1
PATENTS GRANTED In the Metal Finishing Field Printed copies of patents are furnished by the Patent and Trademark Office for $3.00 each. Address orders to: Commissioner of Patents and Trademarks, Washington, DC. 20231. Sputtering Apparatus US. Patent 5,571,393. Nov. 5, 1996 CL. Jay/or and UT: Crowley assignors to Viratec Thin Films Inc., Farihaulf, Minn. A magnet housing for a sputtering cathode. Chromium Recovery Process U.S. Patent 5,571,469. Nov. 5, 1996 TM. Holsen et a/., assignors to fflinois fnstitute of Technology, Chicago A process for recovery of chmmium in an aqueous solution comprising teacting hexava- lent chromium with a reactant capable of con- verting the hexavalent chromium to chromyl chloride; separating the chmmyl chloride from aqueous solution; hydrolyzing the chromyl chloride to form a hydrolyzed solution compris- ing chromic acid and hydrochloric acid; and then tteating the hydrolyzed solution to form chromic acid, an alkali chromate salt, or an insoluble chromate salt. UV-Curable Composition U.S. Patent 5,571,570. Nov. 5, 1996 R. T: Lake, assignor to Red Spot Paint and Varnish Co. Inc., Evansville, fnd. A method for forming a coating on an article, comprising applying an ultraviolet curable coating composition including 35- 65% by weight of a frost acrylated aliphatic urethane; about 525% of a second acrylated aliphatic urethane; lO--55% of a third acrylate having multiple acrylate functionalities; and a photopolymerization initiator or sensitizer; and irradiating and thereby curing the applied composition with ultraviolet light. Tank for Powder Coating Equipment U.S. Patent 5,573,149. Nov. 12, 1996 E. Saifo, assignor to Ransburg lndusfrial finishing K.K., Tokyo Powder coating equipment comprising a tank for storing powder particles, which has a substantially cylindrical side wall, a bottom portion, and an axis. Paint Sprayer U.S. Patent 5573,371. Nov. 12, 1996 J. W. Kieffer, assignor to Wagner Spray Tech Corp., Minneapolis A quieted air compressor comprising a pressurizing enclosure defining an air com- pression chamber and having a primary air intake port and a primary air discharge port. Coated Sliding Material U.S. Patent 5,573,390. Nov. 12, 1996 K. Jakeuchi et al, assignors to Surfec Kariya Co. Ltd. and Jaiho Kogyo Co. Ltd., both of Aichi, Japan A vane of a compressor comprising a coated sliding material wherein the coated sliding material comprises an aluminum alloy, an electroless nickel-phosphorus plating coating having a thickness from 0.5-50 mm provided on the surface thereof, and an electroless nickel-boron plating coating provided on the nickel- phosphorus plating coating. Abrasive Blasting Device U.S. Patent 5,573,450. Nov. 72, 1996 1. Markocic and A. Gerbec, Dobrovo, Sfovenia An abrasive blasting device comprising means for throwing abrasive material gen- erally radially outwardly relative to a lon- gitudinal axis of the device to a surface of a workpiece. Abrasive Media for Barrel Finishing U.S. Patent 5,573,560. Nov. 12, 1996 H. Kobayashi and H. Murase, assignors to Tipton Corp., Aichi, Japan An abrasive media for use in a barrel finishing process, consisting essentially of 20-90% by weight of synthetic resins se- lected from the group consisting of polyes- ter resins, epoxy resins, aramid resins, and polycarbonate resins, and combinations thereof; O.l-10% of a compound compris- ing at least a surfactant and a material selected from the group consisting of anti- corrosives, chelating agents, and detergent builders, and combinations thereof; and lO-80% of an abrasive selected from the group consisting of alumina, silica, and silicon carbide, and combinations thereof; wherein the synthetic resin, compound, and abrasive are formed into a shape. Abrasive Wheel U.S. Patent 5,573,561. Nov. 12, 1996 D.A. Sheldon et at., assignors to Norton Co., Worcester, Mass. An abrasive grinding wheel with im- proved comer holding, comprising sol-gel alumina abrasive and a vitreous bond wherein the vitreous bond after ftig com- prises greater than 47% SO,, less than 16% A1203, 0.5 to 2.5% K,O, 7 to 11% N+O, 2.0 to 10.0% L&O, and 9 to 16% B,O,. Process for Producing Building Materials from Paint Sludge U.S. Patent5,573,587. Nov. 12, 1996 D.M. St. Louis, assignor to Haden Schweitzer Corp., Madison Heights, Mich. A process for treating paint sludge con- taining water and paint solids to produce building materials containing lime. Coated Abrasive Belt US. Pafenf5,573,619. Nov. 12, 1996 H. W. Benedict et al, assignors to 3M Co., St. Paul, Minn. A method for preparing a coated abrasive belt having an endless, seamless backing. Apparatus for Monitoring an Etching Process US. Patent 5,573,623. Nov. 12, 1996 S.G. Barhee et al, assignors to IBM Corp., Armonk, N. Y A contactless in-situ chemical etch mon- itor for providing an indication of a pre- scribed condition of an etching process during etching of a workpiece with a wet chemical etchant. Chemical Etch Monitor U.S. Patent 5,573,624. Nov. 72, 1996 S.G. Barbee et a/., assignors to IBM Corp., Armonk, N.Y. A contactless real-time in-situ chemical etch monitor for providing an indication of a particular condition of an etching process during etching. Apparatus for Continuously Dissolving Nickel Metal Powder U.S. Patent 5,573,652. Nov. 72, 1996 S. Kiyama et al, assignors to Kawasaki Steel Corp., Hyogo, Japan An apparatus for continuously dissolv- ing nickel metal powder for use in plating, comprising a dissolving tank for dissolving METAL FINISHING . AUGUST 1997 81

