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Annual Report Extention to PVSCAN. Artak Hambarian NREL, August, 2007. Outline. The goal of the project Preliminary calculations (excel) Block diagram Components: + Mechanics; + Optics; + Analog Electronics; + Digital Electronics/Data Streaming; + Motion Control; + Software. Providers - PowerPoint PPT Presentation
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Annual Report Extention to PVSCAN
Artak HambarianNREL, August, 2007
Outline
The goal of the project Preliminary calculations (excel) Block diagram Components:
+ Mechanics; + Optics; + Analog Electronics; + Digital Electronics/Data Streaming;+ Motion Control;+ Software.
Providers Current Status
The goal of the project
To achieve rapid polar scanning of semiconductor wafers up to 300 mm (12”) in diameter for specularity detection with resolution of 10µ in the first phase, and 1-2µ in the second phase
In the second phase PL and OBIC can be added, Cartesian scan employed.
Preliminary calculations
Modes of polar scan: constant angular velocity (CAV); constant linear velocity (CLV).
CAV: the number of dots on ONE loop defines the data acquisition rate at a given rpm.
CLV: the number of dots on the LARGEST loop defines the data acquisition rate at a given rpm.
CAV and CLV
Number of points = N Number of points = N/2
Preliminary calculations (excel)
Wafer size, mm 300 300 300 RPM 3,000 3,000 3,000 Resolution, micron 10.0 3.3 1.1 Scan time, minutes 5.0 15.0 45.0 Total information, bytes 5,654,866,776 50,893,800,988 458,044,208,893 Information flow rate, 2 ch., B/s 9,424,778 28,274,334 84,823,002 Readout frequency, Hz 4,712,389 14,137,167 42,411,501
Preliminary calculations (excel) 2
Wafer size, mm 300 300 300 RPM 3,000 3,000 2,200 Resolution, micron 10.0 3.3 1.1 Scan time, minutes 5.0 15.0 61.4 Total information, bytes 5,654,866,776 50,893,800,988 458,044,208,893 Information flow rate, 2 ch., B/s 9,424,778 28,274,334 62,203,535 Readout frequency, Hz 4,712,389 14,137,167 31,101,767
Block Diagram
wafer
Spindle,
encoder
Optical probe
Linear stage, encoder, r Analog amplifier
Motion Control
ADC, Data streaming, PC, User
Innterface, Drivers,
VI-s.
Components
Mechanics: table, granite substrate, spindle, vacuum chuck, linear stage.
Optics: optical probe Motion Control: encoders, multipliers,
processor Analog Electronics: amplifiers Digital Electronics/Data Streaming: ADC-s,
Counter, Processor, PXI/…e. Software: User Interface, VI-s, drivers,
PC transformation, pattern recognition, storage management, etc.
Mechanics, requirements
Mechanical design
Mechanics: table support
Mechanics
Table:- designed by AUA and YPI;- to be manufactured by YPI
Other components: granite substrate, spindle, vacuum chuck, linear stage:- designed by AUA and YPI;- to be manufactured by AeroTech Inc, Pittsburg, PA.
Optics
Optical probe, in process, to be designed and manufactured by NREL.
Laser:- CW- Stability- Noise
Photodetectors (PD): low noise, high speed avalanche PD.
Analog Electronics: amplifiers
Thermal Stability Noise Input/output impedances to deal
with capacities of the photodiodes. Output impedances to deal with
ADC (50 input through coaxial cable.
Trans-Impedance Preamplifier
Motion Control, Data streaming, Synchronization
PX
I Express / P
XI
PXI ExpressController
NI PXIe-8105
PXI ExpressI/O Module
NI PXIe-6259
PXICounter Module
NI PXI-6602
PXIDigitizer Module 1
NI PXI-5142
PXIDigitizer Module 2
NI PXI-5142
Chassis NI PXIe-1062Q
Analogue Signal
AmplifierSignal 2.1
Signal 2.2
Signal 1.2
From4 PhotoSensors
Encoder Signal
Multiplier
Rotation
and
Radial
Motion
Systems
Pulses From RadialMotion System
Pulses FromRotation System
PMAC
Synch.and
Clocking
Signal 1.1
DAQ Start Pulse
DAQ Stop Pulse
24 Bit Coordinates
KeyboardMouseMonitor
PX
I Express / P
XI
PXI ExpressController
NI PXIe-8105
PXI ExpressI/O Module
NI PXIe-6259
PXICounter Module
NI PXI-6602
PXIDigitizer Module 1
NI PXI-5142
PXIDigitizer Module 2
NI PXI-5142
Chassis NI PXIe-1062Q
Analogue Signal
AmplifierSignal 2.1
Signal 2.2
Signal 1.2
From4 PhotoSensors
Encoder Signal
Multiplier
Rotation
and
Radial
Motion
Systems
Pulses From RadialMotion System
Pulses FromRotation System
PMAC
Synch.and
Clocking
Signal 1.1
DAQ Start Pulse
DAQ Stop Pulse
24 Bit Coordinates
KeyboardMouseMonitor
Motion Control Performs the displacement and takes the signal
about the displacement from encoders Provides displacement pulses at clock
frequency (40 MHz, through multiplier) and absolute coordinate at lower frequency (4 kHz).
