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© Fraunhofer
BASIC STUDY ON THE INFLUENCE OF GLASSCOMPOSITION AND AL CONTENT ON THE Ag/Al PASTECONTACT FORMATION TO BORON EMITTERS
S. Körnera, F. Kieferb, R. Peibstb, F. Heinemeyerb, J. Krügenerc, M. Ebersteina
a) Fraunhofer IKTS, Winterbergstr. 28, 01277 Dresden, Germany; b) Institut für Solarenergieforschung GmbH Hameln/Emmerthal Am Ohrberg 1, 31860 Emmerthal, Germany; c) Institute of Electronic Materials and Devices, Leibniz Universität Hannover, 30167 Hannover, Germany
© Fraunhofer
2/22
Introduction & motivation
monocrystalline n-type Si will gain market share up to 39%[1]
Advantages of n-type solar cells[2-4]:
Absence of light induced degradation
Higher bulk life times
Insensitivity to common metal impurities
Disadvantage of n-type solar cells[5]:
Depleted emitter zone at the wafer surface
Solution:
Controlled etch back of depleted zone risk of damaging
Al addition Al-Si-alloy formation for lowering contact resistance
Basic study on influence of Al on paste sintering behavior
[1] www.itrpv.net; [2] www.lg-solar.com; [3] D. Song, et. al., Proc. of the 38th IEEE-PVSC 2012 Austin, TX, USA, pp. 003004-003008; [4] V. D. Mihailetchi, et al., Proc. of the 25th EU-PVSEC 2010, Valencia, Spain, pp. 1446-1448, [5] R. Lago et al., Prog. Photovolt: Res. Appl. 2010; 18:20–27, DOI: 10.1002/pip.933.
© Fraunhofer
3/22
CHIP: cell concept
Cell architecture: PERT (passivated emitter passivated rear totally doped)
n-Typ Si
base
n+-Si
p+-Si
SiN
metal
Al2O3
Components [Vol%]
paste Glass silver aluminium
PbO containing PbO free
1 5 95 0
2 5 92,5 2,5
3 5 87,5 7,5
4 5 95 0
5 5 92,5 2,5
6 5 87,5 7,5
Ag
Al
PbO-glass
Ag
Al
PbO free-glass
© Fraunhofer
4/22
Cross sections in dependence of glass frit and Al content
PbO glass PbO-free glass
0 Vol% Al
2.5 Vol% Al
7.5 Vol% Al
Tf = 810°C
© Fraunhofer
5/22
Single components: glasses
(„long“ h-T-chart) („short“ h-T-chart)
electrical conductivemelt
PbO PbO free
© Fraunhofer
6/22
Cross sections in dependence of glass frit and Al content
PbO glass PbO-free glass
0 Vol% Al
2.5 Vol% Al
7.5 Vol% Al
Tf = 810°C
© Fraunhofer
7/22
Cross sections in dependence of peak temperature andAl content – lead oxide glass frit
With increasing peak firing temperature increasing glass layer thickness[6,7]
At higher temperatures precipitates grown in silicon surface
[6] M. Eberstein et al. 2012, Energy Procedia, Vol. 27, pp. 522– 530. [7] Z. G. Li et al., J. Appl. Phys. 110, 074304 (2011); doi: 10.1063/1.3642956.
780°C, 0 Vol% Al 810°C, 0 Vol% Al 840°C, 0 Vol% Al
© Fraunhofer
8/22
Cross sections in dependence of peak temperature and Al content – lead oxide glass frit
With addition of 2.5% Al inhomogeneous glass layer
Enrichment of glass in vicinity of former Al particle
Depletion of glass at the interface, Ag-Al-spikes at the wafer surface
780°C, 0 Vol% Al 810°C, 0 Vol% Al 840°C, 0 Vol% Al
780°C, 2.5 Vol% Al 810°C, 2.5 Vol% Al 840°C, 2.5 Vol% Al
© Fraunhofer
9/22
EDX analysis of cross section
2.5 Vol% Al content, PbO glass, fired at 780 °C
Al-Ag-alloy indicated by Ag located together with Al
Pb and O indicating the glass can be found in the vicinity of the former Al grain
Si Al Pb O Ag C
© Fraunhofer
10/22
Cross sections in dependence of peak temperature andAl content – lead oxide free glass frit
With increasing peak firing temperature increasing glass layer thickness[6,7]
At higher temperatures silver colloids precipitates in glassy interface layer
780°C, 0 Vol% Al 810°C, 0 Vol% Al 840°C, 0 Vol% Al
[6] M. Eberstein et al. 2012, Energy Procedia, Vol. 27, pp. 522– 530. [7] Z. G. Li et al., J. Appl. Phys. 110, 074304 (2011); doi: 10.1063/1.3642956.
