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Large area 200 mm × 100 mm 7.87" x 3.94" NEW One-shot 3D Measuring Macroscope VR-3000 Series Instant 3D Measurement

VR-3200 Brochure

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Page 1: VR-3200 Brochure

Large area200 mm × 100 mm 7.87" x 3.94"

NEW One-shot 3D Measuring MacroscopeVR-3000 Series

Instant 3D Measurement

Page 2: VR-3200 Brochure

2

Significant time and skill are required to produce repeatable and reproducible measurements.

Conventional Measurement DevicesWith conventional equipment, the shape of an object is measured only in a single line. This makes it difficult to ensure that the targeted area is actually measured. Additionally, measuring large areas is time consuming and sample positioning affects the results.

Several hours

Measurement time:

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Simply place the sample on the stage and click Measure.The setup is user-independent, enabling anyone to obtain repeatable and reliable results.

One-shot 3D Measuring MacroscopeAn entire surface can be measured in one-shot, allowing for accurate measurement of any area.3D measurements over a wide area can be performed instantly.

Example: Depression in a battery

NEW

Measurement time:

4From seconds

One-shot 3D Measuring Macroscope

VR-3000 Series

NEW

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One-shot surface measurement of 3D shapesallows measurements such as height, angles and radii to be taken simultaneously.

Here’s the difference!

4

Conventional measurement devices

Shapes measured with points and linesIt is difficult to measure structures with large height differences or shapes with steep angles.

One-Shot 3D MeasurementAllows non-contact 3D measurement of complex surfaces.Analyze difficult-to-reach areas that cannot be measured with conventional systems.

Example: Stand for handheld device

Page 5: VR-3200 Brochure

Here’s the difference!

In addition to visual inspection, multiple measurements can be made to calculate roughness and waviness.

No. Measurement name Measurement value Unit

1 Evaluated length 1200 47.24 μm Mil

2 Wz 34.3 1.35 μm Mil

3 Wa 10.5 0.41 μm Mil

5

Example: Tablet

Curvature of a tablet case

3D measurement of small parts

One-Shot 3D MeasurementObtains 3D measurement data over a wide area in seconds, including measurement of curvature and small changes in surface texture.

Conventional measurement devices

Limited viewing areaA small field-of-view makes it difficult to measure curvature and irregularity over large areas.

Max. height

Min. height

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Some things can only be seen with 3D measurement.

Introducing the One-shot 3D Measuring Macroscope

Inspecting components now requires 3D data

KEYENCE combined the advanced optical design of our digital microscopes with the high-speed,

high-accuracy measurement and 3D technology of our displacement gauges to develop a macroscope

that completes instant 3D measurements.

Internal structure of a watch

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The 3 Main Benefits of One-shot 3D Measurement

P.8

Precise 3D measurement of a wide area

Innovative optical technology and hardware

User-independent measurements

Place and push 3D measurement and measurement assistance functions P.12

A wide range of easy 3D analysis tools

Extensive measurement and imaging capabilities P.16

One-shot 3D Measuring Macroscope

VR-3000 Series

NEW

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Precise 3D measurement of a wide areaThe world’s first one-shot measurement algorithm

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Real Color 3D Technology

Red, green, and blue light from a dedicated lighting unit are captured by a new high-accuracy CMOS

sensor. Images captured separately with each light color are compiled to create a full color image. This

process produces vivid and detailed images that cannot be obtained with a standard color camera and

white-light illumination.

XYZ Traceability

The measurement results, obtained using the world's first algorithm of its type, are traceable according

to international standards, so users can obtain highly-reliable measurements.

Calibration

A calibration gauge with inspection results and a calibration certificate are included. This allows

calibration to be performed on-site by anyone, ensuring accurate and repeatable measurements

over time.