Apparatus for monitoring an etching process

  • Upload
    dokhanh

  • View
    214

  • Download
    0

Embed Size (px)

Citation preview

Page 1: Apparatus for monitoring an etching process

PATENTS GRANTED In the Metal Finishing Field Printed copies of patents are furnished by the Patent and Trademark Office for $3.00 each. Address orders to: Commissioner of Patents and Trademarks, Washington, DC. 20231.

Sputtering Apparatus US. Patent 5,571,393. Nov. 5, 1996 CL. Jay/or and UT: Crowley assignors to Viratec Thin Films Inc., Farihaulf, Minn.

A magnet housing for a sputtering cathode.

Chromium Recovery Process U.S. Patent 5,571,469. Nov. 5, 1996 TM. Holsen et a/., assignors to fflinois fnstitute of Technology, Chicago

A process for recovery of chmmium in an aqueous solution comprising teacting hexava- lent chromium with a reactant capable of con- verting the hexavalent chromium to chromyl chloride; separating the chmmyl chloride from aqueous solution; hydrolyzing the chromyl chloride to form a hydrolyzed solution compris- ing chromic acid and hydrochloric acid; and then tteating the hydrolyzed solution to form chromic acid, an alkali chromate salt, or an insoluble chromate salt.

UV-Curable Composition U.S. Patent 5,571,570. Nov. 5, 1996 R. T: Lake, assignor to Red Spot Paint and Varnish Co. Inc., Evansville, fnd.

A method for forming a coating on an article, comprising applying an ultraviolet curable coating composition including 35- 65% by weight of a frost acrylated aliphatic urethane; about 525% of a second acrylated aliphatic urethane; lO--55% of a third acrylate having multiple acrylate functionalities; and a photopolymerization initiator or sensitizer; and irradiating and thereby curing the applied composition with ultraviolet light.

Tank for Powder Coating Equipment U.S. Patent 5,573,149. Nov. 12, 1996 E. Saifo, assignor to Ransburg lndusfrial finishing K.K., Tokyo

Powder coating equipment comprising a tank for storing powder particles, which has a substantially cylindrical side wall, a bottom portion, and an axis.

