Parker Hannifin Corporation

New Sampling/Sensor System Initiative Request for Proposal Submittal©Submitted by Parker Hannifin Corporation

Prepared by Steve Doe, Analytical Market ManagerRevised January 3, 2001

IntroductionParker Hannifin Corporation is pleased to submit the following conceptual design proposals for New Sampling System/Sensor Initiative subcommittee review. Several Parker Divisions have worked together to prepare this proposal, including the Veriflo, Instrumentation Valve, Filtration & Separation (Balston), Seal, and Instrumentation Connector Divisions. Parker consultant Frank Ruiz of Ruiz & Associates has provided overall design direction and converted the Request for Proposal (RFP) sample system designs into the surface mount system proposals provided within this submittal. Those of us within the Parker organization involved in the Petrochemical Industry are very happy to participate in this initiative and look forward to working with the subcommittee. The RFP is a well thought out “future-scape” of the Petrochemical Industry and provides us with direction on how to best service the needs of the Industry.

With annual sales of nearly $6 billion, Parker has had the capability to make strategic acquisitions providing the Petrochemical Industry with the broadest sampling system component product offering available from a single source. Therefore, Parker is uniquely qualified to collaborate internally and draw upon our experiences in the Semiconductor Industry to provide “next generation” solutions to the Petrochemical Industry. Having participated in SEMI with Parker engineers in key committee chairmanship positions for nearly 15 years, we understand the history behind the current trends within that industry. Likewise, our similar committee experience within the ISA and understanding of the challenges faced by the Petrochemical Industry allows us to evaluate parallels and deviations between the two industries, which ultimately leads us to technical solutions best suited to address the issues outlined in the RFP.

The proposals contained herein are conceptual, based on proven design standards currently employed within our existing product offerings. We have made every effort to address the issues outlined in the RFP with current technology, however we acknowledge that future innovations and development will enhance this design proposal beyond its current state. With this in mind, we have built in capacity within this proposal to capitalize on future complementary developments.

Following is an outline of this submittal, which covers most of the issues addressed in the RFP through commentary or drawings. Specific RFP points not addressed include: a) Electrical Interfaces, b) Proposals for a sensor/electrical bus, c) Software standardization protocols.

Outline1. Devices Available (references attached file component profile-1.doc)2. Device Block Substrate Design (references attached file Substrate Drawings.ppt)

2.1. Block to Block Attachment & Sealing (references attached file SK4268 Stick Assy.pdf)

2.2. Block to Device Attachment & Sealing2.3. End Blocks

3. Programming a Sample Stream3.1. RFP Design #3

4. RFP Design #5 (references attached file ISA Drawing 5A&5B-1.doc)5. RFP Design #6 (references attached file ISA 8 Stream-1.doc)6. RFP Design #3 (references attached file ISA SYSTEM #3 (4 DRAWINGS)-1.doc)7. Conclusions

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Devices AvailableThe following table outlines the surface mount devices currently available (or under development), including the Parker Division responsible for the manufacture of each device. A rendering of each of these devices is included the attached file component profile.doc.

The Vaporizing Regulator is the only product not currently available in surface mount technology, however it could be integrated into a surface mount system via traditional tube and fitting interface.

1. Device Block Substrate Design The heart of surface mount technology is the substrate to which each control device is mounted, as each substrate block replaces the tube and fitting connections associated with a traditionally plumbed system. The ISA SP76 proposal is based on the semiconductor industry’s use of surface mount technology where 1½” square blocks are employed with a variety of metallic seal interfaces for device connection. This technology provides a control platform for only a single stream and addresses the semiconductor industry’s desire for smaller footprint/volume gas delivery systems with fewer weld connections. While the various interface designs have been in place for several years, there is only limited agreement within the semiconductor community on a true global standard. Surface mount technology is only widely employed in Asia and an industry leading domestic semiconductor OEM has recently standardized on an 11/8” platform in an effort to further reduce space requirements. Lessons learned within the Semiconductor Industry include difficulty maintaining device performance standards and price levels as footprint size shrinks. A further challenge to global standardization is the fact that seal configurations differ amongst the various tool OEM’s and system integrators throughout the world. Thus, the Semiconductor Industry may not be a mature model upon which to base future standards for the Petrochemical Industry as it has yet to truly standardize on dimensional and interface criteria.

