59th Annual Technical Conference, Indiana …...plasma immersion ion implantation to produce graded interfaces and well-adherent coatings, doped diamond-like carbon for biointerfaces,

[email protected] . 505-856-7188 . www.svc.org

FINAL PROGRAM

SOCIETY OF VACUUM COATERS 59th Annual Technical Conference, Indiana Convention Center, Indianapolis, IN, USA

TECHCON2016

DOWNLOAD THE TECHCON MOBILE APP AVAILABLE ON iTUNES AND GOOGLE PLAY

INSIDE

Technical Program Schedule . May 10-13Symposium and Traditional Technical Sessions

Spotlight Sessions: HEURÉKA! Recent Developents,

Poster Presentations, Vendor Innovators Showcase

Technology Exhibit . May 11-12The Largest Exhibit Dedicated to Vacuum Coating Technologies -

Delivering Innovative Services and Equipment Solutions

Education Program . May 9-13Problem-Solving Tutorial Courses

NetworkingInteractive Forums • Meet the Experts Corner • Technology Forum

Breakfasts • Student, Young Members and Young Professional

Networking Events • SVC Foundation 5K Run

• Casino Fun Networking Mixer

Calendar of TechCon Events

2 Society of Vacuum Coaters 2016 TECHCON Final Program

The Exhibit and all Technical Sessions take place in the Indiana Convention Center (ICC).

Events and Meetings taking place in the Hyatt Regency Indianapolis:Awards Ceremony and Welcome Reception – Regency BallroomYoung Members Group Happy Hour – VisionCasino Fun Networking Mixer – Regency BallroomTAC Breakfast Meetings - 3rd Floor Meeting RoomsSee outside back cover for the entire list of events and room assignments.

On-Site RegistrationMonday, May 9, 7:30 a.m. - 11:00 a.m.at the Hyatt Regency Indianapolis for Monday Tutorial Course Registrants Only

At the Indiana Convention Center:• Monday, May 9 1:00 p.m. - 8:00 p.m.• Tuesday, May 10 7:15 a.m. - 6:00 p.m.• Wednesday, May 11 7:15 a.m. - 6:00 p.m.• Thursday, May 12 7:15 a.m. - 5:00 p.m.• Friday, May 13 7:30 a.m. - 1:00 p.m.

Registration Desk Phone Number 505-379-2861

IN THE EVENT OF EMERGENCY:such as witnessing visible smoke, someone in need of medical attention, or the need for security within the Convention Center, dial Security at 3350 from any RED House Telephone. House telephones are located in all major corridors approximately every 250 feet. In the event you cannot locate a red phone, please dial 317-262-3350 (ICC). Please do not dial 911.

TECHCON2016

Find the Technical Schedule at a Glance in the enclosed flyer.

505-856-7188 » fax 505-856-6716 » [email protected] » www.svc.org 3

Welcome from the Program Group

Welcome to the 2016 TechCon of the Society of Vacuum Coaters, held in Indianapolis, an exciting new venue for the SVC TechCon. In a town known for pushing the limits of auto racing, we continue our mission to connect research with production and innovation with business in a unique way, under the banner of this year’s Symposium topic, Leading-Edge Coating Technologies – High-Performance Films Shape Tomorrow’s Products.

A dedicated session and renowned Keynote speakers anchor the Symposium topic, but it also permeates the technical sessions, where you will find a mix of basic and applied research alongside ideas and tools focused on transitioning research results into production. Our sessions are filled with the latest developments in areas of vital importance to the vacuum coating industry. For the industrial practitioner, we offer a number of sessions focused on business topics and products, including the Vendor Innovators Showcase, Meet the Experts Corner, Industry Forum and Technology Forum Breakfast round-table discussions. As always, our Heuréka! Session focuses on recent developments that warrant public discussion, in a relaxed evening environment. Our Poster Session will be jump-started with a series of brief, oral “executive summaries” to enhance the dialogue with the poster authors.

A new innovative “Fundamentals of Interface Design” session is jointly organized by the program teams of the Society of Vacuum Coaters (SVC) and the International Conference of Metallurgical Coatings and Thin Films (ICMCTF). It leverages the combined strengths of SVC’s application-oriented perspective with the first-principles rigor typical of the ICMCTF to highlight the latest advances in interface design for film and coating technologies.

The technical program is enhanced by our unique networking opportunities, a multi-faceted education program, and the largest technology exhibit of its kind, creating the ideal environment for learning about the latest research, industry trends, and nurturing the right connections to develop your business.

Indianapolis and the surrounding region is well-suited to highlight the importance of broad coverage of leading-edge technologies in our industry. In addition to the cutting-edge automotive technology associated with the greatest spectacle in racing – the Indy 500 - the Indianapolis region is home to a range of large, highly specialized and diverse industries developing and applying vacuum coating technologies. We hope you find this to be an exciting locale for the TechCon to develop your business in a refreshing new environment.

We look forward to “innovating with you” at the 2016 SVC TechCon. Welcome to Indianapolis!Chris stoessel, eastman ChemiCal Company ([email protected]) is the program Chair.ralf bandorf, fraunhofer ist ([email protected]) is the assistant program Chair.sCott Walton, u.s. naval researCh laboratory ([email protected]) is the past program Chair.Carl lampert, star sCienCe ([email protected]) is the teChniCal direCtor.

WelcomeMessage from the President

I wish to welcome you to our 59th Annual TechCon in Indianapolis, Indiana. Indianapolis is the home of the “Indy 500” and NASCAR’s “Brickyard 400,” world-famous races that test both the endurance of drivers and materials. This year’s theme is “Leading-Edge Coating Technologies: High-Performance Films Shape Tomorrow’s Products.” Our conference fits very well with the advances being made in lighter, more efficient engines, and the tribology of engineered coatings and lubricants.

Indianapolis is the second largest city in the Midwest, providing a regional manufacturing presence of high-performance vehicle engines, agricultural equipment, and aircraft engines. The region is also the home to industries involved in driver safety, biotechnology, and information technology - all ideal industries for our conference. The Crossroads of America is ready for you to come and appreciate SVC’s outstanding technical program, exciting exhibition, rich educational program, as well as numerous networking events, along with an Industry Forum looking at future trends in our technology.

The Symposium on High-Performance Films will focus on the investigation of coatings for a variety of applications. This includes the progress and outlook of coatings and films that will be used in transportation, control, display and data collection technologies. Also, our traditional subjects for the broader application of coatings will be covered. All those interested in the most recent developments in vacuum coatings, surface engineering, equipment and allied technologies are expected to be at the TechCon.

TechCon participants come from all facets of our industry: manufacturers, suppliers, end users, researchers, managers, development engineers, educators and students. The program scope spans from fundamental aspects and innovative ideas all the way to manufacturing finished products. I would very much appreciate your feedback, your new ideas and suggestions that you believe would further improve the impact of the SVC’s TechCon.

SVC offers TechCon highlights in the SVC Bulletin and the SVC Digital Library gives online access to the technical papers presented at the TechCon. Also, some of the best TechCon papers will be published in a special issue of the refereed, archival journal, Surface and Coatings Technology.

I wish you a very successful, enjoyable and fruitful meeting, and look forward to seeing you in Indianapolis.Wolfgang diehl, fraunhofer institute for surfaCe engineering and thin films ist, germany ([email protected]), svC president

SVC Board of Directors

PresidentWolfgang DiehlFraunhofer IST, [email protected]

Vice PresidentGary VergasonVergason Technology, [email protected]

Immediate Past PresidentLudvik MartinuÉcole Polytechnique de Montréal, [email protected]

SecretaryHana BaránkováUppsala University, [email protected]

TreasurerMichael AndreasenVacuum [email protected]

DirectorsBrent BoyceGuardian Industries, [email protected]

David ChristieAdvanced Energy Industries, [email protected]

Adriana CreatoreEindhoven University of Technology, The [email protected]

Gary DollUniversity of [email protected]

Jolanta E. Klemberg-SapiehaPolytechnique Montreal, [email protected]

David SanchezMaterion Advanced [email protected]

Robert SargentViavi [email protected]

Karin SchererEssilor, [email protected]

Chris StoesselEastman Chemical [email protected]

Technical DirectorCarl LampertStar [email protected]

SVC Administrative Offices71 Pinon Hill Place NE, Albuquerque, NM 87122-1914Telephone 505/856-7188, Fax 505/856-6716E-mail [email protected] Web Site www.svc.org

Executive DirectorVivienne Harwood [email protected]

SVC Bulletin and Proceedings EditorDonald M. [email protected]


Award Recipients2016 Award Recipients

The Nathaniel H. Sugerman AwardThe Nathaniel H. Sugerman Memorial Award was established in 1992 to commemorate the enduring efforts of Nat Sugerman (1922-1991) in founding, nurturing, and supporting the Society of Vacuum Coaters.

2016 Nathaniel Sugerman Award RecipientAndré Anders, Lawrence Berkeley National Laboratory, Berkeley, CAFor his many contributions to the science of plasmas, particularly time dependent effects in magnetrons, and vacuum coating technology education.

André Anders grew up in East Germany where he developed a taste for geographic and scientific exploration. He applied to study physics abroad with the (communist) government and he was told to learn Polish and go to at the University of Wrocław, Poland. The precursors of the collapse of the “Soviet empire” were most obvious in

Poland of 1980, and after only one year abroad, in the Summer of 1981, he and other students were called back at the eve of Poland’s Martial Law. André continued his studies at Humboldt University in (East) Berlin to get his Dipl. Phys. (M.S.) Degree in 1984 with a topic on dielectric barrier discharges. He again applied to study abroad, this time being told to learn Russian and to attend Lomonosov Moscow State University, where he researched atmospheric pressure discharges. In 1987, he completed his PhD at Humboldt University, his first son was born, he got his first job at the Academy of Sciences, and was drafted to the East German military service. He learned to drive a truck and, on the side, started to compile fundamental and practical formulas for plasma physics. He arranged this

collection as a book. It appeared in print in 1990, just months after the fall of the Berlin Wall.

The fall of the Berlin Wall was a turning point in his life. It opened the door to apply for funding and to also to pursue opportunities abroad.

After completing research on cathode spot plasmas (1990-91) at the Academy, André joined Lawrence Berkeley National Laboratory, in Berkeley, California, initially as a visiting researcher and later as Staff Scientist. His research at Berkeley shifted from plasmas to materials, thin films, and surface engineering. For example, he worked on filtered arc technology for the deposition of ultrathin diamond-like carbon films, which is still used today by manufacturers of read-write heads in the magnetic storage industry. The range of topics and applications of the research at Berkeley Lab is wide, including optical and protective coatings, switchable materials and layer systems for electrochromic windows, formation of nanoparticles, ion implantation, plasma immersion ion

implantation to produce graded interfaces and well-adherent coatings, doped diamond-like carbon for biointerfaces, transparent conducting oxides, etc.

André has published three books and about 300 papers in peer-reviewed journals. He has given numerous talks and educational seminars at universities and conferences, including many SVC Annual TechCons. His publications are cited more than 11,200 times, and his work has been recognized by several awards, including two R&D100 Awards, the IEEE Merit Award, the Walter P. Dyke Award, and the Mentor Award of the Society of Vacuum Coaters. He served on the Editorial Board of Surface and Coatings Technology and as Associate Editor (2009-2014) for Journal of Applied Physics and was promoted to Editor-in-Chief in 2014. He was the 2015 Chair of the Executive Committee of Advances Surface Engineering Division of the AVS. For his contributions to plasma and material sciences, André was elected Fellow of the American Physical Society (APS), the American Vacuum Society (AVS), the Institute of Electrical and Electronic Engineers (IEEE), and the Institute of Physics (IoP).

The SVC Mentor AwardsThe SVC Mentor Award program was established to recognize those who have made or are making significant contributions to the SVC and/or the industry by their example or guidance, including one-on-one and one-on-many interactions.

2016 SVC Mentor Award Recipients

David J. Christie, Advanced Energy Industries, Inc., Fort Collins, COFor his contributions to the understanding of, and power supply technology supporting, reactive magnetron sputteringDave Christie married the love of his life, Claudia, in 1984,

and celebrated 32 years of marriage, and tandem road biking, this year. Dave’s career moved to the vacuum coating world in 1995 when he joined Advanced Energy, where he is currently Director, Applications Technology, previously serving as Director, Engineering and Senior Scientist. Before joining Advanced Energy, he held various positions at IXYS Colorado, Lawrence Livermore National Laboratory, and General Motors. In addition, he also had an adjunct faculty appointment at Colorado State University. He received his PhD from Colorado State University, MSEE from University of Illinois, and BEE from Kettering University. His experience and expertise include product development, technology development, advanced power applications for thin films, and intellectual property. He has numerous thin film related publications, and several patents.

Paolo Raugei, Deposition Technology Innovations, Jeffersonville, INFor his key roles in championing an SVC strategic plan, as a founder of the SVC scholarship program and the SVC Foundation, for service on both boards of directors, and as Foundation Chair

Paolo’s vacuum coating career began in 1976 when he joined the Italian vacuum metallizing equipment maker Galileo Vacuum Systems. He has fond memories of the company’s pioneering spirit in vacuum web coating technology. His career with Galileo took him all over the world and in 1989, he finally landed in the US as VP for the Americas. The same year coincides with his introduction to the SVC where he has served in different roles over the years, most recently as Chair of the SVC Foundation. In 2012 he joined DTI, a fast growing web sputter coater, which gave him the opportunity to transition from equipment to product. As Paolo reflects back over the last 40 years, he has been blessed with the support of many individuals, especially his mother as well as Seien, his wife of 32 years.

Table of Contents

Conference Center Map ____________2

Welcome to the Conference _________3

2016 Award Recipients _____________4

Student Sponsorship Program _______5

Tutorial Schedule ___________________6

Special Events • Highlights __________7

Technical Program _______________ 8-21

On-Location Education Program ____19

SVC New Directors ________________22

Career Opportunities ______________22

Digital Library _____________________23

SVC Corporate Sponsors ___________23

Webinar Program _________________24

SVC LinkedIn _____________________24

Notes _____________________________25

SVC Education Guides _____________26

TechCon Sponsors _________________27

Schedule of Events ________________28

TECHCON2016

Martin Caron, École Polytechnique de Montréal, CanadaEnvironmental Stability of Hybrid Optical Coatings on Polymer Substrates(O-3) Thursday, May 12, 9:20 a.m.

Fabio Ferreira, University of Coimbra, PortugalPhase Tailoring of Ta Thin Films by HiPIMS in Deep Oscillations Magnetron Sputtering (DOMS) Mode (HP-8) Tuesday, May 10, 4:40 p.m.

Deepak Kumar Kaushik, Indian Institute of Technology Madras, IndiaDisorder in the DC Magnetron Sputtered Cu2ZnSnS4 Thin Films Grown in Sulfide Plasma(EC-7) Thursday, May 12, 11:20 a.m.

