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16/11/01 GS/ALICE SPD/LHCC Referees 1
ALICE Silicon Pixel Detector (SPD)
G. Stefanini/CERN-EP
General
Front-end electronics
– pixel bus
– ALICE1 ASIC
– PILOT ASIC, bias ASIC, optical link package, MCM
Silicon sensors
Beam test with bump-bonded assemblies
Pixel wafer probing
Pixel wafer thinning
Mechanics and cooling
Summary - Planning
16/11/01 GS/ALICE SPD/LHCC Referees 2
SPD (Hybrid Pixels) - Design Parameters
Two barrel layers Ri= 39mm, Ro = 76mm
Pixel cell dimensions 50m (r ) x 425m (z)
Front-end electronics CMOS6 0.25m standard process on 8” wafers,
rad-hard design
Pixel ASIC thickness (target) ≤ 150m (wafers thinned after bump deposition)
Si sensor ladder thickness ≤ 200m
Flip-chip solder bumps/indium bumps
Pixel bus aluminium-polyimide flex
Cooling water/C6F14/[C3F8 (evaporative)]
Material budget (each layer) ≈ 0.9% X0 (Si ≈ 0.37, cooling ≈ 0.3, bus 0.17, support ≈ 0.1)
Total Si surface ≈ 0.24 m2
Occupancy < 2%
16/11/01 GS/ALICE SPD/LHCC Referees 3
SPD Mechanical Configuration (I)
16/11/01 GS/ALICE SPD/LHCC Referees 4
SPD Mechanical Configuration (II)
2 barrel layers
z= ± 14.15cm (sensitive)
r1 = 3.9 cm, r2 = 7.6 cm
16/11/01 GS/ALICE SPD/LHCC Referees 5
SPD Ladders & Staves
1 sectorone carbon-fibre support for layer 1+2
4 staves in outer layer2 staves in inner layer
ladder (1 sensor, 5 chips)
half-stave: 2 ladders
readout of 120 half-staves in parallel
Image: INFN Padova
SPD total 1200 pixel chips, ≈ 107 pixels
16/11/01 GS/ALICE SPD/LHCC Referees 6
Pixel Bus & Ladders (I)
M. Morel
± 193 mm
ladder1ladder2
70.72 mm70.72 mm
Power supplies connector
1000mm
Flexible Extender
MCM
Extenders (Copper-capton)
Pixel bus: multilayer flex Al-polyimide
So far, only satisfactory technology source is the EST PCB Workshop
A-prototype (Cu) under test for signal integrity with 10 chips on bus
B-prototype (Al) layout to start in Jan 02 (workload in EST layout section)
Explore feasibility with industrial company
16/11/01 GS/ALICE SPD/LHCC Referees 7
Pixel Bus & Ladders (II)
1
2
3
4
5
6
READOUT CHIP
PIXEL DETECTOR
Aluminium
Polyimide
CARBON FIBER SUPPORT
1 ANALOG_GND 25µ2 ANALOG_ POWER 25µ3 HORIZONTAL LINES 10µ4 VERTICAL LINES 5µ5 DIGITAL_POWER 25µ6 DIGITAL_GND 25µ7 RES + CAPA PADS 15µ
1
2
5
6
Glue
COOLING TUBE
11mm
<350µm (design target)
235µm
?
PIXEL_BUS
7 77 7
SMD component
M. Morel
16/11/01 GS/ALICE SPD/LHCC Referees 8
End Stave Connections (I)
1
Note: the drawing is not to scale
Cu extender 1
Al pixel carrierPixel chipPixel detector
Cu extender 2
Pilot MCM
GND
VDDSIG
VDDA
AGND
Bias 1
RESISTOR TOVTT
BIASDECOUPLINGCAPACITOR
AGND
SENSE
VDDA
GND
SENSE
VDD
BIAS 1 (10uA)
AGND
VTT (1A)
Sense (VTT)
GND (VTT)
VTTA (0.1A)Sense (VTTA)AGND (VTTA)
MCM_Dig (1A)
Sense (MCM_Dig)
GND (MCM_DIG)
MCM_A (?)
