)H2

N2

H2

CF / VG・ISO-B

N2

Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG

N2

Specifications


Standard set

◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings




Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Water cooling

Air cooling

Standard set

●Ambient temperature for useThe ambient temperature range to assure reaching the ultimate pressure is 10～23℃. The permissible ambient temperature is 10～32℃ for air cooling type and 10～40℃ for water cooling type. The maximum temperature for the cooling water which assures the ultimate pressure is 30℃ and the permissible temperature range for cooling water is 10～35℃.

Pump+Power Supply+Motor Cable （3 meter）+Fan Cable （3 meter, only for air-cooling type）◆OptionBaking heater, Automatic slow leak valve, Purge gas inlet connector, Precision needle valve, Flanges and Fittings




Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-R

N2
















■Standard types and corrosive resistant types are available.





■Corrosive resistant types are available.
















■The world's largest volume flow rate compound molecular pump.



※Built-to-order products. Please contact us for more information.

Specifications


Standard set






Power supply

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power

Rated Output Frequency

Weight

Standard accessories

TMP

Input connector: 1 / Remote connector: 1 / Serial communication connector※1: 1 / Instruction manual: 1 copy / Serial communication operation manual※1: 1 copy

Motor cable※2

Fan cable※3

length modelCable model（Standard length：※13m）

※Please contact us for models other than the above.

ModelType

◎ Standard Type & Corrosive Resistant Type in 300～2400L/s.

◎ Vibration Free with ABS. (Auto Balance System)

◎ Pumps and Controllers are independently exchangeable.

◎ Rotational speed control.　

◎ Thermal insulation structure is available. (Special version)　

Magnetically Suspended Compound Molecular Pumps（TG-M series）/ Digital type

◎ Grease-lubricated types with pumping speeds of 　50～2400 L/s

◎ Any orientation and easy operation.

◎ Maintenance free 　 (O/H cycle:20,000 to 30,000 hours.)

◎ Durable, compact, light-weight design

◎ Models impervious to air inrush, quick shut down　 on venting are available.

Compound Molecular Pumps（TG-F series）


Pump+Power Supply+Motor Cable （3 meter）











Water cooling

Water cooling Water cooling Water coolingWater cooling

Water cooling

Characteristics of Compound Molecular Pumps

Products Line-up

2015.05.1000

Osaka Head office　

JQA-QMA1902NABARI FACTORY

JQA-EMA5143

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301

■Shin Won Tech. Co., Ltd.(maintenance)

Taiwan2-22 Nan Yuan Road, Chung Li City 32063 Taiwan, R.O.C.

Tel：+886-3-452-6161 Fax：+886-3-451-1347

■Cutes Corporation

ChinaSouth A,T52-4-1F,No.1510,Chuanqiao Rd.,Pudong,Shanghai 201206 P. R. China

Tel：+86-21-5031-1522 Fax：+86-21-5031-1523

Tel support Field support Maintenance Local stock

#12LT 36Bl Namdong Industry Area, Namdong-Ku, Inchon 450-100 Korea

■Shanghai Osaka Vacuum, Ltd.

48000 Fremont Blvd, Fremont, CA 94538 U.S.A.

Tel：+1-510-770-0100 Fax：+1-510-770-0104

■Osaka Vacuum U.S.A., Inc.

Leaders Bldg., 274-4, Seohyun-Dong, Bundang-ku, Seongnam-Si, Gyeonggi-Do 463-824 KoreaTel：+82-31-707-0002 Fax：+82-31-707-3339

■Seoul office(sales)

51 Main Avenue, Sacramento, CA 95838 USA

Tel：+1-916-920-5451 Fax：+1-916-830-1900

■Ebara Technologies Inc.

Model

Size

Specificationtype

Bearingsystem

Inlet Flange※1

Coolingsystem

1

2

3

4

5

6

※1 Standard Flange

CF ： JVIS 003 Bakeable Flanges : Dimensions-Knife-edge sealed type

ISO-B ： ISO1609:1986 Vacuum technology - Flange dimensions （Bolted type）ISO-R ： ISO1609:1986 Vacuum technology - Flange dimensions

　　　　（Clamped or rotatable type）VG ： JISB2290 :1968 Vacuum technology-Flange :dimensions

　　　　（Vacuum flange with O-ring groove）KF ： ISO2861/1:1974 Vacuum technology - Quick-release couplings