Adam Obrusnik, Masaryk University, Czech RepublicUsing Numerical Simulations for Optimization of a Deposition Process in an Atmospheric-Pressure Dielectric Barrier Discharge (P-7) Wednesday, May 11, 10:00 a.m.

Wu Chang Peng, National Chung Hsing University, TaiwanHIPIMS Deposited Titanium Monoxide and the Effect of Post Annealing (HP-6) Tuesday, May 10, 4:00 p.m.

Shaun Robertson, University of the West of Scotland, United KingdomInvestigation of the Antimicrobial Properties of Modified Multilayer Diamond-Like Carbon Coatings on 316 Stainless Steel (MED-4) Tuesday, May 10, 3:00 p.m.

Roya Rudd, University of South Australia, AustraliaThe Energy Gap of Sputtered Sub-Bohr Radius Silicon Quantum Dots (O-2) Thursday, May 12, 9:00 a.m.

SVC acknowledges the SVC Foundation for providing travel sponsorships to the following sponsored students.

Mohamed Bah, University of Delaware Synthesis and Characterization of Polycrystalline Hollow Magnetic Nanoparticles by Vacuum Evaporation and Inert Gas Condensation(E-9) Wednesday, May 11, 9:20 a.m.

Bin Dong, University of North Texas Novel Boron Carbide/Aromatic Polymers Deposited by Plasma-Enhanced Chemical Vapor Deposition: Electronic and Photonic Properties(MED-5) Tuesday, May 10, 3:40 p.m.

Renan Oss Giacomelli, Universidade Federal de Santa Catarina, BrazilPlasma Nitrided + DLC: A Multifunctional Coating on Gray and Nodular Cast Irons (T-12) Friday, May 13, 10:20 a.m.

Erika Herrera Jiménez, École Polytechnique de Montréal, CanadaInterface Control for Enhanced Performance of Hard Protective Coatings(T-2) Thursday, May 12, 9:00 a.m.

Daniel J. Higgs, University of ColoradoNew Tool for Scalable Thin Film Organic Polymer Deposition on Flexible Substrates Using a Solvent-Free, Gas Phase, Spatial Molecular Layer Deposition Approach(W-5) Friday, May 13, 9:40 a.m.

Muhammad Zafar Ullah Khan, University of Windsor, CanadaHigh Temperature Tribological Behavior of Non-Hydrogenated DLC Coated Steel against Fluorinated Tetrahedral Amorphous Carbon (ta-C-F)(T-14) Friday, May 13, 11:20 a.m.

Young Members and Mentors Happy HourHyatt Regency Indianapolis - VisionTuesday, May 10, 7:30 – 8:30 p.m.

Young Members, Students and Young Professionals (age 35 and younger) are welcome to attend this informal get-together, designed to allow participants the opportunity to engage in one-on-one discussions with volunteer mentors from industry and academia. This mentoring program serves as a “bridge” between those just entering the vacuum coating community and SVC Mentors, representing various sectors of vacuum coating and related technologies. Focused discussions explore technical issues, employment opportunities in vacuum coating and offer useful knowledge on how to successfully navigate the TechCon event.

Become a Young MemberThe Young Members Group is open to young people (35 years of age or under at any time in 2016) with an interest in vacuum coating and related technologies. Members of the group may be SVC Young Members Group and Mentors Program students, young professionals or technical staff in industry.

Young Members receive the following benefits:• Discounted SVC Membership Fee: $40• Discounted Conference Registration Fee

For more information on the Young Members Group and Mentors Program, visit www.svc.org and explore the Students and Young Members button.

The SVC Student Sponsorship Program provides travel support and conference registration fee waivers to selected full-time students to present their work at TechCon. The Student Sponsorship Committee evaluates applications from students worldwide and makes selections based on the quality and relevance of the student’s project to the interests and mission of the SVC. Once again, the SVC Foundation has collaborated with the SVC Student Sponsorship Committee to provide student travel sponsorship awards to promising students.

In 2016 this collaboration resulted in the selection of the following individuals whom SVC and the SVCF are pleased to introduce to the SVC Technical Conference in Indianapolis.


SVC + SVC Foundation Student Sponsorship Program Partnership


continued on page 24

Education Solves Vacuum Coating Problems

23 TUTORIAL COURSES OFFERED• Broaden Knowledge• Improve Your Skills• Increase Productivity in your Workplace

The TechCon Tutorial Program increases your practical knowledge of vacuum coatings and processes. Return to work with solutions to your everyday vacuum coating troubles and breathe new life into your career.

You do not have to register for the TechCon to attend the tutorial courses or visit the Exhibit.

NEW! MEMBER + NON-MEMBER PRICING2016 SVC members receive an approximate 15% discount on tutorial course registration fees.

ADDITIONAL DISCOUNTS:For Multiple Employees from the Same Organization Receive 25% off each tutorial course registration for the second or more employee from the same company, enrolling in the same tutorial as the first employee. (Does not apply to the student tutorial course fee).

TUTORIAL CLASSIFICATIONThe tutorial codes (V, C, M) indicate whether the emphasis of the tutorial is primarily on:V - Vacuum TechnologyC - Vacuum Coating Deposition Processes and TechnologyM - Miscellaneous Topics

The tutorial number indicates the level of topic specialization. Lower numbers are basic or introductory in nature, and higher numbers are a more specialized treatment of a specific topic.

Monday, May 9 Monday tutorials 9:00 a.m. - 5:00 p.m. - Hyatt

C-103 Introduction to Physical Vapor Deposition (PVD) Processes S. Ismat Shah, University of DelawareC-205 Introduction to Optical Coating Design NEW! Robert Sargent, Viavi SolutionsC-323 High Power Impulse Magnetron Sputtering Arutiun Ehiasarian, Sheffield Hallam University, UK & André Anders, LBNLC-337 ITO and Alternative TCO: From Fundamentals to Controlling Properties Clark Bright, Bright Thin Film Solutions (retired 3M) C-311 Thin Film Growth and Microstructure Evolution Joe Greene, University of Illinois

Tuesday, May 10 Tuesday-Friday tutorials - Indiana Convention Center

C-203 Sputter Deposition 2-Day Tutorial Course Joe Greene, University of IllinoisC-322 Characterization of Thin Films Tom Christensen, University of ColoradoC-217 Practical Production of Optical Thin Films Ron Willey, Consultant, Willey OpticalV-204 Vacuum Systems, Materials, and Operation John O’Hanlon, University of Arizona, retiredC-336 Transparent Gas Permeation Barriers on Flexible Substrates John Fahlteich, Fraunhofer FEP, Germany

Wednesday, May 11

C-333 Practice and Applications of High Power Impulse Magnetron Sputtering (HIPIMS) AM Ralf Bandorf, Fraunhofer IST, Germany & Arutiun Ehiasarian, Sheffield Hallam University, UKC-328 Properties and Applications of Tribological Coatings AM Allan Matthews, The University of Manchester, UKM-102 Introduction to Ellipsometry AM James Hilfiker, J.A. Woollam Co. Inc. C-317 The Practice of Reactive Sputtering Bill Sproul, Reactive Sputtering, Inc.C-341 Processing on Flexible Glass – Challenges and Opportunities PM NEW! Manuela Junghähnel, Fraunhofer FEP, Germany

Thursday, May 12

C-212 Troubleshooting for Thin Film Deposition Processes Gary Ash, Castle Brook CorporationC-210 Introduction to Plasma Processing Technology AM Hana Baránková, Uppsala University, Sweden & Lad Bárdos, Uppsala University, SwedenC-306 Non-Conventional Plasma Sources and Methods in Processing Technology PM NEW! Hana Baránková, Uppsala University, Sweden & Lad Bárdos, Uppsala University, SwedenC-208 Sputter Deposition in Manufacturing David Glocker, IsofluxV-208 Basic Analysis of Mass Spectrometer Spectra NEW! Robert Langley, Oak Ridge Scientific Consultants

Friday, May 13

C-320 Diamond Like Carbon Coatings – from Basics to Industrial Realization AM Thomas Schuelke, Fraunhofer USA & George Savva, IHI Ionbond, Inc. C-326 Manufacture of Precision Evaporative Optical Coatings AM Jim Oliver, University of Rochester LLEC-316 Introduction to Atomic Layer Deposition (ALD) Processes, Chemistries, and Applications AM Brian Willis, University of Connecticut

Visit www.svc.org/2016Education for tutorial course descriptions, instructor bios and other details.

2016 TechCon Education Program

Full-day: 8:30 a.m. - 4:30 p.m.

Half-day: AM 8:30 a.m. - 12 noon

PM 1:00 p.m. - 4:30 p.m.


Special Events + ProgramsMonday, May 9

SVC Awards Ceremony and Welcome ReceptionAll are Invited to Attend.

SVC Awards Ceremony Hyatt Regency Indianapolis | Regency Ballroom E-F

beginning at 6:15 p.m. The Awards Ceremony will introduce and recognize the

Nathaniel Sugerman Memorial Award Recipient and SVC Mentor Award Recipients for 2016.

Plus, Sponsored Student Award recipients will be featured during the ceremony.

Welcome ReceptionHyatt Regency Indianapolis | Regency Ballroom A-D

7:00 p.m. The Welcome Reception immediately follows the Award Ceremony

Sponsored by Denton Vacuum LLC

Young Members Group + SVC Mentors Happy HourHyatt Regency Indianapolis | Vision

Tuesday, May 10, 7:30 p.m. – 8:30 p.m.Young members, students and young professionals

(age 35 and younger) are welcome to attend this informal get-together designed to allow participants

the opportunity to engage in one-on-one discussions with volunteer mentors from industry and academia.

For more details see page 5.

Casino Fun Networking MixerHyatt Regency Indianapolis | Regency Ballroom A-F

Wednesday, May 11, 6:15 p.m. – 9:00 p.m.After the Exhibit Reception ends on Wednesday,

join us for a fun evening of casino games, prizes and a buffet dinner at the Hyatt Regency Indianapolis.

Sponsored by Intlvac Thin Film

SVC Foundation Fundraising Event5K Fun Run and Walk

Wednesday, May 11 at 6:00 a.m.Meet in the Hyatt Regency Lobby at 5:45 a.m.

Cost: $25 per person (includes a T-shirt)Register for this special event at the Information Center.

TEAM CHALLENGE Sponsored by Sputtering Components, Inc. Individuals must be registered for the 5K Fun Run/Walk

to participate in the Team Challenge. Minimum of 4 members per team. The first team across the finish line wins the traveling plaque. The first 4 members

from the winning team to cross the finish line will receive an additional award.

Exhibit HighlightsAll activities take place in the Exhibit Hall, unless indicated otherwise.Free Wireless Internet Sponsored by Gold SponsorsINFICON, IHI Ionbond, Inc., Soleras Advanced Coatings, and Vergason Technology, Inc.

Wednesday, May 11 Exhibit Hours 12:00 p.m. – 6:00 p.m.

Lunch for Sale 10:30 a.m. - 2:30 p.m.Crossroads Bistro across from Exhibit entrance, behind escalators

Specialty Coffee Cart1:00 p.m. - 5:00 p.m.Sponsored by Plansee USA, LLC

Oral Poster Session2:20 p.m. Wabash 1

Poster Session 3:30 p.m. - 6:00 p.m.

SVC Foundation Presentations 4:30 p.m.Golf Tournament and 5K Run Winners

Exhibit Hall Reception5:00 p.m. - 6:00 p.m.

Casino Fun Networking Mixer 6:15 p.m. Regency Ballroom A-F, Hyatt Regency IndianapolisAll are Invited. Sponsored by Intlvac Thin Film

Thursday, May 12 Exhibit Hours 10:00 a.m. – 5:00 p.m.

SVC Sponsored LunchTickets Distributed to Full Conference Registrants and Exhibitors12:00 Noon - 1:00 p.m.

Vendor Innovators Showcase 12:30 p.m. Room 109

Specialty Coffee Cart 10:00 a.m. - 2:00 p.m.Sponsored by Materion Corporation Frozen Treat Stations 2:00 p.m. - 3:00 p.m.Sponsored by Vacuum Research Corporation

Beer Blast 3:30 p.m. - 5:00 p.m.Sponsored by VON ARDENNE GmbH

Best Poster Award Presentation4:00 p.m. Poster Presentation area

Full-day: 8:30 a.m. - 4:30 p.m.

Half-day: AM 8:30 a.m. - 12 noon

PM 1:00 p.m. - 4:30 p.m.


New! Process Control and Process Monitoring Room 110 Ric Shimshock, MLD Technologies, LLC and David Christie, Advanced Energy Industries, Inc.Process control and process monitoring are fundamental and key elements to the operation of a robust, high-yield industrial process. Various online monitoring approaches including plasma, impedance, optical, Quartz Crystal Monitoring (QCM), and ellipsometric are routinely employed. Each approach has its individual strengths and limitations. Additionally, process modeling can be used to help interpret and establish these process control schemes. Discussions will focus on identifying and resolving many of the issues faced in running a robust deposition process. Bring your questions and successes for a chance to interact with others interested in this wide-ranging topic.

Annual Business Meeting8:30 a.m. – 9:00 a.m. Wabash 2All are invited!

Keynote PresentationSymposium on Leading-Edge Coating Technologies –

High-Performance Films Shape Tomorrow’s Products9:00 a.m. Wabash 2 moderator: Chris stoessel, eastman ChemiCal Company

Thin Film Deposition Techniques for Advanced Energy Materials: From Fundamental Aspects to

Device Technology Wolfram Jaegermann, Technische Universität, Darmstadt, Germany

Thin film materials play an important role in advanced energy technologies such as solar cells, (photo)electrochemical cells, and batteries. As the performance of such devices is strongly dominated by interface effects, we have established a number of integrated UHV systems for our research that consists of the combination of various thin film deposition techniques coupled with surface science analytical techniques. In these systems, fundamental studies on the influence of different synthesis and processing steps on materials properties can be combined with the manufacturing of completed devices. In this talk, we will address the first investigations on new thin film absorber materials in comparison to CdTe solar cells. In addition, the needed research efforts and initial promising results on photoelectrochemical water splitting will be presented. Finally, interface effects in Li ion batteries will be discussed. We will emphasize the dominant influence of electronic effects for energy related materials research. Applying modern surface science techniques, such as photoelectron spectroscopy, for investigating the electronic structure of in situ deposited thin film and interfaces leads to a better insight of material’s properties and device functionality, which can be used in a knowledge-based approach of device optimisation.