National Institute of Advanced Industrial Science and Technology (AIST)

JCSS accredited organization

Gauge block

Height difference measurement device

Calibration block

National Institute of Advanced Industrial Science and Technology (AIST)

JCSS accredited organization

Standard Scale

Coordinate measurement equipment

Calibration chart

National standard National standard

X-YZ

9

CMOS

VR-3000

World’s First One-shot 3D AlgorithmWe combined our TMT one-shot algorithm for high-accuracy, true color measurements with our high resolution 3D technology to create the world’s first algorithm for instant 3D measurement.

TMT (Telecentric Multi-Triangulation) Algorithm

We combined three, double-telecentric lenses with the multi-triangulation technology of our displacement gauges to create a unique algorithm for high-speed, high-accuracy 3D measurement.

Measurement Principle (right)

Bands of light from the transmitter lens are scattered across the surface of the object

being measured. When the reflected light is observed from another angle (receiver

lens), height differences on the object make the bands of light appear distorted.

An image of these distortions is taken using a CMOS sensor, and triangulation

calculations are performed to measure the height and position at each point.

Receiver lens

Light source

Transmitter lens

Object being measured

Page 10: VR-3200 Brochure

High Accuracy with a Telecentric Lens

Feature size is unchanged as the lens moves in the Z

When measuring objects with height differences, it is important

that the field-of-view remains constant as the lens moves in

the Z direction. By using a telecentric lens, the VR-3000 can

accurately measure height differences up to ±5 mm ±0.20".

Minimal distortion throughout the field-of-view

A telecentric lens with minimal distortion throughout the entire

viewing area is essential for one-shot measurement of areas

as large as 3 cm 1.18".

Industry’s first

10

Contact-type measurement device

Installation area12" x 17"

When viewing object from above

Standard lens

Telecentric lens

VR-3000 Series

Minimal distortion over the entire measurement area.

Precise one-shot 3D measurement over a large areaAn innovative combination of optical technology and hardware

Three, Double-telecentric LensesTo achieve high-accuracy 3D measurement, it is crucial that the transmitter and

receiver lenses are made in such a way to minimize distortion, and that changes

in the distance between the object and lens do not alter the size of the image.

The VR-3000 contains a total of 3 wide telecentric lenses, used in combination with

the industry’s largest CMOS. The advanced optical design allows high-accuracy

one-shot 3D measurement of areas up to 3 cm 1.18".

Standard camera lensDistortion in periphery of lens

VR-3000 Series Minimal distortion throughout entire field

Space-saving design requires minimal operating area

The small footprint allows the unit to be placed

anywhere that has access to a 100 VAC power outlet.

3-dimensional measurement device

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Accurate Imaging

No Vibration Isolation Required

11

High-accuracy CMOS sensorThe industry’s largest high-accuracy CMOS is used, allowing data to be obtained with minimal noise for high-resolution image capture.

Specially designed vibration-proof rubberThe VR-3000 is made of a vibration-proof material with over four times the vibration prevention of conventional materials. The material absorbs a wide range of vibration, from low to high frequencies, allowing for steady imaging even at high magnifications.

Real Color Light Unit The VR-3000 has a light source that emits red, green and blue light for true color reproduction. The combination of an optical system and optical fibers minimizes inaccuracies when composing the colors.

Designed to withstand large amounts of vibrationStrength analysis was used to create a highly-rigid frame and remove the need for vibration isolation equipment like an air table. The image above is a diagram of the strength analysis on the casing on the unit.

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Conventional Measurement Devices User Measurement results

Person A 0.34

Person B 0.29

Person C 0.35

Person X 0.31

2. Probe selectionDifferent contact probes need to be selected according

to the sample or purpose of measurement.

1. Positioning Adjustments such as sample positioning

and stage alignment need to be

completed by the user.

3. Parameter selectionVarious measurement conditions need to be set.

Several adjustments need to be made by

the user, meaning that measurement results

may be inconsistent.

Intensity Range

Distance Speed

User-independent measurementsPlace and push 3D measurement

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Just place the sample and click one button.

One-shot 3D Measuring Macroscope

Without AALG With AALG

User Measurement results

Person A 0.35

Person B 0.35

Person C 0.35

Person X 0.35

Measurements are completed instantly

with just a click of the Measure button.

