4
Benchmarking Charge Trapping Models with NBTI, TDDS and RTN Experiments Sharang Bhagdikar and Souvik Mahapatra* Department of Electrical Engineering Indian Institute of Technology Bombay Mumbai 400076, India *Phone: +91-222-572-0408, Email: [email protected] Abstract-- A systematic review and comparison of existing charge trapping models in literature is performed. A framework for simulating hole trapping/de-trapping kinetics is established to compute resultant threshold voltage degradation ( VHT) and capture-emission time constants ( ). The models are analyzed by using data from Negative Bias Temperature Instability (NBTI), Random Telegraph Noise (RTN) and Time Dependent Defect Spectroscopy (TDDS) experiments. KeywordsNBTI, RTN, TDDS. I. INTRODUCTION Charge trapping and detrapping in MOS dielectric contributes to NBTI, RTN, stress-induced leakage currents (SILC) and time dependent dielectric breakdown (TDDB) [1]- [5]. It is established that charge (hole in pFETs) trapping constitutes the overall threshold voltage ( ) degradation along with the interface trap ( ) and bulk trap ( ) generation. Although numerous models have been proposed in an attempt at modelling the charge trapping time kinetics, the exact physical mechanism governing the process stays uncertain [6][7]. The four-state Extended Nonradiative Multiphonon Model (eNMP) [8] is touted to provide the most complete description of hole trapping kinetics. Capture and emission time constants of individual defects are modelled using eNMP [2]. However, the large number of tuning parameters make eNMP intractable and limit its practical use. The Two Well Nonradiative Multiphonon Model (2WNMP) is an abstraction of the eNMP model that treats the neutral and charged states of a trap as two energy levels represented as intersecting parabolic potential wells [8]. The macroscopic implementation of 2WNMP is used to model hole trapping in pre-existing defects in large area devices [7][9], and the stochastic implementation is used for NBTI and TDDS kinetics in small area devices [10]. The double well thermionic (DWT) model represents the distinct defect states as energy levels separated by a thermionic barrier. The original model [11] is altered in [12] by introducing a temperature activated barrier for modelling BTI kinetics over a range of temperatures. This Activated Barrier Double Well Thermionic (ABDWT) model [12] is invoked to model NBTI stress-recovery transients over a range of biases and temperatures and across different technologies [13]. The bias and temperature couplings of capture (C) and emission (E) time constants measured from TDDS and RTN studies is modelled using ABDWT [14]. II. MODEL FRAMEWORK & SIMULATION SETUP Fig.1 depicts a schematic of the NMP model. The neutral (E1) and charged (E2) defect energy levels are approximated as quadratic potential wells. Level E2 is pinned to the energy of the reservoir which supplies the carriers i.e. either the substrate conduction band edge (for electrons) or the valence band edge (for holes). The point where the wells intersect provide the barrier heights 12 and 21 for hole capture ( 12 ) and emission ( 21 ) rates respectively. The bias dependence gets accounted in the fact that upon application of a gate voltage, level E1 undergoes an electrostatic level shift relative to E2 (substrate) which would revise the barrier heights and, hence, the reaction rates. The required energy for the transition is supplied/dissipated entirely via phonons. The expressions for the reaction rates are rigorously derived in [8] and are listed in Fig.1. The ABDWT model provides transition rates for charge (hole in p-FET) capture and emission within a trap, Fig.2. A transition from a reference neutral state (E1) to the charged state (E2) via a thermally activated barrier (EB) constitutes the hole capture reaction. A backward transition signals the hole emission reaction. The barrier EB and state E2 lowers when a gate bias (VG) is applied to account for the bias dependence on the reaction rates [13]. The parameters for bias-dependent barrier lowering and thermal lowering are distinct and allows for decoupling of bias and T dependence on rate constants. Defects are distributed uniformly spatially in the dielectric for performing macroscopic simulations using 2WNMP. Appropriate model parameters (mean + spread) are assigned to be consistent with experimental data. Only the defects (E1) that transition above or below the Fermi level upon application of bias may take part in the capture-emission reaction and are otherwise assumed to remain in equilibrium . The setup for the ABDWT model is similar except that the defects are situated at the dielectric-substrate interface owing to the fact that spatial dependence is implicitly captured by its parameters. For replication of defect-centric data (RTN, TDDS), an individual defect is placed in the dielectric and assigned unique model parameters to generate 12 and 21 , which yield and respectively. III. NBTI MODELLING Fig.3-4 shows experimental VHT stress and recovery data from Gate First HKMG planar MOSFETs [15]. The hole trapping component VHT is isolated from the measured mean VTH data using the macroscopic BAT framework [1], which uses an empirical relation to compute VHT. The VHT is thus extracted over a range of temperatures and biases using the 6-3 © 2020 The Japan Society of Applied Physics 117

