29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Co-ordinator: R.W. McCullough, Queen’s

29th June–1st July 2003 NewLeif FP6 I3

Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies

Co-ordinator:

R.W. McCullough, Queen’s University Belfast, N Ireland, UK,

Deputy-coordinator :

R. Trassl, Justus Liebig University, Giessen, Germany

Participating countries :

Austria, France, Germany, United Kingdom



Tasks

Ion extraction and beam formation:

A. Optimised extraction from ECR sources for low ion beam energies

B. Highly charged ion beams from room-temperature EBIT sources



Advanced ion transport and control systems

C. Beams of highly charged ions at eV-energies

D. Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution

E. A novel technique for ultra high resolution, low energy HCI beam structuring

F. Ion beam guiding in nano-capillaries



Task A

Optimised extraction from ECR sources for low ion beam energies

Originality of Activity

• Combination of computer simulation techniques and experimental emittance measurements

• "perfect" geometry and so optimise the extraction for low energy ion beam production with extraction fields of electrostatic and/or magnetic field configurations



JLU Giessen, Germany + CEA, Caen, France + QUB Belfast, UK

WORK PACKAGE

• Specification/simulation/design/construction/emmitance measurements of extraction geometries to be tested

• Extracted beam energy distribution measurements

• Documentation and dissemination of results

• Implementation of optimum geometries throughout I3 ECR sources



Task B

Highly charged ion beams from room-temperature EBIT sources


• lon beams with excellent emittance (1mmmrad / 10 keV/q)

• nano-positioning of single HCIs

• innovative cooling techniques to achieve energy spreads in the meV *q range



FZR, Rossendorf, Germany + QUB, Belfast, UK

WORK PACKAGE

• Design/implementation of beam retardation system coupled to EBIT and ECR

• Implementation/characterization of 14.5GHZ 2kW ECRIS

• X-ray spectroscopy, q/A analysis diagnostics of a room-temperature EBIT

• Implementation/test of computer-added beam control

• Test of ECR operation in DC and afterglow mode

• Test of EBIT operation in pulsed and leaky mode

• Surface modification experiments

• Design/test of an EBIT with ion production on zero potential



Task C

Beams of highly charged ions at eV-energies


• High intensity, low emittance, low energy spread, low energy (eVs) HCI beams

• Combination of electrostatic and magnetic elements combined with nano-optical system of IMS and nanocapillary guiding/focusing techniques of HMI.



CEA Caen + QUB BelfastWORK PACKAGE

• Installation /diagnostic and optimisation of prototype beam line

• Improvement of vacuum conditions and magnetic sheilding

• Development of beam purifying system

• Experimental study of beam energy distribution

• Integration of a beam-pulsing system for specific time-shaping

• Replacement of the ECR-ion source

• Delivery of intense eV, highly charged high quality ions beams



Task D

Ion optics for nano-beams and nano-positioning of single highly charged ions on surfaces with high energy resolution


• the trapping and cooling of the ions before extraction

• novel single-ion positioning and control optics



MPIK Heidelberg, Germany, + University of Duisberg-Essen, Germany

WORK PACKAGE

• Ion beam optics simulations• Ion optics design specifications, purchasing• Mechanical engineering: drawings and construction • Prototype ion focusing system: machining • Ion cooling test for extraction• Vacuum, ion optics assembly vibration insulation tests• Delivery/ installation of AFM• Coupling to EBIT beam line, beam tuning• Sample preparation and irradiation studies with semiconductors• Scanning of complex patterns: electronic tests; data acquisition



Task EA novel technique for ultra high resolution, low energy HCI

beam structuring


• Concept for a reduction ion-optical system for very low HCI energies

• ultra high resolution (<10 nm, depending on the quality of the illumination system) with very low energy HCI’s

• The desired low beam energy at the wafer level 20 eV per charge is achieved by an innovative imaging strategy



IMS, Vienna, Austria + New LEIF partners

WORK PACKAGE

• Definition of User Requirement Specs

• Design of HCI-optics

• HCI-optics fabrication

• Demo experiments (IMS + New LEIF partners)

• JRA joint experiments: HCI nanostructuring

• Industry feasibility study

• Prototype tool design and fabrication (if consortium can be formed)



Task F

Ion beam guiding in nano-capillaries


• potentially important applications in both macroscopic and mesoscopic focusing

• may provide superior focusing than conventional methods



HMI, Berlin, Germany + QUB, Belfast, UK

WORK PACKAGE

• Macroscopic focusing by ion guiding

• Mesoscopic

• Focusing by ion guiding

• Research on the technique to guide ions in capillaries

• Application of AFM/STM



(a)

(b)

(c) (d)

. Ion focusing by capillary guiding (a) fast ion tracks produced bent foil(b) after etching of the capillaries and stretching of the foil slow ions are focused on a

spot using guiding effects (c) fast ion tracks are produced in a plane foil(d) the foil is bent leading to focusing by guiding effects

Documents

29 th June–1 st July 2003NewLeif FP6 I3 Joint Research Activity No. 2 Innovative Low Energy Ion Beam Technologies Co-ordinator: R.W. McCullough, Queen’s