Repeatable and accurate results can be

obtained by anyone.

AALG (Advanced Auto Light & Gain) algorithm allows accurate data to be obtainedThe transmission method of the projected light and the receiver sensitivity

are automatically adjusted to the optimal conditions for the sample being

measured, meaning that users only need to click the Measure button. This

prevents adjustments made by a user from causing inconsistencies when

gathering 3D data.

Industry’s first

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Extensive measurement assistance tools make it possible to measure shapes by automatically establishing baselines such as top, bottom or intersection points. With contact-type systems, inaccuracies tend to occur with these measurements. Now, with the measurement assist tools, these measurements can be made accurately and easily.

Case: Axial direction of a cylindrical bar (measuring wear of axles, etc.)

Linear: Standard setting

Surface: Standard setting

Case: Angle between two surfaces (folding angle of pressed sheet metal, etc.)

Contact-type

Upward slope

Downward slope

Fixed

Contact-type

With assistance tools

With assistance tools

VR-3000

A base level can be set for wide surfaces, preventing them from being affected by the slope of the sample.

User-independent measurementsMeasurement assistance functions are available to eliminate inconsistencies between users

Assistance tools identify edges and centers of different shapes

Measurement baselines are created based on a surface area to improve measurement accuracy

It can be difficult to accurately set the proper baseline when using a linear incline correction, which can lead to large errors in measurement. For example, when measuring two surfaces that are 10 mm 0.39" apart, a measurement error of nearly 20 μm 0.79 Mil will occur with an incline of just 0.1 degrees. The VR-3000 has several functions for determining the baseline based on a surface area, allowing for accurate setting of the baseline and reducing measurement errors.

Example: Height difference of 0.35 mm 0.01" set

Contact-type

Results are greatly affected by the slope of the sample

Height difference: 0.31 mm 0.01"

Height difference: 0.35 mm 0.01"

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Visualize and quantify differences over the same area

15

All settings and measurement specifications for an image are stored in a template that can be applied to other samples instantly. The automatic position correction function also makes it possible to complete measurements at the same location on multiple samples, even when the samples are not placed in the same orientation.

Repeatable comparative measurement *Requires optional VR-H1P Analyzer expansion module

The 3D comparative view displays the images of two samples side-by-side and quantifies differences in structure, including height and cross-sectional area.

2. Use this template to automatically measure the same location on samples B, C and D.1. Complete a profile measurement for

sample A and save a template.

A

B

C

D

Template function for completing repeat measurements on similar parts

Eliminate variations during repeated or comparative measurements

Automatic position correction

Regardless of sample orientation

Automatic position

correction function

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A wide range of easy 3D analysis tools Easily complete 3D measurements on any sample

Measure height, width, angle and radius

X, Y and Z measurement

Measurements such as height, width, cross-sectional area, angle and radius can be made by simply pointing and clicking across the desired area.

Profile measurement

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Measure the average height difference, volume, surface area, and area-to-surface area ratio of any area selected on the screen.

Measure average height difference Measure volume and surface area

Roughness parameters including Ra and Rz can be measured for the intended area while viewing either a 2D or 3D image.

Various parameters, such as Sa and Sz can be measured for a selected area in accordance with ISO 25178. Differences in appearance and texture can be quantified easily.

Curvature, line roughness (ISO4287:1997), surface roughness (ISO 25178)The VR-3000 is equipped with a variety of metrology functions for quantifying roughness and surface deformations.

Measure line roughness Measure surface roughness

Measuring curvature and distortion

Average height difference, volume and surface area measurement

Line and surface roughness measurements

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A wide variety of easy-to-use 3D analysis and reporting toolsOne-click measurement and simple report creation

Gather and analyze 3D dataA function guide is included for data analysis - eliminating the need for training!

By simply placing the sample on the stage and pressing the “Measure” button, 3D data will be collected in just a matter of seconds. Once the data has been obtained, measurement and analysis can be performed in the Analyzer software.

