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Nanoenabled Directions for N/MEMSNanoenabled Directions for N/MEMS
Dennis PollaDARPA MTO
6 March 2007San Jose, CA
Dennis PollaDARPA MTO
6 March 2007San Jose, CA
MTO Symposium
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4. TITLE AND SUBTITLE Nanoenabled Directions for N/MEMS
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12. DISTRIBUTION/AVAILABILITY STATEMENT Approved for public release, distribution unlimited
13. SUPPLEMENTARY NOTES DARPA Microsystems Technology Symposium held in San Jose, California on March 5-7, 2007.Presentations, The original document contains color images.
14. ABSTRACT
15. SUBJECT TERMS
16. SECURITY CLASSIFICATION OF: 17. LIMITATION OF ABSTRACT
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Standard Form 298 (Rev. 8-98) Prescribed by ANSI Std Z39-18
2
A MTO Nanotechnology VisionA MTO Nanotechnology Vision
Chip-Scale Microfluidic Analyzers
Nanosensors
Nanowires for Sensors and Electronics
Nanotechnology Enabled Opportunities
D. Polla 2Approved for Public Release, Distribution Unlimited
3
A
B1 µm
STM Image
50µ m
light in
Figures courtesy of IBM Research
Nanotechnology and N/MEMSNanotechnology and N/MEMS
Images courtesy of Philip Wong, Stanford University
3Approved for Public Release, Distribution Unlimited
Nanotechnology is emerging as a key aspectof integrated microsystems
Nanotechnology enables new applicationsand drives performance
Two key themes:
4
N/MEMS Program Examples
N/MEMS S&T Fundamentals
CNT Sensors
NEMS Biosensors
Nanoresonators
ReconfigurableNanoelectronics
Micro Cryogenic Coolers
Thermal nanostructures
Nanoenabled cryogeniccooling
Micro Gas Analyzers
CNT Preconcentrators
Nanomechanical Sensors
CNT Detectors
FunctionalizedChemiresistors
D. Polla 4Approved for Public Release, Distribution Unlimited
5
Chip-Scale Gas Analyzers ProgramChip-Scale Gas Analyzers Program
Objective:Enable remote detection of chemical agents via tiny, ultra-low power, fast, high sensitivity, chip-scale gas analyzers with low incidence of false positives.
D. Polla 5Approved for Public Release, Distribution Unlimited
6
Sugar Cube – Size InstrumentSugar Cube – Size Instrument
Objective:Enable remote detection of chemical agents via tiny, ultra-low power, fast, high sensitivity, chip-scale gas analyzers with low incidence of false positives.
Air Sample Preconcentrator Separator Detector ControlElectronics
AB
C
DE
D. Polla 6Approved for Public Release, Distribution Unlimited
7
Integrated N/MEMS ComponentsIntegrated N/MEMS Components
Input GasMixture Pre-Concentrator Separator Detector
Analytes
CompactedSlice of
AnalytesSeparatedAnalytes
Input GasMixture Pre-Concentrator Separator Detector
Analytes
CompactedSlice of
AnalytesSeparatedAnalytes
7Approved for Public Release, Distribution UnlimitedD. Polla
Very high effective surface areaChemical functionalization
DRIEChemical polishing
2.5µm2.5µm
Low proff-massChemical functionalization
8
Prec
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Gain ~ 10,000
Enhancement of PerformanceEnhancement of Performance
D. Polla 8Approved for Public Release, Distribution Unlimited
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0 50 100 150 200 250 300 350-40
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7 ag SF6 pulses75 mV bias
∆f (
kHz)
Time (sec)
SF6: (0.9 +/- 0.3) Hz/zgCO2: (1.0 +/-0.3) Hz/zg
CO2 SF6 1 Hz/zg slope
∆f (
kHz)
Added Mass (ag)
9
Nanotechnology BenefitNanotechnology Benefit
Nanotechnology Lessons Learned:Nanotechnology and MEMS (a terrific combination!)
