Overview of the Semiconductor Emergency Response Forum ... · Overview of the Semiconductor...

Overview of the SemiconductorEmergency Response Forum

(SERF) Manual

Duane Caldwell

Corp. Safety Program Manager, Seagate Technology

Jeffrey Williams

Sr. Environmental Engineer, Department of Defense

SSA2000 Arlington, VA

Introduction

• Presentation will not distribute copies ofmanual or provide details of all sections ofmanual

• Presentation will:– inform attendees of SERF activities,

opportunities & products (e.g., the manual &benchmarking results)

– highlight ERT Best Practices from the manual

– solicit additional active participants

Part One Agenda

• SERF History

• Participating Companies

• ERT Program Structure– Scope of Operations

– Program Requirements

– Program Incentives

• ERT Program Basics– Incident Command

– Emergency Operations Centers

SERF History

• 1995 - SEMATECH hosted a meeting formembers to discuss issues/concerns withemergency response operations

• AMD (Greg Linenfelser) led follow-upmeetings and distribution of a survey in1996. SERF named. Participationexpanded beyond SEMATECH whileremaining a sponsored working group.

SERF History (cont.)

• At SEMATECH under Steve Burnett,additional surveys of best practicesoccurred. Latest survey occurred in 1997.

• SERF manual developed by groupconsensus. At SSA 1998, multi-companyteams were formed to write text for agreedupon chapter headings. Teams werebalanced with respect to size and skills ofparticipants ERT teams.

SERF History (cont.)

• Editing at SEMATECH continued through1998 into 1999.

• SERF Manual published in 1999 throughefforts of 35 companies and 45 participants

• SERF begins exploration of transition fromSEMATECH to SSA sponsorship.

Participating Companies

• AMD

• Allegro Microsystems

• Analog Devices

• Atmel

• Cherry Semiconductor

• Cypress Semiconductor

• Fairchild Semiconductor

• Harris Semiconductor

• Hewlett-Packard

• Honeywell

• IBM

• Intel

• Integrated Device Technologies

• Lucent Technologies

• M/A COM

• Mitsubishi

• Motorola

• National Semiconductor

• NEC

• Nortel

• Philips Semiconductor

• Ramtron

• RF Microdevices

• Rockwell

• Samsung

• SEMATECH

• Silicon Systems

• Symbios

• Texas Instruments

• TSMC

• Unitrode

• UMC

• US Department of Defense

• VLSI Technologies

Scope of ERT Operations

• SERF identified industry scope ofoperations with respect to:– Chemical spills/gas releases

– Fire

– Medical

– Natural disaster

– Security

– Odors

– Evacuations

ERT Charters of Operation

• SERF discussed charters of operation– Ensure evacuation of all personnel

– Information dissemination

– Notifications

– Response to event

– Alarm Response

ERT Program Requirements

• SERF developed guidance for ERT memberrequirements– Physical

– Medical surveillance

– Language

– Skills retention

– Availability/shift coverage

– Union Issues

ERT Program Incentives

• SERF identified industry wide status ofERT program incentives– Voluntary participation v. job description

– Financial compensation range

– Non-financial compensation items

Incident Command System

• SERF established guidance for use of theIncident Command System (ICS)– Developed and used by fire departments

– Provides for unified command of response

– Addresses operations, administration, support

– Ensures proper lines of communication

– Ensure proper span of control

– Applicable on large and small scale responses

Incident Command System

S afety O fficer M ed ica l O fficer

In form ation O fficer

E n try Team L ead er B ack -u p Team L ead er D econ Team L ead er

O p eration s O fficer L og is tics O fficer

In c id en t C om m an d er

Emergency Operations Centers

• SERF identified typical varieties ofoperations centers during response– Incident Command Post

– Central Control Room

– Staging Area

– Response Site

Part Two Agenda

• ERT Response Triggers– Defining Emergencies

– Setting Goals for Response

– Developing Action Plans

• ERT Response & Mitigation– Various Scenarios

• Program Resources

• Case Study & Conclusion

ERT Response Triggers

• Quick, effective, and efficient emergencyresponses start with:– Early detection of problems,

– Quick definition of the situation and its hazards,

– Implementation of comprehensive action plans.

