Apollowave Corporation Company profile & Product information

Apollowave Corporation 2010.

Apollowave Corporation

Company profile & Product information


Our keywords are

High Frequency

Low leakage and

Temperature

■ Daisho Bldg.4 F, 6-7-8 Nishinakajima,

Yodogawa-ku, Osaka 532-0011 JAPAN

■ T E L／F A X ：(81)6-6838-3233/(81)6-6838-3234

■ URL: http://www.apollowave.co.jp

AAppollowave Corporation

About Us

Foundation : February, 2000

Capital : JPY 15,000,000

Location : Daisho Bldg. 4F, 6-7-8 Nishinakajima, Yodogawa-ku, Osaka 532-0011 Japan

Main customers:

NEC Electronics, Omron, Sharp, Sony, Toshiba, Panasonic, Mitusbishi, Rohm, Fujitsu, Renesas Technology and etc.

Osaka University, Tohoku University, Tokyo University, Kyoto University, Nagoya University etc.

2000 Feb. Foundation of Apollowave Corporation

Aug. Development of Gyro Sensor Measurement System

2001 Jan. Development of Semi-Automatic wafer Prober

Mar. Certified as SMBs Creation Act and promotion Company by Osaka pref. with R&D of Vertical RF Probe Card.

Apr. Set up of patent project room at Osaka Prefectural Patent Information Center

Jul. Set up R&D center at Osaka Technology Research Institute and developed RF Probe and Low-leakage Probe.

2002 Jan. Made Prototype 6GHz Probe Card

Oct. Development of TDDB/EM Probe Card

Dec. Capital increased to 150M and prefectural financial group “FORECS” became one of our share holders.

2003 Oct. Grand Prize at Venture’s Economic Development Project Award by Ikeda Bank.

2004 Apr. Certified as SMBs Creation Act and promotion Company by Osaka pref. with development of

“Wafer level EM Evaluation System”.

2005 Feb. Releasing 300mm WLR probing system and Probe card

Oct. Received a special prize at Osaka Frontier award venture of business encouragement division.

2006 Apr. New manual prober model “Alpha” Series were released.

2007 Mar. Releasing model PEM300 as special manual prober for WLR

2008 Apr. Selected as “Vitality Manufacturers 100 of Kansai”.

2009 May. Received a prize “Vitality Manufactures SME 300 of Kansai/Twinkling Manufactures・Small scale” by Ministry

Economy SME Ministry.


Manual Probers Product Line

For LCD

Magnet Prober (For MRAM) For WLR Test

RF Prober

α 200 CS

(Ultra low level measurement at hot & cold temperature)

Vacuum Prober

UP to now, APW has developed and provided several type of manual prober to our customers.

Customizing to your requirements is welcomed.

Magnet Prober (For MRAM)

α Series （100/ 200/ 150/ 300）

From ship to 300mm wafer


α１００

Just Fit point # 1

Compact body W“370 x D370mm

Just Fit point #2

Small wafer, chip and cracked

Wafer as your request!

Just Fit point #3

Variety of wafer chucks and easy

Chuck replacement

Just Fit point #4

Usability

� Precision alignment by accrete

X, Y, Z, θ Stage with micrometer

� Enhancing measurement efficiency by

3-stage Z drive action

� Quick positioning by vacuum grip

Standard Specifications

Stage Travel X: 100mm Y:100mm

Sub-stage travel X:+- 6.5mm Y:+-6.5mm

Wafer chuck Diameter 110mm/ thickness:5mm

Wafer hold Vacuuming

Z-stage travel Fine: 5mm / Coarse:5mm

Θ-stage travel 360 degree. / Fine: +-5deg.

Dimension & Weight W320*H300*D355mm / 25Kg

(Height : without microscope)

Features and specifications

Hot Chuck

Thermo Chuck

Norma Chuck (SUS)

Chuck for film

Resinous Chuck

And etc…

In-Circuit

Board holder

Just Right, Just Fit!

