Meso Machining Norman Salmon Engineering Program Manager Lawrence Berkeley National Lab...

Meso Machining

Norman Salmon

Engineering Program Manager Lawrence Berkeley National Lab

njsalmon@lbl.gov

• Meso-scale machining: 10 µm ~ 1mm

bridging the gap between silicon based MEMS and conventional miniature machining.

10-3 10-4 10-5 10-6 [m]

meso machining

miniature machining

silicon µ-machining

Critical dimensions

Micro Milling, Drilling and Turning

Micro Stepper Motor Laminates - Produced Using 100 Micron Diameter Rotary Cutting Tools - Tech Transfer Grant for Empire Magnetics FY2002

100 Micron Diameter Micro Electrodes Produced for Alexander Zholents 2002 AFRD LDRD

Holes as small as 40 Microns can be drilled in Stainless Steel - Shown is a 70 Micron Drill compared with a Human Hair

Micro Rotor

1mm

1mm

Micro Turbine

Micro Engine Components

1mm

Electroplated RF Electrode

125 micron

Meso-Machining Examples

10µm gears on silicon

25µm channel on diamond

FIB Milling

37µm cutting tool

39µm channel on graphite

• Micro Tooling– tooling design – tooling application – materials

» Diamond tools cut by FIB » New workpiece materials

– analysis of cutting performance » Force sensing (MEMS)» Acoustic emissions

25 micron End Mill

10 micron End Mill

Long Term Vision

Laser Cutting and Welding

Micro EDM

LIGA

Micro Turning

Micro Wire EDMFIB

Micro Milling

Micro Molding & Casting

AFM Nano- Machining

LBL - MESO

Machining Lab

Micro Manipulation Stage for Lift-Out Specimen Preparation with FIB

Nano-Manipulator for the Molecular Foundry

x

y

z120mm

Micro Assembly Station

• MEMS Grippers • Gripper Changer • Nanometer

resolution • Haptic Feedback?

Meso machine tool with in situ metrology

• High Speed 170K RPM Hydrostatic Spindle

• Sub-Micron Accuracy

• Integrated CMM Probing, Laser, and Capacitance Inspection

Objectives • Develop Leading Technology

Program in Meso Machining, Assembly, and Metrology

• Develop Partnerships and Collaborative efforts that support and compliment our Technology