Intuitive software design makes analysis incredibly easy. The user can simply move their mouse over each measurement icon in the function guide to see a brief description of the measurement type, eliminating confusion when measuring.

STEP1

Data capture

STEP2

Measurement

Page 19: VR-3200 Brochure

The VR-3000 comes with an unlimited site license for the Analyzer Software, so you can view and collect measurement data from any PC.

19

After completing a measurement, a report can be generated instantly with a single click

Site license

CAD compatible

Formatted reports can be created and saved easily, eliminating the trouble of making a report from scratch for each sample. The Template function (see page 15) can also automatically perform measurements and create reports over the same location on a sample.

3D data collected by the VR-3000 can be saved as an .stp file and output to a variety of CAD programs.

STEP3

Report

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StitchingWide-area 3D Measurement

Simply place a sample on the stage and

Even for large workpieces,

Click the button.

High-speed motorized XY stage

enables automatic 3D measurement of a large sample.

* The VR-H1J stitching module (optional) is required.

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A F

21

A large area of 200 mm x 100 mm 7.87" x 3.94"can be measured.

A large surface can be observed and measured in 3D, which makes advanced analysis possible.

Images are stitched at a high speed to cover a wide area quickly.

200 mm 7.87" (Max.)

100

mm

3.9

4"

(Max

.)

Precision measurement is ensured even on a stitched image

Incline correction Stage inclination caused by the weight of a workpiece can be accurately corrected with sensing technology.

Auto Focus mode The VR-3000 implements an Auto Focus function that is able to automatically adjust for changes in an objects height when stitching in the XY directions.

Data recapture If any area is not originally captured when stitching, it is possible to re-scan only those specific locations, without having to re-scan the entire part again.

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The VR-3000 is designed with unique telecentric lenses created by advanced optical technology developed through 20 years of microscope design experience. The high-quality lenses provide large depth-of-field observation with minimal distortion.

Telecentric lenses with a large depth-of-field

Extended depth-of-field function

Telecentric lenses combined with the KEYENCE depth composition function allow for sharp focus of the entire surface without the need for any manual manipulation of the part. This function produces fully-focused images of samples, even when working at high magnification, where depth-of-field is limited.

22

An easy-to-use microscope for everyday inspection

Large depth-of-field

Conventional microscope VR-3000 Connector 12x

Conventional microscope VR-3000 PCB 12x

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Extensive 2D measurement functions

Capture high-quality microscope images

High-definition imaging

9 megapixel 3 CMOS cameraSamples can be imaged under magnifications ranging from 12x to 160x. High resolution images of up to 9 megapixels can be captured and saved by simply pushing the Capture button.

Observation that surpasses the limits of optics

16-bit HDR functionThe VR-3000 is able to capture up to 16 bits of red, green and blue color data to perform significantly more accurate imaging of a sample than what can be captured with traditional 8-bit devices.

9 megapixel 3 CMOS camera

Red, green and blue data are

obtained for each pixel, allowing

for clear observation with excellent

color reproduction.

� Reflective samples cannot be imaged clearly due to the limited levels of color that can be captured.

� Details in low contrast samples cannot be seen.

With one click the system will capture additional color data by varying the shutter speed

Problems

8-bit(256-color)

Conventional

method

� By increasing the levels of color gradation, samples with bright spots or dark spots can be imaged clearly.

� Low contrast samples can be imaged clearly.

256 times more levels of color than a conventional deviceEffects

16-bit (65,536-color)

HDR function

Without HDR With HDR Resin surface 40x

Various measurements, such as distance, angle and radius, can be taken simply by clicking the desired points on an image. An edge extraction function and measurement assistance tools also eliminate human error, allowing for consistent and repeatable measurements between different users.

