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MATERIALS ENGINEERING 2015 © The Authors, some rights reserved; exclusive licensee American Association for the Advancement of Science. Distributed under a Creative Commons Attribution NonCommercial License 4.0 (CC BY-NC). 10.1126/sciadv.1500094 Atomically thin layers of BNCO with tunable composition Birol Ozturk, 1,2,3 Andres de-Luna-Bugallo, 1,4 Eugen Panaitescu, 1 Ann N. Chiaramonti, 5 Fangze Liu, 1 Anthony Vargas, 1 Xueping Jiang, 6 Neerav Kharche, 7 Ozgur Yavuzcetin, 8 Majed Alnaji, 9 Matthew J. Ford, 10 Jay Lok, 11 Yongyi Zhao, 1 Nicholas King, 1 Nibir K. Dhar, 12 Madan Dubey, 13 Saroj K. Nayak, 14 Srinivas Sridhar, 1,2 Swastik Kar 1,15 * In recent times, atomically thin alloys of boron, nitrogen, and carbon have generated significant excitement as a composition-tunable two-dimensional (2D) material that demonstrates rich physics as well as application potentials. The possibility of tunably incorporating oxygen, a group VI element, into the honeycomb sp 2 -type 2D-BNC lattice is an intriguing idea from both fundamental and applied perspectives. We present the first report on an atomically thin quaternary alloy of boron, nitrogen, carbon, and oxygen (2D-BNCO). Our experiments suggest, and density functional theory (DFT) calculations corroborate, stable configurations of a honeycomb 2D-BNCO lattice. We ob- serve micrometer-scale 2D-BNCO domains within a graphene-rich 2D-BNC matrix, and are able to control the area coverage and relative composition of these domains by varying the oxygen content in the growth setup. Macro- scopic samples comprising 2D-BNCO domains in a graphene-rich 2D-BNC matrix show graphene-like gate-modulated electronic transport with mobility exceeding 500 cm 2 V -1 s -1 , and Arrhenius-like activated temperature dependence. Spin-polarized DFT calculations for nanoscale 2D-BNCO patches predict magnetic ground states orig- inating from the B atoms closest to the O atoms and sizable (0.6 eV < E g < 0.8 eV) band gaps in their density of states. These results suggest that 2D-BNCO with novel electronic and magnetic properties have great potential for nanoelectronics and spintronic applications in an atomically thin platform. INTRODUCTION Alloy formation is a powerful technology, one that has enabled a va- riety of semiconductors to be used in an array of tunable optics and electronics (1, 2). In recent times, atomically thin two-dimensional (2D) semiconductors have become extremely important for both funda- mental science and technology owing to their unique electronic, op- tical, and mechanical properties (39). Hence, the possibility of alloy formation in 2D materials is a topic of significant interest because composition-tunable 2D materials are expected to show a rich variety of tunable electronic, optical, and magnetic properties in an atomically thin layer. So far, the most promising approach for developing composition-tunable 2D materials has been chemical vapor deposition (CVD) synthesis of hybrid domains of boron, nitrogen, and carbon in an atomically thin plane (1016). This BNC system allows the substi- tution of C atoms of graphene by B, N, and/or hexagonal BN (h-BN), and enables the growth of atomically thin alloys with band gaps ranging from 0 eV (graphene) to 5.2 eV (h-BN). In all relevant reports, the possible role of oxygen, whose presence in small quantities is inevitable in CVD chambers, has not received any attention (11, 17, 18). Oxygen has been proposed to cause C-species oxidation and, hence, etching of carbon (19). In the context of BNC growth, this is significant, because in a recent report, Liu et al. have shown that any etched edge of graphene can, in principle, be a template for 2D heteroepitaxial growth (that is, growth from a 1D edge) of h-BN species (13). Because oxygen is always present during the synthesis of graphene, either as an adsorbed impurity on Cu substrates (18) or in the surrounding gaseous environment, the question arises whether simul- taneous growth of BN species in graphene can be influenced by con- trolling the oxygen content in the CVD chamber. Moreover, Krivanek et al. have shown, using annular dark-field electron microscopy, that oxygen can enter the BNC honeycomb lattice by forming in-plane covalent bonds with B and C (20). It is rather remarkable that oxygen, a group VI element, can enter the hexagonal sp 2 -type lattice of graphene and h-BN. Hence, it is also a matter of immense fundamental interest whether oxygen can be controllably introduced into the BNC system and whether an atomically thin quaternary material, that is, BNCO, can be stably synthesized with tunable composition. Here, we show that B, N, C, and O atoms can indeed form a single-atomic-layer, graphene- like honeycomb lattice (which we call 2D-BNCO), resulting in the first demonstration of a purely 2D quaternary alloy. RESULTS AND DISCUSSION BNCO samples were fabricated on Cu foils in a low-pressure CVD sys- tem (see Materials and Methods) with CH 4 as the carbon source and powdered NH 3 BH 3 as the common source for B and N. To analyze the effect of oxygen content, we synthesized a set of eight samples by introducing Ar/O 2 (O 2 mole fraction of 10 3 ) into the CVD chamber 1 Department of Physics, Northeastern University, Boston, MA 02115, USA. 2 Electronic Ma- terials Research Institute, Northeastern University, Boston, MA 02115, USA. 3 Department of Physics and Engineering Physics, Morgan State University, Baltimore, MD 21251, USA. 4 Cinvestav Unidad Querétaro, Querétaro, Qro. 76230, Mexico. 5 National Institute of Standards and Technology, Boulder, CO 80305, USA. 6 Department of Physics, Applied Physics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180, USA. 7 Chemistry Department, Brookhaven National Laboratory, Upton, NY 11973, USA. 8 Department of Physics, University of WisconsinWhitewater, Whitewater, WI 53190, USA. 9 Department of Mechanical and Industrial Engineering, Northeastern University, Boston, MA 02115, USA. 10 Department of Chemical Engineering, Northeastern University, Boston, MA 02115, USA. 11 College of Computer and Information Science, Northeastern University, Boston, MA 02115, USA. 12 Night Visions Electronic Sensors Directorate, Fort Belvoir, VA 22060, USA. 13 Sensors and Electron Devices Directorate, U.S. Army Research Laboratory, Adelphi, MD 20783, USA. 14 School of Basic Sciences, Indian Institute of Technology Bhubaneswar, Odisha 751013, India. 15 George J. Kostas Research Institute for Homeland Security, Northeastern University, Burlington, MA 01803, USA. *Corresponding author. E-mail: [email protected] RESEARCH ARTICLE Ozturk et al. Sci. Adv. 2015;1:e1500094 31 July 2015 1 of 8 on January 21, 2020 http://advances.sciencemag.org/ Downloaded from