Sense
AGND
VDDDECOUPLINGCAPACITOR
Connections details of pixel_carrier and extenders
BIAS 2 (10uA)
Bias 2
Michel Morel EP/ED 09/2001
16/11/01 GS/ALICE SPD/LHCC Referees 9
ALICE Pixel ASIC
• CMOS6 0.25 µm (8” wafers)
• Radiation hard design (enclosed transistors)
• ≈ 13.106 transistors
• 8192 pixel cells 50 µm x 425 µm
• 256 rows, 32 columns
• Active area: 12.8mm x 13.6mm
• 10 MHz clock
• 1.8V power supply
• ~100 µW/channel
M. Campbell
16/11/01 GS/ALICE SPD/LHCC Referees 10
Pixel Cell
M. Campbell
16/11/01 GS/ALICE SPD/LHCC Referees 11
Pixel Chip JTAG Controls
All configuration parameters are controlled through JTAG bus
Two-fiber optical link, effective clock frequency 5 MHz
Global registers
– 42 DACs for biasing
– strobe delay
– global threshold voltage
– miscellaneous control (leakage current compensation, delay unit)
Local registers (for each pixel cell):
– 3 bit threshold adjustment
– TEST Enable
– Pixel mask
16/11/01 GS/ALICE SPD/LHCC Referees 12
Test Set-Up
VME Master
R/OController
Pixel ChipCarrier
DAQAdapter
PixelChip
P. Chochula
JTAGController•DAQ LabView
•Analysis ROOT•Database MySQL
16/11/01 GS/ALICE SPD/LHCC Referees 13
Radiation Test - Single Event Upsets (SEU)
SEGR (Gate Rupture) breakdown of transistor gate
SEL (Latch-up) high power supply current
SEU (Upset) switch logical level
Alice1LHCb:8192 Pixels: 5 memory cells each (3 threshold adjust, 1 mask, 1 test)42 DACs: 8 memory cells each (8 bit DACs)
Hadrons may interact elastically and inelastically with Si atoms recoils and fragments deposit a large amount of charge in the chip Single Event Effect
Mitigation: all critical memory cells are hardened by built-in redundancy
J. Van Hunen
16/11/01 GS/ALICE SPD/LHCC Referees 14
SEU Cross Section (I)
1.E-11
1.E-10
1.E-09
1.E-08
1.E-07
1.E-06
0 20 40 60 80 100 120
LET (MeV mg-1cm2)
SEU Cross Section (cm
2 )
chip 43
chip 72
Weibull
Measure SEU cross-section as function of the Linear Energy Transfer (LET) - at Louvain cyclotron (ions and protons)
The LET is measured first with heavy ions Xe26+, Kr17+, etc., under different angles of incidence to cover the required range.
J. Van Hunen
16/11/01 GS/ALICE SPD/LHCC Referees 15
SEU Cross Section (II)
For the ALICE pixel detector:
1200 chips, 336 DAC bits 0.1 bit/hour
Measurement with 60 MeV protons:
The heavy ion results are used to calculate the SEU cross section forexposure to protons (60 MeV) : 9 10-16 cm2 per memory cell
J. Van Hunen
Fluence(cm-2)
# SEUs # irradiated cellsCross Section
(cm2)
6.4 1012 84 41,296 3 10-16
16/11/01 GS/ALICE SPD/LHCC Referees 16
Pixel Chip Testing
Four identical test setups have been installed in the CERN lab.
• Test of all internal DACs• Threshold and noise scans • Minimum threshold• Current consumption• Tests of the individual stages • Functionality of the JTAG
•Used also for SEU measurements
16/11/01 GS/ALICE SPD/LHCC Referees 17
Bare Chip Threshold Scan
Pulse each row (e.g. 250 triggers) with test-pulse (e.g. 0-50 mV).
Mean threshold: ~14-15mVRMS ~3mV.
No individual threshold adjust.
Conversion factor: ~66e-/mV(preliminary!)
~1000 e- mean threshold~ 200 e- RMS
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 18
Bare Chip Threshold Scan (II)
Mean threshold vs. global threshold setting
3811 2951 2111 1288 463 Electrons RMS
16/11/01 GS/ALICE SPD/LHCC Referees 19
Bare Chip Noise Scan
Determined from S-curve.
Mean noise ~1.7-2 mVRMS ~ 0.2 mV
Mean noise ~110 e- RMS
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 20
Test Pulse
Threshold map
• measured on chip 52
• scale in mV
• pulser located under column 5
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 21
Fast Multiplicity for Trigger
Fast Multiplicity: prompt analog output from each chip
Half-stave sum ==> multiplicity in left and right part of barrel (Ml, Mr)
Ml+Mr ==> total on SPD barrel ==> trigger on centrality
Ml-Mr ==> left-right asymmetry ==> trigger on position of primary vertex ( ≈ few mm)
Implementation study under way
– analog optical signal transmission
– contribution to L0 ? ( <1s latency)
Constraints on performance at very low multiplicity
16/11/01 GS/ALICE SPD/LHCC Referees 22
Engineering & Pre-production Wafers
All tests so far with 6 engineering run wafers
Some imperfections in design, but performance of the chip “as is” meets essential specs.