Symposium on Leading-Edge Coating Technologies – High-Performance Films Shape Tomorrow’s ProductsWabash 2 moderators: moderators: Chris stoessel, eastman ChemiCal Company and ralf bandorf, fraunhofer institute for surfaCe engineering and thin films ist, germany

9:50 a.m. SY-1 Cathode Heating in Reactive Magnetron Sputtering: A Previously Ignored Hysteresis Loop Whose Analysis Provides Accurate Values of the Secondary Electron Yieldinvited talk D.J. McClure 1,2, C. Bedoya2, E.J. Anderson2

1Acuity Consulting and Training, Lindstrom, MN23M Corporate Research Laboratories, St. Paul, MN

Technology Forum Breakfast7:00 a.m. – 8:15 a.m. In these facilitator-led forums, experts are available to answer your questions and discuss your concerns in an informal environment. This morning’s topics include:

Coatings for Thin Film Photovoltaics Room 104 Wolfgang Diehl and Stephan Ulrich, Fraunhofer Institute for Surface Engineering and Thin Films IST, GermanyThe previous overcapacity of PV module is not present anymore. Nevertheless, prices continue to decline and therefore more efforts are needed towards higher efficiencies, higher durability, and lower module and installation costs. Due to the further expected cost reduction, solar electricity is reaching increasing net parity with established sources. Therefore, the worldwide installed PV capacities are steadily increasing to more than 40 GW/a. In spite of its lower efficiency, thin film technology is facing ambitious aims concerning efficiency and price. In the next two years, the efficiency with thin film absorbers should reach 17% in modules while further reducing the manufacturing costs. CdTe and CIGS show the potential to reach this target. Upcoming technologies like Perovskite show a big potential in future. An increasing need for thin film technology is also observed in conventional silicon wafer technology. Cheap and reliable coatings like TCOs, AR coatings, back contact technology and mature absorbers for thin film photovoltaics are the key issue for the expansion of our technology.

High-Power Impulse Magnetron Sputtering (HIPIMS) Room 105 Arutiun Ehiasarian, Sheffield Hallam University, United Kingdom and Ralf Bandorf, Fraunhofer Institute for Surface Engineering and Thin Films IST, GermanyHigh power impulse magnetron sputtering has finally arrived in industrial production after more than 15 years of intensive fundamental and application oriented research. Improvements in hardness, toughness, refractive index, adhesion on plastic substrates, conformity of the coating to complex shaped parts and reduced deposition temperature are among the benefits that underpin the relevance of HIPIMS to modern production processes. Come learn about the new challenges facing this new technology and discuss the status and technological barriers broken by this process.

Coatings and Surface Engineering for Medical Applications Room 109 Hana Baránková, Uppsala University, Sweden and Aryasomayajula Subrahmanyam, Indian Institute of Technology Madras, Chennai, IndiaPresently, the coatings industry in bio-medical applications has crossed the six billion dollar mark and is still increasing. There is a vast scope for several emerging and new concepts. Among the emerging concepts that are proposed to be discussed are, for example (i) developing methods of assessing the potential longer term stability (ageing) issues associated with coated devices prior to clinical trials (ii) smart systems and sensors for regular health monitoring and (iii) development of early warning systems in mechanical heart valves and (iv) Anti-microbial surface coatings for prevention of Hospital Acquired Infection (HAI) and patient safety.

Transparent Conductive Materials (TCM): from Transparent Conductive Oxides (TCO), to Thin Film Metals, to Alternative Materials Room 106 Clark Bright, Bright Thin Film Solutions, LLC (3M, retired)All aspects of TCM, from fundamentals, deposition/growth, and controlling properties, to using TCM in applications, will be open for discussion. Come share your research, ask questions or get help solving a problem. Everyone is welcome from beginners to experts. While ITO is still ’number one’, there is considerable progress with other TCO and alternative materials, e.g., graphene, nanotubes and hybrid TCC. Zinc oxide-based TCO, e.g., AZO, GZO and ZO with other dopants, are improving with some in commercial application. Also, IZO is replacing ITO in some commercial use. Please join us for wide-open discussions.

TUESDAY . may 10


Tuesday PM . May 9

10:30 a.m. – 2:30 p.m. Cash Lunches for Sale at Crossroads BistroOpposite the Exhibit Hall EntranceBring your lunch to the Donald M. Mattox Tutorial.

The Donald M. Mattox Tutorial Presentation12:50 p.m. Wabash 2 moderator: donald m. mattox, management plus, inC.

New Challenges for Industrial Tribological Coatings Allan Matthews, The University of Manchester, United Kingdom

Whilst there are continuing technological breakthroughs pushing new coating and surface

treatment developments, there are also regulatory, legislative and performance demands which act to pull-through developments in surface processes and coatings with particular attributes to meet the challenges faced by manufacturing industry. It is therefore important that coating companies and those developing coatings work together with these end-user companies and become integrated into the product development programs; this includes becoming embedded into the end-user’s in-house testing and validation systems. Examples are provided of end-user test programs for new coatings and the methodologies and philosophies driving the adoption of new coatings by major manufacturing organisations.

Emerging TechnologiesWabash 2moderators: manuela Junghähnel, fraunhofer institute for organiC eleCtroniCs, eleCtron beam and plasma teChnology fep, germany and JaCob bertrand, maxima sCienCes, llC

1:40 p.m. E-6 Sputter-Deposited Mo Thin Films with Improved Fracture Behavior for Flexible ElectronicssvC foundation sCholarship reCipient

T. Jörg1, M.J. Cordill1,2, R. Franz1, O. Glushko1,2, J. Winkler3, C. Mitterer1

1Montanuniversität Leoben, Leoben, Austria2Austrian Academy of Sciences, Wien, Austria3PLANSEE SE, Reutte, Austria

2:00 p.m. E-7 Vacuum Polymerization of Active DevicesF. Papa1, V. Bellido-Gonzalez2, B. Daniel2, J. Brindley2, H. Li2, A. Azzopardi2, I. Fernandez3, A. Wennberg3

1Gencoa, Davis, CA2Gencoa Ltd., Liverpool, United Kingdom3Nano4Energy, Madrid, Spain

10:30 a.m. - 10:50 a.m. break

10:50 a.m. SY-3 Increasing the Oxidation-Resistance of Molybdenum Thin FilmsH. Köstenbauer, D. Lorenz, M. Schober, J. WinklerPlansee SE, Reutte, Austria

11:10 a.m. SY-4 A Case Study in Progress - Replacing an Incumbent Coating Technologyinvited talk M. Brazil Vergason Technology, Inc., Van Etten, NY

Emerging TechnologiesWabash 1 moderators: manuela Junghähnel, fraunhofer institute for organiC eleCtroniCs, eleCtron beam and plasma teChnology fep, germany and JaCob bertrand, maxima sCienCes, llC

9:50 a.m. E-15 Atomic Layer Etching Using Thermal Reactions: Atomic Layer Deposition in ReverseY. Lee, J.W. DuMont, D.J. Higgs, S.M. GeorgeDepartment of Chemistry and Biochemistry, University of Colorado, Boulder, CO

10:10 a.m. E-2 Superconducting Coatings of Complex Accelerating Cavities Geometries A. Sublet, S. Calatroni, P. Costa Pinto, T. Richard, G. Rosaz, M. TaborelliVacuum Surfaces and Coatings, CERN, Geneva, Switzerland

10:30 a.m. - 10:50 a.m. break

10:50 a.m. E-3 Optimization of Precursor Utilization Using Spatial ALDE. Dickey, B. DanforthLotus Applied Technology, Hillsboro, OR

11:10 a.m. E-4 Gas Flow Sputtering for Manufacture of High Quality Hard Magnetic FilmsR. Bandorf, A. Gröninger, K. Ortner, H. Gerdes, M. Vergöhl, G. BräuerFraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany

11:30 a.m. E-5 Developing Perovskite and Dye Sensized Solar Cells and Modules on Flexible Substratesinvited talk T.M. Brown1, F. Di Giacomo1, F. De Rossi1, G. Lucarelli1, G. Mincuzzi1, A. Reale1, A. Di Carlo1, V. Zardetto2, W.M.M. Kessels2, M. Creatore2, J. Fahlteich3

1CHOSE (Centre for Hybrid and Organic Solar Energy), Department of Electronic Engineering, University of Rome “Tor Vergata”, Rome, Italy2Department of Applied Physics, Eindhoven University of Technology, The Netherlands3Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany

Plasma ProcessingWabash 3 moderator: patriCk Choquet, luxembourg institute of sCienCe and teChnology (list), luxembourg

9:50 a.m. P-1 13.56MHz Plasma Diagnostics Integrated with Impedance Matching NetworkT. Siembida1, A. Dziułko1, K. Lewandowski1, K. Kompa2, W. Glazek1

1TRUMPF Huettinger Sp. z o.o., Zielonka, Poland2Institute of Control and Industrial Electronics, Warsaw University of Technology, Warsaw, Poland 10:10 a.m. P-2 Shape Matters - Advantages of Waveform Adaptability in Plasma ApplicationsK. Ruda, W. Gajewski, P. Ozimek, W. GlazekTRUMPF Huettinger Sp. z o.o., Zielonka, Poland

10:30 a.m. – 10:50 a.m. – break

moderator: sCott Walton, u.s. naval researCh laboratory

10:50 a.m. P-3 Influence of Negative Oxygen Ions and Ion Energy Flux on the Phase Formation of Oxide Thin Filmsinvited talk S. Mráz, J.M. SchneiderMaterials Chemistry, RWTH Aachen University, Aachen, Germany

11:30 a.m. P-4 An Alternative Approach for High Quality Indium Tin Oxide Coatings to be Deposited with Rotatable Magnetrons H. Li1,T. Sgrilli1, V. Bellido-Gonzalez1, A. Azzopardi1, F. Papa2, D. Monaghan11Gencoa Ltd., Liverpool, United Kingdom2Gencoa Ltd. (USA), Davis, CA

11:50 a.m. P-5 Arc Plasma Deposition of Metal Nano-Particles D.J. Mount, E. SohmULVAC Technologies, Inc., Methuen, MA

TECHCON2016TUESDAY


2:20 p.m. E-8 Novel Low Pressure Sputtering Source and Improved Vacuum Deposition of Small Patterned Features Using Precision Shadow MasksW. Decker2, S. Armstrong1, R. Belan1, T. Fisher2, V.D. Heydemann2

1Kurt J. Lesker Co, Jefferson Hills, PA2Advantech U.S. Inc, Pittsburg, PA

Large Area Coatingsmoderators: miChael andreasen, vaCuum edge

2:40 p.m. L-1 Ten Years of Coating the 8-m Gemini Telescopes with Protected SilverT. Schneider1, T. Vucina2, C. Araya2, C. Ahhee1

1Gemini North, Hilo, Hawaii2Gemini South, La Serena, Chile

3:00 p.m. L-2 High Rate Sputter Deposition of Al2O3 Films for Electrical Insulation Applications on Large Area SubstratesT. Goschurny, D. Gloess, H. Bartzsch, P. Frach, A. Drescher, M. Gittner, P. Poetschick Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany

3:20 p.m. – 3:40 p.m. - break

3:40 p.m. L-3 Scratch-Resistant Coatings for Architectural Glassinvited talk S. LecoultreGlas Trösch AG, Bützberg, Switzerland

4:20 p.m. L-4 Superomniphobic Coatings for Automotive and Petroleum ApplicationsC.A. Ellis-Terrell, R. Wei, C. Rincon, M.A. Miller, K. CoulterSouthwest Research Institute, San Antonio, TX

4:40 p.m. L-5 DC-Dual-Anode Reactive Sputter Deposition of Transparent Dielectrics with Low Substrate Heating F. Benecke, H. ProehlVON ARDENNE GmbH, Dresden, German

5:00 p.m. L-6 Challenges for Counter Electrodes of Electrochromic DevicesS. Ulrich1, C. Szyszko1, S. Jung1, M. Vergöhl1, G. Bräuer1, S. Beuermann2, D. Jödicke2

1Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany2EControl-Glas GmbH & Co. KG, Plauen, Germany

Coatings and Processes for Medical and Environmental ApplicationsWabash 1moderator: hana baránková, uppsala university, sWeden

1:40 p.m. MED-1 Antibacterial Effects of Silver and Copper Nanoparticles Deposited by High Vacuum Magnetron Sputtering on Filtering MaterialsD.M. Mihut, L. LackeyMercer University, Macon, GA

2:00 p.m. MED-2 Photocatalytic Activity and Antibacterial Response of Titanium Oxide PVD Coatings Doped by Nitrogen Plasma Immersion Ion ImplantationJ. Esparza1, G.G. Fuentes1, R. Bueno1, R. Rodríguez2, J.A. García2, A. Vitas3

1AIN, Ingeniería Avanzada de Superficies, Cordovilla-Pamplona, Spain2Universidad Pública de Navarra, Pamplona, Spain3Universidad de Navarra, Pamplona, Spain

2:20 p.m. MED-3 Plasmas and Liquidsinvited talk F. IzaSchool of Mechanical, Manufacturing and Electrical Engineering, Loughborough University, Leicestershire, United Kingdom

3:00 p.m. MED-4 Investigation of the Antimicrobial Properties of Modified Multilayer Diamond-Like Carbon Coatings on 316 Stainless Steel sponsored student presentation

S. Robertson1,2, W. Mackay2, C. Williams2, S. Reid1, R. Birney1

1Institute of Thin Films, Sensors and Imaging, SUPA, University of the West of Scotland, Paisley, United Kingdom2Institute of Healthcare, Policy and Practice, Healthcare Associated Infections, University of the West of Scotland, Paisley, United Kingdom

3:20 p.m. – 3:40 p.m. - break

moderator: david gloCker, isoflux inCorporated

3:40 p.m. MED-5 Novel Boron Carbide/Aromatic Polymers Deposited by Plasma-Enhanced Chemical Vapor Deposition: Electronic and Photonic Propertiessponsored student presentation

B. Dong1, E. Echeverria2, J. Rimsza3, J. Du3, Y.S. Jun4, G. Stucky4, P.A. Dowben2, J.A. Kelber1

1Department of Chemistry, University of North Texas, Denton, TX2Department of Physics and Astronomy, Nebraska Center for Materials and Nanoscience, University of Nebraska-Lincoln, Lincoln, NE3Department of Materials Science and Engineering, University of North Texas, Denton, TX4Department of Chemistry and Biochemistry, University of California, Santa Barbara, CA

4:00 p.m. MED-6 Diamond-Like Carbon Coated Fabrics for Electrochemical Oxidation Process to Treat Organic Waste WaterC.-C. Yeh1, P.-W. Wang1, Y.-H. Chen1, K.-B. Cheng2, J.-L. He1

1Department of Materials Science and Engineering, Feng Chia University, Taichung, Taiwan2Department of Fiber and Composite Materials, Feng Chia University, Taichung, Taiwan

4:20 p.m. MED-7 Atmospheric Pressure ICP Jet for Manufacturing of Silicon Nitride Hip Implants from NanopowderY. Glukhoy, P. Ducha, A. Ryaboy, T. Kerzhner, B. Carman, V. LukashykNanocoating Plasma Systems Inc, Fremont, CA

High Power Impulse Magnetron Sputtering (HIPIMS)moderator: ralf bandorf, fraunhofer institute for surfaCe engineering and thin films ist, germany

1:40 p.m. HP-1 HIPIMS Applications for Soft Substrate Materialsinvited talk J.-L. HeDepartment of Materials Science and Engineering, Feng Chia University, Taichung City, Taiwan