The Parker substrate design proposal accommodates the 1½” elastomeric seat seal interface set forth in the SP76. Furthermore, our design proposes a 2.88” wide substrate block with (5) flow streams to accommodate both the 1½” device footprint as well as larger footprint devices such as currently available industrial regulators and flow controllers. This approach allows for flow channels such as sample stream inlet, fast loop outlet, vent, low pressure header, steam heating,

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and device air actuation pressures. Each block can be “programmed” in its manufacture to direct flow in a wide variety of paths, as will be seen in the discussion entitled “Programming a Sample Stream”. The attached file Substrate Drawings.ppt includes (2) drawings that show our detailed designs. Slide #1 shows a 2.88” wide by 2.50” long substrate block to accommodate larger devices such as currently available industrial regulators (Parker IR4000 series) and flow controllers (Parker SC423XL series). The larger platform also provides additional space for potentially mounting analyzer cells and other devices. The second slide on the Substrate Drawings.ppt file shows a 2.88” wide x 1.50” long substrate to accommodate all devices supplied by any manufacturer meeting the SP76 elastomeric seat seal interface standard. Both designs incorporate (5) flow holes which will provide system designers with tremendous flexibility, as many of Parker’s devices will incorporate multiple inlet and outlet holes for stream selection at each device site.

Replacing the conventional fabricated tube and fitting connections with a machined block can provide manufacturing cost challenges, as we have seen in the Semiconductor Industry. The blocks proposed in this submittal have 1/8” (.125”) stream flow holes, which presents a 23:1 length to diameter drilling ratio if they are to be traditionally machined. Manufacturing options under evaluation for the blocks include multi-spindle drill heads, conventional casting, HIP casting and powdered metal, all of which allow the holes to be economically produced. Parker has experience in all of these areas and looks forward to further discussion with the committee regarding these technologies and the metallurgical influence on the sample stream surface.

2.1. Block to Block Attachment & Sealing Surface mount substrate blocks are attached to each other with similar technology to that employed on the R-Max stream-switching valve offered by the Instrumentation Valve Division. As can be seen in the attached file SK4268 Stick Assy.pdf (accessible in Acrobat 4.0), special screws with female threads in the screw cap heads are linked to each other in a series. This method provides discrete thread loading at each connection, yet allows for an infinite number of connections. Each screw has a dowel pin feature that aligns itself to the counterbore of each substrate block. The dowel pin feature and hexhead of each screw protrudes from its respective block to assist in the alignment of the adjoining block

Block to block stream sealing is accomplished through standard elastomeric o-ring seals encased around each stream in a machined counterbore. Such a sealing method has been employed throughout the instrumentation world for many years and is a familiar sealing technology within the Petrochemical Industry, providing a robust and forgiving leak tight connection in the 1x10-4 cc He/sec range.

Note: The SK4268 Stick Assy.pdf file erroneously calls out a 1.75” block dimension that should be 1.50”

2.2. Block to Device Attachment & Sealing Attaching a surface mount device to a substrate block is accomplished with (4) socket head cap screws, drawing the device to the substrate. Sealing is accomplished with elastomeric o-rings similar to those employed in the block to block interface. While the ISA SP76 proposes both metallic and elastomeric seals, we strongly feel that elastomeric o-ring option provides a much better solution for the majority of Petrochemical Industry applications for the following reasons:

Metal seals and their associated sealing surfaces are very susceptible to leaks caused by micro scratching and other surface imperfections.

In many cases metal seals & sealing surfaces must be 100% visually inspected prior to assembly, which is a cost adder in the field.

Field damage to a device or substrate sealing surface can result in a scrap part, which can bring a system down if a replacement part is not immediately available in the field.

