374hlleithen 2004 IfU.PPT) - Uni Leipzig

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IfU GmbH University. Lichtenau Dortmund

IFU Dipl.-Phys. S. Marke – Mühlleithen 2004

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• IfU Diagnostic Systems GmbH

• Acoustooptic Spectrometer (AOS)

• Motivation of Experiments

• Reactor Concept

• Imaging Spectrometer

• Spectroscopy Results

• Yield and Chemical Conversion

• Conclusion and Future Work

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Developer, Producer and Distributor of Fast Optical Emission Spectrometer based on

AOTF (acoustooptic tunable filter)

IfU Diagnostic Systems GmbH

� Gottfried-Schenker-Str. 18 09244 Lichtenau

� (+49) 037 208 / 889 0� (+49) 037 208 / 889 29� www.ifu.de oder [email protected]



• imaging spectroscopy at large area applications

• monitoring of voluminous plasma processes

• multi chamber magnetron sputtering

• process control at different regions inside the discharge

• pulsed magnetron sputtering processes

• periodic rf/mf applications

• process control

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Time resolution

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Aperture

8x8 mm²

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videovideoTechnical parameters AOS 4(5) spectral range 245 nm ......800 nmspectral resolution 0.05nm @ 250nm ,

0.5nm @ 800nmwavelength access 5(1) millisecondstime resolution in 200(10) ns pulse mode size 19” rack, height 4



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• Green house effect – reduction of Carbon dioxide

• Plasma activation of CO2

• CO2 can be used for chemical synthesis

• Optical emissionspectroscopy forprocess control

• Optimisation of homogeneousactiovation usingimaging spectroscopy

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'��'��CYRANNUS® I plasma source from Iplas GmbH, Germany

microwave power: up to 6 kW

flow rates: about 10 m³/h

(200 m³/h possible in inefficient mode)

Gas supply:Carbon Dioxide, Argon, Methane, Hydrogen



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Following specimen were found in emission spectrum:

C – Atomic Carbon,

C2,C3, C4 – Carbon cluster

O – Atomic Oxygen (triplet)

H – Atomic Hydrogen

OH, CH – Bands 250 300 350 400 450 500 550 600 650 700 750 800

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C2CHC4 C3OH

OH

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• Spectrum mode –integration of intensity at selectedarea for everywavelength

• Chrongram mode –sampling of picturesfor selectedwavelengthsC2-Emission at 516 nm

Central range of plasma source



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CO2 conversion, 4500 W

CH 4 conversion, 4500 W

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• Plasma activation of Carbon dioxide adding Methane is able to produce synthesis gas,

• Synthesis reactor handles up to 10 m3/h gas flow,

• Time resolved emission spectroscopy is able to optimise the plasma activation process

- for conversion of raw material,

- yield of conversion,

- pre selection of conversion products,

• Acoustooptic imaging spectroscopy – useful method to investigate large area or volume plasma phenomena. .

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• Imaging Spectroscopy• spatial resolution 100x100 pixels• picture sampling rate 40ms/picture• extend the wavelength range to UV

• Time Resolution- wavelength access: 1ms- pulse mode: 10ns - periodical application: less 10ns (phase shift method)

• Process Control- evaluation of DAC-module- AOS-Profibus-implementation

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374hlleithen 2004 IfU.PPT) - Uni Leipzig