2:20 p.m. HP-2 Deposition of ITO Films by Reactive High Power Impulse Magnetron Sputtering from a Metallic Rotatable TargetsvC foundation sCholarship reCipient

F.C. Carreri1,2, H. Gerdes1, R. Bandorf1, M. Vergöhl1, G. Bräuer1

1Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany2CAPES Foundation, Ministry of Education of Brazil, Brasília, Brazil

2:40 p.m. HP-3 Control of Reactive Bipolar HIPIMS Processes in Dual Magnetron ConfigurationI. Fernandez-Martinez1, F. Papa2, V. Bellido-Gonzalez3, J. Brindley3, B. Daniel3, J. Price3, H. Li3, A. Azzopardi3, A. Wennberg1

1Nano4Energy SL, Madrid, Spain2Gencoa US, Davis, CA3Gencoa Ltd, Liverpool, United Kingdom

3:00 p.m. HP-4 Increased Control of Deposition Conditions by Using Highly Ionized Fluxes of Film Forming SpeciesJ.C. Oliveira, F. Ferreira, R. Serra, A. CavaleiroDepartment of Mechanical Engineering, University of Coimbra, Coimbra, Portugal

3:20 p.m. – 3:40 p.m. - break

TUESDAY . may 10 continued


3:40 p.m. HP-5 High-Rate Reactive High-Power Impulse Magnetron Sputter Deposition: Principles and ApplicationsJ. Vlcek, J. Rezek, A. Belosludtsev, T. KozakDepartment of Physics and NTIS, University of West Bohemia, Plzen, Czech Republic

4:00 p.m. HP-6 HIPIMS Deposited Titanium Monoxide and the Effect of Post AnnealingW.C. Peng1, Y.H. Chen2, J.Y. Chen2, D.S. Wuu1, J.L. He2

sponsored student presentation1Department of Materials Science and Engineering, National Chung Hsing University, Taichung, Taiwan2Department of Materials Science and Engineering, Feng Chia University,Taichung, Taiwan

4:20 p.m. HP-7 Low-Voltage High Power Impulse Magnetron Sputtering with Igniting Pulse (Booster) X. Tian1, X. Zhang1, M. Cai1, C. Gong1, P.K. Chu2

1State Key Laboratory of Advanced Welding and Joining, Harbin Institute of Technology, Harbin, China2Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, China

4:40 p.m. HP-8 Phase Tailoring of Ta Thin Films by HiPIMS in Deep Oscillations Magnetron Sputtering (DOMS) Modesponsored student presentation

F. Ferreira, C. Sousa, A. Cavaleiro, J.C. OliveiraSEG-CEMUC, Department of Mechanical Engineering, University of Coimbra, Coimbra, Portugal

5:00 p.m. HP-9 Structure and Wear Mechanism of Novel CrAlBYCN/AlSiCN PVD Coating Deposited Using a Combined UBM and HIPIMS Process in a Reactive Gas MixT.J. Morton1, A.P. Ehiasarian1, C.-F. Carlström2, M. Ahlgren2

1 Materials and Engineering Research Institute, Sheffield Hallam University, Sheffield, United Kingdom2Sandvik, Stockholm, Sweden

Tuesday Evening . May 10

Heuréka! Post Deadline Recent Developments SessionWabash 1moderators: hana baránková and ladislav bárdos, uppsala university, sWeden

5:30 p.m. H-1 Exploration into Sputtered ITO Film Properties as a Function of Magnetic Field StrengthP. Morse, T. Strait, R. MeckSputtering Components Inc., Owatonna, MN

5:50 p.m. H-2 A Novel Sensor Using Remote Plasma Emission Spectroscopy Monitoring and Control of Vacuum ProcessesJ. Brindley1, T. Williams1, B. Daniel1, V. Bellido-Gonzalez1, F. Papa2, W. Sproul3 1Gencoa Ltd., Liverpool, United Kingdom2Gencoa USA, Davis, CA3Reactive Sputtering, Inc., San Marcos, CA

6:10 p.m. H-3 Tribomechanical Properties of DLC Coatings Deposited byMagnetron Sputtering on Metallic and Insulating SubstratesI. Fernández-Martinez1, J.A. Santiago2, V. Bellido-Gonz.lez3, A.Wennberg1, R.Gonzalez-Arrabal2, A. Rivera2, J. Molina3, M. Monclús3, F. Papa⁴1Nano4Energy SL, Madrid, Spain2ETSII-UPM, Madrid, Spain3Gencoa Ltd., Liverpool, United Kingdom⁴Imdea Materiales, Madrid, Spain⁵Gencoa USA, Davis, CA

6:30 p.m. H-4 A Novel Sensor for Se Vapour Deposition Monitoring and ControlV. Bellido-Gonzalez1, D. Monaghan1, J. Brindley1, B. Daniel1, R. Brown1, F. Papa2, A. Wennberg3, I. Fernández-Martínez3, R. Caballero4, M. Leon4

1Gencoa Limited, Liverpool, United Kingdom2Gencoa USA, Davis, CA3Nano4Energy SL, Madrid, Spain⁴Universidad Autónoma de Madrid, Madrid, Spain

6:50 p.m. H-5 Advances in Broadband Plasma Emission Monitoring Technology for ProductionM. AudronisNova Fabrica Ltd., Ignalina, Lithuania

Young Members Group/Mentors Happy Hour7:30 p.m. – 8:30 p.m. Hyatt Regency - VisionAll Young Members, Students and Young Professionals (age 35 and younger) are welcome to attend.

TECHCON2016TUESDAY

SVC NETWORKING LOUNGEIndiana Convention Center

Directly Across from the Exhibit Entrance Behind the Escalators

Tuesday, May 10 - Friday, May 13

The SVC Networking Lounge allows attendees to conduct business and make connections

in a relaxed, comfortable atmosphere during the TechCon Event.

Indiana Convention Center – Conference Room EastTuesday, May 10 9:00 a.m. – 10:00 a.m.

COMPANIONS MEETINGCompanions of Conference Attendees are invited to meet a representative from Visit Indy to learn about the City of Indianapolis and plan recreational activities.


Keynote Presentation Leading-Edge Coating Technologies – High-Performance Films Shape Tomorrow’s Products8:30 a.m. Wabash 2 moderator: Carl lampert, star sCienCe

Printed Electronics: Innovations in Materials, Processes, and Devices Vivek Subramanian, University of California, Berkeley, CA

In recent years, there has been significant interest in the applications of printed electronics in the realization of a range of low-cost, large area, flexible

electronic systems such as displays, distributed sensors, and low-cost disposable tags. To make printed electronics a viable technology, however, there is a need for significant innovations across all aspects of these systems. In this talk, progress in advancing the state-of-the-art in printed electronics will be reviewed. The presentation will begin by discussing the physical underpinnings of printing and will discuss how understanding and control of printing-related phenomena allows for substantial advancement in the capabilities of the same. Additionally, advances in printable material systems that enable the realization of high-performance printed thin films will be discussed. In particular, the importance of proper material design for use as printable precursors will be presented. Finally, it will be demonstrated how the combination of advanced printed techniques with appropriate materials and proper device design may be used to realize printed devices with unprecedented performance levels.

Large Area Coatings Wabash 2moderator: harald hagenström, von ardenne gmbh, germany

9:20 a.m. L-7 Upscaling of Sheet-to-Sheet Processes for Large Area Coating on Flexible GlassM. Junghähnel1, S. Garner2, R. Blüthner1, T. Preussner1, J. Westphalen1

1Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany2Corning Incorporated, Corning, NY

9:40 a.m. L-8 Linear Plasma Sources for Surface Modification and Deposition for Large Area CoatingJ. Brindley1, H. Li1, V. Bellido-Gonzalez1, F. Papa2, T. Williams11Gencoa Ltd., Liverpool, United Kingdom2Gencoa Ltd. (USA), Davis, CA

10:00 a.m. L-9 A Cost Effective Solution for Large Area TCO Coatings for Solar CellsV.P. Joshi, M.G. Sreenivasan, K. Mohanachandran, P. SakhamuriHind High Vacuum Company Private Limited, Bengaluru, India

10:20 a.m. – 10:40 a.m. - break

10:40 a.m. L-10 Magnetron Sputtering of Oxide Films from Novel Ceramic Rotary Targets for Large Area ApplicationsJ. Oberste-Berghaus, R. Van Nuffel, G. Gobin, W. De Bosscher, A. DasSoleras Advanced Coatings BVBA, Deinze, Belgium

11:00 a.m. L-11 Si Based Target Materials for Large Area Sputtering ApplicationsC. Simons, A. Herzog, A. Kastner, T. Klotz, A. Schott, M. Schultheis, J. WagnerHeraeus Deutschland GmbH & Co. KG, Hanau, Germany

11:20 a.m. L-12 Large Area Co-Sputtering: Insights on Power and ControlD.J. ChristieAdvanced Energy Industries, Inc., Fort Collins, CO


Tribological Coatings Room 104 Allan Matthews, The University of Manchester, UK and Bill Sproul, Reactive Sputtering, Inc. and Gencoa USATribological coatings are applied to surfaces by PVD processes to improve wear resistance and reduce friction. Recent developments in multilayered and nanostructured coatings are advancing this technology. Using these structures, it is possible to combine high hardness and relatively low elastic modulus. These developments will be discussed along with individual applications of tribological coatings.

Atmospheric Plasma Technologies Room 109 Hana Baránková and Ladislav Bárdos, Uppsala University, SwedenAtmospheric plasma technology is a rapidly growing area in plasma-assisted technologies. Technologies using the atmospheric pressure plasma sources bring about fast processes, but it is important to be aware of limitations given by atmospheric plasma properties and plasma chemical reactions.

Magnetron Sputtering Room 105David Glocker, IsofluxThe Technology Forum Breakfast on magnetron sputtering always proves to be extremely informative and entertaining. The large number of participants means a lively exchange on a wide variety of topics including anything from arcing to zone models. We encourage you to ask questions about issues you’ve encountered and engage in productive discussions with others in the group, who frequently have the answers. Often, responses include insights into which technical presentations and presenters specialize in your topic of interest.

Fabrication and Performance of Optical Coatings Room 106Ludvik Martinu, École Polytechnique de Montréal, Canada, and Chris Stoessel, Eastman Chemical CompanyIn a friendly atmosphere of the Breakfast Forum, we will discuss advances in the area of optical films and optical filters with respect to the recent progress in optics, optoelectronics, photonics, optical microelectromechanical systems and others. Please bring your questions, solutions and discussion points related to the fabrication methods, optical coating materials, optical film metrology, mechanical properties of coated systems including plastics, as well as scale-up and other subjects related to the interests of the optical coating community.

New! Modern Coating Sources Room 110Frank Papa, Gencoa USA, and Ralf Bandorf, Fraunhofer Institute for Surface Engineering and Thin Films IST, GermanyWith the demand for high-performance coatings, hardware for manufacturing thin films has to improve and advance, too. A key part of coating systems are the available sources for thin film growth. This technology forum will focus on “modern coating sources,” ranging from sputtering cathodes to plasma sources. Challenges, advancements and future perspectives will be discussed.

WEDNESDAY . may 11

SVC Foundation 5K Run and Walk Wednesday, May 10

Meet in the Hyatt Regency Lobby at 5:45 a.m.

Sign up at the Registration Desk • $25 includes a t-shirt


11:40 a.m. L-13 Review and Recent Insights Regarding Target Nodule Formation Upon Depositing ITOP. Lippens, C. FreiUmicore Thin Film Products AG, Balzers, Liechtenstein

12:00 p.m. L-14 Process Benefit of Advanced Arc Management in DMS Power SuppliesM. Heintze, M. BannwarthTRUMPF Hüttinger GmbH + Co. KG, Freiburg, Germany

Emerging TechnologiesWabash 1 moderators: Chris stoessel, eastman ChemiCal Company and JaCob bertrand, maxima sCienCes llC

9:20 a.m. E-9 Synthesis and Characterization of Polycrystalline Hollow Magnetic Nanoparticles by Vacuum Evaporation and Inert Gas Condensation sponsored student presentation

M. Bah1, G.H. Jaffari2, F.A. Khan3, S.I. Shah1,4

1Department of Materials Science and Engineering, University of Delaware, Newark, DE2Department of Physics, Quaid-i-Azam University, Islamabad, Pakistan3Department of Physics, Bangladesh University of Engineering and Technology, Bangladesh4Department of Physics and Astronomy, University of Delaware, Newark, DE

9:40 a.m. E-10 Manufacture of Titanium Nitride Nanotubes Using High Vacuum Magnetron Sputtering Depositions D.M. Mihut1, K. Lozano2, C. Hilario2

1Mercer University, Macon, GA2The University of Texas Rio Grande Valley, Edinburg, TX

10:00 a.m. E-11 Development of a Sputtering Device for In Situ Coating of Long Beam Pipes of Particle Accelerators with a Low Secondary Electron Yield Carbon Thin Film P. Costa Pinto, M. Taborelli, M. Van GompelVacuum Surfaces and Coatings Group, CERN, Geneva, Switzerland

10:20 a.m. – 10:40 a.m. - break

10:40 a.m. E-12 Ultra Thin Glass - Review of Latest Achievementsinvited talk R. SprengardSchott AG, Mainz, Germany

11:20 a.m. E-13 Progress in the Research on Graphene and Its Composites as Electrodes for Capacitive DeionizationY. Yu, A. Feng, L. Song, X. HuKey Laboratory of Inorganic Coating Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China

11:40 a.m. E-14 Finding New Customized Materials by PVD for Device NeedsS. Lee, S.-M. ChoIntermolecular Inc., San Jose, CA

Plasma ProcessingWabash 3 moderator: lenka ZaJiCkova, masaryk university, CZeCh republiC

9:20 a.m. P-6 Developments of Functional Nanofilms by Plasma Enhanced Chemical Vapor Deposition - Potentialities of Low Pressure and Atmospheric Pressure Technologies invited talk P. ChoquetMaterials Research and Technology Department, Luxembourg Institute of Science and Technology (LIST), Belvaux, Luxembourg

10:00 a.m. P-7 Using Numerical Simulations for Optimization of a Deposition Process in an Atmospheric-Pressure Dielectric Barrier Dischargesponsored student presentation

A. Obrusnik1, P. Jelinek1, D. Necas1,2, L. Zajickova1,2

1Department of Physical Electronics at Faculty of Science, Masaryk University, Brno, Czech Republic2Plasma Technologies at CEITEC, Masaryk University, Brno, Czech Republic

10:20 a.m. – 10:40 a.m. - break

moderator: stanislav mráZ, rWth aaChen university, germany

10:40 a.m. P-8 Throughput Scaling of the Atmospheric Pressure PECVD Process for Gas Diffusion Barrier FilmsS.A. Starostin1, F.M. Elam1,2,3, A. Meshkova2,3, M.C.M. van de Sanden2,3, J.B. Bouwstra1, H.W. de Vries2

1FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands2Dutch Institute For Fundamental Energy Research (DIFFER), Eindhoven, The Netherlands3Applied Physics, Eindhoven University of Technology, Eindhoven, The Netherlands

11:00 a.m. P-9 Development of PECVD SiOx Moisture Barrier CoatingsN. Kaabeche1, P. Kelly1, L. Harland2

1Manchester Metropolitan University, Manchester, United Kingdom2BOBST Manchester Ltd, Heywood, United Kingdom

11:20 a.m. P-10 Role of Plasma Conditions on Cross-Linking of Amine PolymersL. Zajickova1, A. Manakhov1, S. Bittnerova1, M. Michlicek1, D. Cossement2, R. Snyders2,3

1CEITEC and Department Physical Electronics, Masaryk University, Brno, Czech Republic2Materia Nova Research Center, Mons, Belgium3Chimie des Interactions Plasma Surface, CIRMAP, University of Mons, Mons Belgium

11:40 a.m. P-11 Electron Beam Generated Plasmas Produced in SF6 Gas MixturesS.G. Walton, D.R. Boris, S.C. Hernández, Tz.B. Petrova, and G.M. Petrov Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC

Wednesday PM . May 11

SVC Exhibit Opens!12:00 p.m. – 6:00 p.m. Exhibit Hall D-E

Cash Lunches for Sale at Crossroads Bistro, Opposite the Exhibit Hall Entrance 10:30 p.m. - 2:30 p.m.

