Rotary valve thermal oxidizer

ROTAIIY ...INUIAnn OXIDIDIIU.S. Patent 5,871.347. Feb. 16, 1999J.M. Chen et al., assignor.~ toEnj.felhard Corp.• Iselin. N.J.

A rotary regenerative abatementsystem for removal of contami­nants from process gases compris­ing one or more rotors; a transferchamber; a sealing endplate; anadjustable means for rotating thefirst rotor about a longitudinalaxis; and a stationary second ro­tor having a cell density greaterthan that of the first rotor.

ROTAIIY VALVI TIIIRMALOXIDIZIIIU.S. Patellt ,,>,871.:J49. FI·b. 16, 1999•J.C. Jllhnson et al., assij.flwrll til8m it II EngilIeeri IIg Co., 011 tarill,Calif.

A regenerative thermal oxidizercomprising a combustion cham­ber; a heat exchanger having aplurality of heat exchanging seg­ments communicating with thecombustion chamber; a gasstream distribution assembly;and a seal disposed at an inter­face between fixed and rotatingplenums to reduce mixing oftreated and untreated gases.

IlLAPWHDLU.S. Patent 5,871,399. Feb. 16, 1999G. W. Emerson. assignor to MeritAbrasive ProductR Inc., Compton.Calif.

A wheel for abrading and polish­ing a surface of a workpiece.

U.S. Patent 5.871.555. Feb. 16, 1999W.P. Wood. assignor to 3M Co.• St.Paul. Minn.An abrasive grain comprising aceramic alpha alumina-based ma­terial having an alpha aluminasubmicrometer. faceted micro­structure nucleated with manga­nese oxide, the abrasive grainhaving a density of greater than90% of theoretical.

CATIIO.. CONTACTU.S. Patent 5.871.626. Feb. 16, 1999D.E. Crafts et al.• assignors to IntelCorp., Santa Clara. Calif.

A flexible continuous cathode con­tact circuit for electrolytic platingof C4, Tab Microbumps, and ul­tralarge scale interconnects.

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