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Page 1: Atomically thin layers of B N C O with tunable compositionand 60% by changing the oxygen content during CVD growth (see the Supplementary Materials for measurement details). Figure

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MATER IALS ENG INEER ING

1Department of Physics, Northeastern University, Boston, MA 02115, USA. 2Electronic Ma-terials Research Institute, Northeastern University, Boston, MA 02115, USA. 3Departmentof Physics and Engineering Physics, Morgan State University, Baltimore, MD 21251, USA.4Cinvestav Unidad Querétaro, Querétaro, Qro. 76230, Mexico. 5National Institute ofStandards and Technology, Boulder, CO 80305, USA. 6Department of Physics, AppliedPhysics, and Astronomy, Rensselaer Polytechnic Institute, Troy, NY 12180, USA. 7ChemistryDepartment, Brookhaven National Laboratory, Upton, NY 11973, USA. 8Department of Physics,University of Wisconsin–Whitewater, Whitewater, WI 53190, USA. 9Department of Mechanicaland Industrial Engineering, Northeastern University, Boston, MA 02115, USA. 10Department ofChemical Engineering, Northeastern University, Boston, MA 02115, USA. 11College of Computerand Information Science, Northeastern University, Boston, MA 02115, USA. 12Night VisionsElectronic Sensors Directorate, Fort Belvoir, VA 22060, USA. 13Sensors and Electron DevicesDirectorate, U.S. Army Research Laboratory, Adelphi, MD 20783, USA. 14School of Basic Sciences,Indian Institute of Technology Bhubaneswar, Odisha 751013, India. 15George J. Kostas ResearchInstitute for Homeland Security, Northeastern University, Burlington, MA 01803, USA.*Corresponding author. E-mail: [email protected]

Ozturk et al. Sci. Adv. 2015;1:e1500094 31 July 2015

2015 © The Authors, some rights reserved;

exclusive licensee American Association for

the Advancement of Science. Distributed

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NonCommercial License 4.0 (CC BY-NC).

10.1126/sciadv.1500094

Atomically thin layers of B–N–C–O withtunable composition

Birol Ozturk,1,2,3 Andres de-Luna-Bugallo,1,4 Eugen Panaitescu,1 Ann N. Chiaramonti,5

Fangze Liu,1 Anthony Vargas,1 Xueping Jiang,6 Neerav Kharche,7 Ozgur Yavuzcetin,8

Majed Alnaji,9 Matthew J. Ford,10 Jay Lok,11 Yongyi Zhao,1 Nicholas King,1 Nibir K. Dhar,12

Madan Dubey,13 Saroj K. Nayak,14 Srinivas Sridhar,1,2 Swastik Kar1,15*

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In recent times, atomically thin alloys of boron, nitrogen, and carbon have generated significant excitement as acomposition-tunable two-dimensional (2D) material that demonstrates rich physics as well as application potentials.The possibility of tunably incorporating oxygen, a group VI element, into the honeycomb sp2-type 2D-BNC lattice isan intriguing idea from both fundamental and applied perspectives. We present the first report on an atomicallythin quaternary alloy of boron, nitrogen, carbon, and oxygen (2D-BNCO). Our experiments suggest, and densityfunctional theory (DFT) calculations corroborate, stable configurations of a honeycomb 2D-BNCO lattice. We ob-serve micrometer-scale 2D-BNCO domains within a graphene-rich 2D-BNC matrix, and are able to control the areacoverage and relative composition of these domains by varying the oxygen content in the growth setup. Macro-scopic samples comprising 2D-BNCO domains in a graphene-rich 2D-BNC matrix show graphene-like gate-modulatedelectronic transport with mobility exceeding 500 cm2 V−1 s−1, and Arrhenius-like activated temperaturedependence. Spin-polarized DFT calculations for nanoscale 2D-BNCO patches predict magnetic ground states orig-inating from the B atoms closest to the O atoms and sizable (0.6 eV < Eg < 0.8 eV) band gaps in their density ofstates. These results suggest that 2D-BNCO with novel electronic and magnetic properties have great potential fornanoelectronics and spintronic applications in an atomically thin platform.

