S05 03 Sinsheimer - SWTest.org · Xtreme Sort: Roger Sinsheimer SWTW 2006Xtreme Sort: Roger...

Xtreme Sort: Roger Sinsheimer SWTW 2006Xtreme Sort: Roger Sinsheimer SWTW 2006

XTREME SPORTS

XTREMEXTREMESORTSORT

Xtreme SportsXtreme Sports

Capabilities:Capabilities:

Capabilities:Capabilities:ReliableReliable

FastFast

FlexibleFlexible

SizeSize

Heat ResistantHeat Resistant

StrongStrong

Back to the FutureBack to the Future

2001 SWTW presentation2001 SWTW presentation

First Page of 2001 presentation

http://www.swtest.org/swtw_library/2001proc/PDF/S6_04.pdf

Back to the FutureBack to the Future

2001 SWTW presentation2001 SWTW presentation

First Page of 2001 presentationV4400 Flash Memory Interface has 2304 I/O channels, 440mm diameter probe card.

V4400 Flash Memory Interface has 2304 I/O channels, 440mm diameter probe card.

http://www.swtest.org/swtw_library/2001proc/PDF/S6_04.pdf

Xtreme SortXtreme Sort

ReliableReliable

Back to the Future IIBack to the Future II

2004 SWTW presentation2004 SWTW presentation First Page of 2004

presentation

http://www.swtest.org/swtw_library/2004proc/PDF/S01_03_Sinsheimer.pdf

Back to the Future II, p2Back to the Future II, p2

The fundamental flaw in spring probes is the lack of force driving the plunger against the barrel

of 2004 presentation

The result of this inherent flaw is DC Resistance instability

DC Resistance histograms of various types of spring probes.

Back to the Future II, p5Back to the Future II, p5As-made Histograms

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 Clad

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 Clad

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel Silver

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post Plate

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.V2 1.6 oz.

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.V2 1.6 oz.Xandex

20000 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.V2 1.6 oz.XandexXZIF

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 Clad

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 Clad

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel Silver

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post Plate

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.V2 1.6 oz.

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.V2 1.6 oz.Xandex

Post T&H Histograms

0 10 20 30 40 50 60 70 80 90 100

Milliohms

V3 CladV1 CladV1 Nickel SilverV1 BeCu Post PlateV2 1.3 oz.V2 1.6 oz.XandexXZIF

ReliabilityReliability2.5 million XZIF mate / de-mate cycles2.5 million XZIF mate / de-mate cycles

Reliability, p2Reliability, p2

So how did we do this?So how did we do this?

XZIFXZIFKnocked the problem on its ear –turned the signal 90°, delivered 120g of force per contact

Knocked the problem on its ear –turned the signal 90°, delivered 120g of force per contact

XZIFXZIFKnocked the problem on its ear –turned the signal 90°, delivered 120g of force per contactCo-developed rock-solid contact technology

Knocked the problem on its ear –turned the signal 90°, delivered 120g of force per contactCo-developed rock-solid contact technology

XZIFXZIFKnocked the problem on its ear –turned the signal 90°, delivered 120g of force per contactCo-developed rock-solid contact technologyCreated means for self-alignment between the interconnects

Knocked the problem on its ear –turned the signal 90°, delivered 120g of force per contactCo-developed rock-solid contact technologyCreated means for self-alignment between the interconnects

How we did it, p2How we did it, p2Turned the signal 90°Turned the signal 90°

How we did it, p3How we did it, p3Rock-solid contact technologyRock-solid contact technology

How we did it, p4How we did it, p4Self alignmentSelf alignment

Okay, it’s reliable. So what?Okay, it’s reliable. So what?

Now we’ve got a reliable interconnect, one that doesn’t push on the probe card to create the connections . . .

Okay, it’s reliable. So what?Okay, it’s reliable. So what?

Now we’ve got a reliable interconnect, one that doesn’t push on the probe card to create the connections . . .

How about 13,056 (34x384) I/O channels?

FastFast

So how fast is it?So how fast is it?

How fast is it? p2How fast is it? p2DUT Connector with Clamp Bandwidth Data

Vector Network Analyzer (8720ES)

0.00 1.00 2.00 3.00 4.00 5.00 6.00

Frequency in GHz

How fast is it? p3How fast is it? p3Eye diagram – 2 Gb/sEye diagram – 2 Gb/s

How fast is it? p4How fast is it? p4Eye diagram – 5 Gb/sEye diagram – 5 Gb/s

How fast is it? p5How fast is it? p5Eye diagram – 12.5 Gb/sEye diagram – 12.5 Gb/s

FlexibleFlexible

How we did it, p5How we did it, p5Use boards for the ends, cables for the long stretchUse boards for the ends, cables for the long stretch

How we did it, p6How we did it, p6Boards and cables are optimized for the application:Boards and cables are optimized for the application:

