Kobe University Repository : Thesis

Kobe University Repository : Thesis学位論文題目Tit le

高周波アナログ・デジタル混載ＬＳＩのための基板結合解析と評価技術に関する研究

氏名Author 小坂, 大輔

専攻分野Degree 博士（工学）

学位授与の日付Date of Degree 2007-09-25

資源タイプResource Type Thesis or Dissertat ion / 学位論文

報告番号Report Number 甲4075

権利Rights

URL http://www.lib.kobe-u.ac.jp/handle_kernel/D1004075

Create Date: 2017-12-20

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2.2.1 CMOS Wm;9K*1kpDkgP) . . . . . . . 16

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4.3.1 0.3µm F9HACWNrO . . . . . . . . . . . . . . 47

4.3.2 0.18µm F9HACWNrO . . . . . . . . . . . . . 48

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5.3 !P79F‘_WUm< . . . . . . . . . . . . . . . . . . . 62

5.3.1 !Ps)_W . . . . . . . . . . . . . . . . . . . . . 62

5.3.2 pDbGjs0 . . . . . . . . . . . . . . . . . . . . 63

5.3.3 pDkg,j79F‘N7_el<7gs . . . . . 63

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5.4.3 pD(;!PB3 . . . . . . . . . . . . . . . . . . . 66

5.5 k@ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 67

6 k@ 71

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K\35l"5iK"G#<W n&’k]1CHr=9?aK (Fig. 3.8)"

34 h 3 O IjNhpDkgrO

Table 3.1: rO39H

h ~V (s)

Q,@[V 300

FTsi;"F-YQ9 1800

Q,@N;m?o|"5VbGkkg 30

7_el<7gs (SPICE) 30-120

S3bottom O S1]<HNlLNs8FLrp7F S1K\35lk#

Figure 3.9O"G#<W n&’k,<Ijs0=$NbGk=j!G"

k#bGk=j!O n+,<Ijs0=$H1M@,"=L?&’k>

NbGkG S3bNQ,@r|n7"S3inner H S3outer r8.9k#>N

bGkGS3top rFjA7"33GOG<tNp?Pk/bGkGS3bottom

rjA9k#5iK"G#<Wn&’k,<Ijs0rMCHj9HG==

9k?aK (Fig. 3.9(b))"S3KX"9k]<H (S3inner"S3outer"S3bottom)

O"FLG S3top K\35lk#

3.2.7 pDyAs)bGk8.39H

3liNFo,<Ijs0NdoC->AK++kW;39HO"0

n~Ht 750MHz"g-1 2GBNo</9F<7gs (Ultra SPARC III)

rHQ7?H-"H%7? F Tsi;Um<rQ$?F9H=$NyA

s)8.K?Qs 30 ,"SPICEKhk SQia<?7_el<7gsK

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3.3. 7_el<7gsKhk>A&rO 35

Figure 3.10: (a) w%M8-"(b)LQM8-

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Figures 3.11"3.12"3.13GO"p+"n+ZSG#<W n &’k,<I

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36 h 3 O IjNhpDkgrO

Figure 3.11: F,<Ijs0=$Nq3(4HNzL (10Ωcm)

QoiJ$,"G#<W n &’k,<Ijs0=$GOb~HhN.f

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3.3.3 G#<Wn&’k=$NfS

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3.4. k@ 37

Figure 3.12: F,<Ijs0=$Nq3(4HNzL (100Ωcm)

@d!P@H7FQ,@,,WG"k#=3G"Q,@rF9HQ?<s

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38 h 3 O IjNhpDkgrO

Figure 3.13: F,<Ijs0=$Nq3(4HNzL (1kΩcm)

3.4. k@ 39

Figure 3.14: XJkg,J$H-NF,<Ijs0=$NzL

40 h 3 O IjNhpDkgrO

Figure 3.15: G#<W n &’k=$NfS#(a)100MHz"(b)2GHz

ACWlYkpD(;,[rO

4.1 o@

0OGO"1mmQJ<NIj*JNhK*1k 2@VNpDkg"J

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42 h 4O ACWlYkpD(;,[rO

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\aGO"F9HACWKBu5lF$kN$:; (TCNS)KP~9k"