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INTRODUCTION

Alloy formation is a powerful technology, one that has enabled a va-riety of semiconductors to be used in an array of tunable optics andelectronics (1, 2). In recent times, atomically thin two-dimensional(2D) semiconductors have become extremely important for both funda-mental science and technology owing to their unique electronic, op-tical, and mechanical properties (3–9). Hence, the possibility of alloyformation in 2D materials is a topic of significant interest becausecomposition-tunable 2D materials are expected to show a rich varietyof tunable electronic, optical, and magnetic properties in an atomicallythin layer. So far, the most promising approach for developingcomposition-tunable 2D materials has been chemical vapor deposition(CVD) synthesis of hybrid domains of boron, nitrogen, and carbon inan atomically thin plane (10–16). This B–N–C system allows the substi-tution of C atoms of graphene by B, N, and/or hexagonal BN (h-BN),and enables the growth of atomically thin alloys with band gaps rangingfrom 0 eV (graphene) to 5.2 eV (h-BN).

In all relevant reports, the possible role of oxygen, whose presencein small quantities is inevitable in CVD chambers, has not received anyattention (11, 17, 18). Oxygen has been proposed to cause C-speciesoxidation and, hence, etching of carbon (19). In the context of BNCgrowth, this is significant, because in a recent report, Liu et al. have shownthat any etched edge of graphene can, in principle, be a template for2D heteroepitaxial growth (that is, growth from a 1D edge) of h-BNspecies (13). Because oxygen is always present during the synthesis ofgraphene, either as an adsorbed impurity on Cu substrates (18) or inthe surrounding gaseous environment, the question arises whether simul-taneous growth of BN species in graphene can be influenced by con-trolling the oxygen content in the CVD chamber. Moreover, Krivanek et al.have shown, using annular dark-field electron microscopy, that oxygencan enter the BNC honeycomb lattice by forming in-plane covalentbonds with B and C (20). It is rather remarkable that oxygen, agroup VI element, can enter the hexagonal sp2-type lattice of grapheneand h-BN. Hence, it is also a matter of immense fundamental interestwhether oxygen can be controllably introduced into the BNC systemand whether an atomically thin quaternary material, that is, BNCO, canbe stably synthesized with tunable composition. Here, we show that B,N, C, and O atoms can indeed form a single-atomic-layer, graphene-like honeycomb lattice (which we call 2D-BNCO), resulting in the firstdemonstration of a purely 2D quaternary alloy.

RESULTS AND DISCUSSION

BNCO samples were fabricated on Cu foils in a low-pressure CVD sys-tem (see Materials and Methods) with CH4 as the carbon source andpowdered NH3BH3 as the common source for B and N. To analyzethe effect of oxygen content, we synthesized a set of eight samples byintroducing Ar/O2 (O2 mole fraction of 10−3) into the CVD chamber

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and varying its flow rate. These samples, synthesized using flow ratesof 0, 2, 4…14 standard cm3/min (sccm), were correspondingly labeledBNCO-0, BNCO-2…BNCO-14. For samples synthesized using flowrates between 0 and 8 sccm, we found reproducible results and sys-tematic correlations between various investigated material properties.Beyond a flow rate of 8 sccm, the system became unstable, with fluc-tuating and irreproducible results, most possibly due to the uncontrolledoxidation of the samples. Figure 1A shows a transmission electron mi-croscopy (TEM) image of a typical sample, which was found to bemostly monolayer and bilayer in nature. Figure 1B shows typicalselected-area electron diffraction (SAED) patterns from various locations,revealing the ubiquitous sixfold honeycomb symmetry of the crystallattice. Analysis of SAED results suggests the presence of monolayer,possible Bernal-stacked bilayer, and some turbostratic bilayer regions, asexemplified in the four diffraction patterns shown. SAED analysis of mono-layer samples reveals a nearest-neighbor lattice separation of 0.21 nm.From these, we conclude that the samples are atomically thin (mostlymono- or bilayered), with a graphene-like honeycomb lattice structure.

