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Nano Hong Talk
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7/21/2019 Nano Hong Talk
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7/21/2019 Nano Hong Talk
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emand for Ultra-High-Density Magnetic Media
Ref. DSI
7/21/2019 Nano Hong Talk
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otivation for Patterned Media
Conventional Continuous Media
Patterned Media
• Barriers to Overcome
- Medium Noise
- Demag. Field- No Sharp Transition
Zigzag Jitter @ TransitionZigzag Jitter @ Transition
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arious Technologies for Patterned Media
Direct PatterningDirect Patterning
A.A. EE--beam Lithographybeam Lithography
B.B. Defining Magnetic Islands byDefining Magnetic Islands by
1.1. Focused Ion Beam (FIB)Focused Ion Beam (FIB)
2.2. Reactive Ion Etching (RIE)Reactive Ion Etching (RIE)
3.3. IonIon--Beam MillingBeam Milling
NanoNano--Imprinting TechnologyImprinting Technology
resist
magnetic layer
Si
resist
Si
magnetic layer
resist
Those technologies are fine BUTThose technologies are fine BUT
Not appropriate for massNot appropriate for mass--productionproductiondue to low throughput, low yield and high cost!due to low throughput, low yield and high cost!
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rocesses for Nano-Injection Molding Technology
(d) Fabrication of polymeric nano-
master by UV molding
(a) E-beam patterning
(c) Si nano-master
(f) Nano-injection molding
(g) Polymeric pillar patterns
PR
(b) ICP etching
(h) Deposition of magnetic materials
(e) Fabrication of metallic nano-stamperby electroforming
SiSi
Polymeric patternsPolymeric patterns
MetallicMetallic nanonano--stamperstamper
SiSi mastermaster
PolymericPolymeric nanonano--mastermaster
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abrication of Polymeric Nano-Master
Polymeric Nano-Master
by UV Molding
Si Master(CD: 40nm, pitch: 80 nm)
UV Light
SiSi mastermaster
PolymericPolymeric nanonano--mastermaster
UV resin
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abrication of Metallic Nano-Stamper
Electroforming System
MetallicNano-Stamper
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ano-Injection Molding Technology
Ni Nano-Stamper
Polymeric Patterns
(CD: 40 nm, pitch 80 nm)
Pattern Transfer
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eposition of Magnetic Materials
Magnetic Islandson 3.5 inch Media
(CD: 40 nm, pitch 80 nm)3.5 in.
Polymeric Patterns
[Pd / Co]10
M
Pd
C
PerpendicularMagnetic Medi
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revious Studies and Acknowledgment
0 0.4 0.8 1.2
(1) CD: 200 nm, pitch 500 nm (2) CD: 100 nm, pitch 250 nm
Nanotechnology, 15 (8), 901-906, 200
Single magnetic domain state
0 0.4 0.8 1.2㎛ 0 0.4 0.8 1.2 0 0.4 0.8 1.2㎛
Financial support:
Ministry of Science and Technology, KOREA through
Center for Nanoscale Mechatronics & Manufacturing(21st Century Frontier Research Program)
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