　　　　- Dimensions - Part 1（Clamped type）

Notwritten( )

：Compound Molecular Pumps

：Standard type

：XHV type

：Corrosive resistant type

：Ball bearing （oil lubrication）：Ball bearing （grease lubrication）：Magnetically suspended

：CF

：ISO-B

：ISO-R

：VG

：Air cooling

：Water cooling

TG

kineTiG

Near Volume flow rate（N2）0

1

3

F

M

C

B

R

V

A

W

◎ Standard Type & Corrosive Resistant Type in 2200L/s.◎ Integrated controller/power supply, very compact footprint. ◎ Wide pressure range applications, capable of pumping at high throughput. ◎ High compression ratio, low ultimate pressure.◎ Variable rotational speed control(110rps-450rps).

Magnetically Suspended Compound Molecular Pumps with Integrated Control Unit（TG kine 2200M）

U.S.A./Osaka Vacuum U.S.A.,Inc. Ebara Technologies Inc.

Japan/Nabari FactoryTMP Service Group

Japan

Tel：+81-595-64-1162 Fax：+81-595-64-1163

■Nabari Factory TMP Service Group1300-81 Yabata, Nabari, Mie 518-0605, Japan

1






● High throughput







NRTL SEMI-S2 CE




5


3



13


10

12

11 4



7 89 6


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Controller


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

psOsaka Vacuum, Ltd.