Handling and makeup of metal seals and their associated sealing surfaces requires significant amounts of training for all phases of the supply chain.

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Elastomeric seals are widely used in the Petrochemical Industry, which will minimize the learning curve associated with design changes.

Elastomeric seals are much more forgiving of imbalanced mounting loads

For those applications demanding PPT detection levels, we recommend using our Ultra-High-Purity (UHP) products currently supplied to the semiconductor industry.

2.3. End Blocks Figure 1 below is a representation of a typical modular sample stream stick. The end blocks noted in the figure provide traditional tube connection points via inverted compression fittings for each flow stream. In all cases possible, Parker recommends eliminating pipe thread connections in sample streams as they are subject to contaminating the system and thread galling. In cases where pipe threads transition to tubing via male compression adapters, the leak path potential is more than doubled; therefore inverted compression fittings machined directly into the block provides the highest quality tube makeup possible. The end blocks also provide substrate connection points (cap screw and o-ring as previously described) and manual isolation ball valves for each flow stream. Inlet and outlet isolation of the surface mount stick is an important design feature for servicing the stick as system pressure is isolated and the potential for contaminant introduction into the system is minimized when the stick is removed.

2. Programming a Sample Stream Converting a sample stream from a schematic layout into a hardware layout is much simplified with surface mount technology. Traditionally plumbed systems require thought regarding component centerlines, mounting mechanisms, fitting & tube takeoffs, tube bend radii, and a host of other issues that are eliminated with the surface mount approach. With various substrate blocks “sub-programmed” at the manufacturer’s facility, an engineer can simply plug blocks together on paper to determine the overall sample stream system program. This process will be streamlined as Parker automation software is developed to assist the designer with “drag and drop” icons, BOM generation and assembly drawing generation. Such software is among the project release tasks planned by Parker. A simple manual substrate design demonstration follows.

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3.1 RFP Design #3 The following schematic layout was extracted from the RFP Design #3 as those steps of the system that can be accomplished with modular surface mount technology:

In terms of substrate block design, the schematic can be translated as follows for the O2 Analyzer stream:

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Note 1 above points out a system feature that allows flow streams to be isolated within a block; providing maximum stream utilization flexibility. From this point, the system is ready to be built with the surface mount devices. Two units similar to the rendition below would be required for this application, one for oxygen and one for moisture:

4. RFP Design #5 (references attached file ISA Drawing 5A&5B-1.doc)

5. RFP Design #6 (references attached file ISA 8 Stream-1.doc)

6. RFP Design #3 (references attached file ISA SYSTEM #3 (4 DRAWINGS)-1.doc; this is a duplication of the outline above for size clarity.

7. ConclusionParker Hannifin is committed to furthering the technology employed within the Petrochemical Industry and looks forward to working closely with the NeSSi Committee. We have many resources throughout our organization including: the Instrumentation Group Divisions mentioned earlier; a Ph.D. Metallurgist to discuss surface condition interaction with flow streams; a Central Engineering Department capable of software development; and an Automation Group with system components and integration capabilities to help overcome the challenges with introducing new technologies. Our focus within the Process Analyzer world is to provide systems solutions, and we see this submittal as a working document to facilitate further communications with the Committee to implement the strategies of the RFP.

Since our initial submittal, several questions have been raised which we have included, with their respective answers, in the attached file NeSSI FAQ’s.doc. We look forward to hearing your collective feedback on this proposal. Inquiries regarding this submittal may be sent to the author.

Respectfully submitted,Steven C. Doe

Analytical Market ManagerParker Hannifin Corporationsteve_doe@parker.com

cc: John Morse, Business Unit Manager/Instrumentation Valve DivisionTim Shadrick, Product Manager/Instrumentation Valve DivisionDan Theal, Product Manager/Veriflo DivisionJohn Ronan, Development Engineer/Filtration & Separation DivisionKen Perrotta, Product Development Manager/Filtration & Separation DivisionKim Stelzleni, Regional Sales Manager/Instrumentation GroupFrank Ruiz, Ruiz & Associates

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