Vacuum grip Lever for plate


α１50/ α200

� Optics system selection

Efficient alignment by 3-position Z axis drive action

“0” to contact the target (after first alignment, no need to make Z-axis alignment)

“0.3mm” to change the target (just right distance without losing focus through microscope

while stage is moving). “5mm” to load/unload wafer or other sample safely.

Precise alignment

X, Y, Z, Theta stage with accurate micrometer. It also enables easy alignment for using probe

card.

Quick positioning

Operator can move XY stage freely by stage knob and hold tightly by releasing hand from the

switch. XY travel range is equal to the chuck size.

High

Magnification

Micro-zoom Stereomicroscope

*Front opening type

For easy wafer load/ unload

*Robust Platen

A150/200 is designed to mount max.4pcs of

M60 micro-manipulators as standard

*Shock absorber

Used for soft contact probing to prevent

damage to the device.


RF Probe Station α―ＲＦ

M 60M 60M 60M 60 SpecificationsSpecificationsSpecificationsSpecifications

Fixation Magnet base or Screw type

Stroke XYZ+-6.5mm, Theta 360deg

Movement 0.5mm/REV

Linearity 3um

Resolution 10um

Vacuum adsorption (400ｍｍＨｇ≦) Wafer holding

6inches Chuck diameter

Ｘ：14ｍｍ, Ｙ：14ｍｍ Sub stage travel

Ｘ：150ｍｍ, Ｙ：150ｍｍ Stage travel

40KGS Body Weight

D：550mm W：500mm H：330mm Dimension

ＲＦＲＦＲＦＲＦ parameter measurement in

frequency range up to 40 GHz

Standard configuration

� αSeries prober base (α100,150,200)

� From “4 up to 8” wafer chuck

� Microscope

� RF micromanipulator (M60)

W.E = RF Probe (GGB) / N.S=DC (AW Probe)

Micro manipulator M60 supports precise

measurement for high frequency test.

Features M60

� Accurate probing by high linearity

� RF & DC measurement is available

� X-Y-Z Theta adjustable

� Compatible with most of RF probe heads

* Optimum with micromanipulator model M60RF

(X,Y,Z,θ adjustment mechanism) for accurate probing.

Type α-RF is compatible with various type of RF probe head. We

provide DC probe head (Multi-Contact Wedge type) with quick

delivery.

α150


Extract application of αseries

Triaxial Probe

Connector Triaxial

Tip diameter 5 to 40 um

For more precise measurement

Low leakage measurement

M20 with tungsten probe needles

For fA level IV and CV measurement

Standard configuration

� αSeries prober base (α100,150,200)

� 4inch or 6inch wafer chuck

� Microscope

� Micro positioner (M20) (M30) (M40)

� Triaxial probe

� Triaxial connector panel

� Tungsten probe needles

Specifications M 20 (R) (L) M30 (R) (L) M40 (R) (L)

Fixation Magnet rubber base Magnet base Magnetic base

(with ON/OFF lever)

Stroke XYZ+-5mm XYZ+-3.2mm XYZ+-6.5mm

Movement 0.5mm/REV 0.5mm/REV 0.5mm/REV

Linearity 30um 3um 1um

Remark Without micrometer Resolution/ 10um Resolution/ 10um

Micropositioner M20 Micropositioner M30 Micropositioner M40


Extract application of αseries

Mounting -55 to +300deg.C (option) Thermo-chuck

Mounting max. 9pcs of positioners available.

Switch units such as Agilent ASU/RSU,

Keithley PreAmp can be mounted close to probe.

Addressing pulse IV and high speed NBTI tester

Using APW ultra low leak probe card

Compact Shield enables Ultra Low Level

measurement in wide operation temperature range.

α200CS

General Specifications Model α200CS

Stage travel X:200mm Y:200mm

Sub-stage travel X:+-14mm Y:+-14mm

Wafer chuck Diameter200mm (4 to 8”)

Wafer hold Vacuuming (>400mm Hg)

Dimension & Weight W 610* H 390* D 685mm

(Height: without microscope)

71Kg (w/o microscope &chuck)

Leak data in the compact shield

I-T test dasta

I1 9

- 1 .5 0 E- 1 4

- 1 .0 0 E- 1 4

- 5 .0 0 E- 1 5

0 .0 0 E+ 0 0

5 .0 0 E- 1 5

0 2 0 4 0 6 0 8 0 1 0 0 1 2 0

時間（ｓ）

Ｉ（Ａ

）


Dedicated equipment for WLR

Compact chamber for saving N2 consumption

PEM300

Easy wafer load / unload Chuck stage

comes out from chamber.