Although the structure appears to be highly homogeneous in theTEM images, closer inspection of the samples using scanning electronmicroscopy (SEM) provides a clear indication of the presence of twodistinct phases, characterized by contrast between brighter and darkerregions, as seen in the two samples shown in Fig. 1 (C and D), whichwere synthesized under different growth conditions (see the Supplemen-

Ozturk et al. Sci. Adv. 2015;1:e1500094 31 July 2015

tary Materials). For convenience, we term the brighter regions “domains,”because they are compositionally different from the surrounding matrixand have several interesting properties. First, the sharp visual contrastbetween the domains and the surrounding regions (matrix) is onlyvisible when the SEM images are collected from samples on Cu sub-strates. Upon being transferred to insulating surfaces such as SiO2, thecontrast difference completely vanishes. This observation, along withthe homogeneous nature of the TEM image in Fig. 1A and similar SAEDdiffraction patterns obtained everywhere in the samples, suggests thatthe two regions, the “bright” domains and the “dark”matrix, have differ-ing electrical conductivities but are structurally similar.

Second, when sufficiently isolated from each other, the domainsappear to have very well defined shapes, mostly six-sided and with sharp,angular edges as seen in Fig. 1D. Liu et al. demonstrated the growth ofh-BN domains from the graphene edges in a two-step process (13). Inour “single-step” process, we observed domain geometry and sizes thatlook strikingly similar to those of Liu et al., although as shown later,in our case, the chemical composition of the domains is different. Webelieve that introduction of oxygen during the synthesis process collapsesthe two-step process of Liu et al. into a single step either by slowingdown or terminating the growth, or by etching away carbon-rich regionsand introducing a richer combination of 2D-BNCO in their place.

Third, the relative coverage of these domains over the entiremillimeter-scale sample could be systematically controlled between 0

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Fig. 1. Atomically thin 2D-BNCO sheets. (A) A bright-field TEM image of a typical BNCO sample transferred onto a lacey carbon-coated TEM grid.(B) Typical SAED pattern from various locations demonstrating honeycomb-like lattice structure in monolayer or rotated bilayer forms. (C and D) SEM

images of a BNCO sample as grown on Cu substrate. The samples shown here were grown with different oxygen flow rates in the CVD chamber. See theSupplementary Materials, section S1, for details of sample synthesis. (E) Percent surface coverage of domains and graphitic areas as extracted from theanalysis of SEM images, as a function of O2 flow rate into the chamber. (F) Typical XPS survey scan from BNCO-12 sample. The B1s and N1s peaks (regionsmarked by arrows) are only visible in high-resolution detailed scans (see the Supplementary Materials, section S4). (G) Relative occurrence of oxygenatoms as a function of the fractional coverage of the samples by domains, providing direct evidence of the presence of oxygen in the domain areas.

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and 60% by changing the oxygen content during CVD growth (see theSupplementary Materials for measurement details). Figure 1E showsthe percentage coverage of domains as progressively more oxygen isintroduced into the CVD chamber. Starting from a near-complete ab-sence of the domains at 0 sccm Ar/O2, there is a clear overall increasein the surface coverage of the domains, although the dependence isnonmonotonic.

Figure 1F shows an x-ray photoelectron spectroscopy (XPS) surveyscan performed on a typical sample (BNCO-12). Peaks correspondingto C1s and O1s are immediately visible in the survey, whereas weakpeaks corresponding to B1s andN1s are found only in high-resolutionscans of the regions indicated with red arrows (see the SupplementaryMaterials). In all samples between 0 and 8 sccm, the B1s peaks weretoo weak for any quantitative analysis, and the presence of B was con-firmed through analysis of the N peak and Raman spectroscopy. Be-cause the XPS beam size is much larger (400 mm) than the domains,it was not possible to obtain XPS for individual domains (that is, theXPS survey scan contains contributions from both domain and matrix

Ozturk et al. Sci. Adv. 2015;1:e1500094 31 July 2015

regions). Hence, the question arises: What fraction of each observedelement originates from the domains? To address this question, inFig. 1G, the relative concentrations of oxygen atoms and carbon atomsare plotted against fractional domain coverage (for the set of samplesthat were examined in this study).We see a clear correlation betweenthe domain coverage and the relative concentration of oxygen atoms,and especially at higher surface coverage of domains, the relation isnearly linear. This correlation implies that the XPS-observed oxygen ispresent predominantly in the domains. Detailed peak analysis (see theSupplementary Materials) shows that the oxygen atoms are bondedwith B, N, andC atoms, andwe next present some of the salient featuresof the chemical bonding of the oxygen and other atoms in the system.

Figure 2 (A and B) shows examples of typical high-resolution XPSscans of the O1s and C1s spectra, each fitted to several identifiablepeaks representing known chemical shifts. In the O1s spectrum, themost significant contribution came from a peak at 532 eV identifiedwith O–C bonds (21). A red-shifted O–N peak at 530.7 eV (22) and ablue-shifted O–B (23) peak were also identified in all samples. A very

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525 530 535

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Fig. 2. Chemical composition and structure of the 2D-BNCO samples through XPS studies. (A) Typical high-resolution O1s XPS spectrum. Theoxygen atoms were mostly found to attach with N-, B-, and C-based moieties that could include B and N (see text). Direct bond formation with Cu

(the growth substrate) was almost negligible in all samples. a.u., arbitrary unit. (B) Typical high-resolution C1s spectrum, which could be resolved intoa number of peaks associated with known bonds –sp2 (graphene-like) carbon, as well as bonds with B, N, and O entities. (C and D) Specific bonds whoserelative occurrences were found to (C) grow or (D) decrease/remain negligible as the oxygen flow rate was increased during CVD growth of samples.Specifically, some of the flow rate dependences seen in (C) appear to have a reasonable similarity to the flow rate dependence of domain area coverageas shown in Fig. 1E, implying that these bonds were instrumental in the formation of these domains. Similarly, the bonds that decreased or remainednegligibly low as seen in (D) could be less associated with the 2D-BNCO domains.