Defining Emergencies:Investigation of Problem Reports

• SERF provides guidance for investigatingproblem reports and defining responses.– Odors, unidentified

– Medical incidents

– Gas alarms and odors

– Chemical spills

– Fire and Smoke incidents

Defining Emergencies:Gathering Data

• SERF provides guidance for gathering dataessential to defining events and identifyinghazards.– Nature of the event

– Types of hazards

– Contributing conditions (e.g., perforated floors,air flow patterns, sensitive populations, etc.)

– Missing or injured employees

Setting Response Goals:Essential Activities

• SERF provides guidance for setting goalsand objectives for responses.– Rescue

– Quantification of Hazards (e.g., airconcentrations of contaminants)

– Observation of Conditions (e.g., open drains,ignition sources, damaged equipment)

– Corrective Action

– Protect (People, Environment, Property)

Developing Action Plans:Assembling Response Resources

• SERF provides guidance for determiningresources required for successful entries andresponses.– Personnel and Teams

– PPE

– Monitoring Equipment

– Tools and Supplies

– Decontamination Stations

Developing Action Plans:Model Scenario Flow Charts

• SERF provides example flow charts fromoperating fab sites for various scenarios.– Chemical Release

• Non-specific

• Hazardous liquid or solid

– Smoke and Fire/Explosion

– Tornado/Severe Weather

– Bomb Threat

– Building Evacuation

Developing Action Plans:Disaster Planning

• Planning Process & Guidance– Analyze Hazards

– Survey Organization

– Develop Emergency Management Organization

– Identify Emergency Functions

– Develop Response Tools (e.g., checklists)

– Develop Capability

– Maintain & Evaluate Readiness

– Revise

Developing Action Plans:Business Resumption Planning

• Recovery Planning Process & Guidelines– Identify Critical Business Functions

– Perform a Risk Analysis

– Document the Recovery Procedures

– Training & Validation

ERT Response & Mitigation:Techniques & Guidelines

• SERF lists techniques and guidance forresponding to and mitigating varioushazardous conditions.– Gas Releases/Fires (e.g, SiH4 and ClF3)

– Chemical Spills (by hazard class)

– Injuries/Illnesses (universal precautions)

– Natural & Technological Disasters (e.g.,earthquakes, severe weather, power failure)

– Bomb Threats

ERT Response & Mitigation:Techniques & Guidelines

• SERF describes examples ofdecontamination techniques and procedures.– Equipment

– Personnel

• SERF discusses training techniques andcurriculum, and provides some examples ofdrill scenarios and evaluations.

Program Resources:References

• Glossary

• Guidance for Developing ERT Documents– site & system maps

– contact lists

– equipment lists & manuals

• List of Recommended Books

• List of Recommended Internet Sites

• SERF Member Company Contacts

Program Resources:Hazardous Materials Inventory

Double-click Icon to view document

a m p l e H M I S F o r m . x l s

Program Resources:ERT Equipment Inventory

S a m p l e E R T Equ ipment Inven to ry

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Program Resources:Emergency Contact Matrix

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E m e r g e n c y C o n t a c t Ma t r i x

Case Study:Chemical Release Flow Charts

n iden t i f i ed Chemica lRe lease . jpg

Re lease Class i f ica t ion . jpg

Haza rdous Mate r i a l Re lease . jpg

Double-click Icons to view documents

Conclusion

• SERF depends on active participation froma wide range of companies and geographicregions.

• The SERF Manual is a first draft ofconsensus practices and sample documentsthat should be expanded and refined, usingan even larger group of contributors.

SERF Contacts

• Interested parties should contact:– Peter Monti, Department of Defense

301.688.0120

– Lori Strong, SSA

703.790.1745