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Process Flow : Overhead and Cross Section Views ( Diagrams courtesy of Mr. Bryant Colwill ). Step 1. Step 2. Step 3. Step 4. Step 5. Step 6. Step 7. Step 8. Step 9. Step 10. Step 12. Step 11. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. T. - PowerPoint PPT Presentation
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Process Flow : Overhead and Cross Section Views (Diagrams courtesy of Mr. Bryant Colwill)
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
TTT T
T TT TTTTTTT
TTTT TT
TTT T
T TT TTTTTTT
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Step 1 Step 2 Step 3 Step 4 Step 5 Step 6
Step 7 Step 8 Step 9 Step 10 Step 11 Step 12
Step 1: Cleaning
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Starting Si Wafer&
Sulfuric Acid / Peroxide Clean
Cross-section View of Wafer
Insert text here
Overhead View of Wafer
Step 2:
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Plasma Enhanced Chemical Vapor Deposition
Of Silicon Dioxide
Overhead View of Wafer
Cross-section View of Wafer
Insert text here.
Probably include picture and name of machine here
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Lithography Patterning
Overhead View of Wafer
Cross-section View of Wafer
Step 3: Lithography Patterning
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Lithography Patterning
Overhead View of Wafer
Cross-section View of Wafer
Step 3: Lithography Patterning (cont.)
name
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
Lithography Patterning
Overhead View of Wafer
Cross-section View of Wafer
Step 3: Lithography Patterning (cont.)
name
name
Step 4:
Color Code: Grey=Si, Blue=Silicon Dioxide, Red=Photoresist
INSERT
Overhead View of Wafer
Cross-section View of Wafer
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
insert
Overhead View of Wafer
Cross-section View of Wafer
Step 5:
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
Overhead View of Wafer
Cross-section View of Wafer
insert
Step 6:
name
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
insert
Overhead View of Wafer
Cross-section View of Wafer
Step 7:
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
insert
Cross-section View of Wafer
Step 8:
Overhead View of Wafer
name
T T
T T
TTTTT
T
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
name
Step 9:
Cross-section View of Wafer
Overhead View of Wafer
T T
T T
TTTTT
T
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
Aluminum Removal byAcid Etch
Overhead View of Wafer
Cross-section View of Wafer
Step 10:
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
Overhead View of Wafer
Cross-section View of Wafer
TTT
T
T
TTT T
T
name
Step 11:
TTT
T
T
TTT T
T
Grey=Si, Blue=Silicon Dioxide, Red=Photoresist , Purple= Phosphorus Doped Glass, Lilac= Silicon with Diffused Phosphorus, Silver=Aluminum
name
Cross-section View of Wafer
Step 12:Overhead View of Wafer
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