3
Loca l vibrat ional modesof carb on in GaS b an d GaAsS b X. K. Chen, R. Wiersma, C. X. Wang, O. J. Pitts, C. Dale, C. R. Bolognesi, and S. P. Watkins a)  Department of Physics, Simon Fraser University, 8888 University Drive, Burnaby,  British Columbia V5A 1S6, Canada Received 17 December 2001; accepted for publication 21 January 2002 We have measured the Raman spectra of heavily carbon doped ( p 10 19 cm 3 ) GaSb and GaAsSb. A local vibrational mode L VM due to carbon residing on group-V lattice sites was observed at 540 cm 1 for GaSb and 568 cm 1 for GaAs 0.44 Sb 0.56 . A gap mode at 164 cm 1 was observed for GaSb. The frequ enc y of the LVM as wel l as the gap mod e is in qua nti tat ive agree men t wit h rec ent theoretic al p redi ctio ns. © 2002 American Institute of Physics. DOI: 10.1063/1.1461871 Antimony-containing materials are of increasing interest for both optoe lectr onic and elec troni c devi ce appl icat ions. Cutoff frequencies in excess of 300 GHz have recently been observed in high-breakdown voltage InP/GaAsSb/InP double heter ojunc tion bipol ar tran sist ors 1 us in g ca rb on as th e GaAsSb base dopan t. Extr emel y high hole conc entra tions can be achieved in carbon doped GaAsSb grown by metal- organic chemical vapor depos itio n MOCVD wit h ver y weak hydro gen passi vati on eff ects compared to MOCVD gro wn GaI nAs . The hig h hol e concentra tio ns in C-d ope d GaAsSb suggest carbon is incorporated on group-V sublat- tice sites, but until now no independent conrmation of this assertion has been provided. Raman scattering from undoped GaAsSb has bee n rep ort ed in sev era l stu die s 2– 4 however there are no prior reports of Raman scattering from carbon- doped GaAsSb or GaSb to our knowledge. Carbon has been extensively studied as a dopant for GaAs due to its very low diff usivi ty and high solub ilit y . Local vibratio nal mode s in GaAs and GaP due to carbon substituted for As or P have been reported in deta il. 5,6 In contr ast carbon has received very little attention as a dopant for GaSb. Van Hove et al. demonstrated the use of a carbon e -beam source for p -type doping of molecular beam epitaxy MBE material to high levels (  p 1 10 20 cm 3 ) . 7 Carbo n tetr achloride was re- cently demonstrated to be an effective carbon dopant for or- ganome tal lic vap or pha se epi tax y OMVPE gro wth of GaSb. 8 In this work we ide ntify loc al vib rat ion al modes L VM for heavily carbon-doped GaSb and GaAsSb using Raman spectroscopy and compare the energies with recent theoretical predictions. GaSb growth was performed in a vertical chamber at a growt h temp eratu re of 560 °C on Te-do ped GaSb 001 sub- strates Ramet. 8 GaAs growth was performed in a vertical chamb er at a growt h tempera ture of 560 °C on GaAs 001 substrates AXT. GaAsSb growth was perf orme d at 560 °C in a horizontal chamber using prev iousl y repor ted growt h condi tion s on Fe-do ped InP 001 substrates. 9 Triethylgal- lium, tertiarybutylarsine, trimethylantimony, and carbon tet- rachloride 500 ppm in hydrogen were used as the precur- sors. Fur the r det ail s of the gro wth pro ced ure s hav e bee n reported elsewhere. 8,10 Hall measurements were performed at a eld of 5000 G by the van der Pauw method, using In–Zn cont acts alloy ed under hydrog en at 250–300 °C. The alloy comp osit ion of the heavily carbon doped GaAsSb sample was estimated from x-ray diffraction data, assuming coherent strain. From previous measurements of the effect of carbon on the lattice parameters of GaAs and GaSb in this labora- tor y we est ima te tha t the actua l Sb mol e fra cti on of thi s sample is 0.561. Neglecting the effect of carbon on the lattice consta nt wou ld giv e a Sb mol e fra cti on of 0.547. Car bon conce ntra tions were assu med to be equa l to the meas ured acceptor concentrations. The Raman spectra of GaSb and GaAsSb were measured with a triple spectrometer in a quasibackscattering geometry using the 488.0 nm line of an Ar-ion laser. The spectra of GaAs were measured using the 457.9 nm line which resulted in bet ter sig nal -to -no ise spe ctra bec aus e of a resonance effect. 11 Four polariz atio n cong urati ons were used in the Raman measurements, X X , X Y , X  X , and X Y , where X , Y , X , and Y refers to the 100, 010, 110, and 1 ¯ 10 crystal direction, respectively. For example, X Y represents the scattering geometry in which the polarization direction of the incident light is along 100 and the polarization direction of the scatt ered light is along 010. All the spectra were measured at an ambient temperature of 15 K. The estimated heating effect due to the incident laser is less than 20 K. Fig ure 1 shows the Raman spe ctra of hea vil y car bon dop ed (  p 10 19 cm 3 ) and undoped (  p 6 10 16 cm 3 ) GaSb samples. The undoped spectrum is dominated by the GaSb LO phonon at 240 cm 1 together with a weaker fea- ture at about 450 cm 1 whic h we be li eve is due to two pho non pro ces ses and thu s reect s the pho non den sit y of states. The spectra of the heavily doped samples are domi- nated by a strong line at about 230 cm 1 which we attribute to the coupl ed hole plasmo n-LO phonon mode, simi lar to publ ished results for heavi ly p -type GaAs. 12 A careful ex- amination reveals that the frequency of this coupled mode shifts from 231 to 225 cm 1 when the doping level is in- creased from 3.810 19 to 1.510 20 cm 3 . In the heavily carbon doped samples two additional nar- row peaks, one at 164 cm 1 and the ot he r at about 540 cm 1 , appear in XY and X  X spectra. The Raman selection rule s indi cate that thes e are T 2 mod es of the point group T d . 13 We attribute the 540 cm 1 mode to a localized vibra- a Electronic mail: [email protected] APPLIED PHYSICS LETTERS VOLUME 80, NUMBER 11 18 MARCH 2002 1942 0003-6951/2002/80(1 1)/1942/3/$19.00 © 2002 American Institute of Physics Downloaded 15 Mar 2002 to 142.58.249.143. Redistribution subject to AIP license or copyright, see http://ojps.aip.org/aplo/aplcr.jsp

