Monolithic and Vertically Integrated Pixel Detectors, CERN, 25 th November 2008 CMOS Monolithic...

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Overall view CMOS image sensor activity started in 1998 (aka Monolithic Active Pixel Sensor; MAPS) 1 st tape-out in 2000: test structures for the Star-Tracker in 0.5 and 0.7  m 1 st full-scale sensor submitted in May 2001: the Star-Tracker in 0.5  m Use of technologies down to 0.18  m Use of CIS (CMOS Image Sensors) technologies Patented, silicon-proofed INMAPS technology for high-end sensors Pixel size from 2  m upwards Large pixels IPs 4T pixel Ips Low noise pixel IPs Wafer-scale (200mm) sensor capability Over 40 years of cumulated design experience 3

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