Bruce F Stacy

732.828.1294 1199 Cherokee Rd, North Brunswick, NJ 08902

Mr. Suresh Santhanam

Director of MEMS Fabrication

IC Mechanics, Inc.

425 N. Craig Street

Suite 500

Pittsburgh, PA 151213-1154

March 22, 2002

Dear Suresh:

It is a pleasure working with you and and your organization on resolving electroforming

issues with your MEMS product. Since my visit on March 14 the progress we have made

is significant.

1) We discussed the reasons for failure of your present product and agreed on a

course of action.

2) We discussed and specified the equipment for prototype feasibility testing and

manufacturing.

3) I spoke with Electrode products and they quoted you Pt/Ti anodes for the plating

bath.

4) I have contacted Enthone regarding chemistry and given you the information

necessary to order plating solution components

5) I spoke with Semitool regarding sample plating of wafers and this is being

scheduled to occur in two to three weeks

6) I requested Semitool invite you to their Technical Seminar in Bethlehem, PA on

March 27 and you have accepted.

7) I spoke with IMI regarding sample plating of wafers and a quotation has been sent

to you.

The easy part is done. Now we need to install a plating bath in your facility and optimize

it to give the deposit material properties you require. Evaluation of parameters such as

temperature, pH, current density, duty cycle, and bath component concentration will be

necessary to arrive at the best operating limits. We will be able to assess how much we

need to vary from standard operating conditions from the data collected from plating in

house and from wafers plated at both IMI and Semitool.

Once again I want to stress that I will do what it takes to insure the success of this project.

I commit to:

1) Traveling to both IMI and Semitool when wafers are plated (or wherever else you

require me to go).

2) Working with you on site and off to insure we can produce product consistently.

3) Evaluating alternate chemistries and deposits with you if we decide this is the

correct course of action.

I have enclosed a bill for services to date and an expense report with receipts for limo

service to and from Newark Airport on March 14.

Bruce F Stacy

732.828.1294 1199 Cherokee Rd, North Brunswick, NJ 08902

Please call me if you have any questions regarding this or anything else.

Best regards,

Bruce Stacy

Bruce F Stacy

732.828.1294 1199 Cherokee Rd, North Brunswick, NJ 08902

This is an invoice from Bruce F. Stacy for consulting services and travel expenses

applied to:

IC Mechanics, Inc

425 N. Craig Street

Suite 500

Pittsburgh, PA 151213-1154

from March 14 to March 20, 2002. Services are billed at the rates of:

$1000 per diem

or

$125 per hour

plus expenses.

Please issue separate checks for services and expenses. Make both service check and

expense check payable to:

Bruce F. Stacy

1199 Cherokee Rd.

North Brunswick, NJ 08902

SERVICES

March 14----------------one day---------------------$1000.00

March 15----------------3 hours-------------------- 375.00

March 18--------------- 2 hours-------------------- 250.00

March 19 ------------- 0.5 hours (telephone)----- 62.50

Service Check Total $1687.50

EXPENSES

Limo service to EWR from home (3/14/02)----- $ 85.00

Limo service from EWR to home (3/14/02)----- $ 84.00

Expense Check Total $ 169.00

Questions? Please contact me at:

bfstacxy@aol.com

732-828-1294

732-310-0639 (cell)