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A STUDY OF LOW LEAKAGE A STUDY OF LOW LEAKAGE FAILURE MECHANISM FAILURE MECHANISM

OF MULTILAYER 7XR CERAMIC OF MULTILAYER 7XR CERAMIC CAPACITORCAPACITOR

Zhaofeng Wang Zhaofeng Wang

International Rectifier Corp.International Rectifier Corp.

ISTFA 2006

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Presentation Presentation OutlineOutline

IntroductionIntroduction Hot Spot DetectionHot Spot Detection Precision localizationPrecision localization SEM, STEM AnalysisSEM, STEM Analysis SummarySummary AcknowledgementAcknowledgement

ISTFA 2006

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Illustration of a leaky capacitor in application circuit

and its IV behavior

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Sectioning and thermal imaging to

confirm/localize the hot spot in x-direction

x

zy

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Illustration of approaching the failure site through y-direction sectioning and photon

emission micro-probing

X - direction y-direction

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Laser marks

Illustration of precision localization using Laser marking, sectioning and photon emission micro-probing

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failure site SEM: there is no observable physical defect

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04/09/2304/09/23 88SEM close-up showing a grain boundary micro-fracture

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High leakage (mA range) failure sites showing micro-fractures

intergranular transgranular

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STEM image of a failure site showing compositional contrast

ISTFA 2006