半導體製程設備技術 Semiconductor Technology - Process and Equipment

8/3/2019 Semiconductor Technology - Process and Equipment

1/65


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5/65

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6/65

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7/65

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8/65

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9/65

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10/65

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11/65

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;'5'5 îec{dpi Dog I{cmi~& ^DI >88

;'5'> [~doki ^DI >8>

;'5'3 Aelgi{dcefft Igmegci ^DI& AI^DI >83

;'5'; Mdlm Kigsd{t Xfesae îec{o~s >8;

;'5'9 Aelgi{dc Ayf{dxofi Cog`dgiaig{& AAC >89

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;'5'= Mifdcog \epi Xfesae Soy~ci& M\X >5;


12/65

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13/65

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14/65

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21/65

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22/65

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24/65

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25/65

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26/65

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27/65

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28/65

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29/65

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30/65

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31/65

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32/65

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33/65

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34/65

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35/65

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36/65

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37/65

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38/65

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39/65

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40/65

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41/65

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42/65

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43/65

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44/65

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45/65

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46/65

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47/65

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48/65

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@ygkeaig{ef& X~ec{dci egk Aokifdgl& X~ig{dci Meff& Gi| Ji~sit& >888'

58' CAOS

55'PFSD


49/65

3=3

E

Engo~aef Sdlgef

5>5

En~esdpi>44

Enso~x{dog593& >>3

Eccifi~e{dog Cofyag=>

Ecuyd~i39>& 390

Ec{dpe{dog;=& 359

Ec{dpi E~ie95& 35;

Ec{ye{o~=& 58& 55& 309

Ekmisdog35>& 3>5

Ekmisdog Feti~3>;& 3>9& 3>04&

>=;

Eao~xmoys98& >;8& >;4& 3>4

Eao~xmoys Sdfdcog& e!Sd98

Egefol Kdld{ef Cogpi~{& EKC

5>

Eglfi=9& >>9

Egdso{~oxdc>88& >>3& >3>&

354

Egdso{~oxdc I{cmdgl>88

Eggief30& ;

E{aosxmi~dc X~issy~i& EX3

E{aosxmi~dc& E{a53

Ne`i30

Ne~~di~ Feti~=;&

3>;& 3>9& 3>3& 5>0

Niffo|s4>9

Nd~k,s Nieb9>

Nfo|yx=0


50/65

3=;

Noane~kaig{8>&

>80& >>9

No~og Xigi{~e{dog358

No~og& N359& 353=& >34

Noygke~t Feti~5833

N~iebko|g40& 534

Ny`ì~ O}dki I{cmeg{& NOI

550

Nygcm=3& =;

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>58

Cexecd{dpi!Coyxfdgl Xfesae>85& >8>

Ce~o,s Ecdk!M>SO;555

Ce~~di~;0& 45& 535& 53>& 599&

508& 5=0& 35=& 333

Ce~~di~ Les;0& 535& 53>& 599&

508& 55

Cig{~ef Sc~ynni~

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Cmeani~>& 50& 5=& 54&

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539& 530& 5;=

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Cmdx3>

Cmfo~dgi& Cf335

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5>;

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Cfys{i~50& 5=& 5>4& 595& 5=4&

>;=

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Cfys{i~ [oof595

CAOS X~ociss @fo|

355& 35>

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>4;

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Cofk \eff Cmeani~5


51/65

3=9

Coffic{dog Ox{dcs>59

Coffodkef Sdfdce>44

C o a x f i a i g { e ~ t A i { e f ! O } d k i !

Siadcogkyc{o~& CAOS

38

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Cogkigsi95& >4>

Cogkyc{egci4>

Cogkyc{dpd{t>4& 0=& >8=

Cogkyc{dpd{t o` EC Xfesae

>8=

Cogkyc{o~>4

Cog{ec{559& >;3& >0=& >3& 3>;& 3>9& 30=&

>;3

Cog{ec{ ^isds{egci559

Cog{~offi~58& 55& ;5& ==& >88&

3;>& 305& 30>& 309& 309

Co~~osdog>;=& 38;

C~d{dcef Kdaigsdog& CK35&

58

C~to xyax50>

C!P cy~pi3>4&

33

Kief [~deglfi33;& 339

Kiix Ny~dik Feti~>>& >309

Kiix \iff49

Kix{m o` @ocys& KO@>00

Ki~jelydg!Fegkey!Pi~|it!Opi~niib&

KFPO>4;

Kiso~x{dog593& >>3

Kipifox>93& >99& >0>& >03& >0;

Kipifoxi~>93& >99& >0>

Kipdci38& 58;& 580& 5>0& >>5&

38


52/65

3=0

KD \e{i~ Pexo~dzi~

505

Kdi3>& 93& 9;& 54=& >55=&

>>>& >33& >;8& 3>3& 3>9& 3>4& 33>

Kdific{~dc3>& 93& 9;& 54=& >55=& >>>& >33& >;8& 3>3& 3>9& 3>4&

33>

Kdific{~dc Cogs{eg{& b3>

Kdific{~dc Feti~ I{cmdgl

54=& >>>

Kd``ysdog39& 30& ;>& ;3& ;9& 0=&

5855

Kdld{ef Egefol Cogpi~{& KEC

5>& 3

Kdfy{i M@35;