Preconcentration Separation DetectionClean-up
PossibleMultiplexing
PossibleMultiplexing
PossibleMultiplexing
Collection
Micro Gas Analyzers (MGA) Program
Preconcentration Separation DetectionClean-up
PossibleMultiplexing
PossibleMultiplexing
PossibleMultiplexing
Collection
Micro Gas Analyzers (MGA) ProgramNanotechnology Opportunity
D. Polla 9Approved for Public Release, Distribution Unlimited
Nanotechnology enables systems with unprecedented performance:
Size: 40,500 cm3 2 cm320,000X
1,000XSensitivity: 1 ppb < 1 ppt
Analysis time: 15 min 4 s225X
10,000XEnergy per analysis: 104 J 1 J
10
N/MEMS S&T FundamentalsN/MEMS S&T Fundamentals
• Goal:– Support basic research of
importance to DoD in N/MEMS
• Technical Challenges– Failure Mechanisms and physics– New materials and processes– Scaling laws in multiple domains– Interfaces and interconnects
between the macro-micro-nano worlds.
MEMS/NEMS- Surfaces & Interfaces- Reliability Physics- Scaling Physics- Materials & Processes- Interconnections- Noise Mechanisms- Modeling- Signal Processing
MEMS/NEMS- Surfaces & Interfaces- Reliability Physics- Scaling Physics- Materials & Processes- Interconnections- Noise Mechanisms- Modeling- Signal Processing
Microfluidics
Data Storage
Biology & Medicine
Uncooled IR Displays
ChemicalSensing
OpticalComms
Navigation
rf Comms
BiotechnologyD. Polla 10Approved for Public Release, Distribution Unlimited
11
N/MEMS S&T FundamentalsN/MEMS S&T Fundamentals
MEMS/NEMS- Surfaces- Interfaces- Reliability- Scaling- Materials- Fabrication- Modeling- Nanostructures
Microfluidic Processors
UC Irvine
Biosensors
Harvard
Functionalized Surfaces
Cornell
Non-lithographicFabrication
MIT
Materials Interfaces
Stanford
500 nm
Nanowire SensorsColorado
RF ScalingUC Berkeley
Reliability Physics
UC San Diego
ABAB
Self-Configuring ICs
Carnegie Mellon
Nano Probes
Caltech
STI
BOX
M1
Silicon substrate
Metallization Layers
STI
BOX
M1
Silicon substrate
STI
BOX
M1
Silicon substrate
Metallization Layers
Multi-Physics Modeling
Illinois11Approved for Public Release, Distribution UnlimitedD. Polla
12
Nanotechnology VisionNanotechnology Vision
1. Nanoenabled Electronics
Six Nanoenabled Opportunities
2. Nanoenabled Informatics
4. Nanoenabled Plasmonics and Photonics
3. Nanoenabled Biotechnology
6. Nanoenabled Energy
5. Nanoenabled Sensors
12Approved for Public Release, Distribution UnlimitedD. Polla
13
Nanowire Electronics
Nanoenabled Electronics
PMMA
-V
+VVout
Vin
back gate
SiO2
p-FE
T
n-FE
T
K
CNT
-4 -2 0 2 4-2
-1
0
2
1
V out
[V]
Vin [V]
Gain~2
Nanotube gatePMMA
-V
+VVout
Vin
back gate
SiO2
p-FE
T
n-FE
T
K
CNT
PMMA
-V
+VVout
Vin
back gate
SiO2
p-FE
T
n-FE
T
K
CNT
-4 -2 0 2 4-2
-1
0
2
1
V out
[V]
Vin [V]
Gain~2
-4 -2 0 2 4-2
-1
0
2
1
V out
[V]
Vin [V]
Gain~2
Nanotube gate
Key ChallengesControlled GrowthSelective PlacementInterconnections
Self-Configuring Electronics.
A
phase change material
BA
phase change material
B
plan view of 1 tile on chip(100 um x 100 um)Total number of tiles = 10000T. Schlesinger, DARPAN/MEMS S&TFundamentals, CMU.
GeSbTe
13Approved for Public Release, Distribution UnlimitedD. Polla
14
PC via
Si substrate
oxide• NEMS Thermal Actuators • Designed-in stress gradient• 3 µm post, 230 nm tip area
230 nm
1.2 µm
Self-Configuring ICsSelf-Configuring ICs
Imagine… Dynamically changing the basic function of an electronic chip according to current need.
14Approved for Public Release, Distribution UnlimitedD. Polla
15
Nanomechanical Memory
Nanoenabled Informatics
A probe cantilever array in the IBM Millipede. [H. Goldstein]
IBM
Key AspectsMEMS probes used for mediaread/write3 Tbits/inch2 demonstrated
Storage Media
www.nccr-nano.org
Feature size reductions dramatically increase the capacity of storage media. Nanotechnology enables future optical and magnetic storage.