All operations can be made in front of

operator safely and alignment as well.

Mounting CCD camera with smooth

movement and monitor. CCD travel

range: X.Y 300mm

Heat resistance glass enables

clear alignment by preventing

heat-shimmering generated

from heating,

Integrating APW probe card makes the best WLR solution!

For 300mm full wafer For 200 mm full wafer For 1 Chip measurement


For R & D of Organic electronic device, MEMS and Material

Vacuum Prober Specialized for probe card use to measure multiple pads

Compact design

D310*W320*H180mm, WT 8Kg only!

� Multiple of pads can be measured by probe card

� Vacuum :10-5

toll

� Connector panel depended on requirements

� Low current measurement available

Vacuum Prober Vacuum Prober

Mini prober PM20

For vacuum chamber

Easy chip level measurement

For organic electronic device and MEMS sensors

PM20 can be used in vacuum chamber or in oven

Small design (Dia.80mm*H80mm) only!!

Vacuum chamber or Oven

IN

� Multiple pads can be measured by probe card

� Contact 100um pad is available



� With XYZ (+-2.5mm) and 360 deg.Theta stage

Mini prober PM20

PEL-S1 Simple box type prober for N2 purge

Low cost solution for IV/CV measurement

fA level measurement is available by connecting

Parameter analyzer and LCR meter easily at low

cost

� N2 gas environment is the shielding box is available



� Incorporating anti vibration table is available


Hot Chuck System

Hot Chuck system

Stable data acquired for low current,

low resistance and low capacitance

measurement at high temperature.

Features

・Chuck stage:4 to 12” wafer size

・Accurate temperature control

・Simple configuration and compact system

because chiller is not used.

・Capable of small current measurement.

Thermo chuck system

Chiller cooling type

For high temp. environment requirement from RT to 400deg.C

Controlling from -55deg. C up to +300deg.C

Features

・Chuck stage: 4 to 12” wafer size

・Wide operating temp. by employing both

chiller and heater

・Capable of small current measurement

Thermo chuck system

Peltier module type Controlling from -40deg. C up to +125deg.C

Features

・Chuck stage: 4 to 12” wafer size

・Wide operating temp. by employing both

chiller and heater

・Capable of small current measurement

Material, color and coating of respective wafer chucks will be

decided by material of samples, multi-site or single chip test

and high voltage measurement or normal impressed voltage.

Start Set Time Over shoot Under shoot Set Temp. Time Chiller

20 C 50 C 1’10” 2.0 C 0.2 C 20 C 1’20” 5.0 C

20 C 100 C 5’45” 0.5 C 0.1 C 20 C 3’05” -2.0 C

20 C 0 C 1’25 2.6 C 0.2 C 20 C 0.58” -6.0 C

20 C -20 C 3’28” 1.9 C 0.2 C 20 C 1’12” -7.0 C


Probe Cards

Supporting Advanced Wafer Level Test

RF probe card Up to 6GHz

DC Multi Contact Probe

*Free pad location is available.

(No need to be traditional alignment of GSG

or SGS with certain pitch)

*Pitch : Min. 100um

*Pin count: max.20pins

*Probe type: Ceramic blade

*Probe tip material : BeCu, WRe and PD

*Special request is welcomed

Ex. Make a circuit on the strip line.

Connecting ferrite to restrain oscillation.

For parametric test

*Stable measurement date at extreme temp.

*100~200C by using ceramic blade

*Option: Ultra low leakage 10fA

*Max. pin count of 48Pin

( depends on pad layout)

*For more stable measurement, WRe needle

can be used.

For parametric test Covering 300mm full wafer

Because of using ceramic PCB which

has almost the same expansion factor

as silicon makes accurate probing

extensively without misalign in high

temp. Allowing pad pitch of 100um

and pad size of 70 x 70um.