Page 24: VR-3200 Brochure

Transportation/Metal Industries

24

Tool blade edge

Gear Bearing

Metal disk Metal fracture surface (Ductility)

Applications (1)

Die-cast parts

Structural analysis

Gear shape analysis

Waviness/Warpage

Radius measurement

Shape of fracture surface

Wear analysis

Page 25: VR-3200 Brochure

Semiconductor/Electronic Industries

25

Overall appearance of PCB / Curvature of entire PCB / Waviness of plated area of PCB

PCB Connector pin

Surface roughness on casing

Main image

Integrated MEMS multi-project prototype chip for VLSI Design and Education Center (VDEC)

Waviness/Deflection

High-accuracy 3D Height difference

Surface roughness MEMS structure

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Height difference/Waviness

Chemical/Plastic Industries

Check of O-rings for leakage Height differences on console surface

Handy terminal

Resin mold product

❚ Output to CAD programs

Applications (2)

Fan blade angle

Containment analysis

Angle

Height difference

Sink mark/Waviness

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27

Other Industries

Business card printing Dents formed between fibers (Measured while fibers are being pressed with a glass plate.)

❚ Comparison of surface roughness between fingertips and palm

Skin and wrinkles on a hand

Entire dental arch

Glass

Fibers

Interdental space between molars

Dent/Volume

Surface roughness

Structural analysis Shape/Surface area

Waviness on specific area

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Product Lineup

■ XY-axis motorized control ■ Z-axis motorized control■ Color imaging ■ Wide-field/high-magnification camera ■ Height measurement repeatability of

0.5 μm 0.02 Mil

■ XY-axis manual control■ Z-axis motorized control■ Color imaging ■ Wide-field/high-magnification camera ■ Height measurement repeatability of

0.5 μm 0.02 Mil

■ Z-axis manual control ■ Wide-field camera ■ Height measurement repeatability of 0.5 μm 0.02 Mil

High-end model with motorized

XY stage

VR-3200

Standard model with

color/high-magnification

imaging capabilities

VR-3100

Basic model

VR-3050

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29

OP-87709 Tilt stageThis stage allows users to observe and measure

objects from any angle without having to

manipulate the object by hand. The stage is

designed so that the sample securely adheres to

the stage when positioned at an angle.

Custom stages KEYENCE offers a variety of large-sized or

special stages to meet your needs.

Contact us for more details.

OP-87708 100 mm 3.94" Spacer Inserting this 100 mm 3.94"-high spacer

between the measurement unit and the base

allows you to measure objects up to 188 mm

7.40"* in height. This extra space can be also

used for setting a heated stage or custom fixture.

VR-S200 Motorized XY stageCombined with the stitching module (optional),

this stage enables the system to perform

image stitching with higher speed and

accuracy.

OP-87717 Manual slider for image stitchingThe manual slider allows measurement of

a wider field, up to 270 mm 10.63", when

used together with the Stitching Module

(optional).

188 mm

7.40"

Optional Items

* When the VR-S200 is mounted, the maximum height is 170 mm 6.69".

Page 30: VR-3200 Brochure

290

343310150

14.1

34470

496

48

147

150

428

195

11726

25.3

8480

182

8 × M6 Depth 10 0.39"

228

328125

97 22414.1

34470

150

496

48428

147

328.4

91 109310

290

171

344

228.5

(77 3.03")

414

35

35

35180R

Unit: mm inch

70147

342

109.5 115.5

42848

496

14.1

330310

328.4

290

165

225

165

109.5

179200

73.5376

6

13.46"13.46"2.76"5.79"11.42"

0.24"

19.53"7.87"

8.86"

7.05"4.31"

1.46"6.50" 6.50"0.24"

2.89"

0.56"

12.20"12.99"12.93"

4.31" 4.55"

16.85"

2.76"2.76"

11.42" 11.42"

13.54" 13.54"

1.89"

5.79"

19.53"19.53"

0.56" 0.56"

8.98"

8.82"12.91"

4.92"

3.82"

1.89"1.89"

5.91" 5.91" 5.91"

16.85" 16.85"

7.17"1.00"4.61"

1.02"

3.15"7.68"

3.31"

6.73"3.58" 12.20"

12.20"13.50"

12.93"

4.29"

1.38"

1.38" 1.38"R7.09"

16.30"

13.54"

9.00"

5.79"