V = 0.1 m/s 1 µm
= 10 µs10 nm
= 100 ns
dwell switching
V = 0.1 m/s 1 µm
= 10 µs10 nm
= 100 ns
dwell switching
15Approved for Public Release, Distribution UnlimitedD. Polla
16
Nanoenabled Biotechnology
Therapeutic nanoparticles can be targeted to specific biological sites.
Medical Therapeutics / Drug Delivery
www.nanocancer.gov
Imagine… Site specific targeting of nerves withtherapeutic nanoparticles that enhance sensory perception.
Nanoparticles
N. Halas, Rice University
16Approved for Public Release, Distribution UnlimitedD. Polla
17
Nanoenabled Plasmonics/Photonics
Plasmonics
Key Challenges
Control of EM-fieldEnhancementMaterials properties
Imagine… Nanosensors with ppq sensitivities and no false alarms.
SERS NanosensorsBasic physics and materialsscience associated withSERS nanoparticles asphysical, chemical, andbiological nanosensors
Spectral finger-printing- sub-ppt sensitivity- PD> 99.99%- FAR < 1:109
- Fast response < 1 s
2000nm
17Approved for Public Release, Distribution UnlimitedD. Polla
18
Nanoenabled SensorsNanoenabled Sensors
www.nanocancer.gov
Nanowires, CNTs, nanocantilevers,nanoparticles,quantum dots,nanoporous,magneticmaterials
Nanowire Sensors
18Approved for Public Release, Distribution Unlimited
www.nanocancer.gov
Application examples: – Gas sensing – Protein/DNA detection– Particle detection– Chemical detection– Signal amplification (e.g.SPR)
Nanomechanical Sensors
Imagine… Integrated multi-functional nanosensor modules capable of multiplexed bioanalysis and physical sensing.
D. Polla
19
Nanoenabled Energy
ZhangP. Yang, U.C. Berkeley
Nanobatteries
Sandia National Laboratories Thermo-photovoltaic Power Converter
Piezoelectric Energy Scavengers
1 μm
Zhang, Nano Letters, 3 (2004) 423-426.
Cornell Prototype MEMS Continuous-Mode Piezo-Cantilever Beta converter
Imagine… Never having to replace a battery.19Approved for Public Release, Distribution UnlimitedD. Polla
20
Nanowires for Sensors & ElectronicsNanowires for Sensors & Electronics
• Goal:– Develop new chemical, and
biological nanosensors based on nanowires
• Applications– All types of sensing– Energy harvesting– Thermal management– New class of nanosensors for
the detection of biochemical warfare agents.
050
100150200250300350400450
800 1000 1200 1400 1600 1800
Raman Shift (cm-1)
Sca
tterin
g In
tens
ity (A
U)
Encoded nanowiresAg nanowires forexplosives detection
P. Yang, U.C. Berkeley SurroMed
M. Natan, OxonicaAu nanowires for multiplexed
bioanalysis
S. Guha, IBM
Vertical selective growthof Ge nanowires for sensorand electronics applications
Assembled Co nanowire
A. Zhang, GE
20Approved for Public Release, Distribution UnlimitedD. Polla
21
Lessons LearnedLessons Learned
1. Largest opportunities for nanotechnology are in enabling new systems
2. Look to nanotechnology to enable performance; not drive down cost.
3. Nanotechnology apps are best driven from top-down not bottom-up.
4. Multi-domain scaling is the key to performance-driven nanotechnology.
5. World competition is intense. Success in nanotechnology requires a vision, patience, and entrepreneurial spirit.
What are the opportunities for nanotechnology?
21Approved for Public Release, Distribution UnlimitedD. Polla
22
SummarySummary
Many, many new challenges remain (Challenge = Opportunity)
Microfluidic Analyzers
Preparation (nanostructures)Preconcentration (nanochem)NanoanalyticsNanodetectors (multiplexing)
SERS Nanosensors
Enhancement Factor (EM)SubstratesGeometriesPorous nanoparticles Nanowires
NanosensorsNanosolar cellsNanoenergy scavengingThermal interfaces
22Approved for Public Release, Distribution UnlimitedD. Polla
dpolla @ darpa.mil
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