Special PresentationWabash 2moderator: gary vergason, vergason teChnology, inC.

12:50 p.m SP-1 A New Approach to Vacuum Technology Education at a DistanceD. Smith, N. LowagieNormandale Community College, Bloomington, MN

TECHCON2016WEDNESDAY


Poster-4 Corrosion, Structural and Mechanical Properties of Multilayer TiN-Graphene Hybrid Systems on Ti6Al4V Titanium AlloyM. Grobelny1, M. Kalisz1, M. Zdrojek2, J. Judek2, M. Sochacki31Motor Transport Institute, Warsaw, Poland2Faculty of Physics, Warsaw University of Technology, Warsaw, Poland3Institute of Microelectronics and Optoelectronics, Warsaw University of Technology, Warsaw, PolandPoster-5 Fabrication of PMMA/Metal Multilayers for Soft Gamma-Ray Telescope LensesJ.E. Krzanowski1, E.N. Wong2, P.H. Aliotta3, F. Shirazi3, O. Echt3, J. Tsavalas2, P. Bloser3, M. McConnell3, J.S. Legere31Mechanical Engineering Department, University of New Hampshire, Durham, NH2Chemical Engineering Department, University of New Hampshire, Durham, NH3Physics Department, University of New Hampshire, Durham, NH

Poster-6 Preparation of a Gradient SiO2 Antireflective Coating by a Co-Sputtering Method Using a Dual Rotatable Magnetron SystemT. Preussner, M. Junghähnel, U. Hartung, T. Kopte, J. FahlteichFraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany

Poster-7 Titanium Nitride Protective and Decorative PVD Coatings on Stainless Steel and its Application in the Tableware MarketS. Lyda, A. Brown, J. Wojcik, P. MascherDepartment of Engineering Physics, McMaster University, Hamilton, Ontario, Canada

Poster-8 On the Possibility of Using Sintering to Synthesize Materials with Low Structural Defects for Opto-Electronic ApplicationsA. Samanta1, A. Lange2, H. Madjidi2, J. Ging1, T. Olson1, K. van Benthm2, S. Mahajan2, S. Elhadj11Lawrence Livermore National Laboratory, Livermore, CA2Department of Chemical Engineering and Materials Science, University of California, Davis, CA

Poster-9 High-Performance and Low-Cost Transparent Conductive Oxide Electrodes for Liquid Crystal DisplaysA. Varanytsia1, L. Weng1, T.-C. Lin2, J. Yang2, D. Rooney2, L. Shunk2, R. McGinnis2 , L.-C. Chien11Liquid Crystal Institute, Chemical Physics Interdisciplinary Program, Kent State University, Kent, OH2SCI Engineered Materials, Columbus, OH

Poster-10 Construction of a Corrosion-Resistant Surface Layer Using a Nitriding Process Based on Large Pulsed Electron Beam (LPEB) IrradiationH.W. ParkDepartment of Mechanical and Nuclear Engineering, Ulsan National Institute of Science and Technology, Ulsan, Republic of Korea

Poster-11 Copper and Stainless Steel Coated Ceramic Hollow Spheres for Syntactic Foam Composites Made by Magnetron SputteringA. Shishkin1, M. Drozdova2, V. Kozlov3, I. Hussainova2, J. Rulev31Riga Technical University, Laboratory of Powder Materials, Riga, Latvia2Tallinn University of Technology, Tallinn, Estonia3JS Sidrabe, Riga, Latvia

Poster-12 A Method to Improve High-Power Impulse Magnetron Sputtering for Industrial ApplicationsJ. McLain1, P. Raman1, I. Shchelkanov1,2, S. Armstrong3, J. Hrebik3, B. Jurczyk⁴, R. Stubbers⁴, D. N. Ruzic1 1Center for Plasma Material Interactions, University of Illinois, Urbana, IL2Plasma Physics Department, National Nuclear Research University (MEPhI), Moscow, Russia3Kurt J. Lesker Company, Jefferson Hills, PA⁴Starfire Industries, LLC, Champaign, IL

Poster-13 Planar Langmuir Probe Investigations of Metallic and Reactive Bipolar Sputtered AluminumH. Gerdes1, V. Barati1, R. Bandorf1, D. Gahan2, M. Vergöhl1, G. Bräuer11Fraunhofer Institute for Surface Engineering and Thin Films IST, Braunschweig, Germany2Impedans Ltd, Dublin, Ireland

Industry Forum: New Coating Materials and Challenges1:10 p.m. – 2:10 p.m. Wabash 2forum organiZer: Carl lampert, star sCienCe; riC shimshoCk, mld teChnologies, inC.; miChael andreasen, vaCuum edge; and Chris stoessel, eastman ChemiCal Company

This panel will give us a view of new coating materials and challenges the electronics industry expects to face. The role of coating processes is huge with developments being made in pulse and ion deposition, spatial ALD, 3D fabrication, and printed electronics. Equally big are the new materials including: 2D materials such as graphene, oxide and organic electronics, energy harvesters, flexible polymers and glass. Key Industries are touch displays, electronics, mobile computing, cell phones, smart cards, batteries and portable power sources. The Forum will be open to questions from the audience.

Vivek Subramanian, Professor of Electrical Engineering and Computer Sciences, University of California, Berkeley, CAVivek Subramanian will discuss the implications of printed and flexible electronics on coating technology development and uses.

John Murray, President & CEO, Concept Laser Inc., Grapevine, TXJohn Murray will present the developments in metal 3D printing and the future of additive manufacturing. A look at the AM Factory of Tomorrow.

Don Veri, Business Development, Meyer Burger, Columbus, OHDon Veri will present technologies from thin film crystalline photovoltaic/module technologies to thin film encapsulation and barrier films required for the manufacture of next generation PV modules, flexible/rigid displays and sensors.

Poster Presentations 2:20 p.m. Wabash 1 moderators: Claes granqvist, uppsala university sWeden; ralf bandorf, fraunhofer institute for surfaCe engineering and thin films ist, germany; and riC shimshoCk, mld teChnologies, llC Oral Presentation Session: There will be a series of short presentations by poster authors who wish to present their work.

Poster Session 3:30 p.m. – 6:00 p.m. Exhibit Hall D-E

Poster-1 The Effect of the Transition SiN layer on the Quality and Corrosion Properties of SiN/Graphene/SiN/Graphene Hybrid Coatings System Deposited on Titanium Alloy SurfaceM. Kalisz1, M. Grobelny1, M. Świniarski2, M. Zdrojek2, J. Judek2

1Centre for Material Testing, Motor Transport Institute, Warsaw, Poland2Faculty of Physics, Warsaw University of Technology, Warsaw, Poland

Poster-2 Investigation of the Structural and Mechanical Properties of W-Re and Mo-Re Thin Films Deposited by Magnetron Sputtering from Sintered Metallic TargetsM. Mazur1, A. Wrona2, D. Kaczmarek1, M. Lis2, D. Wojcieszak1, M. Kalisz3, K. Bilecka21Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Wroclaw, Poland2Institute of Non Ferrous Metals, Gliwice, Poland3Centre for Material Testing and Mechatronics, Motor Transport Institute, Warsaw, Poland

Poster-3 Technical and Modelling Aspects of Subsecond Thermal Processing with Flash LampsT. Schumann, L. Rebohle, W. SkorupaDepartment of Semiconductor Materials, Helmholtz Research Center Dresden-Rossendorf, Dresden, Germany

WEDNESDAY . may 11 continued


Poster-14 Characterization of AlGaN and Ga2O3 Epitaxies on Silicon and Sapphire SubstratesR. Garcia Perez, J. Castillo, H. HuqDepartment of Electrical Engineering, University of Texas Rio Grande Valley, Edinburg, TX

Poster-15 High Density Plasma Deposition System with High Throughput and High Material UtilizationG. GuoAscentool Inc., Freemont, CA

Meet the Experts Corner3:30 p.m. - 4:30 p.m. Room 110

Operator/Technician Training and In-House Certificationpanel leaders: donald m. mattox, management plus, inC.; daniel rippere, Coherent, inC.; al douglas, viavi solutions

This panel will discuss attendee input on the various options to train operators and technicians (O/Ts) on in-house equipment so as to have a reproducible process, increase production yield, reduce equipment/process downtime, and provide a path for advancement for the O/Ts. The panel will discuss the importance of the O/Ts understanding of where they fit into the product flow, the basic aspects of the processing (vacuum technology, plasma technology, etc.) why the Manufacturing Process Instructions (MPIs) say what they say, the importance of documentation, and the various types of training that may be utilized (“on-floor”, available literature/internet, formal, etc.). In-house certification will be discussed as to how it relates to O/T advancement as well as indicate who is trained to do what.

Exhibit Reception5:00 p.m. – 6:00 p.m. Exhibit HallEveryone is invited for a light reception. All TechCon Conference Registrants and Exhibitors receive a complimentary drink ticket.

Wednesday Evening . May 10

Casino Fun Networking Mixer 6:15 p.m. Hyatt Regency Indianapolis . Regency Ballroom A-FSponsored by Intlvac Thin Film.

All are Invited to Attend! Join us for a fun evening of casino games, prizes and a buffet dinner.

TechCon Schedule at a GlanceWe captured the entire TechCon schedule of events and calendar of presentations in one place! Find the full-color flyer inserted in this Final Program and use it to find out what’s happening, when and where, every day of the week.

Schedule of Events: a daily calendar of SVC meetings, special events, exhibit highlights, notable presentations and networking opportunities.

Technical Conference Schedule at a Glance: every oral, poster and forum presentation scheduled throughout the entire Technical Program, shown in parallel with Exhibit Hall schedule.

Convention Center Map: Locate meeting rooms, the Exhibit Hall, and dining locations within the Indiana Convention Center. The map provides registration open hours, TechCon organizers’ contact phone number, and what to do in case of emergency.

Didn’t get a TechCon Schedule at a Glance? Pick one up from the Registration Counter.

Get Instant TechCon Schedule Updates: Download the 2016 SVC TechCon Mobile App from iTunes or Google Play to your phone and receive real-time notifications from TechCon organizers about schedule changes, presentation cancellations or any modifications to the published schedule of events.

TECHCON2016WEDNESDAY

Lunch Options During the TechConTuesday: 10:30 a.m. – 2:30 p.m. Lunch for Sale at Crossroads Bistro

Across from Exhibit entrance, behind escalators

Wednesday: 10:30 a.m. – 2:30 p.m. Lunch for Sale at Crossroads Bistro Across from Exhibit entrance, behind escalators

Thursday: 12:00 p.m. – 1:00 p.m. SVC Hosted Lunch in the Exhibit Halll For Full-Conference Registrants and Exhibitors


Optical CoatingsWabash 1 moderators: peter munZert, fraunhofer institute for applied optiCs and preCision engineering iof, germany and James hilfiker, J.a. Woollam Co. inC.

8:40 a.m. O-1 Molybdenum Oxide Thin Films Deposited by DC Sputtering from Oxide TargetsJ. Pachlhofer1, R. Franz1, E. Franzke2, J. Winkler2 and C. Mitterer11Montanuniversität Leoben, Leoben, Austria2PLANSEE SE, Reutte, Austria

9:00 a.m. O-2 The Energy Gap of Sputtered Sub-Bohr Radius Silicon Quantum Dotssponsored student presentation

R. Rudd, D. Evans, E. Charrault, C. Hall and P.J. MurphyFuture Industries Institute, University of South Australia, Adeliade, Australia

9:20 a.m. O-3 Environmental Stability of Hybrid Optical Coatings on Polymer Substratessponsored student presentation

M. Caron, T. Schmitt, O. Zabeida, J. Klemberg-Sapieha, L. MartinuEngineering Physics Department, École Polytechnique de Montréal, Montréal Canada

9:40 a.m. O-4 Ultra-Low Index Materials for Durable Anti-Reflective CoatingsW. Trottier-Lapointe, T. Schmitt, O. Zabeida, J. Klemberg-Sapieha, L. MartinuEngineering Physics Department, École Polytechnique de Montréal, Montréal, Canada

10:00 a.m. O-5 Deposition of Titanium Oxide Thin Films by Low Pressure Ion Assisted DepositionW.G. Sainty Saintech Ion Beam Systems, Tuncurry, AustraliaPresented by R.R. Willey, Willey Optical, Consultants, Charlevoix, MI

10:20 a.m. – 10:40 a.m. – break Visit the Exhibit! Open 10:00 a.m. – 5:00 p.m.

