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- · IJrYA) 5— KrF R=248nm, v—ff Talbe 1 Ablation and deposition conditions DLC and CNx films....
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· IJrYA) 5— KrF R=248nm, v—ff Talbe 1 Ablation and deposition conditions DLC and CNx films. 800m Torr 50—-200mTorr J/crn2 4 Omm TorrJÈJ,F
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