307φ

356φ

115 43

81

111183

85.5

77

Oil sump

Connector


8-M10DP12PCD340

KF40


A

DE

B

C

ISO-B250

VG250 21

16

425

425

363

363

A B C D E

φ350

φ335

B

CF200

ISO-B200

VG200 20

16

25

A B C

392

392

407

330

330

345

D E

φ300

φ253

φ285

C

A

DE

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

Connector



Oil sump

B

C

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

A

DE

Connector



Oil sump

CF160

ISO-B160

VG150 16

16

22

421

421

421

359

359

359

A B C D E

φ235

φ203

φ225

VG500 25

A B C

560

D

530

E

φ625

100

83

φ516

φ570

Oil sump

KF50

Oil level sensor

150

156

175


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

C

D

B A

E

φ140

30ﾟ30ﾟ85

100

25

6036

φ89

25 53

11

PCD 128


Connector

KF25KF25


3-M8 DP17

Oil sump

φ140

30ﾟ30ﾟ85

φ89

45ﾟ

120

□120

75

PCD 128


53

Connector

KF25

Air cooling fan

3-M8 DP10

Oil sump

AB

C

E

E

D

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

238

236

238

D

φ185

φ152

φ130

E

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

226

224

226

D

φ185

φ152

φ130

AB

C

ED

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

AB

C

D E

ISO-B250

VG250 21

16

A B C

454.5

454.5

D

392.5

392.5

E

φ350

φ335

ISO-B320

VG300 16

19

A B C

411.5

406.5

D

349.5

344.5

E

φ400

φ425

AB

C

D E

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

ISO-Rc3/8

150

156

175

8-M20DP22PCD540


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

100

φ516

KF50

φ570

Oil sump

83

Oil level sensor

AB

C

D E



A

ED

B

C

74

85.5

77

ISO-Rc3/8

PCD238

φ223

φ256

150

102

Connector

Purge gas


10-M8 DP20

Inlet ISO-G1/4

95

22

KF40

Oil sump

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5

100

43

1.6

3027

0

416

FANSpa

ce fo

r ca

ble

conn

ectio

ns

100

149

6

24.5

24.5

480460


209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG203 TG203




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG553


TG553



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410 TG1003 TG2410 TG1003



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1


TG1303 TG1303




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG1813 TG1813



N2N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


TG2813 TG2813


of backing pump


of backing pump

TG2810

N2


of backing pump

N2

TG2810


of backing pump

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

TG3213


of backing pump

TG3213


of backing pump


[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

N2



of backing pump


of backing pump

TG2413 TG3413


of backing pump


of backing pump

TG2410 TG3413

N2

Gas throughput

N2

Volume flowrate

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

TG2810 TG5500 [Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


of backing pump


of backing pump


of backing pump


of backing pump

TG2410 TG5500

TG203

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

200

140

150

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）543

4-6

4-6

550（4.1）80

70

11

TC203

TG553 TG1003

TG1303 TG1810/1813 TG2813TG3213

1 14

TC203


TC553 / TC1003 / TC1813 / TC3213



OSAKA VACUUM

180-25390-121 / 180-253

8.2

400

610

800

2.7

TC203 TC553 TC1003 TC1813 TC3213 TC5500

50/60

Single

340 500

10

360

180-242

1200 1600 30002200



※1 Except TC5500

02-TB-E-04

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG3413TG5000/5003TG5500/5503

TG203

TG553

TG1003

TG1303

TG1810 / TG1813

TG2813

TG3213

TG3413

TG5000 / TG5003

TG5500 / TG5503

TG203CA

TG203RA

TG203VA

TG203CW

TG203RW

TG203VW

TG553CW

TG553BW

TG553VW

TG1003CW

TG1003BW

TG1003VW

TG1303CW

TG1303BW

TG1303VW

TG1810BW / TG1813BW

TG1810VW / TG1813VW

TG2813BW

TG2813VW

TG3213BW

TG3213VW

TG3413VW

TG5000VW / TG5003VW

TG5500VW / TG5503VW


F3/TC-S2

F5/TC-S2

F7/TC-S2

F10/TC-S2

F15/TC-S2

F20/TC-S2

1m

3m

5m

7m

10m

15m

20m

1m

3m

5m

7m

10m

15m

20m

TG20 3※V A1 2 3 4 5 6



S2M2


TC5500


TG203 TG553TG1003TG1303

TG1810TG1813

TG2813TG3213TG3413

TG5000TG5500

TG5003TG5503







VG350 20

A B C

380

D

318

E

φ450

AB

C

D E

VG450 25

A B C

600

D

570

E

φ575

CF160

ISO-B160

VG150 16

16

22

402

402

402

360

360

360

A B C D E

φ235

φ203

φ225

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

550

430

370

1×108

3×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）1500

8-13

8-11

300（2.3）250

260

41

TC553

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1000

940

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1300

1100

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1800

1700

1100

1×108

3×103

＜ 1×10-6

（＜ 7.5×10-9）2444

11-16

23-28

270（2）500

260

80

TC1813

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

2800

2600

2400

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3200

3000

2500

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3400

3200

2600

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1×108

5×103

＜ 1×10-6

（＜ 7.5×10-9）1200

25-35

30-40

200（1.5）1500

1000

250

TC5500

TG5000

5000

4700

4000

TG5500

5500

5200

4400

※TG5500

2






Osaka Vacuum, Ltd.



● High throughput







NRTL SEMI-S2 CE


Specifications


Water cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Water cooling

Air cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-R

N2









































Specifications


Standard set






Power supply

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power


Weight


TMP


Motor cable※2

Fan cable※3



ModelType

























Water cooling


Water cooling


Products Line-up

2015.05.1000



JQA-EMA5143

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301



Tel：+886-3-452-6161 Fax：+886-3-451-1347



Tel：+86-21-5031-1522 Fax：+86-21-5031-1523





Tel：+1-510-770-0100 Fax：+1-510-770-0104





Tel：+1-916-920-5451 Fax：+1-916-830-1900


Model

Size

Specificationtype

Bearingsystem

Inlet Flange※1

Coolingsystem

1

2

3

4

5

6







Notwritten( )


：Standard type

：XHV type



：CF

：ISO-B

：ISO-R

：VG

：Air cooling

：Water cooling

TG

kineTiG


1

3

F

M

C

B

R

V

A

W





Japan

Tel：+81-595-64-1162 Fax：+81-595-64-1163



3

Osaka Vacuum, Ltd.Tu

rbo

Mol

ecul

ar P

umps

φ140

30ﾟ30ﾟ85

100

25

6036

φ89

25 53

11

PCD 128


Connector

KF25KF25


3-M8 DP17

Oil sump

φ140

30ﾟ30ﾟ85

φ89

45ﾟ

120

□120

75

PCD 128


53

Connector

KF25

Air cooling fan

3-M8 DP10

Oil sump

AB

C

E

E

D

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

238

236

238

D

φ185

φ152

φ130

E

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

226

224

226

D

φ185

φ152

φ130

AB

C

ED


N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG203 TG203



TG203

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

200

140

150

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）543

4-6

4-6

550（4.1）80

70

11

TC203

Specifications


Water cooling

Air cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-R

N2







4

Osaka Vacuum, Ltd.Turbo M

olecular Pumps

A

ED

B

C

74

85.5

77

ISO-Rc3/8

PCD238

φ223

φ256

150

102

Connector

Purge gas


10-M8 DP20

Inlet ISO-G1/4

95

22

KF40

Oil sump


N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG553


TG553


TG553■Corrosive resistant type for corrosive gases.