10:40 a.m. O-6 Preserving Error Compensation Benefits while Changing Monitoring Wavelengths with Each LayerR.R. WilleyWilley Optical, Consultants, Charlevoix, MI

11:00 a.m. O-7 Deposition Control Using Optical and Physical Monitoring MethodsB. Barney, T. GuppenbergerTelemark, Battle Ground, WA

11:20 a.m. O-8 Mirror Coatings for the Large Synoptic Survey Telescope: Requirements and Solutionsinvited talk J. SebagLarge Synoptic Survey Telescope Project, Telescope and Site, Tucson, AZ

SVC Exhibit Opens!10:00 a.m. – 5:00 p.m. Exhibit Hall

Protective, Tribological and Decorative CoatingsWabash 2 moderators: papken hovsepian, sheffield hallam university, united kingdom and allan mattheWs, the university of manChester, united kingdom

8:40 a.m. T-1 Evaluation of ZnO and Al-Doped ZnO Thin Films as Sensor Materials for Sulfur Concentrations in FuelJ.A. Fouts1, B. Tury1, P.J. Shiller1, T.W. Scharf2, and G.L. Doll21Timken Engineered Surfaces Laboratories, The University of Akron, Akron, OH 2Department of Materials Science & Engineering, University of North Texas, Denton, TX

9:00 a.m. T-2 Interface Control for Enhanced Performance of Hard Protective Coatingssponsored student presentation

E. Herrera Jiménez, M. Laberge, J. Lengaigne, T. Schmitt, E. Bousser, L. Martinu, J.E. Klemberg-SapiehaDepartment of Engineering Physics, École Polytechnique de Montréal, Montréal, Canada

9:20 a.m. T-3 Tribological Behaviour of Thick DLC Coatings under Lubricated ConditionsB. Rübig1, D. Heim1, C. Forsich1, A. Gebeshuber2, T. Mueller2, R. Kullmer2, V.Strobl2, C. Dipolt2, C. Lugmair2, R. Holecek2, M. Krawinkler21University of Applied Sciences Upper Austria, Wels, Austria2Rübig GmbH & Co. KG, Wels, Austria

9:40 a.m. T-4 Getting Ready for Filtered Deposition of ta-C-Films on Industrial Scale G. Englberger, S. Makowski, V. Weihnacht, H.-J. Scheibe, A. LesonFraunhofer Institute for Material and Beam Technology IWS, Dresden, Germany

10:00 a.m. T-5 Development and Evaluation of Low Friction and Low Wear TiSiCN and DLC Coatings for Automotive Valvetrain J. Lin, R. Wei, P. Lee, C. BitsisSouthwest Research Institute, San Antonio, TX


10:40 a.m. T-6 HIPIMS: Recent Developments invited talk H. RudigierOerlikon Surface Solutions Ltd., Trübbach, Switzerland

11:20 a.m. T-7 Sputter Deposition of Stainless Steel Coatings in Nitrogen/Argon AtmosphereJ.E. Krzanowski1, F. Alresheedi21Mechanical Engineering Department, University of New Hampshire, Durham, NH2Physics Department, University of New Hampshire, Durham, NH

11:40 a.m. T-8 Silicon Doped Diamond-Like Carbon Films Synthesized by Linear Ion SourceS. Hua1, Y. Chen1, J. DiBattista2, E. Chan2, Y. Yang21Department of Electronic Information Materials, School of Materials Science and Engineering, Shanghai University, Shanghai, China2Darly Photonics Composite Materials (Shanghai) Corp., Shanghai, China

Coatings for Energy Conversion and Related ProcessesWabash 3 moderators: Carl lampert, star sCienCe and Claes graqvist, uppsala university, sWeden

8:40 a.m. EC-1 Surface Engineering for Electrochemical Energy Storage – Challenges and Opportunitiesinvited talk Y.-T. ChengDepartment of Chemical and Materials Engineering, University of Kentucky, Lexington, KY

9:20 a.m. EC-2 Sputter Deposition of Li7La3Zr2O12 for All Solid State Thin Film BatteriesS. Lobe, C. Dellen, M. Finsterbusch, H.-G. Gehrke, C.-L. Tsai, S. Uhlenbruck, O. GuillonInstitute of Energy and Climate Research, Forschungszentrum Jülich GmbH, Jülich, Germany

9:40 a.m. EC-3 High Efficiency Magnetron Sputtered Tungsten Oxide Thin Film Electro-Chromics with Neon Sputtering K. Uday Kumar1, D. Kumar Kaushik1, KM Karuppasamy2, A. Subrahmanyam11Semiconductor Laboratory, Department of Physics, Indian Institute of Technology Madras, Chennai, India2AC&CS, CRM Group, Ghent University, Liege, Belgium

10:00 a.m. EC-4 Fabrication and Protection of Vanadium Dioxide FilmY.-Z. Cao, X. Wang, L. Yan, Y. Li Key Laboratory of Inorganic Coating Materials, Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai, China

THURSDAY . may 12


Thursday PM . May 12

Fundamentals of Interface DesignA Joint Session organized with ICMCTF (AVS/ASED)Wabash 2 moderators: Chris stoessel, eastman ChemiCal Company and Christian mitterer, university of leoben, austria

12:30 p.m. F-1 Defect Engineering to Optimize Properties in Transparent Conductorsinvited talk G.J. ExarhosPhysical Sciences Division, Pacific Northwest National Laboratory, Richland, WA

1:10 p.m. F-2 Scalable Synthesis of Flexible 2D Electronic Devices M.E. McConney1, N.R. Glavin1, T. Shelton1,2, J.G. Colborn1,2, J. Hu1,2, J.E. Bultman1,2, R.E. Stevenson1,2, M.L. Jespersen1,2, A.T. Juhl1, M.F. Durstock1, M.K. Gupta1,2, A. Haque3, A.A. Voevodin1,4, C. Muratore1,2

1Materials and Manufacturing Directorate, Air Force Research Laboratory, Wright- Patterson Air Force Base, OH2University of Dayton Research Institute, Dayton, OH3Department of Mechanical and Nuclear Engineering, Pennsylvania State University, State College, PA⁴University of North Texas, Denton, TX

1:30 p.m. F-3 Development of Hard and Tough Coatings Based on MetalsY.-W. ChungDepartment of Materials Science and Engineering, Northwestern University, Evanston, IL

1:50 p.m. – 2:00 p.m. – break

2:00 p.m. F-4 Interfaces and Interface Effects in Thin FilmsC. MittererDepartment Physical Metallurgy and Materials Testing, Montanuniversität Leoben, Austria

2:20 p.m. F-8 Tuning the Thermal and Electrical Transport at Graphene-Metal Interfaces via Plasma-Based Chemical FunctionalizationB.M. Foley1, S.C. Hernández2, J.C. Duda1, J.T. Robinson3, S.G. Walton2, and P.E. Hopkins11Department of Mechanical and Aerospace Engineering, University of Virginia, Charlottesville, VA2Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC3Electronics Science and Technology Division, U.S. Naval Research Laboratory, Washington, DC

2:40 p.m. F-7 Optimizing Durability of Multifunctional Thin Film Stacks for Ophthalmics - The Importance of Interface Treatmentsinvited talk K. SchererEssilor International, Créteil, France

Vendor Innovators Showcase Room 109moderators: Jason hrebik, kurt J. lesker Company and marCel anaya, dhf teChniCal produCts

12:30 p.m. V-1 High Capacity Cantilever Mounted Rotatable CathodeJ. Price, V. Bellido-Gonzalez, D. Monaghan, F. Papa, T. WilliamsGencoa Ltd, Liverpool, UK

12:40 p.m. V-2 Energy Management with Thyristor SCR Power Controllers: Reducing Cost EfficientlyA. BreitkopfAdvanced Energy Industries, Inc., Fort Collins, CO

12:50 p.m. V-3 Custom Tailored Coating SolutionsR. Bandorf, M. Vergöhl, W. Diehl, G. BräuerFraunhofer Institute For Surface Engineering And Thin Films IST, Braunschweig, Germany


moderators: volker sittinger, fraunhofer institute for surfaCe engineering and thin films ist, germany and david sanCheZ, materion advanCed ChemiCals

10:40 a.m. EC-5 Thermochromic Fenestration Based on VO2: Finally a Technology of Practical Interest?C.G. GranqvistDepartment of Engineering Sciences, The Ångström Laboratory, Uppsala University, Uppsala, Sweden

11:00 a.m. EC-6 Effect of Deposition Temperature and Chlorine Activation on Microstructure of CdTe Thin Film Solar CellsC. Metzner, H. Morgner, O. Zywitzki, D. Hirsch, T. ModesFraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany

11:20 a.m. EC-7 Disorder in the DC Magnetron Sputtered Cu2ZnSnS4 Thin Films Grown in Sulfide Plasmasponsored student presentation

D.K. Kaushik, A. SubrahmanyamDepartment of Physics, Indian Institute of Technology Madras, Chennai, India

WebTech Roll-to-Roll Coatings for High-End ApplicationsRoom 109 moderator: alberto argoitia, viavi solutions

8:40 a.m. W-3 Subsecond Thermal Processing for the Advancement of Thin Layers and Functional Coatingsinvited talk W. SkorupaHelmholtz-Zentrum Dresden-Rossendorf, Dresden, Germany

9:20 a.m. W-2 Hollow-Cathode Activated PECVD for the High-Rate Deposition of Permeation Barrier FilmsM. Top, J. Fahlteich, S. Bunk, T. Kühnel, S. Straach, N. SchillerFraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, Dresden, Germany

SVC Hosted Lunch in the Exhibit Hall12:00 – 1:00 p.m.Lunch tickets provided to Exhibitors and Full Conference Registrants.

TECHCON2016THURSDAY

Visit Indy Information Center Indiana Convention Center • Outside Exhibit Hall Entrance

Monday 1:00 p.m. - 6:00 p.m.Tuesday-Thursday 10:00 a.m. - 5:00 p.m.

Find maps, information, dining options and friendly, local advice from a Visit Indy representative at their Information Center during the TechCon.


1:00 pm V-4 VON ARDENNE GmbH Product Portfolio for New Sputter Applications and Process ControlA. Nilsson1, K. Nauman2

1VON ARDENNE GmbH, Dresden, Germany2VON ARDENNE North America, Fort Collins, CO

1:10 p.m. V-5 One World Under PressureC. MatheyCacejen Vacuum, Temecula, CA

1:20 p.m. V-6 A New Glance on Cathodic ARC Evaporation with a Highly Flexible Pulsed ARC-Power-SupplyM. Glück1, G. Moser1, H. Müller1, G. Eichenhofer21J. Schneider Elektrotechnik GmbH, Offenburg, Germany2abeg-engineering, Holzgerlingen, Germany

1:30 p.m. V-7 Increasing Low Melting Point Target Utilization: A Power Systems Route to Operating Cost ReductionD. PelleymounterAdvanced Energy Industries, Inc., Northfield, MN

1:40 p.m. V-8 Surface Cleanliness Measurement and Analysis to Improve Thin Film AdhesionD. YangEbatco, Eden Prairie, MN

1:50 p.m. V-9 FloTron X: A Rugged Plasma Emission Monitoring and Reactive Sputtering Process ControllerM. AudronisNova Fabrica Ltd., Ignalina, Lithuania

2:00 p.m. V-18 Cryopumping Technology AdvancesJ. WellsBrooks Automation, Chelmsford, MA

2:10 p.m. V-10 Features of 3rd Gencoa Circular Magnetron Cathodes for R&D ApplicationsJ. Price, V. Bellido-Gonzalez, D. Monaghan, B. Kurian, F. Papa, T. WilliamsGencoa Ltd., Liverpool, United Kingdom

2:20 p.m. V-11 Thyristor Power Controller Functions and Applications: A Technical IntroductionA. BreitkopfAdvanced Energy Industries, Inc., Fort Collins, CO

2:30 p.m. V-12 Ion Beam Etching and Deposition for Sensor and MEMS ManufacturingM. Demmlerscia Systems GmbH, Chemnitz, Germany

2:40 p.m. V-13 Advanced Characterization and Performance Comparison in HiPIMSJ. HrebikKurt J. Lesker Company, Jefferson Hills, PA

2:50 p.m. V-14 Stand-Alone Spectroscopic Plasma Process Control System for Production Lines T. Schütte, P. NeissPLASUS GmbH, Mering, Germany

3:00 p.m. V-15 hiP-V: A New HiPIMS Power Supply TechnologyG. Eichenhofer1, C. de la Viesca2, I. Fernandez3, A. Wennberg314A-PLASMA, Holzgerlingen, Germany2Ingenieria Viesca, Alcalá de Henares, Spain 3Nano4Energy, Madrid, Spain

3:10 p.m. V-16 Inline and In Situ Monitoring of Film Thickness, Color, Sheet Resistance, or R/T CharacteristicsN. Hecker-Denschlag, M. Eberhardt, B. Keilm-u-t GmbH , Neu-Ulm, Germany

3:20 p.m. V-17 New HiPIMS Generator SPIK3000AM. Mark, J. LoefflerMELEC GmbH, Baden-Baden, Germany

Meet the Experts Corner1:40 p.m. – 2:40 p.m. Room 110Modern Source Developmentpanel leaders: frank papa, genCoa usa; ralf bandorf, fraunhofer institute for surfaCe engineering and thin films ist, germany; david stevenson, ampres, inC.; riCk Welty, magplas teChnik llC

The development of new PVD and PECVD sources is continuously needed as the demand for better quality coatings at lower cost and higher throughput continues to grow. Such developments require a strong knowledge of mechanical and electrical systems as well as plasma physics. This interactive session will focus on the challenges of developing such sources in order to meet increasingly difficult industrial demands.

SVC Exhibit Beer Blast! 3:30 p.m. – 5:00 p.m. Exhibit Hall D-ESponsored by VON ARDENNE GmbH.