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JeNh&JM!+i"Fig. 4.2G(5lkTSDPCbGk,MF5l

F$k#g,OJG8?ks)K*1k~V4eN@0nrlj~V

VV (T) G,d7"F~VVmC/hKs8FLXN<E0nKV-9

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lYk"^?OHis89?lYkNMCHj9HrQ$F~OY/?

hK~"3N7_el<7gsrT&3HG8.9k#

TSDPCbGkOs8FLH9$CAK^^lkq3.,N_G==5

lkNG"g,OJG8?ks)KD$Fb7_el<7gs~Vrg

K:i93H,G-k#^?"@ilk7_el<7gskLN:Y

b"His89?lYkG7_el<7gsrT&lgH[\1yG"

k#5iK"bGkOlY8.9lP$UN95N~VNhK*1kE

.HArrO9k3H,D=G"QC1<8o‘d\sF#s0o$d

tNQ9H$C?M9JH_)FM8-N>AKFxQG-k#

F9HACWNTCNSs)O"TSDPCbGkN6r=N^^s)=

7?bNG"k (Fig. 4.3)#TCNSO"l$uK[V5l?(;;fKC

H (NSU)H?j(C88.s)G=.5lF$k#NSUOPO<KMOS

G=.5l?FLr\37?$sP<?"l$Hn0s)G=.5lF

4.2. ACWlYkpDkgbGjs0 45

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XN<E0n,88k#?j(C88.s)O/mC/Ydr/85;

k?aNs)G=.5lF*j"FVmC/VN/mC/ABYd~V

r_jG-k#^?"?j(C88.s)bG/mC/(C8N+\

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4.2.2 ACWlYkGNpDbGjs0NUm<

4.2.2.1 >hj!KhkbGjs0 (0.3µm F9HACW)

TCNSs)+iNpDN$:r7_el<7gs9k?aKO"TCNS

s)r=9 TSDPC bGkHE;[~"JiSK0i&sI[~r^‘

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sT<@s9rH_go;?7_el<7gsbGk,,WG"k [20]#Figure 4.4K>hNpDkgbGk8.Um<r(9# :"E; (Vdd)

[~H"pDK\@rD0i&sI (Vss)[~rl$"&H+ijP9

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4.2.2.2 H%j!KhkbGjs0 (0.18µm F9HACW)

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/=@8lw

\&fKX9k/=@8

[1] D. Kosaka, M. Nagata, Y. Murasaka, and A. Iwata, “Evaluation of

Isolation Structures against High-Frequency Substrate Coupling in

Analog/Mixed-Signal Integrated Circuits,” IEICE Transactions on

Fundamentals of Electronics, Communications and Computer Sci-

ences, Vol. E90-A, No. 2, pp. 380–387, 2007.

[2] D. Kosaka, M. Fujiwara, T. Danjo, and M. Nagata, “On-Die Mon-

itoring of Substrate Coupling for Mixed-Signal Circuit Isolation,”

Japanese Journal of Applied Physics, Vol. 46, No. 4B, pp. 2244–

2251, 2007.

[3] D. Kosaka, M. Nagata, Y. Murasaka, and A. Iwata, “Chip-Level

Substrate Coupling Analysis with Reference Structures for Verifica-

tion,” IEICE Transactions on Fundamentals of Electronics, Com-

munications and Computer Sciences, Vol. E90-A, No. 12, to appear

[4] D. Kosaka, M. Nagata, Y. Hiraoka, I. Imanishi, M. Maeda,

Y. Murasaka, and A. Iwata, “Isolation Strategy against Substrate

Coupling in CMOS Mixed-Signal/RF Circuits,” in Symposium on

VLSI Circuits Digest of Technical Papers, pp. 276–279, 2005.

[5] D. Kosaka and M. Nagata, “Equivalent Circuit Modeling of Guard

Ring Structures for Evaluation of Substrate Crosstalk Isolation,”

in Proceedings of IEEE Asia and South Pacific Design Automation

Conference, pp. 677–682, 2006.