Air-enhanced Dielectric Coaxial Cable for high speed channelsAir-enhanced Dielectric Coaxial Cable for high speed channels

Air-enhanced Dielectric Coaxial Cable for high speed channels

Standard Ribbon Cable for Utility channels

Twisted Pair or “Shieldless Coax” Cable for inexpensive, low speed (<25 MHz) channels

Ultra-low Inductance Coaxial Cable for Power channels

How we did it, p7How we did it, p7Channel requirements can be mixed and matched within a single board / XZIF clamp assembly

Channel requirements can be mixed and matched within a single board / XZIF clamp assembly

How fast is it? p6How fast is it? p6Twisted Pair Eye diagram, 50 Mb/sTwisted Pair Eye diagram, 50 Mb/s

Got Power?Got Power?Power transmission line spec’s:

500 nΩ round-trip DCR150 pH Inductance35 mΩ Impedance – stable into MHz range

Power transmission line spec’s:500 nΩ round-trip DCR150 pH Inductance35 mΩ Impedance – stable into MHz range

Energy dissipated across the entire path @ 400A load is 30WEnergy dissipated across the entire path @ 400A load is 30W

Energy dissipated across the entire path @ 400A load is 30W

Force is carried by >300 contact structures

Energy dissipated across the entire path @ 400A load is 30W

Force is carried by >300 contact structures

SizeSize

What about probe card size?What about probe card size?

What about probe card size?What about probe card size?They’re not getting smallerThey’re not getting smaller

In 2001 440mm diameter was bigIn 2001 440mm diameter was big

They’re not getting smallerThey’re not getting smaller

In 2001 440mm diameter was bigDesign target was to touch down on ¼ of a 200mm wafer – 165mm diameter application space with 2304 I/O was adequate

In 2001 440mm diameter was bigDesign target was to touch down on ¼ of a 200mm wafer – 165mm diameter application space with 2304 I/O was adequate2006 target is a 300mm single-touch probe card – must have a much bigger application space

Big probe cards are comingBig probe cards are coming520mm probe card with 320mm app’ space520mm probe card with 320mm app’ space

This is a really big probe cardThis is a really big probe cardA high pin count 300mm single-touch probe card is estimated to weigh as much as 75 pounds (35 kg)

A high pin count 300mm single-touch probe card is estimated to weigh as much as 75 pounds (35 kg)

A high pin count 300mm single-touch probe card is estimated to weigh as much as 75 pounds (35 kg)It will most likely cost somewhere in excess of US$150kIt will most likely cost somewhere in excess of US$150k

A high pin count 300mm single-touch probe card is estimated to weigh as much as 75 pounds (35 kg)It will most likely cost somewhere in excess of US$150kWould you want to carry this beast around the sort floor in your hands?

It will most likely cost somewhere in excess of US$150kWould you want to carry this beast around the sort floor in your hands?

A high pin count 300mm single-touch probe card is estimated to weigh as much as 75 pounds (35 kg)

I didn’t think so.I didn’t think so.

It will most likely cost somewhere in excess of US$150kWould you want to carry this beast around the sort floor in your hands?

Direct DockDirect Dock

Indirect DockIndirect Dock

XZIF Direct DockXZIF Direct Dock3535

Back to the Future, p2Back to the Future, p2By using Direct Dock, we can make the mechanical support behind the probe card veryrigid.

By using Direct Dock, we can make the mechanical support behind the probe card veryrigid.

Back to the Future, p2Back to the Future, p2By using Direct Dock, we can make the mechanical support behind the probe card veryrigid.

By using Direct Dock, we can make the mechanical support behind the probe card veryrigid.

Thermal isolation of the probe card support dramatically reduces Hot Sort soak time

Direct Dock, p2Direct Dock, p2

StrongStrong

What happens to the prober?What happens to the prober?

Imagine a 300mm single-touch probe card – 60,000 probe needles, 300 kg (60k x 5g) to compress the probe needles.

Imagine a 300mm single-touch probe card – 60,000 probe needles, 300 kg (60k x 5g) to compress the probe needles.Wafer chucks don’t put out that much force . . . today

Imagine a 300mm single-touch probe card – 60,000 probe needles, 300 kg (60k x 5g) to compress the probe needles.Wafer chucks don’t put out that much force . . . todayProber structure will be working extremelyhard.

What happens to the prober? p2What happens to the prober? p2

FastFast

FlexibleFlexible

SizeSize

StrongStrong

Credit where credit is most certainly due:

XandexEvan Williams, Staff Mechanical EngineerJohn Wood, Senior Quality EngineerKevin Peebles, Mechanical EngineerTyrus Hudson, Mechanical Engineer

S05 03 Sinsheimer - SWTest.org · Xtreme Sort: Roger Sinsheimer SWTW 2006Xtreme Sort: Roger...

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