Best Poster Award Presentation4:00 p.m. Exhibit Hall D-E

Tuesday - Wednesday . April 28-29TECHCON2016THURSDAY

Stress Evolution in Thin Films and Coatings

from Fundamental Understanding to Control

Joint ICMCTF–SVC WorkshopOctober 2-5, 2016

Embassy Suites Hotel, O’Hare-Rosemont, Chicago, IL USAhttp://STRESS-2016.org

Please mark your calendar with the following DEADLINES:

Abstract Submission ................ Wednesday, June 15

Workshop Early-registration .. Monday, September 5

Hotel Room Reservations ....... Monday, September 12, at 5 p.m. CDT


IMPROVE SKILLS & KNOWLEDGE INCREASE PRODUCTIVITY • COST EFFECTIVE–CONVENIENT EDUCATION

Bring High-Quality, Practical Tutorials in PVD Processing and Vacuum Technology to Your Facility• Presentedbyrecognizedprofessionals• PracticalinformationthatwillassistyourstaffintheR&Dandmanufacturingenvironment• Eliminatetravelexpenses,timeawayfromwork,andindividualtutorialattendeefees• KeepproprietaryinformationprivateGo to www.svc.org/OnLocation for details on each tutorial course.Somehalf-daytutorialscanbepresentedasfull-daytutorialswhenpresentedviatheOn-LocationProgram.Interested in further information? Contact [email protected] or call 505-856-7188

Society of Vacuum Coaters • 505-856-7188 • fax 505-856-6716 • [email protected] • www.svc.org

“Fantastic job! This tutorial very much related to the real world. This class was excellent and gave many ideas to implement on the plant floor.” —TomaLjulj,EmrickPlastics(V-207)

“There was a wonderful balance between various industry uses as well as new ideas which could be used across various process types.” —KevinMoreau,ElcanOpticalTechnologies(C-306)

SVC On-Location Education Tutorial Roster

On-Location Education Program

C-102: Introduction to Evaporation and SputteringC-103: Introduction to Physical Vapor Deposition (PVD) ProcessesC-203: Sputter DepositionC-204: Basics of Vacuum Web CoatingC-205: Introduction to Optical Coating DesignC-207: Evaporation as a Deposition ProcessC-208: Sputter Deposition in ManufacturingC-210: Introduction to Plasma Processing TechnologyC-211: Sputter Deposition onto Flexible SubstratesC-212: Troubleshooting for Thin Film Deposition ProcessesC-213: Introduction to Smart MaterialsC-214: Pulsed Plasma ProcessingC-304: ITO and Other Transparent Conductive Coatings:

Fundamentals, Deposition, Properties, and ApplicationsC-306: Nonconventional Plasma Sources and Methods in

Processing TechnologyC-307: Cathodic Arc Plasma DepositionC-310: Plasma Immersion Techniques for Surface EngineeringC-311: Thin Film Growth and Microstructure EvolutionC-314: Plasma Modification of Polymer Materials and Plasma Web

TreatmentC-315: Reactive Sputter DepositionC-316: Introduction to Atomic Layer Deposition (ALD)C-317: The Practice of Reactive SputteringC-318: Nanostructures: Strategies for Self-Organized GrowthC-319: Introduction to Energy Conversion Materials and

TechnologyC-322: Characterization of Thin FilmsC-323: High Power Impulse Magnetron SputteringC-324: Atmospheric Plasma TechnologiesC-326: Manufacture of Precision Evaporative CoatingsC-328: Properties and Applications of Tribological Coatings

C-330: Introduction to Thin Film Photovoltaic TechnologiesC-332: Zinc Oxide-Based and Other TCO Alternatives to ITO:

Materials, Deposition, Properties and ApplicationsC-333: Practice and Applications of High Power Impulse

Magnetron Sputtering (HIPIMS)C-336: Transparent Gas Permeation Barriers on Flexible SubstratesC-337: ITO and Alternative TCO: From Fundamentals to Controlling

PropertiesC-338: Application of Reactive SputteringC-340: Plastic Optics-Coatings and Antireflective StructuresV-201: High Vacuum System OperationV-202: Vacuum System Gas AnalysisV-203: Vacuum Materials and Large System PerformanceV-204: Vacuum Systems, Materials and OperationV-206: Helium Leak Detection Theory and TechnologyV-207: Practical Aspects of Vacuum Technology: Operation and

Maintenance of Production Vacuum SystemsV-304: Cryogenic High Vacuum PumpsM-101: Basic Principles of Color Measurement

M-102: Introduction to Ellipsometry

Tutorial Classification SystemThe tutorial coes (V, C, M) indicate whether the emphasis of the tutorial is primarily on V - VACUUM TECHNOLOGYC - VACUUM COATING DEPOSITION PROCESSES AND TECHNOLOGYM - MISCELLANEOUS TOPICS

The tutorial number indicates the level of topic specialization. Lower numbers are basic or introductory in nature, and higher numbers are a more specialized treatment of a specific topic.


Keynote PresentationSymposium on Leading-Edge Coating Technologies – High-Performance Films Shape Tomorrow’s Product8:30 a.m. Wabash 2 moderator: roel tietema, hauZer teChno Coating b.v., the netherlands

It’s All About the Surface - The Role of Tribological Thin Film Coatings in Rolling Element Bearing Applications Stephen P. Johnson, The Timken Company, North Canton, OH

Over the past three decades, advancements in steel making and improvements in geometrical accuracy

in manufacturing have shifted the initiation location of rolling element-bearing damage from the subsurface to the near surface. In addition, modern application demands are now increasingly driving bearing operating conditions toward insufficient, or ‘boundary’ lubrication and hence, roller and raceway surface durability is a key life-limiting factor. The ability to modify and control surface properties is playing an increasing role in the research and development of next generation bearing components. This presentation presents an overview comparing traditional surface treatments with nanostructured coatings using advanced microscopy techniques and describes their behavior in high-pressure tribological applications such as rolling element bearings. Major global trends that impact industry today are reviewed, such as the need for increasing vehicle and machine efficiency and minimizing maintenance and operation expenses in energy applications such as wind turbines. A common technical theme for bearing designers going forward is the design-stage acceptance that rolling element bearings may need to survive long periods in application with insufficient lubrication to maintain full surface separation. While technologies such as engineered thin film surface coatings have been applied in industry on bearings for more than 10 years, they are expected to be increasingly utilized to protect functional surfaces looking forward.

Protective, Tribological and Decorative CoatingsWabash 2 moderators: dave doerWald, ihi hauZer teChno Coating b.v., the netherlands and ronghua Wei, southWest researCh institute

9:20 a.m. T-9 Friction and Wear Behaviour of Mo - W Doped Carbon-Based Coating during Boundary Lubricated SlidingP.Eh. Hovsepian1, P. Mandal1, A.P. Ehiasarian1, G. Sáfrán2, R. Tietema3, D. Doerwald31Nanotechnology Centre for PVD Research, Sheffield Hallam University, Sheffield, United Kingdom2Research Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, Budapest, Hungary3IHI Hauzer Techno Coating B.V., Venlo, The Netherlands

9:40 a.m. T-10 Application of Titanium Nitride Coatings on Stainless Steel Tableware for Decorative and Protective PurposessvC foundation sCholarship reCipient

A. Brown, S. Lyda, J. Wojcik, P. MascherDepartment of Engineering Physics, McMaster University, Hamilton, Canada

10:00 a.m. T-11 Inline Technology for Metallization on Plastics with High Productivity and PerformanceC. Trivedi1, I. Kolev1, D. Doerwald1, R. Tietema1, J. Landsbergen1, J. Amigo21IHI Hauzer Techno Coating B.V., Venlo, The Netherlands2Sidasa S.a., Barcelona, Spain


Gas/Moisture Permeation Barrier Layers Room 109 John Fahlteich, Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP, GermanyAmongst the challenges and emerging technologies in the field of electronic displays/ lighting, flexible electronics and solar cells, the research on the “ultimate gas/vapor barrier performance” which allows long term stability devices involves also the search for new deposition techniques, next to the more traditional sputtering and low pressure plasma deposition. During this Technology Breakfast Program we will review the deposition techniques, compare them, also in terms of barrier performances and compatibility with large area and roll-to-roll production. Furthermore, we will analyze the recent developments in the field at industrial/production level as well as at laboratory scale.

Optical Coating Design Room 104 Angus Macleod, Thin Film Center Inc. and Robert Sargent, Viavi SolutionsIt is difficult to imagine an optical system that would not need optical coatings. The shape of an optical surface is designed to manipulate the direction of the light but virtually every other optical property, even including some directional ones, is assured by the thin-film coating carried by the surface. The constant proliferation of optical applications continuously creates new and more demanding requirements for optical coating performance. To complicate matters, the coating is frequently required also to support other properties like environmental resistance. Of course there are advanced computer programs for thin-film design but optical coating design still involves skill, experience, and understanding

Energy Conversion and Storage Room 105Carl M. Lampert, Star Science, and Ric Shimshock, MLD Technologies, LLCEnergy conversion and storage is a group of technologies that address global needs of clean energy, air, water, and environment. At our breakfast we will have an open discussion on coatings, films and devices on the following topics: Energy Conversion: including fuel cells, and photothermal conversion; Energy Storage: including batteries, hydrogen and hybrid systems; Energy Control and Surface Functionality: including smart windows, low-e coatings, photocatalysis, hydrophobicity, oleophobicity, anti-icing, and light and energy transformation.

Diamond-Like Carbon (DLC) Coatings Room 106 George Savva, IHI Ionbond, Inc. and Thomas Schuelke, Fraunhofer USA, Inc.The unique microstructure of DLC films formed by appropriate proportions of sp3 and sp2 hybridizations of carbon in combination with the chemical inertness, low friction, biocompatibility and other advantageous properties has made this material extremely attractive for a large number of applications. This includes low friction coatings for the engine components in automobile industry, biocompatible coatings for implantable prostheses, wear resistant protective coatings for optical components, ultra-smooth protective coatings for magnetic recording media and numerous others.

New! Industrial Challenges Room 110Ralf Bandorf, Fraunhofer Institute for Surface Engineering and Thin Films IST, GermanyThis technology forum breakfast will address technologies, advancements and new approaches for industrial coatings. This forum is planned as an open format to address both questions related to existing production issues and valuable input for future trends, demands, and developments. The mix of representatives from industry and academia shall foster fruitful discussions and help to connect people for custom solutions and innovative development. Come, join, and bring your ideas!

FRIDAY . may 13


10:20 a.m. T-12 Plasma Nitrided + DLC: A Multifunctional Coating on Gray and Nodular Cast Irons sponsored student presentation

R.O. Giacomelli, D.B. Salvaro, C. Binder, A.N. Klein and J.D. Biasoli de MelloLaboratório de Materiais (LabMat), Universidade Federal de Santa Catarina, Florianópolis, Brazil

10:40 a.m. – 11:00 a.m. – break

11:00 a.m. T-13 Impact Erosion and Corrosion Behavior of Multilayer Metallic Nitride Structures Deposited on Aluminum and Steel SubstratesD.M. Mihut1, S. Hill1, G. Negrea2, P. Harpe11Mercer University, Macon, GA2Technical University of Cluj Napoca, Cluj Napoca, Romania

11:20 a.m. T-14 High Temperature Tribological Behavior of Non-Hydrogenated DLC Coated Steel against Fluorinated Tetrahedral Amorphous Carbon (ta-C-F) sponsored student presentation

M.Z.U. Khan1, S. Bhowmick1, A. Banerji1, M.J. Lukitsch2, A.T. Alpas11Mechanical Automotive and Materials Engineering Department, University of Windsor, Windsor, Canada2Chemical Sciences and Materials Systems Laboratory, General Motors R&D Center, Warren, MI

11:40 a.m. T-15 High Temperature Tribological Behavior of Ti Containing Multilayer MoS2 Coating Against Aluminum AlloysS. Bhowmick1, A. Banerji1, M.J. Lukitsch2, A.T. Alpas11Mechanical Automotive and Materials Engineering Department, University of Windsor, Windsor, Canada2Chemical Sciences and Materials Systems Laboratory, General Motors R&D Center, Warren, MI

12:00 p.m. T-16 Segregation as a Driving Force in the Formation of Nanocomposite ZrO2-Al2O3 CoatingsI. Zukerman1,3, S. Hayun2, M. Halabi2, R.L. Boxman3, A. Raveh⁴1Divison of Chemistry, NRC-Negev, Beer-Sheva, Israel2Department of Materials Engineering, Ben Gurion University of the Negev, Beer-Sheva, Israel 3Electrical Discharge and Plasma Laboratory, Tel-Aviv University, Tel-Aviv, Israel⁴Advanced Coatings Center, Rotem Industries Ltd., Arava, Israel

Optical CoatingsWabash 1 moderators: angus maCleod, thin film Center, inC. and JaCques sebag, large synoptiC survey telesCope proJeCt

9:20 a.m. O-9 Multilayer Coatings for Bloch Surface Wave Optical Biosensorsinvited talk P. Munzert1, N. Danz1, F. Michelotti21Fraunhofer Institute for Applied Optics and Precision Engineering IOF, Jena, Germany2SAPIENZA Università di Roma, Rome, Italy

10:00 a.m. O-10 4-Cavity Narrow Bandpass Filter Coating with Ion Assisted Vacuum EvaporationT. Erguder, R. FaberVacuum Process Technology LLC, Plymouth, MA

10:20 a.m. O-11 A Solution to Adhesion Problem of Oxide Thin Films on Zinc Selenide Optical SubstratesM.B. Cosar, G.H. Aydogdu Kuru, H. Batman, A.E. Sinan OzhanASELSAN, Ankara, Turkey

10:40 a.m. – 11:00 a.m. - break

11:00 a.m. O-12 Enhancement of Laser Damage Resistance of High and Anti-Reflective Optical Multilayers by Tailoring the Electric Field Distribution and Post AnnealingG.H. Aydogdu Kuru, H. Batman, M.B.Cosar, A.E. Sinan OzhanASELSAN, Ankara, Turkey

11:20 a.m. O-13 Highly Conductive and Transparent ITO Films Deposited at Low Temperatures by Pulsed DC Magnetron Sputtering from Ceramic and Metallic Rotary TargetsC. David, P. Prunici, B.P. Tinkham, A. PanckowSolayer GmbH, Kesselsdorf, Germany

11:40 a.m. O-14 High Optical Strength Widegap Conductive SemiconductorsS. Elhadj, J.H. Yoo, J. Adams, M. Menor, T. Olson, J. Lee, A. Samanta, J. BudeMaterials Science Division, Lawrence Livermore National Laboratory, Livermore, CA

12:00 p.m. O-15 Laser Damage Mechanism of Wide Bandgap Conductive SemiconductorsJ.-H. Yoo, S. Elhadj, J. Adams, M. Menor, T. Olson, J. Lee, A. Samanta, J. BudeMaterials Science Division, Lawrence Livermore National Laboratory, Livermore, CA

WebTech Roll-to-Roll Coatings for High-End ApplicationsWabash 3 moderators: John fahlteiCh, fraunhofer institute for organiC eleCtroniCs, eleCtron beam and plasma teChnology fep, germany

9:20 a.m. W-4 Super-Linear Thickness Scaling of Moisture Barriers Produced in Roll-to-Roll High Current Dielectric Barrier DischargeH.W. de Vries1,2, S.A. Starostin1,2, F.M. Elam1,2,3, A. Meshkova1,2,3, J.B. Bouwstra2, M.C.M. van de Sanden1,3

1Dutch Institute For Fundamental Energy Research (DIFFER), Nieuwegein, The Netherlands2FUJIFILM Manufacturing Europe B.V., Tilburg, The Netherlands3Applied Physics Department, Eindhoven University of Technology, Eindhoven, The Netherlands

9:40 a.m. W-5 New Tool for Scalable Thin Film Organic Polymer Deposition on Flexible Substrates Using a Solvent-Free, Gas Phase, Spatial Molecular Layer Deposition Approachsponsored student presentation

D.J. Higgs, A.M. Cano, K. Sharma, S.M. GeorgeDepartment of Chemistry and Biochemistry, University of Colorado, Boulder, CO

10:00 a.m. W-6 Processing of Rolled Flexible Substrates for Active and Passive Device Integrationinvited talk M. PoliksBinghamton University and Center for Advanced Microelectronics Manufacturing, Binghamton, NY

10:40 a.m. – 11:00 a.m. – break

11:00 a.m. W-8 Dual Magnetron Sputtering of Aluminum Oxide: Experience with an Alternative ApproachC. Merton1, S. Jones1, D. Pelleymounter21Corporate Research Process Lab, 3M, St. Paul, MN2Advanced Energy, Northfield MN

11:20 a.m. W-9 Industrial Roll to Roll Fabrication of PV and LOW-E Thin FilmsS. Kreher, S.M. Van EekFHR Anlagenbau GmbH, Ottendorf-Okrilla, Germany

11:40 p.m. W-10 High-Resolution, In Situ Defect DetectionT. PottsDark Field Technologies, Inc., Orange, CT

TECHCON2016FRIDAY


Career Opportunities Service at the TechCon

The SVC TechCon is a prime venue for both employers and job seekers.