88 /=@8lw

[6] D. Kosaka, M. Fujiwara, T. Danjo, and M. Nagata, “On-Die Moni-

toring of Substrate Coupling for Mixed-Signal Circuit Isolation,” in

Proceedings of 2006 International Conference on Solid State Devices

and Materials, pp. 62–63, 2006.

[7] D. Kosaka, M. Nagata, Y. Murasaka, and A. Iwata, “Chip-Level

Substrate Noise Analysis with Emphasis of Vertical Impurity Pro-

file for Isolation,” in Proceedings of 2007 IEEE Custom Integrated

Circuits Conference, 27.3, to appear

[8] .d ge, JD ?, <d B4, dD T, “CMOS _C/9H70J

k? RF s)K*1kpDkgPv,” ERpsL.Xq .X;s

ICD2005-75, pp. 49–53, 2005.

[9] >\ /:, .d ge, JD ?, <d B4, dD T, “ACWlY

kpD(;rO;Q,” pshXq DA 7s]8&‘ @88, pp.

157–162, 2005.

[10] Ie ", .d ge, JD ?, “_C/9H70Jks)K*1k

pDkgN*sACWbK?js0,” ERpsL.Xq .X;s

ICD2006-171, pp. 1–5, 2006.

[11] .d ge, JD ?, <d B4, dD T, “pD/m9H</PvN?

aN,<Ijs0=$NyAs)bGk=j!,” ERpsL.Xq

.X;s ICD2006-206, pp. 55–60, 2006.

[12] .d ge, >\ /:, JD ?, <d B4, dD T, “pD/m9

H</NrOHPv,” h 9s79F‘ LSI o</7gCW, 2005.

[13] #6 5y, .d ge, Ie ", JD ?, “pDbGkrM87?b

~HpD(;!Ps)_W!N!$,” h 7s7j3s"Jm0RF

&fq, 2006.

1.1 LSIbtNACWlYk?IjNhpDkg . . . . . . . . 4

1.2 E;?0i&sIP&s9KhkYd~VNQ0 . . . . . 4

1.3 "/F#V,<IPsIU#k? . . . . . . . . . . . . . . 7

1.4 E;E.r?3=9kRSB-CMOS s) . . . . . . . . . . 7

1.5 pDN π ?bGjs0 . . . . . . . . . . . . . . . . . . . . 8

1.6 aC7eN?QA,d . . . . . . . . . . . . . . . . . . . . 8

1.7 <5KhCFpDN,dtrQ= . . . . . . . . . . . . . . 9

1.8 E.;"q3"FLbGkKhkpDN$:m~ . . . . . 10

1.9 -ShE53sQl<?rQ$?pDN$:,js) . . . 11

2.1 CMOS Wm;9K*1kpDkgP) . . . . . . . . . . . 16

2.2 lL*JpDkg,%=$#(a)p?,<Ijs0"(b)n?

,<Ijs0"(c)G#<Wn&’k]1CH (HjWk&’