Use of ladder Fast-OR and very low Fast Multiplicity would require partial redesign.
Final decision in Q2/02.
Exceptional new lot of 48 wafers just delivered
– ALICE ≈ 24
– NA60 16
– LHCb, .. ≈ 8
New ALICE lot: optimisation of bump-bonding and wafer thinning
– allows some flexibility in deadline for decision on final production
16/11/01 GS/ALICE SPD/LHCC Referees 23
Half-Stave Readout Electronics Chain
G-link serializer&optics
opt.link
L1, L2y, L2n, testpulse, jtag
pixelpilot
link receiver
pixelconverter
busy, jtag
pilot MCM control roompixelbus
pixel transmit
pixelcontrol transmit
opt.links
pixelcontrol receivepixel chips
pixelrouter
A. KLuge 25.1.01
A. Kluge
16/11/01 GS/ALICE SPD/LHCC Referees 24
PILOT ASIC
• CMOS6 0.25m• Rad-hard design
• Dimensions 4mm x 6mm
• JTAG controls• clock recovery and distribution• half-stave data out
• level conversion• multiplexing
• interface to Gigabit Optical Link (GOL)• (serialiser/driver ASIC)
• currently under test (Nov 01)
A. Kluge
16/11/01 GS/ALICE SPD/LHCC Referees 25
Bias ASIC - Optical link package
Bias ASIC : generates reference levels for the pixel chip
– design (≈ 3 months) to start in Jan 02 (EP-MIC)
– submission in MPW
– might be on critical path for MCM
Optical link package (1 laser diode, 2 PIN diodes, overall thickness < 1.4mm)
– development under way
– functional prototype ≈ end March 02
– full production will take ≈ 3 months
16/11/01 GS/ALICE SPD/LHCC Referees 26
Silicon Sensors
p+ on n with guard rings, each wafer (5”) has 5 ladders + 13 singles
Prototypes
– 300m thickness 15 wafers available
– 200m thickness 3 wafers available (+ 2 in order)
CERN Market Survey MS-3087/EP/ALICE sent out to firms on 12 Nov 01
Closing date: 21 Dec 01
Examination of replies: Jan 02 (2nd week)
Invitation to tender will be issued by INFN (Catania/Roma 1)
– Committee already appointed
– deadline: within Q1/02
16/11/01 GS/ALICE SPD/LHCC Referees 27
Bump-bonding - Assemblies
First delivered ≈ 10 assemblies:Sensors: p+ on n, thickness 300µmChips: Lot 1 (750µm thick) - unprobed wafers!
Assemblies produced by:
AMS/Italy VTT/FinlandIndium bumps Pb-Sn solder bumpsstand-off ~ 10µm stand-off ~15µm
Chip
Detector
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 28
Assemblies - Threshold Scan
Threshold measurement:
VTT 8
Mean threshold: 21.2 mVRMS: 2.8 mV
Similar to measurement on bare chip.
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 29
Assemblies - Noise Scan
Noise measurement:
VTT 8
Mean noise: 1.97 mVRMS: 0.24 mV
Similar to noise on bare chip.
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 30
Threshold Scan on Assemblies
P. Riedler
50mV ≈ 3,200 e-
16/11/01 GS/ALICE SPD/LHCC Referees 31
Assemblies - Source Tests
Source tests were carried out on all assemblies, using:
~1600~6100~63 300 Electrons RMS
~6keV gammas~22+25 keV gammas (electrons shielded)2.28 MeV electrons
Fe 55Cd 109Sr 90Source
• Bump-bonding quality• Calibration• Threshold adjustment
16/11/01 GS/ALICE SPD/LHCC Referees 32
Assemblies - Sr90 Source
Bump-bonding quality
Assembly VTT 10
Bias: 80V
Sr-source
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 33
Assemblies - Fe55 Source
glue drop
No threshold adjust With threshold adjust
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 34
Beam Test with Assemblies
13-25 July (Period 1) and 1-9 September, 2001 (Period 2)H4 beam-line in the NA57 area
• 150 GeV/c pions• 105-106 particles/spill• ~10 x 5 mm2 beam-focus• Scintillator trigger selects 2 x 2 mm2 beam-spot
Period 1: one plane, 2 assemblies tested
Period 2: telescope (3 planes), 5 assemblies testedanalysis under way
16/11/01 GS/ALICE SPD/LHCC Referees 35
Beam Test Set-Up (I)
scintillator S3~10m
two small scintillatorsorthogonal to each other
{
C2
C1BAssembly 1
beam
MBcard
power supply
x-y table
MBcard
power supply
MBcard
power supply
Assembly 0 Assembly 2
C1A
Full telescope (for Period 1 only the centre assembly was mounted)
16/11/01 GS/ALICE SPD/LHCC Referees 36
Beam Test Set-Up (II)
16/11/01 GS/ALICE SPD/LHCC Referees 37
Beam Profile
Beam profile in z (425 µm pixels): ~ 7 pixels = 3 mmBeam profile in x ( 50 µm pixels): ~50 pixels = 2.5 mm
VTT 12
16/11/01 GS/ALICE SPD/LHCC Referees 38
Bias Scan
Normalization to scintillating counters - preliminary!