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small contribution to the overall oxygen content comes from the Cusurface oxide (24), as indicated by the nearly negligible size of theO–Cu peak. The above observations imply that the O atoms are pri-marily attached to the B, N, and C atoms in the sample and not to thesubstrate. The C1s spectrum can be decomposed into several knownpeaks as seen in Fig. 2B. In addition to a peak due to the graphitic C–Cbonds and a defect-induced peak (25–27), the C atoms were found tobe attached to oxygen (11, 25), to nitrogen (28), and, in small parts, toboron (29). Together with the TEM structure analysis, the XPS resultssuggest that B, N, C, and O atoms are chemically bonded with eachother in a honeycomb lattice with lattice spacing similar to graphene orh-BN. To obtain a better understanding of whether these bonds lie with-in the domain or matrix regions of our samples, the percentages of eachbond type (for example, O–C, O–B, O–N, or O–Cu) for a given ele-ment (for example, O) were obtained as a function of O2 flow rateduring synthesis. Figure 2C shows the variation of all bonds whose rel-ative occurrence increased with increasing oxygen flow (implying theirgrowing dominance in the domain regions), and Fig. 2D shows therelative concentrations of bonds whose occurrence decreased (imply-ing their possible presence in the matrix region) or remained insignif-icantly low (implying insignificant presence in either domain or matrix)with the same. The most striking similarity was found between themanner in which (i) the percentage of total oxygen bonds attachedto C atoms (O–C, obtained from the O1s spectrum), and (ii) the per-centage of C bonds that were attached to O atoms (C–O, obtained

Ozturk et al. Sci. Adv. 2015;1:e1500094 31 July 2015

from the C1s spectrum) varied with the increasing percentage cover-age of the domain regions in the samples (Fig. 1E). Although less con-spicuous, there is a corresponding correlation between the growth ofbonds between nitrogen and carbon (that is, both N–C, obtained fromthe N1s spectrum as shown in the Supplementary Materials, and C–N,obtained from the C1s spectrum) as a function of domain size. Anal-ysis of the N1s and O1s peaks show that the relative number of bondsthat participated in the N–B (in h-BN form), N–O, and B–O bondschanged nonmonotonically as the oxygen content in the CVD cham-ber was increased. There was an overall increase in B–N bonds anddecrease in N–O bonds, which implied that the presence of O in thechamber facilitated the relative growth of h-BN while sacrificing theless-preferred N–O bonds. Other N moieties such as amine groups de-creased as a function of oxygen inclusion into the chamber, whereasthere was a remarkable suppression of C–B bonds over the entire rangeof samples synthesized, indicating that C–B is not a preferred bondingconfiguration for this alloy system. As a result of the above analysis,we are able to conclude that as more oxygen was introduced into theCVD chamber, (i) the percentage coverage of the domains increased,(ii) the percentage of O atoms in the samples increased whereas the per-centage of C atoms decreased, and (iii) the formation of domain regionsis favored by the presence of O–C, N–C, and B–N bonds.

Having inspected the chemical bonding in the domains, we nowinvestigate a few morphological characteristics of these 2D materials.Figure 3 (A and B) shows SEM and atomic force microscopy (AFM)

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Fig. 3. Structural, morphological, and Raman analyses of the 2D-BNCO samples. (A and B) SEM (A) and AFM (B) images of the same location of a2D-BNCO sample mechanically transferred onto a SiO2 (300 nm)/Si substrate. The 2D-BNCO domains could not be “seen” in the SEM images after they

were transferred to the insulating silica substrate. AFM images confirmed that the “darker” contrast seen in (A) is due to the presence of a second layer.The thinner layer was found to have a height of 0.6 nm with respect to the SiO2 substrate, indicating a possible monolayer region. (C) Typical Ramanspectra obtained from the monolayer and bilayer regions showing peaks that could be identified with the G, G′, and D peaks of graphene. DecomposedG′ peaks could be fitted with one or four peaks confirming their mono- and bilayer natures, respectively. (D) Typical composition of the Raman peaksabout 1355 cm−1 showing the presence of the D peak, along with h-BN and B–C bonds only in the bilayer area. (E to G) Optical image (E), G peak (F), andh-BN peak (G) Raman maps of a 2D-BNCO domain and the surrounding 2D-BNC matrix from sample BNCO-3 on SiO2 (300 nm)/Si substrate. (H) Percentageoccurrence of regions containing h-BN (as obtained from Raman spectra from 30 to 35 randomly selected regions) and h-BN–free graphene-rich regions,as a function of increasing oxygen content.