Test temp.350deg.C available


Option

High linearity & wide strokes High linearity & compact Low cost / High performance

For EMC & light shielding

Customizing to match existed probe station is available

Choices of accessories to enhance your measurement

Model: M 20 ( R ) or ( L )

*Fixation: Magnetic rubber base

*Stroke: X,Y,Z +-5mm

*Accuracy: 30um

*Movement: 0.5mm/REV

*Exclude Micrometer

Model: M 30 ( R ) or ( L )

*Fixation: Magnetic base

*Stroke: X,Y,Z +-3.2mm

*Linearity: 1um


*Resolution: 10um

Model: M 40 ( R ) or ( L )

*Fixation: Magnetic base

(with ON/ OFF lever)

*Stroke: X,Y,Z +-6.5mm

*Linearity: 1um


*Resolution: 10um

Model: M60

*Fixation: Magnet base or Screw type

*Stroke: XYZ+-6.5mm,Theta 360deg

*Linearity: 3um


*Resolution: 10um

Compatible with major RF probe head

maker’s

Ensure RF probe contact For small current/ Capacitance /RF measurement

Coaxial probe

Connector: SMA

Probe tip dia. 5 to 40um

1set=10pcs

Kelvin coaxial probe

Connector: SSMC

Probe tip dia.:

1 to 40um

Triaxial probe

Connector: Triaxial

Probe tip dia.;

5 to 40um

For DC measurement

L-arm (2types)

Isolated type or

Conductive type

To be used with tungsten probe

Tungsten probe

Probe tip diameter

And probe material

Can be designated

By customer

Shielding

BOX

Standard size:

750*750*1000

mm

Customizing is

Anti-vibration

Table type or Desktop type

For small chip hold chip chuck

Vacuuming small chip

size 200um is available.

In-circuit board holder

Very easy to replace

with wafer chuck


Table : Compatibility of peripheral items to alpha series prober

*1 For operating temperature range +-20deg.C <

*2 Adaptor for positoner is necessary


J-P-J, J-J-J

TXA (J) – TXA (J)

TXA (P) - BNC (J)

TXA (J) – BNC (P)Straight type

Coaxial adaptor (TRIAX.) Remarks

3m

2m

1 to 3m

1m

<1m

Item Cable lengths

3 to 5m

Up to 3m

New_TXA_Cable

Leak-Time @RT

-3.00E-14

-2.00E-14

-1.00E-14

0.00E+00

1.00E-14

2.00E-14

3.00E-14

0 10 20 30 40 50 60 70

Time[Sec]

Leak[A]

New 0V

New 100V

New -100V

電圧依存性 New_TXA_Cable

Leak-Time @RT

-5.00E-14

-4.00E-14

-3.00E-14

-2.00E-14

-1.00E-14

0.00E+00

1.00E-14

2.00E-14

3.00E-14

4.00E-14

5.00E-14

0 10 20 30 40 50 60 70

Time[Sec]

Leak[A]

振動有り 0V

振動無し 0V

振動の影響確認

J-P-J

Triax. Cable (External dia. 5mm)

TXA (P)-TXA (P)

Guaranteed leak level: <50fA at 10V

Triax. Cable Special thin line

External dia. 2.8mm, heat-resisting up to 200deg.CTXA(P) –TXA (P) Guaranteed leak level : <50fA at 10V

Low noise triaxial cable

Equivalent ability to tester maker’s products

External diameter: 3.3mmTXA(P)-TXA(P) Guaranteed leak level : <10fA at 10V

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Outer floating

Outer floating

Inner floating

Straight type

Inner floating

Triaxial (T) type adaptor

SMA (T) type adaptor Au plating

�Lead time: please ask APW

�Changing cable length or assembly method is available

�All triax. connectors are 3 Lug type

�“J “ means Jack and “P” for Plug

�Guarantee leakage is limited to both side triaxial only

Triaxial cable and connector assemblies

Optimum for low noise and low leak measurement

Leakage is guaranteed

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Apollowave Corporation Company profile & Product information