Paint Sprayer U.S. Patent 5573,371. Nov. 12, 1996 J. W. Kieffer, assignor to Wagner Spray Tech Corp., Minneapolis

A quieted air compressor comprising a pressurizing enclosure defining an air com-

pression chamber and having a primary air intake port and a primary air discharge port.

Coated Sliding Material U.S. Patent 5,573,390. Nov. 12, 1996 K. Jakeuchi et al, assignors to Surfec Kariya Co. Ltd. and Jaiho Kogyo Co. Ltd., both of Aichi, Japan

A vane of a compressor comprising a coated sliding material wherein the coated sliding material comprises an aluminum alloy, an electroless nickel-phosphorus plating coating having a thickness from 0.5-50 mm provided on the surface thereof, and an electroless nickel-boron plating coating provided on the nickel- phosphorus plating coating.

Abrasive Blasting Device U.S. Patent 5,573,450. Nov. 72, 1996 1. Markocic and A. Gerbec, Dobrovo, Sfovenia

An abrasive blasting device comprising means for throwing abrasive material gen- erally radially outwardly relative to a lon- gitudinal axis of the device to a surface of a workpiece.

Abrasive Media for Barrel Finishing U.S. Patent 5,573,560. Nov. 12, 1996 H. Kobayashi and H. Murase, assignors to Tipton Corp., Aichi, Japan

An abrasive media for use in a barrel finishing process, consisting essentially of 20-90% by weight of synthetic resins se- lected from the group consisting of polyes- ter resins, epoxy resins, aramid resins, and polycarbonate resins, and combinations thereof; O.l-10% of a compound compris- ing at least a surfactant and a material selected from the group consisting of anti- corrosives, chelating agents, and detergent builders, and combinations thereof; and lO-80% of an abrasive selected from the group consisting of alumina, silica, and silicon carbide, and combinations thereof; wherein the synthetic resin, compound, and abrasive are formed into a shape.

Abrasive Wheel U.S. Patent 5,573,561. Nov. 12, 1996 D.A. Sheldon et at., assignors to Norton Co., Worcester, Mass.

An abrasive grinding wheel with im- proved comer holding, comprising sol-gel alumina abrasive and a vitreous bond wherein the vitreous bond after ftig com- prises greater than 47% SO,, less than 16% A1203, 0.5 to 2.5% K,O, 7 to 11% N+O, 2.0 to 10.0% L&O, and 9 to 16% B,O,.

Process for Producing Building Materials from Paint Sludge U.S. Patent5,573,587. Nov. 12, 1996 D.M. St. Louis, assignor to Haden Schweitzer Corp., Madison Heights, Mich.

A process for treating paint sludge con- taining water and paint solids to produce building materials containing lime.

Coated Abrasive Belt US. Pafenf5,573,619. Nov. 12, 1996 H. W. Benedict et al, assignors to 3M Co., St. Paul, Minn.

A method for preparing a coated abrasive belt having an endless, seamless backing.

Apparatus for Monitoring an Etching Process US. Patent 5,573,623. Nov. 12, 1996 S.G. Barhee et al, assignors to IBM Corp., Armonk, N. Y

A contactless in-situ chemical etch mon- itor for providing an indication of a pre- scribed condition of an etching process during etching of a workpiece with a wet chemical etchant.

Chemical Etch Monitor U.S. Patent 5,573,624. Nov. 72, 1996 S.G. Barbee et a/., assignors to IBM Corp., Armonk, N.Y.

A contactless real-time in-situ chemical etch monitor for providing an indication of a particular condition of an etching process during etching.

Apparatus for Continuously Dissolving Nickel Metal Powder U.S. Patent 5,573,652. Nov. 72, 1996 S. Kiyama et al, assignors to Kawasaki Steel Corp., Hyogo, Japan

An apparatus for continuously dissolv- ing nickel metal powder for use in plating, comprising a dissolving tank for dissolving

METAL FINISHING . AUGUST 1997 81