The SVC TechCon is a prime venue for both employers and job seekers. Take advantage of the SVC Career Opportunities Service, developed to connect hiring companies with potential employees. FREE

Participation is Free!Employers: DisplayyourjobpostingattheTechCon by delivering your job description to the Information Center during the TechCon open registration hours.

Job Seekers: Include your resume in the TechCon Career Opportunities Service “ResumeCatalog”bydeliveringfivecopiesofyour resume to the Information Center during the TechCon.

Vice President-elect (2016-2018)Chris StoesselEastman Chemical [email protected]

Secretary (2016-2018)Hana BaránkováUppsala University, [email protected]

First-Term Director (2016-2019)Ralf BandorfFraunhofer Institute for Surface

Engineering and Thin Films IST, Germany [email protected]

Second-Term Director (2016-2019)Robert SargentViavi [email protected]

SVC Welcomes

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TheSVCmembershipvotedin2015bysecretballottoelecttwoOfficersforatwo-yeartermandtwoDirectorsforathree-yeartermstartingattheAnnualBusinessmeetingonTuesday,May10,2016.

new directors

TECHCON2016

Available for Purchase at the Registration Counter

50th Anniversary Book . . . . . . . . . . $35 soft cover $45 hard cover

Education Guides Book. . . . . . . . . . $60

2015 Proceedings . . . . . . . . . . . . . . $65

2011 Proceedings CD-ROM . . . . . . $65

2016 Individual Membership . . . . . $110 $40 students/young members

2016 Corporate Sponsorship . . . . . $1100 first calendar year $550 renewal

5K Run Registration . . . . . . . . . . . . $25


+ Two Options to Publish Your Presentation at the TECHCON Presenters in the SVC Technical Program are asked to submit a manuscript for publication. SVC is pleased to offer two publication options to meet the interests of our presenters.

Publish without Peer Review The Society of Vacuum Coaters Annual Technical Conference Proceedings is a collection of presentations made at the SVC TECHCON, published in both a printed and digital format. Pro-ceedings manuscripts will be available in the SVC Digital Library.**Last Chance Extended Submission Deadline June 3, 2016

Publish with Peer Review The SVC will accept a limited number of manuscripts for publication in a special issue of Elsevier’s, Surface and Coatings Technology. Manuscripts subjected to the peer review process, and are accepted, may require modification before publication in Surface and Coatings Technology. All manuscripts submitted for peer review consideration will be published in the SVC Conference Proceedings in its original version (without modification).

Peer Review Manuscript Submission Window: May 4 - June 30, 2016

Visit: www.svc.org/Manuscript

Digital LibraryThe SVC Digital Library contains the complete collection of papers published in the Society of Vacuum Coaters Annual Technical Conference Proceedings from 1988–Present.

SEARCH with intuitive features

TAG favorite titles

SHARE abstracts via email

DOWNLOAD manuscripts

FREE for members

www.svc.org/DigitalLibrary

SVC CORPORATE SPONSORS

3M CompanyAdvanced Energy Industries, Inc.Agilent Technologies, Vacuum Products DivisionAnderson Dahlen, Inc.*Angstrom Sciences, Inc.ARi Industries, Inc.BOBSTBrooks Automation, Inc.Bühler, Inc.Darly Custom Technology, Inc.Denton Vacuum, LLCDynavacEastman Chemical CompanyEbara Technologies, Inc.*EdwardsFerrotec (USA) CorporationFil-Tech, Inc.General Plasma, Inc.GfE Metalle und Materialien GmbHGoodfellow CorporationHauzer Techno Coating - IHI GroupHeraeus Materials TechnologyIHI Ionbond, Inc.Indium CorporationINFICONIntellivation, LLCIntlvac Thin Film*Izovac Ltd.*Kurt J. Lesker CompanyMaterials Science, Inc.Materials Science International, Inc.Materion CorporationMDC Vacuum Products LLCMidwest Tungsten Service , Inc.MKS Instruments, Inc.Mustang Vacuum System LLCNor-Cal Products, Inc.Oerlikon Leybold VacuumOptiforms*Oxford Instruments Plasma TechnologyPfeiffer Vacuum, Inc.Plasmaterials, Inc.Process Materials, Inc.Providence Metallizing Company, Inc.PVT - Plasma und Vakuum Technik GmbHR.D. Mathis CompanyReliable Silver Corporation*RF VII Inc.Solayer GmbH*Soleras Advanced CoatingsSputtering Components, Inc.Sumitomo (SHI) Cryogenics of AmericaTelemarkThermionics Vacuum ProductsThin Film Center, Inc.Toray Plastics (America), Inc.Trillium USA, Inc.TRUMPF HuettingerUC Components, Inc.ULVAC Technologies, Inc.Umicore Thin Film ProductsVacuCoat Technologies, Inc.Vacuum Engineering & Materials (VEM)Vacuum Process Technology LLCVacuum Technology & Coating*VAT, Inc.VDL Groep*Vergason Technology, Inc.Viavi SolutionsVON ARDENNE GmbH

Bold indicates Charter Corporate Sponsor* indicates new 2014/2015/2016 Corporate Sponsors


Follow the SVC Company page and join the SVC Networking Group to foster and expand your professional Network.

http://bit.ly/SVCSolutions

SVC SolutionsThe Society of Vacuum Coaters has launched its LinkedIn Networking Group, SVC Solutions.Join the Group and start a discusion!

SVC on LinkedIn

Follow the SVC Company page and join the SVC Networking Group to foster and expand your professional Network.

http://bit.ly/SVCLinkedIn

On-Demand (Recorded) Webinars Cost: 3-Hour Live On-Line Webinar + Webinar Notes Member $195 | Non-member $270 | Full-Time Student $135

W-105 Evaporation for Thin Film Deposition S. Ismat Shah, University of Delaware

W-110 Advanced Social Media for B2B - Strategies and Success Thomas A. Meshanko

W-204 Basics of Vacuum Web Coating Donald J. McClure, Acuity Consulting W-207 Production Vacuum Systems: Operation and Maintenance Robert (Bob) Langley, Oak Ridge Scientific Consultants

W-208 Sputter Deposition David Glocker, Isoflux

W-212 Troubleshooting for Thin Film Deposition Processes Gary S. Ash, Castle Brook Corporation

W-218 Optical Thin Film Monitoring and Control Ron Willey, Willey Optical Consultants

W-219 Optical Thin Film Materials and Process Know-How Ron Willey, Willey Optical Consultants

W-309 Cathodic Arc Deposition André Anders, Lawrence Berkeley National Laboratory

W-314 Practical Aspects of Plasma Modification of Polymer Materials and Plasma Web Treatment Jeremy Grace, IDEX Corporation

W-317 The Practice of Reactive Sputtering Bill Sproul, Reactive Sputtering, Inc.

W-332A Thin Film Characterization: Structural, Elemental and Chemical Tom Christensen, University of Colorado

W-332B Thin Film Characterization: Physical, Mechanical and Functional Tom Christensen, University of Colorado

W-326 Manufacture of Precision Evaporative Coatings Jim Oliver, Vacuum Innovations, LLC and University of Rochester LLE

W-337 Introduction to Transparent Conductive Oxides (TCO) Clark Bright, Bright Thin Film Solutions (3M retired)

For Webinar descriptions and to register go to: www.svc.org/Education/Webinars.cfm or phone 505-856-7188 for details on Group discounts.

Webinar Tutorial Program

TECHCON2016


NOTES


Beer Blast › VON ARDENNE

USB Flash Drive › Agilent Technologies

Badge Lanyards › Telemark

Notepad › Reliable Silver Corporation

Specialty Coffee Station › Materion › PLANSEE

Wednesday Evening Networking Mixer › Intlvac Thin Film

Frozen Treats in the Exhibit Hall › Vacuum Research Corporation

Welcome Reception Sponsor › Denton Vacuum, LLC

Exhibitor Lounge › Physics Today

Conference Tote Bags› Brooks Automation, Inc.

›Fil-Tech, Inc.› Nordmeccanica Group

› UC Components, Inc.

Bottled Water › DHF Technical Products

Hotel Registration Splash Page › R.D. Mathis Company


TechCon sponsors are recognized as key players in the vacuum coating community, and every sponsor is acknowledged during their sponsored event with prominent signage, on the SVC Website and in all SVC publications throughout the year. Participate in our Sponsor Program to reinforce your name recognition and demonstrate your commitment to the industry. Choose the sponsorship that fits your budget from the list.

Beer Blast › VON ARDENNE

USB Flash Drive › Agilent Technologies

Badge Lanyards › Telemark

Notepad › Reliable Silver Corporation

Specialty Coffee Station › Materion › PLANSEE

Wednesday Evening Networking Mixer › Intlvac Thin Film

Frozen Treats in the Exhibit Hall › Vacuum Research Corporation

Welcome Reception Sponsor › Denton Vacuum, LLC

Exhibitor Lounge › Physics Today

Conference Tote Bags› Brooks Automation, Inc.

›Fil-Tech, Inc.› Nordmeccanica Group

› UC Components, Inc.

Bottled Water › DHF Technical Products

Hotel Registration Splash Page › R.D. Mathis Company

Gold - $2,800 › INFICON

› IHI Ionbond, Inc. › Soleras Advanced Coatings

› Vergason Technology, Inc.

Silver - $1,900 › Advanced Energy Industries, Inc.

› Bürkert Fluid Control Systems › GfE Metalle und Materialien GmbH

› Heraeus Materials Technology › Indium Corporation

› SAFINA Materials, Inc. › Umicore Thin Film Products

Bronze - $950› BOBST

› EBARA Technologies, Inc. › Hauzer Techno Coating – IHI Group

› J.A. Woolman Co. Inc. › MDC Vacuum Products, LLC for more information

[email protected]

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SponsorsTHANK YOU

Benefits of sponsorship start when you sign up and last until long after the TechCon!

TECHCON2016

SCHEDULE OF EVENTSAll meeting rooms are in the Indiana Convention Center (ICC) unless specified otherwise.Monday - FridayConference Registration, Presenter/Manuscript Center, Information Center: ICC Wabash East CorridorCorporate Sponsor Meeting Room: Inquire at the TechCon Information Center

Monday, May 9, 2016 7:30 a.m. – 8:45 a.m. SVC Executive Committee Meeting – Studio Five – Hyatt 9:00 a.m. – 3:00 p.m. Board of Directors Meeting – Discovery – Hyatt 2:30 p.m. SVC Foundation Golf Tournament – Riverside Golf Course, Indianapolis Advance Reservations Required 4:15 p.m. – 4:45 p.m. TAC Chair/Moderator AV Training Session – Wabash 2 6:15 p.m. – 7:00 p.m. Awards Ceremony – Regency Ballroom E-F – Hyatt 7:00 p.m. – 8:30 p.m. Welcome Reception – Regency Ballroom A-D – Hyatt

Tuesday, May 10, 2016 7:00 a.m. – 8:15 a.m. Technology Forum Breakfast – Rooms 104, 105, 106, 109, 110 8:30 a.m. – 9:00 a.m. SVC Business Meeting and TechCon Opening Ceremony – Wabash 2 All are welcome. 9:00 a.m. – 10:00 a.m. Companions Meeting – Conference Room East 9:00 a.m. – 9:40 a.m. Keynote Presentation – Wabash 2 10:30 a.m. – 2:30 p.m. Lunches for Sale – Crossroads Bistro 12:50 p.m. – 1:30 p.m. Donald M. Mattox Tutorial Presentation – Wabash 2 5:30 p.m. – 7:10 p.m. Heuréka! Session – Wabash 1 7:30 p.m. – 8:30 p.m. Young Members Group/Mentors Happy Hour – Vision – Hyatt

Wednesday, May 11, 2016 5:45 a.m. SVC Foundation 5K Fun Run – Meet in Hyatt Lobby 7:00 a.m. – 8:15 a.m. Technology Forum Breakfast – 104, 105, 106, 109, 110 8:30 a.m. – 9:10 a.m. Keynote Presentation – Wabash 2 10:30 a.m. – 2:30 p.m. Lunches for Sale – Crossroads Bistro 12:00 p.m. – 6:00 p.m. Exhibit Open Hours – Exhibit Hall 1:10 p.m. – 2:10 p.m. Industry Forum – Wabash 2 2:20 p.m. Oral Poster Session – Wabash 1 3:30 p.m. – 6:00 p.m. Poster Session – Exhibit Hall 3:30 p.m. – 4:30 p.m. Meet the Experts Corner – Room 110 4:30 p.m. SVC Foundation 5K and Golf Tournament Prize Presentation – Exhibit Hall 5:00 p.m. – 6:00 p.m. Exhibit Hall Reception – Exhibit Hall 6:15 p.m. – 9:00 p.m. Casino Fun Networking Mixer – Regency Ballroom A-F - Hyatt All are welcome.

Thursday, May 12, 2016 7:00 a.m. – 8:15 a.m. TAC Breakfast Meetings – Hyatt 3rd Floor Meeting Rooms 9:20 a.m. Exhibitor Meeting – Room 117 10:00 a.m. – 5:00 p.m. Exhibit Open Hours – Exhibit Hall 12:00 p.m. – 1:00 p.m. SVC Hosted Lunch – Exhibit Hall Lunch Ticket Provided to Exhibitors and Full Conference Registrants 12:30 p.m. – 3:30 p.m. Vendor Innovators Showcase – Room 109 1:40 p.m. – 2:40 p.m. “Meet the Experts” Corner – Room 110 3:30 p.m. – 5:00 p.m. Beer Blast – Exhibit Hall 4:00 p.m. Best Poster Award Announcement – Exhibit Hall 5:30 p.m. – 7:15 p.m. Program Committee Meeting – Vision – Hyatt

Friday, May 13, 2016 7:00 a.m. – 8:15 a.m. Technology Forum Breakfast – 104, 105, 106, 109, 110 8:30 a.m. – 9:10 a.m. Keynote Presentation – Wabash 2 12:45 p.m. SVC Board Wrap-up Lunch – Conference Room East

TAC Breakfast Meeting Room Locationsin the Hyatt Regency (3rd Floor)Thursday, May 12 7:00 a.m. – 8:15 a.m.

WebTech Roll-to-Roll Coatings – Studio Five

Energy Conversion and Related Processes – Studio One

Protective, Tribological and Decorative Coatings – Studio Six

Emerging Technologies – Studio Two

HIPIMS – Studio Three

Optical Coatings – Discovery B

Plasma Processing – Studio One

Large Area Coatings – Discovery A

Biomedical and Environmental Applications – Studio Four

Free WIFI in the Exhibit HallCourtesy of SVC Gold Sponsors

TECHCON2016

Documents

59th Annual Technical Conference, Indiana …...plasma immersion ion implantation to produce graded interfaces and well-adherent coatings, doped diamond-like carbon for biointerfaces,