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7/22/2019 Engineering Science for Microsystem Design
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7/22/2019 Engineering Science for Microsystem Design
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Why?
Fundamental principles of
physics,chemistry and biology
Closely related to design,manufacture andpackaging of microsystems
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ATOMIC STRUCTURE OF MATTER
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ATOMIC STRUCTURE OF
MATTER
Q:What defines the different properties of
elements?
Some familiar terms
Nucleus
Electrons
Atomic number
Example:
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ATOMIC STRUCTURE OF MATTER
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ATOMIC STRUCTURE OF MATTER
Rules Applicable to atomic structure In the periodic table,each element contains a
specific number of protons,and no two elements
have the same number of protons
Electrons with the same number of electrons at theouter orbit have similar properties
Elements are stable with eight electrons in the outer
orbit
Atoms seek to combine with other atoms to createthe stable condition of a full orbit
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IONS AND IONIZATION
Ion and types
Ionization-two methods By electrolysis process
By electron beams
Schematic diagram of ionization by electron beams
Hydrogen and helium are the popular ion sources
Ionization energy
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MOLECULAR THEORY AND
INTERMOLECULAR FORCES
Molecules
Made up of bonds that can be compressed or stretched
on force or actuation
Eg:Sulphuric acid molecule
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Lattice
Bonding forces in lattice:Intermolecular
forces
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Stiction in thin films in surfacemicromachining
the static friction that has to be overcome toenable relative motion of stationary objects incontact
Serious factor-Van der Waals force
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Variation of intermolecular forces with separation Electrostatic nature of forces
Pulling molecules apart prompt the increase of attractionforce to overcome the inherent cohesion
Further separation-rapid decrease of attraction Variation-1/d to 1/d^6
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MOLECULAR THEORY ANDINTERMOLECULAR FORCES
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THANK YOU
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