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ABC of Vacuum Valves ABC of Vacuum ValvesAn easy-to-follow introduction to CKD's vacuum valves
We support your vacuum control requirement with our wide-ranging lineup.
Applicable vacuum pump (example)
Type of device vs. degree of vacuum
Vacuum Control Device Classification by Application
2
High vacuum
Medium vacuum
Low vacuum
Oil diffusion pumpCryopumpOil diffusion pumpCryopump
PressurePa(abs)
Dry pump(Multistage Roots pump)(Screw pump)(Dry vane pump)
Dry pump(Multistage Roots pump)(Screw pump)(Dry vane pump)
1.3×10-5
1.3×10-1
1.3×102
1.3×105
Thin
film
fo
rmat
ion
Vacu
um
depo
sitio
n
Ele
ctro
n m
icro
scop
e
Met
al
proc
essi
ng
Liqu
id
dega
ssin
g
Vacu
um
dryi
ng
Sucti
on
trans
porta
tion
Vacu
um tu
be
manu
factur
ing
Ana
lyze
r
Turbo molecular pumpTurbo molecular pump
Oil diffusion ejector pumpOil diffusion ejector pumpRoots
pumpRoots pump
Oil ejector pumpOil ejector pump
Vacuum Exhaust System Basic Configuration and CKD Devices
3
[Gas supply]AGD-R
[Instrument protection]AVB/MVB
[ON/OFF valve]AVB
[Leak valve]HVL
[Pressure control]VEC
[Solenoid valve for release to atmosphere]HVB
Vacuum vessel (chamber)
Mainpump
Auxiliary pump
•Can be used in vacuum
•Standard air operated valve with a proven track record
•Wide range of operations from closing to pressure control accommodated with a single unit
•Circuit can be simplified by reducing incidental equipment
*Custom order
•Solenoid vacuum valve with excellent vacuum maintaining capability and durability
•Wide lineup including NW 16 size
•Manual operating types available
•Long service life combined with high durability and adoption of proprietary molded bellows for high reliability
•High cleanliness ensured by bellows structure
•Delay control possible with simple setting
•Effective for preventing entry of oil into piping of pumps
Count on CKD, “the Expert on Vacuum”★Wide lineup
Valve for High Vacuum: AVB**7
4
AVB*17 Series AVB**7 Series (high temperature type)
AVB*47 Series AVB*37 SeriesUnshakable reliability
Overview
Applications ●Semiconductors ●FPDs ●Solar panel ●Other vacuum control circuits
[Prevention of bending]
[Mitigation of impact]
Atmosphere release valve
Position: sideways (horizontal)
Operating air
Vacuum pump
50
100
150
200
250
300
0Times of operation
(10,000 times)
*The CKD's guaranteed value based on the durability test specified by the company standards is 1 million times. For details, see the specification.
Unprecedented service life achieved by special structure with CKD's proprietary molded bellows
[Number of corrugations, thickness and shape]Appropriate number of corrugations, thickness and shape selected by stress analysis.Dedicated design to suit respective bore diameter.
The guide location well thought out and bending of bellows prevented to minimize concentration of stress.
•Actuator end made lightweight.
•Mechanism to reduce the impact stress of valve opening/closing adopted.
CKD guaranteed value
CKD performance value
★Two-stage type with a simple structure also available! AVB*47 Series
Simple flow channel structure for eliminating problems including dust emission and attachment of products
Simple flow channel structure for eliminating problems including dust emission and attachment of products
■ Durability test circuit
■ Realization of high durability Highlight
☞■ Durability test result
★Horizontal installation★Repetition of changes between
atmospheric and vacuum conditions Rigorous test
conditions endured
Over 3 million
times
High durability to endure practically over 3 million times of operation!
Custom orderCustom orderCustom order
Wide-ranging Demands Served!
5
We meet your requests.
