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Copyrights© 2011 CSK TAIWAN Inc. all right reserved
Presenter : Seung Gon Kim
Safety and Energy Saving System on High Flow Hydrogen Abatement
Copyrights© 2011 CSK TAIWAN Inc. all right reserved
CONTENTS
1. Company profile
2. Introduction
3. Review of present Abatement systems
4. Future abatement system with energy saving
5. Discussion & Direction of future abatement system
Copyrights© 2011 CSK TAIWAN Inc. all right reserved
1. Company profile
HumanHuman……NatureNature……
HappinessHappiness……
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ProductsScrubber
Burn & Wet Plasma & Wet WetThermal & Wet
PDS
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2. Introduction
Why Hydrogen is used in the process?
※ The Effect of Carrier Gas and H on MOCVD Cu Films Using Cu(1,5-COD) as a Precursor .1028 Lee, Ko, Journal of ELECTRONIC MATERIALS, Vol. 30, No. 8, 2001
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2. Introduction
Which process is needed Hydrogen Carrier?Process Reasons Remark
MOCVD
1. Using hydrogen carrier gas led to a higher MOCVD Cu deposition rate and a lower film resistivity compared to an argon carrier gas system.
2. Improvements in surface roughness of the MOCVD films.
EPI 1. The hydrogen is used the processing gas as follow.SiCl4(g) + 2H2(g) ↔ Si(s) + 4HCl(g)
MOCVD EPI
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2. Introduction
What is the H2(Hydrogen)??
H2 MATERIAL SAFETY DATA SHEET
Characteristics Value
Boiling point -423F(-253C)
Freezing point -434F(-259C)
Vapor pressure 760mmHg@-253C
Vapor density(air=1) 0.07
Water solubility 0.08987 g/L @ 0C
Viscosity 1.82% @ 20C
auto Ignition temperature 790F(520C)
Hydrogen is the Lightest gas ever found.
Hydrogen has No color, No smell and No Taste.
Hydrogen is the simple element known to exist.
An atom of hydrogen has one proton and one electro.
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3. Review of present abatement methods
Dilution with air for LEL(lower explosion limit)
Usually wet scrubbing solution was used for abatementsoluble gases(NH3, Cl2, HCl etc) and dust.
Hydrogen was not considered as abatement gas due to it is not pollutant
Difficult to control LEL with dilution (Control mistake=high potential of explosion)
Combustion with oxidizerHigh temperature of H2 combustion (High temperature of exhaust gas)Thermal managementHigh burning velocity and flash back (explosion)Safety management
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4. Characteristics of Hydrogen Combustion
H2 + O2 +E(ignition) → H2O+E(generation)
• A premixed fuel-air mixture will only burn as long as the fuel concentration is between the upper and lower flammability limits, i.e. UFL and LFL.
• The flammability limits are experimentally determined data. The flammability limits in air depend on initial temperature and pressure. Standard test conditions are 25°C and 1 atm.
Flammability Limit (LFL & UFL)
Auto ignition temperature of H2 is around 520 ℃ at 1atm
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4. Characteristics of Hydrogen Combustion
Adiabatic flame temperature
Adiabatic flame temperature is 2380K (at f=1.1)at maximum andalmost 600K (at f=1.9) is higher than that of methane case
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4. Characteristics of Hydrogen Combustion
Laminar burning velocity
Laminar flame speed for Stoichiometric composition (Harris, 1983).
Hydrogen Ethylene Propane Methane
S (m/s) 28.0 6.5 4.0 3.5
The higher the laminar flame speed, the more reactive is the mixture This means that the flame can propagate fast through a cloud and thereby cause flame acceleration and pressure build-up
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4. Characteristics of Hydrogen Combustion
Pressure Build up potential
Comparison of explosion pressure for various Stoichiometric fuel-air mixtures in a 10 m wedge-shaped vessel (Bjørkhaug 1988b).
Explosion pressure for H2-Air mixture is more than 100 times higher than that of methan-air mixture
More dangerous and need more careful treatment!!
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5. Safety consideration for H2 combustion
Control the flame speed
1. Active control
2. Passive control (externally control the flame temperature)
⎟⎟⎠
⎞⎜⎜⎝
⎛=
u
b1
0u ρ
ρSS
Using external heat sink source(e.g. cooling lid)Flame quencher (high heat capacity, ceramic)
H2 + other hydrocarbon
Fuel lean combustion
Qgen << Qloss
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5. Safety consideration for H2 combustion
Continuous ignition source
When flame blow out then H2 premixture exist inside reactor. It makes high potential of pressure build up andFinally ignition occur inside reactor, then explosion occur.
Anti-explosion design
It is final solution and can endure over 10 bar at minimum
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6. Thermal Treatment(energy saving)
High temperature of reactor
Thermal insulation or cooling system of reactor body
High temperature of flue gas
Over 1,000K should be decreased by cooling water
Those are absolutely energy loss for thermal treatment!!
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Thermal regeneration-External recirculation-Internal recirculation
Thermal insulation-Safety of worker-Defense energy loss
Energy saving
Safety
High DRE of H2-Perfect combustion
Thermal Treatment
All the issues should be solved togetherNeed new technology for H2 abatement system
Control of burning velocity-Fuel lean combustion-Anti flash back (Flame quencher)-Continuous ignition source
7. Optimization of H2 treatment issues
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Schematics of Heat regenerative system
Outlet
Heat-up- HeaterSupplementary Heater
Reverser
Regenerator 1 Regenerator 2
ReactorInsulation
• Heat regeneration is accomplished by "Thermal Swing" Method meaning periodically reversing the flow direction
• The energy is contained within the System
8. New concept of H2 abatement system
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9. Summary of new H2 abatement system
Items Detailed issues applicationThermal insulation
Energy saving Internal heat recirculationRegenerator
Safety of worker Thermal insulationThermal treatment
Defense energy loss Exhaust temperatureFuel lean combustion f=0.6
Anti flash back Id 2.5mm of honeycombSafetyContinuous ignition source Regeneration
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Advantages and Highlights:
• Thermal Swing Reactor is proven technology (thousands of RTO-units worldwide)
• very stable operations (no controller issues)• robust design • truly isothermal treatment (no cold channel)• Energy saving up to 90% (Tmax=800℃)• Easy to scale up !!!
9. Summary of new H2 abatement system
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Clean Solution! Clean Service! Clean Standing!
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