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Local vibrational modes of carbon in GaSb and GaAsSb

X. K. Chen, R. Wiersma, C. X. Wang, O. J. Pitts, C. Dale, C. R. Bolognesi, andS. P. Watkinsa)

 Department of Physics, Simon Fraser University, 8888 University Drive, Burnaby, British Columbia V5A 1S6, Canada

Received 17 December 2001; accepted for publication 21 January 2002

We have measured the Raman spectra of heavily carbon doped ( p1019 cm3) GaSb and GaAsSb.

A local vibrational mode LVM due to carbon residing on group-V lattice sites was observed at 540

cm1 for GaSb and 568 cm1 for GaAs0.44Sb0.56 . A gap mode at 164 cm1 was observed for GaSb.

The frequency of the LVM as well as the gap mode is in quantitative agreement with recent

theoretical predictions. © 2002 American Institute of Physics. DOI: 10.1063/1.1461871

Antimony-containing materials are of increasing interest

for both optoelectronic and electronic device applications.

Cutoff frequencies in excess of 300 GHz have recently been

observed in high-breakdown voltage InP/GaAsSb/InP double

heterojunction bipolar transistors1 using carbon as the

GaAsSb base dopant. Extremely high hole concentrations

can be achieved in carbon doped GaAsSb grown by metal-organic chemical vapor deposition MOCVD with very

weak hydrogen passivation effects compared to MOCVD

grown GaInAs. The high hole concentrations in C-doped

GaAsSb suggest carbon is incorporated on group-V sublat-

tice sites, but until now no independent confirmation of this

assertion has been provided. Raman scattering from undoped

GaAsSb has been reported in several studies2– 4 however

there are no prior reports of Raman scattering from carbon-

doped GaAsSb or GaSb to our knowledge. Carbon has been

extensively studied as a dopant for GaAs due to its very low

diffusivity and high solubility. Local vibrational modes in

GaAs and GaP due to carbon substituted for As or P havebeen reported in detail.5,6 In contrast carbon has received

very little attention as a dopant for GaSb. Van Hove et al.

demonstrated the use of a carbon e-beam source for p-type

doping of molecular beam epitaxy MBE material to high

levels ( p11020 cm3).7 Carbon tetrachloride was re-

cently demonstrated to be an effective carbon dopant for or-

ganometallic vapor phase epitaxy OMVPE growth of 

GaSb.8 In this work we identify local vibrational modes

LVM for heavily carbon-doped GaSb and GaAsSb using

Raman spectroscopy and compare the energies with recent

theoretical predictions.