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images of the same area on a sample mechanically transferred onto anSiO2/Si substrate. This area, which shows the presence of regions withdifferent numbers of layers, was chosen to investigate the layer thick-ness of these materials. Unlike the SEM images obtained from as- grownsamples on Cu, the SEM and AFM images of the samples transferredonto SiO2/Si do not show any contrast between the domain and matrixregions (the contrast in these images arises from the presence of re-gions with different numbers of layers). The AFM topographic image(Fig. 3B) reveals that the height difference between these two regions is≈0.5 nm, which is similar to the second-layer thickness of bilayergraphene samples. The chemical and structural nature of these layerscould be verified by analyzing peaks occurring in Raman spectra mea-sured from each of these layers, as shown in Fig. 3C. The most distinctspectral signal was from the G and G′ peaks of graphitic carbon, lo-cated roughly at 1580 and 2700 cm−1, respectively, implying that bothregions contained graphitic (−sp2 C=C) carbon. A detailed line shapeanalysis of the G′ bands confirms that the thinner region is monolayerin nature (the G′ band was fitted to a single Lorentzian), whereas thethicker layer is bilayer (the G′ band was fitted to a sum of fourLorentzians) (30), which is consistent with both TEM and AFM mea-surements. Further information could be obtained by deconvolvingthe spectral shape between 1300 and 1400 cm−1 (Fig. 3D). A graphiticdefect-induced D band occurs near 1350 cm−1 in the monolayer re-gion, whereas contributions from the vibrational modes of B–C bonds(31) (relatively weaker) and h-BN (12, 15) are identified in the bilayerregion. In general, it was found that the second layers were richer inh-BN content. To establish this, we obtained Raman spectral maps ofa sample area that encompasses a two-layer region, as shown in thedigital optical image in Fig. 3E, where a second layer is seen to havegrown over the first (darker green). Figure 3F shows a map of the Gband (1580 cm−1) intensity, measured with a ≈350-nm spatial reso-lution, which illustrates the non-uniform distribution of graphitic car-bon in the sample. Figure 3G shows a map of the h-BN (1367 cm−1)intensity, which correlates strongly with the second layer. A second re-gion of the sample, indicated by arrows, was also found to be h-BN–rich (and less populated by graphitic carbon, as seen in Fig. 3F). Notethat the contrast seen in the Raman spectral maps is not reproducedin the optical image of Fig. 3E. These investigations reveal that of thevarious bonding configurations obtained via XPS measurements, someare arranged in graphene-like carbon bonds, a small quantity of B–Cbonds, and h-BN bonds.

An interesting observation is the behavior of h-BN–rich regions asthe oxygen content of the CVD chamber was increased. Figure 3Hshows the fraction of the randomly selected regions that show h-BNpeaks, as well as the fraction of regions that do not, as a function of in-creasing oxygen content in the system. An overall increase in the frac-tional occurrence of h-BN regions in the samples is seen as a functionof increasing oxygen, which implies that the presence of oxygen pro-motes the formation of h-BN domains within 2D-BNCO layers, inagreement with our XPS analysis results.

The observations reported in this study suggest that the four con-stituent elements of 2D-BNCO are present in a number of different bond-ing configurations. At the macroscale, the samples can be viewed as apatchwork of nanoscale domains of B, N, C, and O atoms bondedtogether in a honeycomb lattice with energetically stable configurations.To gain further insight into their possible structural and electronicproperties, we have used ab initio density functional theory (DFT) toinvestigate three representative nano patch configurations of 2D-BNCO

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with an increasing number of O atoms around an h-BN hexagon em-bedded in the graphene matrix, as shown in Fig. 4A (a to c). The tech-nical details and the metastable structures found in the DFT calculationsare discussed in the Supplementary Materials. The stability of thesepatches was verified in the DFT calculations by confirming the returnof intentionally out-of-plane displaced atoms back into the plane. Inparticular, the atomic arrangements of Fig. 4A (c) have no B–C bonds,and hence, the rather low percentage of B–C bonds seen in our XPSmeasurements could imply that patches of samples such as the oneseen in Fig. 4A (c) may be prevalent in the system. The remainingbonding configurations are consistent with all the experimental (TEM,XPS, and Raman) observations, implying that energetically stablein-plane oxygen inclusion into the BNCO systemmay be possible throughB–O–C bonds at the periphery of h-BN domains.