Communicates through PCI or PXI bus. Performs backlash and other software driven
controls.
Data streaming
Analog to digital conversion (ADC) Counts of steps and synchronization Digital signal processing for:
- interleaving: omission of signals that do not carry information- on-fly pattern recognition (here or in the main processor)- laser noise cancelling- Other noise reduction algorithms (in process)
PX
I Express / P
XI
PXI ExpressController
NI PXIe-8105
PXI ExpressI/O Module
NI PXIe-6259
PXICounter Module
NI PXI-6602
PXIDigitizer Module 1
NI PXI-5142
PXIDigitizer Module 2
NI PXI-5142
Chassis NI PXIe-1062Q
Analogue Signal
AmplifierSignal 2.1
Signal 2.2
Signal 1.2
From4 PhotoSensors
Encoder Signal
Multiplier
Rotation
and
Radial
Motion
Systems
Pulses From RadialMotion System
Pulses FromRotation System
PMAC
Synch.and
Clocking
Signal 1.1
DAQ Start Pulse
DAQ Stop Pulse
24 Bit Coordinates
KeyboardMouseMonitor
PX
I Express / P
XI
PXI ExpressController
NI PXIe-8105
PXI ExpressI/O Module
NI PXIe-6259
PXICounter Module
NI PXI-6602
PXIDigitizer Module 1
NI PXI-5142
PXIDigitizer Module 2
NI PXI-5142
Chassis NI PXIe-1062Q
Analogue Signal
AmplifierSignal 2.1
Signal 2.2
Signal 1.2
From4 PhotoSensors
Encoder Signal
Multiplier
Rotation
and
Radial
Motion
Systems
Pulses From RadialMotion System
Pulses FromRotation System
PMAC
Synch.and
Clocking
Signal 1.1
DAQ Start Pulse
DAQ Stop Pulse
24 Bit Coordinates
KeyboardMouseMonitor
Data streaming
Data streaming
The sampling rate of analogue signals is assumed to be from 2.5Ms/sec to 40Ms/sec
ADC resolution is 14 bit, we use only 8 bit. for four sensors requires from
4x8bitx2.5Ms/sec = 80Mbit/sec to 4x8bitx40Ms/sec = 1.28Gbit/sec summary capacity of communication channel and signal processing speed
Data streaming
The system is based on PXI express / PXI components mounted into the NI PXIe-1062Q chassis
consists of:- two NI PXI-5142 digitizers, - NI PXI-6602 counter, - NI PXIe-6259 Input/Output module and - NI PXIe-8105 controller.
ADC-s, NI PXI-5142 digitizers
Each of the two digitizers receives two amplified analogue signals from photo sensors
On board signal processing
gain control, offset control, frequency translation, filtering, decimation and interleaving
On board DSP
The filtering is employed in level selection operation during the high precision scanning, which has the reason not to record the data points when scanned segment is clear from defects.
By choosing the threshold level equal to the background noise it will be possible to discard all not necessary sampled data points.
On board DSP
The interleaving process allows to combine the necessary data points into data packets by means of the initial buffering and then to transmit packets at lower data rate without transmission of zero information bytes.
It strongly decreases the data transmission rate through the PXIe/PXI bus
Synchronization - I/O PXIe-6259 module
Laser
CW Stability Noise Noise cancelling algorithm.
Software
User Interface Polar Cartesian transformation VI-s for interleaving On-fly pattern recognition and
indication Storage management (making
smaller files for storage) Simultaneous various size files
creation for easy zooming.
User Interface
System Integration
Excel
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