CF160

ISO-B160

VG150 16

16

22

402

402

402

360

360

360

A B C D E

φ235

φ203

φ225

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

550

430

370

1×108

3×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）1500

8-13

8-11

300（2.3）250

260

41

TC553

Specifications


Water cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

5



rbo

Mol

ecul

ar P

umps

B

C

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

A

DE

Connector



Oil sump

CF160

ISO-B160

VG150 16

16

22

421

421

421

359

359

359

A B C D E

φ235

φ203

φ225


N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410 TG1003 TG2410 TG1003



TG1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1000

940

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2








Water cooling


6


olecular Pumps

B

CF200

ISO-B200

VG200 20

16

25

A B C

392

392

407

330

330

345

D E

φ300

φ253

φ285

C

A

DE

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

Connector



Oil sump

N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1


TG1303 TG1303



TG1303

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1300

1100

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2








Water cooling


7


rbo

Mol

ecul

ar P

umps

307φ

356φ

115 43

81

111183

85.5

77

Oil sump

Connector


8-M10DP12PCD340

KF40


A

DE

B

C

ISO-B250

VG250 21

16

425

425

363

363

A B C D E

φ350

φ335

ISO-Rc3/8


N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG1813 TG1813



TG1810/1813

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1800

1700

1100

1×108

3×103

＜ 1×10-6

（＜ 7.5×10-9）2444

11-16

23-28

270（2）500

260

80

TC1813

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2








Water cooling


8


olecular Pumps

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

AB

C

D E

ISO-B250

VG250 21

16

A B C

454.5

454.5

D

392.5

392.5

E

φ350

φ335

N2N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


TG2813 TG2813


of backing pump


of backing pump

TG2813

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

2800

2600

2400

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2








Water cooling


9


rbo

Mol

ecul

ar P

umps

ISO-B320

VG300 16

19

A B C

411.5

406.5

D

349.5

344.5

E

φ400

φ425

AB

C

D E

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

TG2810

N2


of backing pump

N2

TG2810


of backing pump

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

TG3213


of backing pump

TG3213


of backing pump


TG3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3200

3000

2500

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2








Water cooling

10



olecular Pumps

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

N2



of backing pump


of backing pump

TG2413 TG3413


of backing pump


of backing pump

TG2410 TG3413

N2

TG3413

VG350 20

A B C

380

D

318

E

φ450

AB

C

D E

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3400

3200

2600

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2








Water cooling


11


rbo

Mol

ecul

ar P

umps

VG500 25

A B C

560

D

530

E

φ625

100

83

φ516

φ570

Oil sump

KF50

Oil level sensor

150

156

175


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

C

D

B A

E

150

156

175

8-M20DP22PCD540


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

100

φ516

KF50

φ570

Oil sump

83

Oil level sensor

AB

C

D E


TG5000 Water cooling Gas throughput

N2

Volume flowrate

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

TG2810 TG5500 [Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


of backing pump


of backing pump


of backing pump


of backing pump

TG2410 TG5500

TG5000/5003TG5500/5503

VG450 25

A B C

600

D

570

E

φ575

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1×108

5×103

＜ 1×10-6

（＜ 7.5×10-9）1200

25-35

30-40

200（1.5）1500

1000

250

TC5500

TG5000

5000

4700

4000

TG5500

5500

5200

4400

※TG5500

Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG

N2






Specifications


Standard set






12

Osaka Vacuum, Ltd.Turbo Controller

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5

100

43

1.6

3027

0

416

FANSpa

ce fo

r ca

ble

conn

ectio

ns

100

149

6

24.5

24.5

480460


209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections

TC203


TC553 / TC1003 / TC1813 / TC3213


180-25390-121 / 180-253

8.2

400

610

800

2.7

TC203 TC553 TC1003 TC1813 TC3213 TC5500

50/60

Single

340 500

10

360

180-242

1200 1600 30002200

※1 Except TC5500

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TC5500


TG203 TG553TG1003TG1303

TG1810TG1813

TG2813TG3213TG3413

TG5000TG5500

TG5003TG5503

Power supply

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power


Weight


TMP


13

Osaka Vacuum, Ltd.