The DFT calculations reveal extremely interesting local structuraland magnetic properties of these patches. In agreement with our ex-perimental finding, all three nano patches are planar in the sense thatthe hexagonal bonding is preserved. As shown in the side views in Fig.4B, the pair of B atoms, closest to the O atoms, are slightly displaced outof plane (by 0.26 to 0.67 Å). This result highlights the fact that the Oatoms can indeed be stably introduced into the plane of a graphene-like honeycomb lattice at the cost of a small out-of-plane distortion ofthe B–O bonds. Furthermore, spin-polarized DFT calculations revealanother rather surprising result: The differential spin density (Dr =r↑ − r↓) is localized on the B atoms, which are bonded to the O atoms(and which exhibit the largest out-of-plane displacement), implyingthat these B atoms carry non-zero magnetic moments. The possiblemagnetization of a 2D system composed of nonmagnetic elementsand without the addition of any defects is an extremely intriguing re-sult. Here, the localized magnetic moments originate from the fact thatthe BO2 motif has an odd number of electrons. As seen from the spin-selective density of state (DOS) plots in Fig. 4C, all nano patches ex-hibit sizable band gaps exceeding 0.5 eV. The projected DOS (PDOS)analysis of all three structures shows that the states near the valenceand conduction band edges are mainly composed of pz orbitals, with Bpz orbitals dominating over pz orbitals of C, N, and O. The DFT pre-dictions for bond lengths, magnetic moments, and electronic bandgaps are tabulated in Fig. 4D. The possible magnetic nature of these 2Dsheets along with their semiconducting behavior (see the SupplementaryMaterials) gives rise to the intriguing possibility that controlled structuresof 2D-BNCO sheets may be atomically thin diluted magnetic semicon-ductors, which are key spintronic materials (32). Furthermore, these DFT-predicted ground states are more stable than the possibly nonmagneticmetastable states (see the Supplementary Materials) by ~200 meV, im-plying that they may be magnetic even at room temperature (~25 meV).

In conclusion, we have synthesized and characterized atomicallythin layers of 2D-BNCO, a quaternary system that allows for the incor-poration of oxygen into a graphene-like honeycomb lattice. Undersuitable conditions, isolated 2D-BNCO domains grow within a graphene-rich 2D-BNC matrix with well-defined shapes and sharp edges, whichsuggests that these domains grow hetero-epitaxially from the 1D edgesof graphene-rich monolayer 2D-BNC in a manner similar to how 2Dh-BN can grow from 1D etched edges of graphene (13). We believethat oxygen plays an important role in partially etching or limiting themonolayer graphene-rich 2D-BNC edge growth, providing active 1Dedges where 2D-BNCO can continue to grow. It also appears that oxygenpromotes the increased presence of h-BN rings in the 2D-BNCO crystal.Detailed investigation of synthesis as a function of growth durations,

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preferably under in situ probes, could potentially provide a clear pic-ture regarding the exact nature of 2D-BNCO domain growth. Thepossibility that oxygen, a group VI element, can be controllably intro-duced into an sp2-type hexagonal lattice with only small out-of-planedistortions is by itself a fundamentally exciting discovery. In addition,our DFT results predict that in their most stable configurations, theboron atoms closest to oxygen atoms have non-zero differential spindensity, rendering 2D-BNCO nano patches with sizable magnetic mo-ments. Magnetism in carbon-based materials (33, 34) is a topic of greatimportance, because such materials are expected to provide lightweightand low-cost alternatives to conventional magnets. In this context, thepossibility of magnetic 2D-BNCO sheets, which are also semicon-ducting with variable band gap values, could have exciting potentialfor fundamental investigations and applications in spin-based electronics.

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Furthermore, because oxygen is a critical ingredient in many importantclasses of materials such as superconductors, electroceramics, magneto-resistors, and solid-state catalysts, inclusion of oxygen into the 2D-BNClattice could potentially lead to new classes of 2D materials. We believethat this is a big step toward designing next-generation atomically thinfunctional alloys that may find applications in a number of technologies.

MATERIALS AND METHODS

Conventional CVD chambers operating under low pressure alwayscontain oxygen as an ambient element. Although this oxygen rarelyenters the graphitic lattice during pure graphene synthesis, it has beensuggested that the presence of nitrogen can promote oxygen inclusion

CBA

Fig. 4. DFT-computed electronic properties of representative atomic configurations of 2D-BNCO nano patches. (A) (a to c) Optimized structures ofdistinct stable configurations of model BNCO structures including the spatial distribution of the differential spin density Dr = r − r . Regions of |Dr| > 0

↑ ↓

were found to be associated with the local BO2 motifs, which leads to non-zero magnetic moments. (B) Side views showing the out-of-plane displacementof B atoms closest to O atoms. (C) DOS of the BNCO units. The Fermi level is aligned with the top of the valence band. The lines in red and blue correspondto opposite spin polarizations. (D) A table of bond lengths, electronic band gap, and average magnetic moment on the B atoms closest to the O atoms.

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into the lattice (35). In our synthesis method, carbon was sourced fromCH4, boron, and nitrogen from NH3BH3 (2, 3), whereas oxygen wassupplied from an Ar/O2 mixture (0.1%). Large-area atomically thinBNCO sheets were grown directly on copper at temperatures of1015 °C using a custom-built CVD setup (see the Supplementary Ma-terials for an image of the growth setup). A set of eight samples withvarying O2 flow rates were grown for this study. Samples BNCO-0 toBNCO-14 correspond to oxygen flow rates of 0, 2, 4, to 14 sccm. All othergrowth parameters listed below were kept the same for all samples.Cleaned copper foils were placed in a quartz tube inside a furnace,which was subsequently pumped down to base pressures about 1 Pa(10 mtorr). Hydrogen (H2) was introduced as carrying gas at a con-trolled flow rate of 10 sccm, with the equilibrium pressure reachingabout 40 Pa (300 mtorr). The temperature was ramped up to thegrowth temperature, at which the copper foil was annealed for about30 min; growth was subsequently initiated by introducing precursors.The source for carbon was methane (CH4), with a controlled flow rateof 4 sccm. Boron and nitrogen were introduced by placing 60 mg ofammonia borane (NH3BH3) in an alumina boat in the outside chamber(see fig. S1), and this chamber was not heated during the growth in con-trast to other published reports where NH3BH3 was always heatedabove its sublimation temperature (60 °C) (10, 12, 13). The precursorsources were stopped and the system was allowed to cool down after30-min growth time in low pressure conditions (lower than 650 mtorr).