30

External Dimensions

Head VR-3050 Head VR-3100

Head VR-3200 Motorized XY stage VR-S200

Controller VR-3000K

ModelController VR-3000KHead VR-3200 VR-3100 VR-3050

Motorized XY stage VR-S200 Standard Optional OptionalXYθ stage OP-87715 × Standard OptionalManual slider for stitching OP-87717 × Optional Optional100 mm 3.94" spacer OP-87708 Optional Optional OptionalTilt stage OP-87709 Standard Standard OptionalCalibration standard OP-87710 Standard Standard Standard

Viewer software VR-H1VE Standard Standard StandardAnalyzer software VR-H1AE Standard Standard StandardStitching module VR-H1J Optional Optional OptionalAnalyzer expansion module VR-H1P Optional Optional Optional

VR-3200 VR-3100 VR-3050 Control PC

Head

Controller VR-3000K Monitor (optional)

System Configuration Diagram

Page 31: VR-3200 Brochure

31

First-class customer support that only a direct service system can provide

Specifications

Motorized XY stage VR-S200

VR Head/Controller

KEYENCE employs a direct sales system that eliminates intermediaries, such as distributors and dealers, from our sales channel.

Our experienced, highly-skilled sales engineers respond quickly to customers’ inquiries, providing them with exceptional after-sales service and support.

KEYENCE also offers free on-site inspection services and provides equipment loans free of charge in the event of a failure.

With this level of service, KEYENCE provides post-sales support you can rely on.

* Optional item mountable on VR-3100 or VR-3050.

ModelController VR-3000KHead VR-3200 VR-3100 VR-3050

Wide-field mode High-magnification mode Wide-field mode High-magnification mode Wide-field mode

Magnification on a 15" monitor 12× 25× 38× 50× 40× 80× 120× 160× 12× 25× 38× 50× 40× 80× 120× 160× 12× 25× 38× 50×

Field-of-view

Horizontal (H): mm inch

24.00.94"

12.00.47"

8.00.31"

6.00.24"

7.60.30"

3.80.15"

2.50.10"

1.90.07"

24.00.94"

12.00.47"

8.00.31"

6.00.24"

7.60.30"

3.80.15"

2.50.10"

1.90.07"

24.00.94"

12.00.47"

8.00.31"

6.00.24"

Vertical (V): mm inch

18.00.71"

9.00.35"

6.00.24"

4.50.18"

5.70.22"

2.90.11"

1.90.07"

1.40.06"

18.00.71"

9.00.35"

6.00.24"

4.50.18"

5.70.22"

2.90.11"

1.90.07"

1.40.06"

18.00.71"

9.00.35"

6.00.24"

4.50.18"

Zoom 1x to 4x

Measurable height *1 10 mm 0.39" (±5 mm ±0.20")

1 mm 0.04" (±0.5 mm ±0.02")

10 mm 0.39" (±5 mm ±0.20")

1 mm 0.04" (±0.5 mm ±0.02")

10 mm 0.39" (±5 mm ±0.20")

Standard scale *2 0.1 μm 0.004 Mil 0.5 μm 0.02 Mil

Repeatability (σ) *3Height measurement 0.5 μm 0.02 Mil

Width measurement 1 μm 0.04 Mil 0.5 μm 0.02 Mil 1 μm 0.04 Mil 0.5 μm 0.02 Mil 1 μm 0.04 Mil

Stitching function *4

Full automatic (XY stage automatic control + auto focus) measurement

Manual (XY, Z)

Auto adjustment, Auto template analysis –

Stage

XY stroke 184 x 88 mm 7.24" x 3.46" (motorized) 70 mm 2.76" *5 (200 mm 7.87" *6) (manual)

Z stroke 90 mm 3.54" (motorized) 90 mm 3.54" (motorized) 88 mm 3.46" (manual)

Rotation ±180°(sample rotating stage) ±90°(θ stage) –

Tilt ±30° or more ±30° or more –

Working distance 75 mm 2.95"