k=$)"(d)G#<W n &’k,<Ijs0 . . . . . . . . 17

2.3 ClWm;9rQ$?pDkg,%=$#(a)bq3pD"

(b)SOI=$"(c) (T=$ . . . . . . . . . . . . . . . . . . 18

2.4 4<R!Khk>3NN DC q3,j . . . . . . . . . . . . 19

2.5 DCq3,jkL . . . . . . . . . . . . . . . . . . . . . . . 20

2.6 IjNhpDkg,jN (a) F9H=$"(b),jD- . . 21

2.7 z-~_[~HpDVNFL-kg (XJkg)H7<kI

Khk~1zL . . . . . . . . . . . . . . . . . . . . . . . . 22

2.8 SF+LC ?pD(;!Po . . . . . . . . . . . . . . . . . . 23

2.9 SF+LC s)N (a)AC C-H (b)DCC- . . . . . . . . . . 24

3.1 FTsi;KhkpDbGjs0 . . . . . . . . . . . . . . 26

3.2 IjNhrOUm< . . . . . . . . . . . . . . . . . . . . . 27

3.3 (a)Q,@N[V"ZS (b) ;m"(c) +| . . . . . . . . . 28

3.4 (a)?XQXbGjs0"(b) Tc*;Y,[ . . . . . . . . 29

3.5 l$"&HM8->Aj9H . . . . . . . . . . . . . . . . 31

3.6 p+,<Ijs0=$NbGjs0 . . . . . . . . . . . . . . 32

3.7 n+,<Ijs0=$NbGjs0 . . . . . . . . . . . . . . 32

90 ^lw

3.8 G#<W n &’k]1CH=$NbGjs0 . . . . . . . . 33

3.9 G#<W n &’k,<Ijs0=$NbGjs0 . . . . . 33

3.10 (a) w%M8-"(b)LQM8- . . . . . . . . . . . . . . . 35

3.11 F,<Ijs0=$Nq3(4HNzL (10Ωcm) . . . . . 36

3.12 F,<Ijs0=$Nq3(4HNzL (100Ωcm) . . . . . 37

3.13 F,<Ijs0=$Nq3(4HNzL (1kΩcm) . . . . . 38

3.14 XJkg,J$H-NF,<Ijs0=$NzL . . . . . 39

3.15 G#<W n &’k=$NfS#(a)100MHz"(b)2GHz . . . 40

4.1 G8?ks)N<|E0n . . . . . . . . . . . . . . . . . . 42

4.2 TSDPC bGk . . . . . . . . . . . . . . . . . . . . . . . . 42

4.3 TCNS s)H TSDPC bGkNP~ . . . . . . . . . . . . . 43

4.4 >hNpDkgbGk8.Um< . . . . . . . . . . . . . . 44

4.5 H%7?pDkgyAs)8.Um< . . . . . . . . . . . 50

4.6 ACWlYkpDkg,[7_el<7gsbGk . . . . 51

4.7 0.3µmF9HACWN (a)ACWL?"(b)aC7e,dc

HUC7?*UACW$sT<@s9 . . . . . . . . . . . 52

4.8 0.3µm F9HACWNB,"ZS7_el<7gskL#

(a) HA"(b),[ . . . . . . . . . . . . . . . . . . . . . . . 53

4.9 0.18µmF9HACWN (a) ACWL?"(b) aC7e,d

cHUC7?*UACW$sT<@s9 . . . . . . . . . . 54

4.10 0.18µm F9HACWN,j"7_el<7gsHA . . . 55

4.11 0.18µm F9HACWK*1kpDkg,[N,j"7_e

l<7gskL#(a)D$s?V=$"(b)HjWk&’k

=$ . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 56

5.1 *sACWpDkg!P79F‘5Q . . . . . . . . . . . 58

5.2 *sACWpDkg,js)=$ . . . . . . . . . . . . . . 59

5.3 >hN_-5KhkpDN$:!P! . . . . . . . . . . 59

5.4 _-5Khk~HtQ9 . . . . . . . . . . . . . . . . . . . 60

5.5 !Ps)4N^ . . . . . . . . . . . . . . . . . . . . . . . . 61

5.6 *sACWpDkg,j79F‘N_W"ZSrOUm< 62

5.7 ACWlYkGN!Ps)7_el<7gsN?aNF9

H=$#(a) pDkg,j^"(b)F9H=$?L^ . . . . 63

5.8 7_el<7gskL#(a)pDkg"(b)!PoPO9Z

/Hk . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 64

^lw 91

5.9 ,jO"ZS7_el<7gsQN*UACWs8., . . 65

5.10 !PoNWmH?$W . . . . . . . . . . . . . . . . . . . . 66

5.11 WmH?$WACWN~PO.f/YNB,"ZS7_e

l<7gskLNfS . . . . . . . . . . . . . . . . . . . . 67

5.12 *sACWpDkg,jGbACW . . . . . . . . . . . . . 67

5.13 *sACWpDkg,jGbACWN>A . . . . . . . . . 68

5.14 B,H7_el<7gsN9Z/HkfS . . . . . . . . . 69

3.1 rO39H . . . . . . . . . . . . . . . . . . . . . . . . . . 34

Kobe University Repository : Thesis · 2017-12-19 · Kobe University Repository : Thesis...

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