All samples were characterized by SEM, TEM, Raman spectroscopy,and XPS. Ab initio DFT was used to confirm the ground-state stabilityof representative compositions of BNCO, whose bonding states agreewith our experimental findings (see the Supplementary Materials fordetails). Unfortunately, despite our best efforts, we were not able to ob-tain higher-resolution TEM imaging because of possible surface con-tamination while trying to transfer these samples to TEM grids.Selected-area TEM diffraction patterns were collected in a field-emissioninstrument operated at 200 kV.

SUPPLEMENTARY MATERIALSSupplementary material for this article is available at http://advances.sciencemag.org/cgi/content/full/1/6/e1500094/DC1TextFig. S1. CVD setup for BNCO growth.Fig. S2. Morphology of growth substrate (copper) with and without boron and nitrogensource.Fig. S3. Morphological characterizations of sample and substrate after growth.Fig. S4. XPS analysis of the chemical composition of the 2D-BNCO samples.Fig. S5. 2D-BNCO surface coverage analysis.Fig. S6. Detailed Raman spectroscopic analysis.Fig. S7. DFT-computed electronic properties of metastable structures of C38(BN)3B2O4 andC35(BN)3B3O6 nano patches.Fig. S8. Source-drain current as a function of back gate voltage measured from BNCO-6 sample.Fig. S9. Absorption spectroscopy studies.Fig. S10. Variation of resistance with temperature in a typical BNCO sample, demonstratingsemiconducting behavior with a negative temperature coefficient of resistance (TCR).Fig. S11. Temperature dependence of resistance.Fig. S12. Phototransmittance characteristics of 2D-BNCO.Table S1. Calculated TCR values for BNCO samples.References (36–38)

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Funding: We acknowledge financial support from ARL/DARPA (U.S. Army Research Laborato-ry/Advanced Research Projects Agency) contract number ARMY/W911NF-11-2-0080 for the

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experimental aspects of this work. S.K. also acknowledges partial financial support fromNSF-ECCS-1351424 (for. F.L.), NSF ECCS 1202376 (for M.F., J.L., and cost of publication), as wellas U.S. Army Grant, W911NF-10-2-0098, sub-award 15-215456-03-00 (for A.V.). N.K., X.J., and S.K.N.would like to thank the Interconnect Focus Center (MARCO program), State of New York, theNSF Petascale Simulations and Analysis (PetaApps) program (grant no. 0749140), and an anon-ymous gift from Rensselaer for the support. Computing resources of the Computational Centerfor Nanotechnology Innovations at Rensselaer, partly funded by the State of New York, havebeen used for this work. This work is a partial contribution of the National Institute of Standardsand Technology, an agency of the U.S. government. Hence, it is not subject to copyright in theUnited States. Author contributions: B.O. and S.K. designed the study, developed the meth-odology, performed the analysis, and wrote the manuscript. B.O., A.d.L.B., E.P., A.N.C., F.L., A.V.,O.Y., M.A., M.J.F., J.L., Y.Z., and N.K. collected the data. X.J., N.K., and S.K.N. performed DFTcalculations. N.K.D., M.D., S.S. and S.K. provided direction and guidance and participated in writingand reviewing the manuscript. Competing interests: The authors declare that they have nocompeting interests.

Submitted 24 January 2015Accepted 14 May 2015Published 31 July 201510.1126/sciadv.1500094

Citation: B. Ozturk, A. de-Luna-Bugallo, E. Panaitescu, A. N. Chiaramonti, F. Liu, A. Vargas,X. Jiang, N. Kharche, O. Yavuzcetin, M. Alnaji, M. J. Ford, J. Lok, Y. Zhao, N. King, N. K. Dhar,M. Dubey, S. K. Nayak, S. Sridhar, S. Kar, Atomically thin layers of B–N–C–O with tunablecomposition. Sci. Adv. 1, e1500094 (2015).

fro

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O with tunable composition−C−N−Atomically thin layers of B

Dubey, Saroj K. Nayak, Srinivas Sridhar and Swastik KarMadanNeerav Kharche, Ozgur Yavuzcetin, Majed Alnaji, Matthew J. Ford, Jay Lok, Yongyi Zhao, Nicholas King, Nibir K. Dhar,

Birol Ozturk, Andres de-Luna-Bugallo, Eugen Panaitescu, Ann N. Chiaramonti, Fangze Liu, Anthony Vargas, Xueping Jiang,

DOI: 10.1126/sciadv.1500094 (6), e1500094.1Sci Adv 

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