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( Transmission Electron Microscopy:TEM ) 穿透式電子顯微鏡. Advisor: Kuen-Hsien , Wu Student: Jyun -Li, Wu. Outline. Introduction Principle Application Comparison Conclusion Reference. Introduction. Introduction. 1924 Louis de Broglie. 1926 Hans Busch. 1931 Ernst Ruska. 1939. Principle. - PowerPoint PPT Presentation
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( Transmission Electron Microscopy: TEM)穿透式電子顯微鏡
Advisor: Kuen-Hsien, Wu Student: Jyun-Li, Wu
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OutlineIntroduction
Principle
Application
Comparison
Conclusion
Reference
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Introduction
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Introduction
1924 Louis de Broglie
1926 Hans Busch
1931 Ernst Ruska
1939
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Principle規格:( 1 )電子源:熱陰極電子鎗(鎢絲或是 LaB6 燈絲)( 2 )最大加速電壓: 120KV( 3 )倍率:最低 50x ,最高 600,000x( 4 )傾斜角度:正負 30 度
圖片來源 : 南台科技大學
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Principle
Vacuum System : To increase the mean free path of the electron gas interaction for the voltage difference between the cathode and the ground without generating an arc .
Electromagnetic Lens System : A series of electromagnetic lenses and apertures are used to reduce the diameter of the source of electrons and to place a small, focused beam of electrons onto the specimen.
Sample Holder : TEM specimen stage designs include airlocks to allow for insertion of the specimen holder into the vacuum with minimal increase in pressure in other areas of the microscope.
Imaging System : Imaging methods in TEM utilize the information contained in the electron waves exiting from the sample to form an image.
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Principle
S = 0.61λ/NA
λ = h / p
LaB6
圖片來源: http://www.hk-phy.org/atomic_world/tem/tem02_e.html
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Principle
圖片來源: http://www.hk-phy.org/atomic_world/tem/tem02_e.html
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Principle
Elastic Scattering
Inelastic scattering
Back-scattered Electron
圖片來源: http://www.microscopy.ethz.ch/elast.htm
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Analysis of material contain :
Application
Material morphology
Material defects
Chemical composition
Crystallographic structure
Extremely high resolution images
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Application
Epitaxy structure
Polycrystalline silicon
圖片來源: http://el.mdu.edu.tw/datacos//09510221040A/%E7%A9%BF%E9%80%8F%E5%BC%8F%E9%9B%BB%E5%AD%90%E9%A1%AF%E5%BE%AE%E9%8F%A1TEM.pdf
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Application
Bright field image
Dark field image
圖片來源: http://el.mdu.edu.tw/datacos//09510221040A/%E7%A9%BF%E9%80%8F%E5%BC%8F%E9%9B%BB%E5%AD%90%E9%A1%AF%E5%BE%AE%E9%8F%A1TEM.pdf
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Application
BFI of particle in Al-Cu alloy
DFI selected to show the particle seen on their side
DFI showing the conspicuous close to vertical particle
圖片來源: http://el.mdu.edu.tw/datacos//09510221040A/%E7%A9%BF%E9%80%8F%E5%BC%8F%E9%9B%BB%E5%AD%90%E9%A1%AF%E5%BE%AE%E9%8F%A1TEM.pdf
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ApplicationThree-dimensional image
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Application南台科技大學 -奈米科技研究中心: JEOL JEM- 1230穿透式電子顯微鏡 (120 kV TEM)TEM影像分析1000元 /小時 學校單位
1500元 /小時 研究單位
2000元 /小時 營利事業單位
成功大學 -微奈米科技研究中心 :高解析場發射掃描穿透式電子顯微鏡(High-Resolution Transmission Electron Microscopy ; HR-TEM)680自行操作 /小時 1800 代工學界 /小時
3600 代工業界 /小時
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Comparison
SEM : 1. Samples must be conductive.2. Samples can not be a powder or a
volatile items.3. The scattered electrons in SEM are
backscattered or secondary electrons.4. SEM has only 0.4 nanometers.
TEM : 1. Samples must be conductive.2. TEM sample need to prepare for thickness.3. Using elastic scattering and inelastic scattering
for image. 4. The resolution of TEM is 0.5 angstroms.5. Specimen size must be under 3mm.
圖片來源: http://highscope.ch.ntu.edu.tw/wordpress/?p=1599
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Because of TEM analysis would be broken the sample, so we should consider what formation we can obtain in TEM, but TEM can provide high resolution better than SEM.
Both SEM and TEM are two types of electron microscopes and are tools to view and examine small samples.
Conclusion
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http://investor.fei.com/http://highscope.ch.ntu.edu.tw/wordpress/?p=1
599http://www.hk-phy.org/atomic_world/tem/tem02
_c.htmlhttp://news.gamme.com.tw/388598http://en.wikipedia.org/wiki/Transmission_electr
on_microscopyhttp://homepage.ntu.edu.tw/~ntuipse/TEM.htmhttp://www.microscopy.ethz.ch/elast.htmhttp://www.differencebetween.net/science/differ
ence-between-tem-and-sem/
Reference
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Thanks for your attention
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