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MAPS development at IPHC for HEP and X-ray applications
Maciej Kachelmaciej.kachel@iphc.cnrs.fr
➙ IPHC & PICSEL group
➙MAPS for high energy physics
➙MAPS for low energy X-ray applications
➙Summary and Future
KEK, 30 Nov. 2017
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 2
Institut Pluridisciplinaire Hubert Curien
IN2P3INC
INEE INSB
• 300 employees(≳100 researchers)• Pluri-disciplinary: subatomic physics, chemistry, ethology
PICSEL group Complementary expertise
• Physicists: 3 permanent, 1 post-doc
• Micro-electronics designers: 11 permanents, 3 PhD students
• 5 test engineers• Since 1999: 120 publications, 14
PhD defended• ~50 sensors designed (MIMOSA
series)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Partners• Academics:
CERN, USA (Berkeley, Brookhaven), DESY (Hambourg), IHEP in China, …• CMOS foundries:
AMS, TSMC, STM , Tower-Jazz, ESPROS, X-FAB, …
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IPHC-PICSEL group: MAPS Detection of high energy particles with MAPS sensors
• Pioneers in using Monolithic Active Pixel Sensors since 1998- Single particle detection ➙ position at µm level
• Very low signal (≲200 e-)• Pixel noise ≃ 10 to 20 e-• Pixel size 10 - 100 µm• Low occupancy ≃ 1%
Readout in 2 ways:• Analog - external ADC• Digital – on-chip discrimination / ADC
Detection surface:• Individual sensors: 1 to 4 cm2
• Module with several sensors: .. tens of cm2
• Full detector: few 100 cm2
P- substrate
N-WELLnn
P - WELLn n
collecting diodeNMOS NMOS
P - WELL
epitaxial layer ~20 µm
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 4
IPHC-PICSEL strategy
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EUDET 2006/2010Beam Telescope
Spin-off: Interdisciplinary applications, biomedical, space …
ILC >2025Internatinal Linear Collider
CBM 2018Compressed Baryonic Matter
EUDET (R&D for ILC, EU project)
STAR (Heavy Ion physics)
CBM (Heavy Ion physics)
ILC (Particle physics)
HadronPhysics2 (generic R&D, EU project)
AIDA (generic R&D, EU project)
FIRST (Hadron therapy)
ALICE/LHC (Heavy Ion physics)
EIC (Hadronic physics)
Belle II (Particle physics)
CLIC (Particle physics)
…
ALICE 2019A Large Ion Collider at LHC
STAR 2014Solenoid Tracker At RHIC
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
IPHC-PICSEL: STAR experiment
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MIMOSA28 (ULTIMATE)
- ~ 1M pixels- Thinned to 50 µm- 10 chips per ladder- Power dissipation
~350 mW /cm2
400 MIMOSA-28 sensors 360 106 pixels Air flow cooling Top ≲ 35∘C 𝜎𝜎s.p.≃ 4 µmmat. budget = 0.39 % X0 / layer Read-out time ~ 190 µs
Operated 2014-2016
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
PLUME Pixel Ladder with Ultra low Material Embedding
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Mimosa 26 sensors
• Thickness 2 mm• 8 Mpixels, • Readout time 115 µs,• Material budget 0.4 % of X0• Weight - 10 g• Power - 9 Watts (air cooled)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
PLUME – BEAST @ KEK
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 8
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SALAT - Single Arm Large Area Telescope
Motivation -> Big surface and thin reference planes
4.2 cm
4.6 cm
4 x Chips thinned down to 50 μm glued on a 50 μm thick mylar layer• 3.6 M-pixels over 15.3 cm2
• < 200 µs integration time• Gap between the pixels ~ 100 µm
Build with AIDA european project
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Molecular imaging with 𝛃𝛃+ emitters in moving rats MAPSSIC project:
• Constraint on size and power dissipation• 16 x 128 pixels – pitch 30 x 50 µm• Pixel based on Alpide architecture (ALICE)• Power consumption ~ 160 µW• Expected flux - few counts / s – slow readout• IMNC, IPHC, CPPM, CERMEP, NeuroPSi
Currently integrating prototype sensor …
probe in the brain : - section ~500x500 µm2
- sensitive volume (18 um) immune to 𝛾𝛾
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
From previous project PIXSIC
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Current main project of PICSEL groupMIMOSIS - sensor for CBM experiment
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
MIMOSIS - sensor for CBM experimentCurrent main project of PICSEL group
*D. Kim, et al. “Front end optimization for the monolithic active pixel sensor of the ALICE Inner Tracking System upgrade” JINST, Volume 845, 11 February 2017, Pages 583-587
MIMOSIS pixel details: schematic
Vdiode
AMP
THR
Memory 1
Memory 2
MEM_SEL MEM_SEL
MEM
_RST
MEM
_FLUSH
MASKPIXEL_OUT
Sensingdiode
- Pixel design based on Alpide*
- Modifications in sensing part and the memory part
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Current main project of PICSEL group
MIMOSIS pixel details: layout
Single pixel
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
diode
MIMOSIS - sensor for CBM experimentCurrent main project of PICSEL group
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But there is more than 1 pixel…
Full sensor Overview• Matrix of pixels – 504 x 1024• Pixel pitch – 26.88 x 30.24 µm2
• Configurable by I2C• Integration time 5 µs• Readout: 8 x e-link @ 320 Mbit/s
• Small prototype produced• First full scale submission
- Q3 2018
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Monolithic Active Pixel Sensors for low energy X-ray applications
Motivation – MAPS for Imaging Devices
Monolithic Sensor(ex: MAPS)
Hybrid Pixel SensorCCD
Sensitive Volume
Detector
Readout &Processing Cell
Pixel detector
Small pixel pitch Wide energy range Low noise (cooling) No single particle
image Limited counting rate
Single particle counting High counting rate Noise impacted by
detector connection High cost
Bonding detector
Single particle counting Small pixel pitch Low noise Low cost Moderate counting rate