O ring material options(5) With heater
(2) Large bore diameter
(4) With solenoid valve
(3) Electric/multistage control(1) Manual valve
*Custom order *Custom order *Custom order
MVB SeriesManual valve with a stable seal structure offering the performance of the AVB SeriesBore diameter lineup: NW 16 to 50
Large bore diameter types of NW 80 to 160 availableTwo-stage exhaust and high temperature can be accommodated* NW80 to 100: Catalog “High Purity Gas Control System Component”
NW160: Custom order
EVB Series30-position opening adjustment made possible by electric controlMultistage control realizedBore diameter lineup:NW25/40/50
Solenoid valve for operation directly connected to the valve, realizing space conservation and meeting various piping demands
Heater can be provided to prevent material deposition.*Bore diameter available: NW25 to 63
Various O ring material available according to request* For materials available for replacement, contact our sales representative.
Pressure Control Vacuum Pressure Proportional Control System VEC series
6
Overview
Applications ●Various CVD systems ●Experiments/researches (vacuum pressure control)
The VEC Series is a system designed for controlling vacuum pressure in vacuum chambers of semiconductor manufacturing lines.
Wide-range Wide-range Tight shutoff and unrestricted exhaust control
Closed OpenDuring control (low vacuum)
During control (high vacuum)
*Contact our sales representative for details.
Highlight HighlightWide range of control from low to high vacuum
Diverse exhaust control!!AtmosphereLow vacuum
High vacuum
Cont
rol r
ange
of V
ECCo
ntro
l ran
ge o
f VEC
Tight shutoff
Wide-range control from low to high vacuum realized by a single unit
Control range of butterfly system
● Capability of slow exhaust: effective for prevention of stirring of particles in chambers
● Eliminates the need for a shutoff vacuum valve, contributing to space conservation of equipment
pressure control
Unit/Classification of Vacuum and Pressure Conversion
7
-1.00×105
-160
-360
-560
-660
-759
-0.2
-0.5
-0.7
-0.9
-0.999
10 -6
-760 -1.033
0 0 0
0
1.033
-1.96×10 4
-4.90×10 4
-6.86×10 4
-8.83×10 4
-9.80×10 4
0.8
0.5
0.3
0.1
10 -3
10 -7
10 -3
1.3×10 -5
1.3×10 -1
00
760
600
400
200
100
11.3×102
1×10 5
PaG mmHg
Gauge pressure
kgf/cm 2 Gkgf/cm2(abs)Torr(=mmHg)
Pa(abs)
Absolute pressureClassification
Ultra-high vacuum
High vacuum
Medium vacuum
Low vacuum
MPa Pa bar kgf/cm 2 atm mH2O mHg lbf/in2 (psi)1×10-6
1×10-1
9.80665×10 -2
1.01325×10 -1
9.80665×10 -3
1.3332×10 -1
6.895×10-3
11×105
9.80665×10 4
1.01325×10 5
9.80665×10 3
1.3332×10 5
6.895×103
1×10-5
19.80665×10 -1
1.013259.80665×10 -2
1.33326.895×10-2
1.0197×10 -5
1.01971
1.03321.0000×10 -1
1.35957.031×10-2
9.869×10-6
9.869×10-1
9.678×10-1
19.678×10-2
1.31586.805×10-2
1.0197×10 -4
1.0197×101.0000×101.033×10
11.360×107.031×10-1
7.501×10 -6
7.501×10 -1
7.356×10 -1
7.60×10-1
7.355×10-2
15.171×10-2
1.450×10-4
1.450×101.422×101.470×10
1.4222×10-1
1.934×101
Atmospheric pressure
Absolute vacuum
■ Unit and classification of vacuum
■ Pressure conversion table
2014.4.CAC
RecommendationsWXU MN3E/MN4E Air fiberSaves water piping space.Contributes to quality improvement and space conservation of non-piping systems.
Ideal for air operated valve operation.Valve block width: 10 mm or 7 mmCompact pilot operated solenoid valve manifold
Extra-fine tube with an outer diameter of ø1.8Streamlines cumbersome pipe routing.
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