Kdscme~li530& 534& 549& 540&

>98

Kdsmdgl383

Kdsfoce{dog;=& 5054=

Kdpo{>30

KD\ ^dgsi [egb5>3

Koxeg{>4& ;0& ;=& &

30

Kosi Cog{~offi~==

Koynfi Xe{{i~g>>& >3& ;9& &

5>;& 35=& 354& 3>8

K~edg Aokyfi53& >>& >3& 5>;

K~issi~>4>

K~dpi!dg30& ;0& ;=

K~dpi~58& 55& 309& 305

K~t O}dke{dog;>

K~t Xyax50>& 5==& 544

Kyef!Keaescigi X~ociss3>0

Kyef!Keaescigi54=& >>>

Kyaat Foek5;

Ifes{dc530

Ific{~dc Koynfi Feti~>49

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580

Ific{~ocmiadcef Xfe{dgl

3>9


53/65

3=

Ific{~oadl~e{dog& IA545&

3>;

Ific{~og Niea Ipexo~e{dog

5=>

Ific{~og Ctcfo{~og ^isogegci& IC^

>8;& >5>

Ific{~og Lyg& I!Lyg5=9

Ific{~og Ox{dcs Sfd{>49

Ific{~os{e{dc Sceggdgl=;

Ific{~os{e{dc Smdifkdgl Feti~

>58

Igi~lt Lex& Il38& >5

I~osdog383& 38;

I{cm Sific{dpd{t>88& >>0

I{cmdgl S{ox Feti~95

Ipexo~e{dog5=>

Ipexo~e{dog Soy~ci5=>

Ipig{ Cog{~of Sts{ia4

I}cdai~ Fesi~>09

I}cd{e{dog530

I}cd{ik S{e{i53=& 534

I}meys{53& >>& >3& ;8&

5>;& 5& 5=;& 5=0& 5=4& 544

I}meys{ Aokyfi53& >>& >3&

5>;

I}xosy~i Cmeani~>93& >0;

I}{dgc{dog Coi`stcdig{>44

I}{dgc{dog Dgki}54@fe{ Negk584

@offo| Yx Sts{ia4

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@oy~!Xodg{ X~oni43

@~og{ Igk o` Fdgi& @IOF95&

35>

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@yaik Sdfdce>44

@ygc{dog Nfocb>3

@y~geci39& 30& 588

L

Lex @dffdgl543

Les Ad}dgl sts{ia5


54/65

3==

Le{i3>& ;3& ;9& 95& 93& 99& 3>& >3;& >=9& 359& 350& 354& 33

Le{i O}dki& LO];3& 359

Leyli9=& 50;

Leyssdeg Niea>>

Li{{i~335& 33>

Li{{i~dgl335

Lfonef Xfegefdze{dog>=;

Lfo| Kdscme~li534

LGK3;=& 394

L~edg Noygke~t;=& 98

L~edg L~o|{m;>

L~exmd{i5& 5& >>& 584& 558& 555& 55=&

554

M3XO;>>& 550;

Me~k Aesb95& 553& >>& 553& 55=

Mie{ I}cmegli~>8&

>5& 538

Mie{ [exi95

Miepdft Koxik98

Mifdcog \epi Xfesae& M\X

>8;

Mifdcog \epis>59

Mi{~oixd{e}t500

Mi}eai{mtfkdsdfezegi& MAKS

>909

Mdlm Esxic{!^e{do>38

Mdlm Cy~~ig{ Dog Daxfeg{

8>

Mdlm I`stcdigct Xe~{dcyfe{i Ed~

4=& 44

Mdlm Igi~lt Dog Daxfeg{

;8

Mdffocb545

Md!Fo394

Mo~dzog{ef @fo| Kisdlg

504

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Mo{ Ce~~di~45& 333

Mo{ Ce~~di~ Dgjic{dog333

Mo{ Ific{~og89

Mo{!Ce~~di~ I``ic{& MCI

35=

Mtk~olig @fyo~dki& M@>4O>388


55/65

3=4

D

Daai~sdog Fd{mol~exmt

>4& >5=& 3>4

Dg{il~e{ik Cd~cyd{& DC>4& 38

Dg{i~ Feti~ Kdific{~dc& DFK

93& 3>3&

33>

Dg{i~ Ai{ef Kdific{~dc 5& DAK!5

3>9

Dg{i~ Ai{ef Kdific{~dc& DAK

9;

Dg{i~`eci [~exxik Cme~liUd{

338

Dg{i~`i~oai{i~>54

Dg{i~focb>& 580& >>9

Dog Leyli50;

Dog Daxfeg{39&

0=& & 333

Dog Aess Egeftzi~3

Dso{~oxdc I{cmdgl>>3

J

Jygc{dog Kix{m;9& 48

Jygc{dog Fiebeli Cy~~ig{

58=

B

Befdya Dog& B338

F

Fegkey Keaxdgl>50& >554& >>8

Fe{cm!Yx45

Fe{{dci Adsae{cm500& 5=5


56/65

348

Fi`{ Megk Xofe~dze{dog& FMX

>53

FIPIF399

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T

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