TG203

TG553

TG1003

TG1303

TG1810 / TG1813

TG2813

TG3213

TG3413

TG5000 / TG5003

TG5500 / TG5503

TG203CA

TG203RA

TG203VA

TG203CW

TG203RW

TG203VW

TG553CW

TG553BW

TG553VW

TG1003CW

TG1003BW

TG1003VW

TG1303CW

TG1303BW

TG1303VW

TG1810BW / TG1813BW

TG1810VW / TG1813VW

TG2813BW

TG2813VW

TG3213BW

TG3213VW

TG3413VW

TG5000VW / TG5003VW

TG5500VW / TG5503VW


F3/TC-S2

F5/TC-S2

F7/TC-S2

F10/TC-S2

F15/TC-S2

F20/TC-S2

1m

3m

5m

7m

10m

15m

20m

1m

3m

5m

7m

10m

15m

20m

TG20 3※V A1 2 3 4 5 6



S2M2

Motor cable※2

Fan cable※3



ModelType

Products Line-up

Model

Size

Specificationtype

Bearingsystem

Inlet Flange※1

Coolingsystem

1

2

3

4

5

6







Notwritten( )


：Standard type

：XHV type



：CF

：ISO-B

：ISO-R

：VG

：Air cooling

：Water cooling

TG

kineTiG


1

3

F

M

C

B

R

V

A

W


5


3



13


10

12

11 4



7 89 6


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Controller


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

307φ

356φ

115 43

81

111183

85.5

77

Oil sump

Connector


8-M10DP12PCD340

KF40


A

DE

B

C

ISO-B250

VG250 21

16

425

425

363

363

A B C D E

φ350

φ335

B

CF200

ISO-B200

VG200 20

16

25

A B C

392

392

407

330

330

345

D E

φ300

φ253

φ285

C

A

DE

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

Connector



Oil sump

B

C

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

A

DE

Connector



Oil sump

CF160

ISO-B160

VG150 16

16

22

421

421

421

359

359

359

A B C D E

φ235

φ203

φ225

VG500 25

A B C

560

D

530

E

φ625

100

83

φ516

φ570

Oil sump

KF50

Oil level sensor

150

156

175


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

C

D

B A

E

φ140

30ﾟ30ﾟ85

100

25

6036

φ89

25 53

11

PCD 128


Connector

KF25KF25


3-M8 DP17

Oil sump

φ140

30ﾟ30ﾟ85

φ89

45ﾟ

120

□120

75

PCD 128


53

Connector

KF25

Air cooling fan

3-M8 DP10

Oil sump

AB

C

E

E

D

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

238

236

238

D

φ185

φ152

φ130

E

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

226

224

226

D

φ185

φ152

φ130

AB

C

ED

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

AB

C

D E

ISO-B250

VG250 21

16

A B C

454.5

454.5

D

392.5

392.5

E

φ350

φ335

ISO-B320

VG300 16

19

A B C

411.5

406.5

D

349.5

344.5

E

φ400

φ425

AB

C

D E

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

ISO-Rc3/8

150

156

175

8-M20DP22PCD540


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

100

φ516

KF50

φ570

Oil sump

83

Oil level sensor

AB

C

D E



A

ED

B

C

74

85.5

77

ISO-Rc3/8

PCD238

φ223

φ256

150

102

Connector

Purge gas


10-M8 DP20

Inlet ISO-G1/4

95

22

KF40

Oil sump

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5

100

43

1.6

3027

0

416

FANSpa

ce fo

r ca

ble

conn

ectio

ns

100

149

6

24.5

24.5

480460


209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG203 TG203




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG553


TG553



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410 TG1003 TG2410 TG1003



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1


TG1303 TG1303




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG1813 TG1813



N2N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


TG2813 TG2813


of backing pump


of backing pump

TG2810

N2


of backing pump

N2

TG2810


of backing pump

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

TG3213


of backing pump

TG3213


of backing pump


[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

N2



of backing pump


of backing pump

TG2413 TG3413


of backing pump


of backing pump

TG2410 TG3413

N2

Gas throughput

N2

Volume flowrate

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