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 16
17
Depletion studies of MAPS Principle
Undepleted MAPS Fully depleted MAPS
p-- epitaxial layer
nwell
deep pwell
pwell
p+ n+ n+
nwell
n+ p+ p+ p+ p+
p substrate
collecting diode (~1 V)NMOS
transistorPMOS
transistor
Depletion RegionX-ray
photon
nwell
deep pwell
pwell
p+ n+ n+
nwell
n+ p+ p+ p+ p+
NMOStransistor
PMOS transistor
X-ray photon
collecting diode (~15 V)
high res p-- substrateor epitaxial layer
• Charge collection by drift and diffusion• Diode at ~ 1.0 V
• Charge collection by drift• Diode at higher voltage ~ 15-20 V
Motivation for having depleted sensors:• Larger depleted volume -> Increased signal • Drift -> Faster charge collection
-> Larger pixels possible (small clusters)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Depletion studies of MAPS
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Pipper sensor (FSI)
Epitaxial layer 18 um Czochralski substrate
Collecting diode
bias
read
Vdiode
Column OUTPUT
• Prorotype - 32x128 pixels• Pixel size 22x22 µm2
• Analog outputs• AC coupled collecting diode• Produced on two substrates:
• Epitaxial layer 18µm• High resistivity substrate
Laboratory measurements with 55Fe in function of diode bias (1-20V)
Energy resolution obtained ~ 300eV
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Depletion studies of MAPS (II)
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METAL layers + oxide ~10µmMETAL layers + oxide ~10µm
Goal: « costless » BSI sensor
[J. HEYMES]
Depleted zone
p+ layer
col. diode
• Thinning 50 µm• Ion implant.• Annealing
Preliminary studies on CZ wafer with 55Fe
col. diode
Post processing done in Jan 2017
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Counting low energy X-rays - Mimosa 22SX
Vclamp
Cc
Rf
power
_powerCollecting diode
Vdiode
Column OUTPUT
Requirements:• X-Ray Energy Range [few 100 eV – 5 keV] with 100% QE
• Counting Dynamic [1-107] ph/pix/s
• High occupancy
• High Spatial Resolution (pixel pitch ~ 20 µm)
First prototype specs Tower Jazz 180 nm CIS
128 x 256 pixels with 22µm pixel pitch
Collecting diode AC coupled to the amplifier
Discriminator with 2 thresholds -> energy window
Binary outputs
16 mm² of active area
Mimosa 22SX
Strategy for counting:• Small pixels – amplification only• Rolling shutter readout• Column Discriminator• Serialization and readout
Counting outside of the pixels
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 20
Mimosa 22SX – energy window
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 21
NIR laser emulates a space-correlated continuous energy spectrum• Short laser pulses (100ns) sent at the beginning of every recorded
frame• Unfocused laser spot –> center ~6000 eV, outer ring ~ 500 eV
NIR laser
Equivalent Stable number of pulses detected throughout range of thresholds=> suggest constant detection efficiency from 800 to 6000 eV
Reconstructed laser spot profile
M22SX – results with X-rays
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Piece of a flex PCB - aluminum strips Image obtained with Mimosa 22SX
1. Front Side Illumination vs Back Side Illumination:• Higher diode voltage => deeper depletion• Higher number of counts BSI => full depletion of 40µm probable• Quantitative interpretation needs to account for charge sharing
⇒Need low X-ray energy tests to verify that full depletionis achieved and entrance window is operational
2. X-ray Image (single photon counting)
• Obtained with 55Fe – very low flux• Thickness of the aluminum strips calculated => 15 µm for the thin (150µm), and ≥ 50µm for the thick strips
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
M22SX results – Soleil – 1.5keV
Post process M22SX Vdiode = 40V
We can see 1.5 keV photons!
23M.Kachel - MAPS development at IPHC for HEP and X-ray applications
A spin-off application for M22SX
Dose Monitoring at CYRCé Cyclotron at IPHC:• 24 MeV protons • Milimeter beam size
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First tests with Mimosa 22SX• Linear behaviour in the measured fluence range• At least 1000 protons/pix/s possible
Motivation:Monitor dose for small beam size (problematic with current detector)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications
Depleted MAPS – good for HEP!
Tests performed with irradiated Pipper2 chip at the University of Frankfurt
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 25
1013 neq/cm²T=-60°C
5x1014 neq/cm²T=-60°C
1V3V
10V 20V
1V3V
10V20V
1013 neq/cm2 performance restored after cooling 1015 neq/cm2 degraded, but we still see the energy peak
Summary – future Plans
PICSEL group capabilities:• Design of sensors for HEP experiments / low X-ray applications• Readout systems• Sensor integration into modules / detectors
Future plans :• Sensor following MIMOSIS architecture (towards ILC)
- Integration time < 1µs- Power pulsing- …
• Large(r) scale depleted imager with analog readout- Active area ~1cm2
- Applications : X-ray spectroscopy, Hadron therapy, …- SOI technology would be an ideal candidate (depletion wise..)
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 26
Thank you for your attention
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 28
M.Kachel - MAPS development at IPHC for HEP and X-ray applications 29
Short-term fellowship at KEK
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Plan for the Short-term fellowship at KEK
Hands-on the SOI technologyDesing of the analog part of MIMOSIS pixel usedfor CBM experiment• Schematic + layout + simulations• How much we benefit from the SOI vs TJ 0.18µm :
- Pixel size- Power- Speed
Future collaboration
31M.Kachel - MAPS development at IPHC for HEP and X-ray applications
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