()
Channeling
,

*


*
*
Labview


*
*
Mapping of the channeling yield for SiO2 around the [0001] axis.
13.unknown
26.unknown
69.unknown
*
Mapping of the channeling yield for LiNbO3 around the [0001] axis.
36.unknown
58.unknown
72.unknown
Simulation condition of DICADA (Dechanneling In Crystals And Defect Analysis) code
Crystal
LiNbO3
hexagonal
79.unknown
*
cmin of a 100Å Au coated Si wafer in the [110] direction
85.unknown
82.unknown
*
χmin of the SiO2 crystal of dislocation density 6 /cm3 measured in the [0001] direction.
88.unknown
*
χmin of the SiO2 crystal of dislocation density 3000 /cm3 measured in the [0001] direction.
133.unknown
χmin of the LiNbO3 crystal measured in the [0001] direction.
113.unknown
Conclusion
Channeling
Au coating 11 %
, (Si wafer, GaAs wafer)
RBS, ERD, PIXE
(
)
-3
-2
-1
0
1
2
-3
-2
-1
0
Tilt
Azimuthal
0
1
2
3
4
5
6
-9
-8
-7
-6
-5
-4
-3
Tilt
Azimuthal