100
80
60
40
20
0
Online Efficiency [%]
806040200Bias Voltage [V]
VTT 1 th=215 ~ 1600 electrons RMS th=200 ~ 2900 electrons RMS
Sensor thickness 300m
16/11/01 GS/ALICE SPD/LHCC Referees 39
Cluster Size Analysis(preliminary, from run with 1 assembly)
16/11/01 GS/ALICE SPD/LHCC Referees 40
First ALICE Pixel Ladder from VTT
16/11/01 GS/ALICE SPD/LHCC Referees 41
Pixel Wafer Probing (I)
Each wafer contains 86 ALICE1LHCb chips.
Tests carried out on each chip:
• Current consumption (analogue/digital)• JTAG functionality• Scan of all DACs• Determination of minimum threshold• Complete threshold scan of pixel matrix
16/11/01 GS/ALICE SPD/LHCC Referees 42
Pixel Wafer Probing (II)
Class I
Class IIFully functional, but less than 6000 pixels responding to the threshold scan
Class IIIMasking problems, highor asymmetric noise orthreshold
Class IVExcessive or no currentNo response from the chip
P. Riedler
16/11/01 GS/ALICE SPD/LHCC Referees 43
Pixel wafer thinning
Pixel wafers will be thinned after bump deposition (processed side protected)
VTT has equipment and expertise in this field
Preliminary trials with 4” and 8” blank wafers with SPD bump pattern
– wafers thinned down to <100m
– backside free from bump imprint
Imminent trial with real probed pixel wafers
– check if thinning affects performance
– determine practical limit
Bump-bonding thinned chips and ladders is next major challenge
– development program under way
– completion expected in June 02
16/11/01 GS/ALICE SPD/LHCC Referees 44
Mechanics & Cooling
Items to be produced:
Carbon fiber support structure: 10 sectors (turbo_like disposition)
Two halves cylinder-cone support structure working also as thermal screen towards SDD and air flow channelling
Tooling for stave assembly, detector assembly etc.
TEST already done:
Prototypes of CFSS made out of different CF tape thickness and resin (epoxy, cyanate ester). The final geometry is not yet assessed (sector length, cooling system choice, etc.).
The main efforts are on integration scenario definition and cooling system design & test.
A. Pepato
16/11/01 GS/ALICE SPD/LHCC Referees 45
SPD Sector (II)
A. Pepato
16/11/01 GS/ALICE SPD/LHCC Referees 46
Cooling Test Bench
A B
A B50 mkapton25 m copper60 m epoxy resin125 mkapton50 m . cond grease40 m SS cooling
1 4mm FR25 m copper50 m . cond grease40 m SS cooling
A. Pepato
16/11/01 GS/ALICE SPD/LHCC Referees 47
Summary - Planning
Pixel ASIC meets essential specs. KGD yield from engineering wafers ≈ 35%
Pre-production wafer lot procured
Sensors market survey sent out
Bump-bonding optimisation and wafer thinning trials in progress
FE electronics chain under test
Pixel bus prototyping nearly completed
Key electronic issues under study: signal integrity on bus, end-stave connections,
grounding, power distribution (rad-hard voltage regulators in patch-panels), etc
Mechanics & cooling well defined, corrosion study under way ==> choice of coolant
Completion of all developments by Q3/02, production to start in Q4/02
Detailed planning reviewed Nov 01
Challenge ahead: detector assembly and integration (ladders, bus, glueing, wire bonding,
mounting on sectors, final tests)