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© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
MEMS Devices
• The MEMS(Microelectromechanical systems) devices can be made through the IC Process:
• Bulk micromachining: Pressure sensor• Surface micromachining: Accelerometer
http://www.youtube.com/watch?v=ZuE4oVrtEQY
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Bulk micromachining
• Mask pattern by SiO2 or Si3N4 • Etching silicon substrate
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Acceleration and Pressure sensor
Acceleration and Pressure sensor
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Pressure
Fabrication steps for pressure sensor
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Thermal Ink-jet printer
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Surface micromachining
Micro-cantilever1. Silicon substrate, Si2. Deposit silicon nitride, Si3N4
3. Grow silicon oxide, SiO2
4. Pattern by Lithography5. Deposit polysilicon6. Remove SiO2 by Etching
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Accelerometer for airbags
• Acceleration Displacement of beam Capacitive change Turn on the airbag
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Micromirror Device
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Comb Drive / Capacitive
• Parallel Plate CapacitorC = ε A/d
• Electrostatic ForceFe = ½ ε (A/d2)V2
© Pearson & GNU Su-Jin Kim© Pearson & GNU Su-Jin Kim
MEMSMEMSManufacturing ProcessesManufacturing Processes
Nanoscale Manufacturing
• Parts are produced at nanometer(10-9) length scales.• Integrated circuits are at this length scale.
• Carbon nanotubes have high strength and electrical current-carrying capability.
Carbon nanotubes: http://www.youtube.com/watch?v=zQAK4xxPGfM
Nano tech: http://www.youtube.com/watch?v=sITy14zCvI8 (10min)