GaSb growth was performed in a vertical chamber at a

growth temperature of 560 °C on Te-doped GaSb 001 sub-strates Ramet.8 GaAs growth was performed in a vertical

chamber at a growth temperature of 560 °C on GaAs 001

substrates AXT. GaAsSb growth was performed at 560 °C

in a horizontal chamber using previously reported growth

conditions on Fe-doped InP 001 substrates.9 Triethylgal-

lium, tertiarybutylarsine, trimethylantimony, and carbon tet-

rachloride 500 ppm in hydrogen were used as the precur-

sors. Further details of the growth procedures have been

reported elsewhere.8,10 Hall measurements were performed at

a field of 5000 G by the van der Pauw method, using In–Zn

contacts alloyed under hydrogen at 250–300 °C. The alloy

composition of the heavily carbon doped GaAsSb sample

was estimated from x-ray diffraction data, assuming coherent

strain. From previous measurements of the effect of carbon

on the lattice parameters of GaAs and GaSb in this labora-

tory we estimate that the actual Sb mole fraction of thissample is 0.561. Neglecting the effect of carbon on the lattice

constant would give a Sb mole fraction of 0.547. Carbon

concentrations were assumed to be equal to the measured

acceptor concentrations.

The Raman spectra of GaSb and GaAsSb were measured

with a triple spectrometer in a quasibackscattering geometry

using the 488.0 nm line of an Ar-ion laser. The spectra of 

GaAs were measured using the 457.9 nm line which resulted

in better signal-to-noise spectra because of a resonance

effect.11 Four polarization configurations were used in the

Raman measurements, XX , XY , X  X , and X Y , where X ,

Y , X 

, and Y 

refers to the 100, 010, 110, and 1¯

10crystal direction, respectively. For example, XY  represents

the scattering geometry in which the polarization direction of 

the incident light is along 100 and the polarization direction

of the scattered light is along 010. All the spectra were

measured at an ambient temperature of 15 K. The estimated

heating effect due to the incident laser is less than 20 K.

Figure 1 shows the Raman spectra of heavily carbon

doped ( p1019 cm3) and undoped ( p61016 cm3)

GaSb samples. The undoped spectrum is dominated by the

GaSb LO phonon at 240 cm1 together with a weaker fea-

ture at about 450 cm1 which we believe is due to two

phonon processes and thus reflects the phonon density of 

states. The spectra of the heavily doped samples are domi-nated by a strong line at about 230 cm1 which we attribute

to the coupled hole plasmon-LO phonon mode, similar to

published results for heavily p-type GaAs.12 A careful ex-

amination reveals that the frequency of this coupled mode

shifts from 231 to 225 cm1 when the doping level is in-

creased from 3.81019 to 1.51020 cm3.

In the heavily carbon doped samples two additional nar-

row peaks, one at 164 cm1 and the other at about 540

cm1, appear in XY  and X  X  spectra. The Raman selection

rules indicate that these are T 2 modes of the point group

T d  .13 We attribute the 540 cm1 mode to a localized vibra-aElectronic mail: [email protected]

APPLIED PHYSICS LETTERS VOLUME 80, NUMBER 11 18 MARCH 2002

19420003-6951/2002/80(11)/1942/3/$19.00 © 2002 American Institute of PhysicsDownloaded 15 Mar 2002 to 142.58.249.143. Redistribution subject to AIP license or copyright, see http://ojps.aip.org/aplo/aplcr.jsp

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tion of substitutional carbon atoms on the Sb lattice sites,

with bonding to four nearest-neighbor Ga atoms, similar to

the well known LVM at 582 cm1 observed in heavily car-

bon doped GaAs by IR and Raman spectroscopy.5 The de-

crease in the LVM mode frequency relative to GaAs prima-

rily represents the effects of dilation of the C–Ga bonds due

to the larger lattice constant of GaSb. Theoretical estimates

of the carbon LVM mode energy in GaSb were previously

reported by Robbie et al.14 assuming the same changes of 

force constant used to fit the GaAs local mode energies. With

this approximation the LVM energy was calculated to be

around 544 cm1

. Robbie et al. further predict a gap modeat 166 cm1 assuming the same force constant changes.

The gap between the acoustic and optical phonons in GaSb is

very narrow, occurring from 161.4 to 182.9 cm1.14 There-

fore, we attribute the 164 cm1 mode observed in Fig. 1 to a

carbon gap mode of GaSb. The present results show no evi-

dence of carbon on Ga sites, which would be expected to

produce a LVM at lower energy than carbon on Sb sites.

Figure 2 shows the doping dependence of the frequency

and intensity of the LVM in GaSb. When the doping level is

increased from 3.81019 to 1.51020 cm3, the LVM peak 

shifts towards lower frequency by 41 cm1. The effect of 

lattice parameter shift due to carbon-induced lattice contrac-

tion would be expected to shift the local mode energy to

higher energies, opposite to the observed trend. On the other

hand, a coupling effect between vibrational and electronic

excitations could result in the observed redshift in

frequency.15 This mechanism was invoked by Wagner et al.

to explain a similar effect in Be-doped GaAs.16

In addition, we normalized the integrated intensity of theLVM to that of the second-order phonon Raman spectrum at

450 cm1. As shown in Fig. 2, the integrated intensity of the

LVM increases linearly with increasing hole concentration as

expected from the relation17

 I LVM pV  , 1

where p represents the hole concentration, V  the scattering

volume, and   the scattering cross section per impurity.

