孙晓文 1120349016

Optical Filter Based on SOI

23/4/21 2

Outline

Introduction of silicon photonics

Target of the design of optical filter

Analysis of existed optical filters

Advantage of Silicon Photonics

集成不同类型的器件到同一个硅基平台上

与 CMOS 工艺的兼容性，光子器件同电子器件单片集成，将电子的计算能力与光子的互连能力通过单个硅基芯片融合。

硅 (n=3.45)/ 二氧化硅 (n=1.45) 此 SOI 结构对光的限制能力很强，光子器件的尺寸 nm

23/4/21 3

Target of the design

Large FSR

Bandwidth tunable

Wavelength tunable

23/4/21 4

Add-drop filter type microring resonator

23/4/21 5

34

2 1

EE r it

E it r E

Through: 2 1 2

1 1 2

( )1

i

i

E r r ae

E r r ae

Drop:2

5 1 2

1 1 2

R( )1

i

i

E t t ae

E r r ae

Add-drop filter type microring resonator(2)

23/4/21 6

Schematic of the vertical structure of SOI

Transmission Spectrum

Discrete and Fine Wavelength TunableThermo-Optic WSS for Low PowerConsumption C+L Band Tunability

23/4/21 7

FSRextended = m1FSR1 = m2FSR2

To get the maximum FSR expansion and maximum suppression of the interstitial peaks:

m2 = m1 −1

(2)

23/4/21 8

Wavelength tunable

Bandwidth tunable

Tunable Vernier Microring Optical Filters Using p-i-p Resistor-Based Micro-Heaters

23/4/21 9

R1 = 10 um and R2 = 12 um

the filter wavelength can be tuned to cover one FSR of 47

nm

Bandwidth and wavelength-tunable optical bandpass filter based on

silicon microring-MZI structure

23/4/21 10