TG2810 TG5500 [Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


of backing pump


of backing pump


of backing pump


of backing pump

TG2410 TG5500

TG203

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

200

140

150

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）543

4-6

4-6

550（4.1）80

70

11

TC203

TG553 TG1003

TG1303 TG1810/1813 TG2813TG3213

1 14

TC203


TC553 / TC1003 / TC1813 / TC3213



OSAKA VACUUM

180-25390-121 / 180-253

8.2

400

610

800

2.7

TC203 TC553 TC1003 TC1813 TC3213 TC5500

50/60

Single

340 500

10

360

180-242

1200 1600 30002200



※1 Except TC5500

02-TB-E-03

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG3413TG5000/5003TG5500/5503

TG203

TG553

TG1003

TG1303

TG1810 / TG1813

TG2813

TG3213

TG3413

TG5000 / TG5003

TG5500 / TG5503

TG203CA

TG203RA

TG203VA

TG203CW

TG203RW

TG203VW

TG553CW

TG553BW

TG553VW

TG1003CW

TG1003BW

TG1003VW

TG1303CW

TG1303BW

TG1303VW

TG1810BW / TG1813BW

TG1810VW / TG1813VW

TG2813BW

TG2813VW

TG3213BW

TG3213VW

TG3413VW

TG5000VW / TG5003VW

TG5500VW / TG5503VW


F3/TC-S2

F5/TC-S2

F7/TC-S2

F10/TC-S2

F15/TC-S2

F20/TC-S2

1m

3m

5m

7m

10m

15m

20m

1m

3m

5m

7m

10m

15m

20m

TG20 3※V A1 2 3 4 5 6



S2M2


TC5500


TG203 TG553TG1003TG1303

TG1810TG1813

TG2813TG3213TG3413

TG5000TG5500

TG5003TG5503







VG350 20

A B C

380

D

318

E

φ450

AB

C

D E

VG450 25

A B C

600

D

570

E

φ575

CF160

ISO-B160

VG150 16

16

22

402

402

402

360

360

360

A B C D E

φ235

φ203

φ225

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

550

430

370

1×108

3×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）1500

8-13

8-11

300（2.3）250

260

41

TC553

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1000

940

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1300

1100

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1800

1700

1100

1×108

3×103

＜ 1×10-6

（＜ 7.5×10-9）2444

11-16

23-28

270（2）500

260

80

TC1813

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

2800

2600

2400

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3200

3000

2500

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3400

3200

2600

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1×108

5×103

＜ 1×10-6

（＜ 7.5×10-9）1200

25-35

30-40

200（1.5）1500

1000

250

TC5500

TG5000

5000

4700

4000

TG5500

5500

5200

4400

※TG5500

2

Japan/Hachiohji Workshop






Osaka Vacuum, Ltd.



● High throughput







NRTL SEMI-S2 CE


Specifications


Water cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Water cooling

Air cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-R

N2









































Specifications


Standard set






Power supply

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power


Weight


TMP


Motor cable※2

Fan cable※3



ModelType

























Water cooling


Water cooling


Products Line-up

2011.10.1000



JQA-EMA5143

Japan

Tel：+81-42-664-5301 Fax：+81-42-664-6420

■Hachioji Workshop

U.S.A.

Korea

Tel：+82-32-814-8441 Fax：+82-32-814-7301



Tel：+886-3-452-6161 Fax：+886-3-451-1347



Tel：+86-21-5031-1522 Fax：+86-21-5031-1523


1221 Kunugida-cho, Hachioji 193-0942 Japan




Tel：+1-510-770-0100 Fax：+1-510-770-0104





Tel：+1-916-920-5451 Fax：+1-916-830-1900


Model

Size

Specificationtype

Bearingsystem

Inlet Flange※1

Coolingsystem

1

2

3

4

5

6







Notwritten( )


：Standard type

：XHV type



：CF

：ISO-B

：ISO-R

：VG

：Air cooling

：Water cooling

TG

kineTiG


1

3

F

M

C

B

R

V

A

W





5


3



13


10

12

11 4



7 89 6


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps


Turb

o M

olec

ular

Pum

ps

Turbo Controller


Turb

o M

olec

ular

Pum

ps

Turbo Molecular Pum

ps

Osaka Vacuum, Ltd.