© Fraunhofer
11/22
Cross sections in dependence of peak temperature andAl content – lead oxide free glass frit
Same effects as mentioned for PbO-glass
But higher melting glass less glass at the interface
Small spikes of Ag-Al-alloy at higher temperature
780°C, 2.5 Vol% Al 810°C, 2.5 Vol% Al 840°C, 2.5 Vol% Al
780°C, 0 Vol% Al 810°C, 0 Vol% Al 840°C, 0 Vol% Al
© Fraunhofer
12/22
In-situ-contact resistance measurement assembly
quasi 4-point measurement on silver contact layers
I
I
U
PV belt furnace
Data logger
Measurement of the contact formation during firing the solar cells
© Fraunhofer
13/22
In-situ-contact resistance – lead-oxide glass frit
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
100
200
300
400
500
600
700
800
900
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]time [s]
T-Profil
Lead-oxide paste with 0 Vol% Al
Peak firing temperature 840°C (@IKTS)
© Fraunhofer
14/22
In-situ-contact resistance – lead-oxide glass frit
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]time [s]
T-Profil
gla
ss v
iscosity [P
a*s
]
time [s]
glass A
Lead-oxide paste with 0 Vol% Al
Peak firing temperature 840°C (@IKTS)
© Fraunhofer
15/22
In-situ-contact resistance – lead-oxide glass frit
[7] M. Eberstein et al., In-situ Observations of Glass Frit Related Effects during the Front Side Paste Contact Formation, 40th PVSC 2014, June 8-13, 2014, Denver, CO.
Lead-oxide paste with 0 Vol% Al
Peak firing temperature 840°C (@IKTS)
glass viscosity dependent ARC etching
Intensity of interface reconstruction
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]time [s]
T-Profil
104.4
Pa*s
gla
ss v
iscosity [P
a*s
]
time [s]
glass A
658°C 485°C
© Fraunhofer
16/22
In-situ-contact resistance – lead-oxide glass frit
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
200
400
600
800
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]
time [s]
T-Profil
655°C 645°C
gla
ss v
iscosity [P
a*s
]
time [s]
glass A
104.4
Pa*s
Lead-oxide paste with 0 Vol% Al (left) and 7.5 Vol% Al (right)
Peak firing temperature 840°C (@IKTS)
Al decreased intensity of contact formation reaction
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]time [s]
T-Profil
104.4
Pa*s
gla
ss v
iscosity [P
a*s
]
time [s]
glass A
658°C 485°C
© Fraunhofer
17/22
In-situ-contact resistance – lead-oxide glass frit
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
100
200
300
400
500
600
700
800
900
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]time [s]
T-Profil
104,4
Pa*s
gla
ss v
iscosity [P
a*s
]
time [s]
glass A
658°C 485°C
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
200
400
600
800
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]
time [s]
T-Profil
655°C 645°C
gla
ss v
iscosity [P
a*s
]
time [s]
glass A
104.4
Pa*s
Reduction of Ag2O with Al is energetic convenient than reduction with Si
© Fraunhofer
18/22
In-situ-contact resistance – lead-oxide free glass frit
Lead-oxide free paste with 0 Vol% Al (left) and 7.5 Vol% Al (right)
Peak firing temperature 840°C (@IKTS)
contact formation is improved through Al-addition
0 20 40 60 80 100 120
0
200
400
600
800
0 20 40 60 80 100 120
0,1
1
10
100
1000
Tem
per
ature
[°C
]time [s]
T-Profil
609°C
resis
tance [O
hm
]
time [s]
R690°C
0
2
4
6
8
10
12
glass B
gla
ss v
iscosity [P
a*s
]
105.0
Pa*s
0 20 40 60 80 100 120
0,1
1
10
100
1000
0 20 40 60 80 100 120
0
200
400
600
800
0 20 40 60 80 100 120
0
2
4
6
8
10
12
resis
tance [O
hm
]
time [s]
R
Tem
per
ature
[°C
]
time [s]
T-Profil
694°C 624°C
105,0
Pa*s
gla
ss v
iscosity [P
a*s
]
time [s]
glass B
© Fraunhofer
19/22
0% Al 2.5% Al 7.5% Al 0% Al 2.5% Al 7.5% Al
-1,0
-0,8
-0,6
-0,4
-0,2
0,0
rela
tive
effic
ien
cy
aluminium content
780°C
810°C
840°C
Electrical characterization of prepared cells
Paste without Al shows improving electrical performance with increasing firing temperature
Addition of aluminum decreases efficiencies opposite trend in terms of firing temperature
PbO-free glass
PbO glass
© Fraunhofer
20/22
0% Al 2.5% Al 7.5% Al 0% Al 2.5% Al 7.5% Al
-1,0
-0,8
-0,6
-0,4
-0,2
0,0
rela
tive
effic
ien
cy
aluminium content
780°C
810°C
840°C
Electrical characterization of prepared cells
PbO-free glass
PbO-free paste without Al shows improved electrical performance with increasing firing temperature
With the addition of Al a gain of efficiency can be reached
PbO glass
© Fraunhofer
21/22
Conclusions
Basic study of Contact formation of silver metallization paste on n-type Si in terms of Al content
Addition of Al
lowers densification
leads to modified glass distribution in the interface structure glass is enriched in the vicinity of Al
Reduction of Ag2O solved in the glass is most likely with Al than with Si
In-situ resistance measurement:
ARC etching is glass viscosity depended
Intensity of interface reconstruction can be controlled with Al addition
© Fraunhofer
22/22
www.ikts.fraunhofer.de
The authors thank all involved scientists and technical staff…
… and you for your kind
attention!
© Fraunhofer
23/22
Experimental setup
Pastes were varied according to
Aluminum content
Glass frit chemistry and viscosity
Cleaning/damage etch
Single side texture
Boron implant (FS)
Phosphorous implant (RS)
Co-annealing
RS passivation (SiNx)
FS passivation (Al2O3+SiNx)
FS screen print (9 wafer per paste)
Drying/firing (3 wafer per T)
RS Laser contact openings
Al evaporation
Contact tempering