Image receiving element 4 megapixel monochrome CMOS

Transmitter lens Double telecentric lens x2

Receiver lens Double telecentric lens

Light sourcesObservation light source LED ring light (red, green, blue) LED ring light (white)

Measurement light source White LED

Image size 1024 x 768 pixels, 2048 x 1536 pixels

Data processing Dedicated PC specified by KEYENCE (OS: Windows 7) *7

Power sourceSupply voltage 100 to 240 VAC ±10%, 50/60 Hz

Power consumption 150 VA

Environmental resistance

Ambient temperature for usage 15 to 30°C 59 to 86°F

Relative humidity for usage 35 to 80% (no condensation)

Weight Controller 3.8 kg

Head *8 28.0 kg 22.5 kg 20.6 kg

*1 Low range ±5 mm ±0.20" and high range ±0.5 mm ±0.02" around the focal point position. *2 Height measurement resolution. *3 When measured in height 20 times measurement mode/width 20 times measurement mode with the KEYENCE calibration gauge. *4 The stitching module (VR-H1J) is required.*5 The VR-3050 requires the XYθ stage (OP-87715). *6 When the OP-87717 manual slider for stitching used. *7 Windows 7 Professional and Ultimate. *8 Weight of measurement unit: 10.8 Kg

Travel speed 10 mm 0.39"/sec (max.)

Travel range 184 x 88 mm 7.24" x 3.46"

Stage size Top surface: 215 x 165 mm 8.46" x 6.50" (rotary plate: ø140 mm ø5.51")

Weight 6.5 kg

In addition to the “Getting Started Guide” provided with the product, a full color manual is also available.

Most manufacturers

Direct sales

[ KEYENCE ]

Customer

Customer Sales company Distributor Manufacturer

KEYENCE

Page 32: VR-3200 Brochure

KA1-1024

Regional offices COFLGAIL

DenverTampaAtlantaChicago

ALCACA

BirminghamN.CaliforniaLos Angeles

TXVAWAWI

DallasRichmondSeattleMilwaukee

SCTNTNTX

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www.keyence.com

KEYENCE MEXICO S.A. DE C.V.PHONE: +52-81-8220-7900 FAX: +52-81-8220-9097 E-mail: [email protected]

INKSKYMA

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OHOHORPA

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Copyright (c) 2014 KEYENCE CORPORATION. All rights reserved. VR32-KA-C-US 1074-1 611883 Printed in Japan

KEYENCE CANADA INC.Head Office PHONE: 905-366-7655 FAX: 905-366-1122 E-mail: [email protected] PHONE: 514-694-4740 FAX: 514-694-3206

KEYENCE CORPORATION OF AMERICACorporate Office 669 River Drive, Suite 403, Elmwood Park, NJ 07407 PHONE: 888-539-3623 FAX: 855-539-0123 E-mail: [email protected] & Marketing Head Office 1100 North Arlington Heights Road, Suite 210, Itasca, IL 60143 PHONE: 888-539-3623 FAX: 855-539-0123

SAFETY INFORMATIONPlease read the instruction manual carefully in order to safely operate any KEYENCE product.

The information in this publication is based on KEYENCE’s internal research/evaluation at the time of release and is subject to change without notice.

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NEW

Providing non-contact profile and roughness measurements on nearly any material

3D LASER SCANNING MICROSCOPEVK-X100/X200

❙ 200× - 24000× magnification❙ 0.5 nanometer Z-axis resolution on any material❙ High-resolution, large depth-of-field observation❙ Profile and roughness measurements with zero sample preparation❙ Measures thickness and uniformity of clear layers❙ Acquires data on angles approaching 90 degrees

The New Standard for Microscopes

DIGITAL MICROSCOPEVHX-5000

NEW

❙ All-in-one microscope that incorporates observation, image capture and measurement capabilities❙ Depth-of-field 20 times greater than optical microscopes❙ Motorized XYZ controls for simplified operation❙ Instantly view any area entirely in focus❙ Intuitive user interface allows everyone to perform analysis easily❙ Advanced 2D and automated area measurement functions