39
MEMS & MEMS PRO Presenter: Abdelrahman Samy El-Tamawy

Introduction to MEMS and MEMS PRO

Embed Size (px)

DESCRIPTION

Introduction to MEMS and MEMS PRO simulating tool

Citation preview

Page 1: Introduction to MEMS and MEMS PRO

MEMS & MEMS PRO

Presenter: Abdelrahman Samy El-Tamawy

Page 2: Introduction to MEMS and MEMS PRO

AGENDA

• MEMS Overview• Modeling and Simulating MEMS• Finite Element Method• MEMS PRO Tool

Page 3: Introduction to MEMS and MEMS PRO

MEMS OVERVIEW

Micro

Electro

Mechanical

Systems

Definition

Page 4: Introduction to MEMS and MEMS PRO

MEMS OVERVIEW• Size μ

Page 5: Introduction to MEMS and MEMS PRO

MEMS OVERVIEW

• Biotechnology• Vehicles• Smart devices• Printers• Projectors

APPLICATIONS

Page 6: Introduction to MEMS and MEMS PRO

MEMS OVERVIEW

• Vehicles

APPLICATIONS

VIDEO

Page 7: Introduction to MEMS and MEMS PRO

MEMS OVERVIEW

• Silicon• Polymers• Metals• Ceramic

FABRICATION MATERIAL

Page 8: Introduction to MEMS and MEMS PRO

MEMS OVERVIEW

• Deposition• Lithography• Etching

FABRICATION PROCESS

Page 9: Introduction to MEMS and MEMS PRO

MEMS OVERVIEWFABRICATION PROCESS

Page 10: Introduction to MEMS and MEMS PRO

MODELING AND SIMULATING MEMS

• Real experiments cost• Physical model• Mathematical models • numerical models

• FEM (Finite Element Method)

• BEM (Boundary Element Method)

Page 11: Introduction to MEMS and MEMS PRO

MODELING AND SIMULATING MEMS

• Approximate solution• Dividing• Simpler approximation• Global approximate solution• Tools (COMSOL/ANSYS)

FINITE ELEMENT METHOD

Page 12: Introduction to MEMS and MEMS PRO

MEMS PRO

Page 13: Introduction to MEMS and MEMS PRO

MEMS PRO

• Set of CAD tools• Allow data sharing• Design and Analysis• 3D model generation• Powerful optimization

algorithms• For MEMS and IC devices

WHAT IS MEMS PRO

Page 14: Introduction to MEMS and MEMS PRO

MEMS PRO

• Behavioral model from FEA• Different formats• 3D Modeling w.r.t Fab sequence• Cross section viewer

MODELING TOOLS

Page 15: Introduction to MEMS and MEMS PRO

MEMS PRO

• Cell view• Symbol Mode

• Schematic Mode

• Objects• Primitives

• Instance

S-EDIT (SCHEMATIC-EDIT)

Page 16: Introduction to MEMS and MEMS PRO

MEMS PROS-EDIT

Page 17: Introduction to MEMS and MEMS PRO

MEMS PROS-EDIT

• Mechanical elements

Page 18: Introduction to MEMS and MEMS PRO

MEMS PROS-EDIT

• Optical elements

Page 19: Introduction to MEMS and MEMS PRO

MEMS PRO

• Functionality• Tracing specific node• Collapsing charts

W-EDIT (WAVE-EDIT)

Page 20: Introduction to MEMS and MEMS PRO

MEMS PROW-EDIT

Page 21: Introduction to MEMS and MEMS PRO

MEMS PRO

• Functionality• Library Palette

L-EDIT (LAYOUT-EDIT)

Page 22: Introduction to MEMS and MEMS PRO

MEMS PRO

• Library paletteL-EDIT

Page 23: Introduction to MEMS and MEMS PRO

MEMS PROL-EDIT

• Plate• Comb drive

Page 24: Introduction to MEMS and MEMS PRO

MEMS PROL-EDIT

Page 25: Introduction to MEMS and MEMS PRO

MEMS PROL-EDIT• Technology

manager

Page 26: Introduction to MEMS and MEMS PRO

MEMS PROL-EDIT• 2D/3D Model view

Page 27: Introduction to MEMS and MEMS PRO

MEMS PROL-EDIT• 2D/3D

Model view

Page 28: Introduction to MEMS and MEMS PRO

MEMS PROL-EDIT• Running

simulation

Page 29: Introduction to MEMS and MEMS PRO

MEMS PRO

• Layout vs. Fabrication• Flexible DRC

DESIGN RULE CHECKER

Page 30: Introduction to MEMS and MEMS PRO

MEMS PRODRC• Complete set of DRC

Page 31: Introduction to MEMS and MEMS PRO

MEMS PRODRC• Specific DRC

command

Page 32: Introduction to MEMS and MEMS PRO

MEMS PRODRC• Min Distance• Min Overlap• Min spacing• Min surround

Page 33: Introduction to MEMS and MEMS PRO

MEMS PRODRC

• Run• Verification

Error Navigator

Page 34: Introduction to MEMS and MEMS PRO

MEMS PRODRC• Current distance:

2um.• Rule distance:

> 4um.

Page 35: Introduction to MEMS and MEMS PRO

MEMS PROOPTIMIZATION

Page 36: Introduction to MEMS and MEMS PRO

MEMS PROEXPORTING MODEL

Page 37: Introduction to MEMS and MEMS PRO

MEMS PROWHAT NEXT?

• Analysis (FEM – BEM)• Pre-Fabrication• Fabrication

Page 38: Introduction to MEMS and MEMS PRO

MEMS PROANSYS

Page 39: Introduction to MEMS and MEMS PRO

MEMS PROEND

NEXT: ANSYS TOOL WITH IBRAHIM AWAD