Figure 3 shows a comparison of the LVM of heavily

FIG. 1. Log plot of low temperature 15 K Raman spectra of undoped and

heavily carbon doped GaSb layers. From top to bottom: p1.51020, 6.7

1019, 3.81019, and p61016 cm3. Note the local vibrational mode

at about 540 cm1 and a gap mode at 164 cm1. The inset shows the

spectra of heavily doped samples ( p6.71019 cm3) measured in X Y ,

 X  X , and XX  scattering geometries.

FIG. 2. Frequency and intensity of the LVM as a function of carbon doping

level as measured by Hall effect. The solid circles represent the peak fre-

quency. The squares represent the ratio of the integrated intensity of the

LVM to that of the 450 cm

1 peak. The thick solid line represents a fit usingEq. 1.

FIG. 3. Raman spectra of heavily carbon doped from top to bottom GaAs

( p7.51019 cm3), GaAs0.44Sb0.56 ( p1.01020 cm3), and GaSb ( p

1. 510 20 cm3), measured using XY  scattering geometry.

FIG. 4. Frequency of the carbon LVM vs lattice parameter for GaP, GaAs,

GaSb and GaAsSb. For the GaAsSb sample we used the relaxed lattice

constant as inferred from x-ray measurements. The error bar represents thelinewidth FWHM.

1943Appl. Phys. Lett., Vol. 80, No. 11, 18 March 2002 Chen et al.

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doped GaAs, GaAsSb, and GaSb samples. The frequency of 

the LVM of the ternary alloy GaAs0.44Sb0.56 is 568 cm1,

which is between the frequencies of the LVM in GaAs and

GaSb. This confirms that the Ga– C bonding in C-doped

GaAsSb is stronger than that in GaSb but weaker than that in

GaAs as expected. As shown in Fig. 4, the frequency of the

LVM linearly depends on the lattice constant in these mate-

rials. Furthermore, it is interesting to note that the linewidth

of the LVM in GaAsSb is about three times as large as that of 

GaSb and GaAs. This broadening of LVM in the ternary

alloy can be interpreted as the consequence of alloy effects.

In particular, while the average lattice spacing in the GaAsSb

sample is constant over large length scales, the interatomic

distance can vary within a range, due to alloy or composi-

tional fluctuations. As a result, the LVM mode for the alloy

should be broadened. In addition, the mass distribution of the

second nearest neighbor group-V atoms surrounding the car-

bon impurity should vary due to alloy disorder, which might

have a contribution to the broadening of the LVM in the

alloy.

Table I shows a summary of the relevant experimentalvalues for the LVM measured in the present study as well as

the commonly accepted values for GaP and GaAs for com-

parison.

In conclusion, we have identified local vibrational modes

of carbon acceptors substituting for group-V sites in GaSb

and GaAsSb heavily doped with carbon. Local and gap

modes at 540 and 164 cm1 were identified for GaSb. A

local mode intermediate between those of GaSb and GaAs

was observed in GaAs0.44Sb0.56 .

The authors acknowledge the support of the Natural Sci-

ences and Engineering Research Council of Canada.

1 M. W. Dvorak, C. R. Bolognesi, O. J. Pitts, and S. P. Watkins, IEEE

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1986.4 M. Peter, N. Herres, F. Fuchs, K. Winkler, K.-H. Bachem, and J. Wagner,

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J. M. Van Hove, P. P. Chow, M. F. Rosamond, G. F. Carpenter, and L. A.Chow, J. Vac. Sci. Technol. B 12, 1200 1993.8 R. Wiersma, J. A. H. Stotz, O. J. Pitts, C. X. Wang, M. L. W. Thewalt, and

S. P. Watkins, J. Electron. Mater. 30, 1429 2001.9 S. P. Watkins, O. J. Pitts, C. Dale, X. G. Xu, M. W. Dvorak, N. Matine,

and C. R. Bolognesi, J. Cryst. Growth 221, 59 2000.10 V. Fink, E. Chevalier, O. J. Pitts, M. W. Dvorak, K. L. Kavanagh, C. R.

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TABLE I. Summary of experimental values of the carbon local mode ener-

gies for various materials.

Material

Carrier

concentration

(cm3)

LVM energy

(cm1)

Linewidth

FWHM

(cm1)

GaP N/A 6066 N/A

GaAs 7.5 1019 582 12

GaAs0.44Sb0.56 1.0 1020 568 30

GaSb 1.5 1020

5380.5 10GaSb 6.7 1019 5400.5 10

GaSb 3.8 1019 5420.5 10

GaSb 1.7 1019 5411.0 10

1944 Appl. Phys. Lett., Vol. 80, No. 11, 18 March 2002 Chen et al.

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