307φ

356φ

115 43

81

111183

85.5

77

Oil sump

Connector


8-M10DP12PCD340

KF40


A

DE

B

C

ISO-B250

VG250 21

16

425

425

363

363

A B C D E

φ350

φ335

B

CF200

ISO-B200

VG200 20

16

25

A B C

392

392

407

330

330

345

D E

φ300

φ253

φ285

C

A

DE

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

Connector



Oil sump

B

C

φ267

φ296

115

85.5

77

φ267

φ296

162

102

115

43

74

85.5

77

PCD282

ISO-Rc3/8

KF40

A

DE

Connector



Oil sump

CF160

ISO-B160

VG150 16

16

22

421

421

421

359

359

359

A B C D E

φ235

φ203

φ225

VG500 25

A B C

560

D

530

E

φ625

100

83

φ516

φ570

Oil sump

KF50

Oil level sensor

150

156

175


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

C

D

B A

E

φ140

30ﾟ30ﾟ85

100

25

6036

φ89

25 53

11

PCD 128


Connector

KF25KF25


3-M8 DP17

Oil sump

φ140

30ﾟ30ﾟ85

φ89

45ﾟ

120

□120

75

PCD 128


53

Connector

KF25

Air cooling fan

3-M8 DP10

Oil sump

AB

C

E

E

D

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

238

236

238

D

φ185

φ152

φ130

E

CF100

ISO-R100

VG100 15

12

21

A B C

264

262

264

226

224

226

D

φ185

φ152

φ130

AB

C

ED

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

AB

C

D E

ISO-B250

VG250 21

16

A B C

454.5

454.5

D

392.5

392.5

E

φ350

φ335

ISO-B320

VG300 16

19

A B C

411.5

406.5

D

349.5

344.5

E

φ400

φ425

AB

C

D E

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

ISO-Rc3/8

150

156

175

8-M20DP22PCD540


Purge gas

ISO-Rc3/8

Inlet ISO-G1/4

320250

Connector

100

φ516

KF50

φ570

Oil sump

83

Oil level sensor

AB

C

D E



A

ED

B

C

74

85.5

77

ISO-Rc3/8

PCD238

φ223

φ256

150

102

Connector

Purge gas


10-M8 DP20

Inlet ISO-G1/4

95

22

KF40

Oil sump

115 42

.5

85.5

77

102210

Inlet ISO-G1/4

9

9

PCD390

74

ISO-Rc3/8

φ377

φ405

Oil sump

8-M10 DP18Purge gas


Connector

KF40

100

20

POWER SUPPLY

OSAKA VACUUM,LTD.

START

F2F1 F3

STOP/RESET

149

513

9

104.5 250

1.62-φ5

100

43

1.6

3027

0

416

FANSpa

ce fo

r ca

ble

conn

ectio

ns

100

149

6

24.5

24.5

480460


209

157.526

139

149

5

400

20

4-φ5

2.3

START

F2F1 F3

OSAKA VACUUM,LTD.

STOP/RESET

POWER SUPPLY

150Space for cable

connections



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG203 TG203




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG553


TG553



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG2410 TG1003 TG2410 TG1003



N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1


TG1303 TG1303




N2

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-2 10-1 100 101 102

10-4 10-3 10-2 10-1

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-2 10-1 100 101 102

10-4 10-3 10-2 10-1

TG1813 TG1813



N2N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


TG2813 TG2813


of backing pump


of backing pump

TG2810

N2


of backing pump

N2

TG2810


of backing pump

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

TG3213


of backing pump

TG3213


of backing pump


[Torr]

[Pa]

Inlet pressureVo

lum

e flo

w ra

te

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

[Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

N2



of backing pump


of backing pump

TG2413 TG3413


of backing pump


of backing pump

TG2410 TG3413

N2

Gas throughput

N2

Volume flowrate

N2

[Torr]

[Pa]

Inlet pressure

Volu

me

flow

rate

104

103

102

10110-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2

[L/s

]

TG2810 TG5500 [Pa･

L/s]

[scc

m]

Thro

ughp

ut

103

102

101

104

103

102

101

[Torr]

[Pa]

Inlet pressure

10-3 10-2 10-1 100 101

10-5 10-4 10-3 10-2


of backing pump


of backing pump


of backing pump


of backing pump

TG2410 TG5500

TG203

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

200

140

150

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）543

4-6

4-6

550（4.1）80

70

11

TC203

TG553 TG1003

TG1303 TG1810/1813 TG2813TG3213

1 14

TC203


TC553 / TC1003 / TC1813 / TC3213



OSAKA VACUUM

180-25390-121 / 180-253

8.2

400

610

800

2.7

TC203 TC553 TC1003 TC1813 TC3213 TC5500

50/60

Single

340 500

10

360

180-242

1200 1600 30002200



※1 Except TC5500

02-TB-E-04

（ACV）

（Hz）

（VA）

（Hz）

（kg）

TG3413TG5000/5003TG5500/5503

TG203

TG553

TG1003

TG1303

TG1810 / TG1813

TG2813

TG3213

TG3413

TG5000 / TG5003

TG5500 / TG5503

TG203CA

TG203RA

TG203VA

TG203CW

TG203RW

TG203VW

TG553CW

TG553BW

TG553VW

TG1003CW

TG1003BW

TG1003VW

TG1303CW

TG1303BW

TG1303VW

TG1810BW / TG1813BW

TG1810VW / TG1813VW

TG2813BW

TG2813VW

TG3213BW

TG3213VW

TG3413VW

TG5000VW / TG5003VW

TG5500VW / TG5503VW


F3/TC-S2

F5/TC-S2

F7/TC-S2

F10/TC-S2

F15/TC-S2

F20/TC-S2

1m

3m

5m

7m

10m

15m

20m

1m

3m

5m

7m

10m

15m

20m

TG20 3※V A1 2 3 4 5 6



S2M2


TC5500


TG203 TG553TG1003TG1303

TG1810TG1813

TG2813TG3213TG3413

TG5000TG5500

TG5003TG5503







VG350 20

A B C

380

D

318

E

φ450

AB

C

D E

VG450 25

A B C

600

D

570

E

φ575

CF160

ISO-B160

VG150 16

16

22

402

402

402

360

360

360

A B C D E

φ235

φ203

φ225

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

550

430

370

1×108

3×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）1500

8-13

8-11

300（2.3）250

260

41

TC553

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1000

940

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1300

1100

1000

1×108

4×103

＜ 1×10-7 / ＜ 1×10-6

（＜ 7.5×10-10 / ＜ 7.5×10-9）2715

9-12

9-13

300（2.3）500

260

50

TC1003

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1800

1700

1100

1×108

3×103

＜ 1×10-6

（＜ 7.5×10-9）2444

11-16

23-28

270（2）500

260

80

TC1813

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

2800

2600

2400

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3200

3000

2500

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

3400

3200

2600

1×108

6×103

＜ 1×10-6

（＜ 7.5×10-9）543

10-15

25-30

270（2）1500

260

100

TC3213

L/s

L/s

L/s

Pa

（Torr）sccm

min

min

Pa（Torr）L/min

mL

kg

1×108

5×103

＜ 1×10-6

（＜ 7.5×10-9）1200

25-35

30-40

200（1.5）1500

1000

250

TC5500

TG5000

5000

4700

4000

TG5500

5500

5200

4400

※TG5500

2






Osaka Vacuum, Ltd.



● High throughput







NRTL SEMI-S2 CE


Specifications


Water cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Standard set





Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

VG・ISO-B

N2

Specifications


Water cooling

Air cooling

Standard set






Volume flow rate


Ultimate pressure

Max. throughput※1

Startup time

Shutdown time




Weight

Power Supply

N2


N2

H2

CF / VG・ISO-R

N2









































Specifications


Standard set






Power supply

Power supply model

Input Voltage

Input Frequency

Input Phases

Input Power


Weight


TMP


Motor cable※2

Fan cable※3



ModelType

























Water cooling


Water cooling


Products Line-up

2015.05.1000



JQA-EMA5143

U.S.A.

Korea

Tel：+82-32-814-6331 Fax：+82-32-814-7301



Tel：+886-3-452-6161 Fax：+886-3-451-1347



Tel：+86-21-5031-1522 Fax：+86-21-5031-1523





Tel：+1-510-770-0100 Fax：+1-510-770-0104





Tel：+1-916-920-5451 Fax：+1-916-830-1900


Model

Size

Specificationtype

Bearingsystem

Inlet Flange※1

Coolingsystem

1

2

3

4

5

6







Notwritten( )


：Standard type

：XHV type



：CF

：ISO-B

：ISO-R

：VG

：Air cooling

：Water cooling

TG

kineTiG


1

3

F

M

C

B

R

V

A

W





Japan

Tel：+81-595-64-1162 Fax：+81-595-64-1163


Documents

Turbo Molecular Pumps Series of Turbo Molecular Pumps Turbocdn055.yun-img.com/static/upload/ribovac/download/202007040826… · Turbo Molecular Pumps Turbo Molecular Pumps Turbo Molecular