Benchmarking Charge Trapping Models with NBTI, TDDS ...in4.iue.tuwien.ac.at/pdfs/sispad2020/SISPAD2020_6-3.pdfSharang Bhagdikar and Souvik Mahapatra* Department of Electrical Engineering

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  • Benchmarking Charge Trapping Models with NBTI,

    TDDS and RTN Experiments

    Sharang Bhagdikar and Souvik Mahapatra*

    Department of Electrical Engineering

    Indian Institute of Technology Bombay

    Mumbai 400076, India

    *Phone: +91-222-572-0408, Email: [email protected]

    Abstract-- A systematic review and comparison of

    existing charge trapping models in literature is performed.

    A framework for simulating hole trapping/de-trapping

    kinetics is established to compute resultant threshold

    voltage degradation (∆VHT) and capture-emission time constants (𝝉𝑪 − 𝝉𝑬 ). The models are analyzed by usingdata from Negative Bias Temperature Instability (NBTI),

    Random Telegraph Noise (RTN) and Time Dependent

    Defect Spectroscopy (TDDS) experiments.

    Keywords—NBTI, RTN, TDDS.

    I. INTRODUCTION Charge trapping and detrapping in MOS dielectric

    contributes to NBTI, RTN, stress-induced leakage currents

    (SILC) and time dependent dielectric breakdown (TDDB) [1]-

    [5]. It is established that charge (hole in pFETs) trapping

    constitutes the overall threshold voltage (∆𝑉𝑡ℎ ) degradationalong with the interface trap (∆𝑉𝑖𝑡 ) and bulk trap (∆𝑉𝑜𝑡 )generation. Although numerous models have been proposed in

    an attempt at modelling the charge trapping time kinetics, the

    exact physical mechanism governing the process stays

    uncertain [6][7]. The four-state Extended Nonradiative

    Multiphonon Model (eNMP) [8] is touted to provide the most

    complete description of hole trapping kinetics. Capture and

    emission time constants of individual defects are modelled

    using eNMP [2]. However, the large number of tuning

    parameters make eNMP intractable and limit its practical use.

    The Two Well Nonradiative Multiphonon Model (2WNMP) is

    an abstraction of the eNMP model that treats the neutral and

    charged states of a trap as two energy levels represented as

    intersecting parabolic potential wells [8]. The macroscopic

    implementation of 2WNMP is used to model hole trapping in

    pre-existing defects in large area devices [7][9], and the

    stochastic implementation is used for NBTI and TDDS kinetics

    in small area devices [10]. The double well thermionic (DWT)

    model represents the distinct defect states as energy levels

    separated by a thermionic barrier. The original model [11] is

    altered in [12] by introducing a temperature activated barrier

    for modelling BTI kinetics over a range of temperatures. This

    Activated Barrier Double Well Thermionic (ABDWT) model

    [12] is invoked to model NBTI stress-recovery transients over

    a range of biases and temperatures and across different

    technologies [13]. The bias and temperature couplings of

    capture (C) and emission (E) time constants measured from

    TDDS and RTN studies is modelled using ABDWT [14].

    II. MODEL FRAMEWORK & SIMULATION SETUPFig.1 depicts a schematic of the NMP model. The neutral

    (E1) and charged (E2) defect energy levels are approximated

    as quadratic potential wells. Level E2 is pinned to the energy

    of the reservoir which supplies the carriers i.e. either the

    substrate conduction band edge (for electrons) or the valence

    band edge (for holes). The point where the wells intersect

    provide the barrier heights 𝜖12 and 𝜖21 for hole capture (𝑘12)and emission (𝑘21) rates respectively. The bias dependencegets accounted in the fact that upon application of a gate

    voltage, level E1 undergoes an electrostatic level shift relative

    to E2 (substrate) which would revise the barrier heights and,

    hence, the reaction rates. The required energy for the

    transition is supplied/dissipated entirely via phonons. The

    expressions for the reaction rates are rigorously derived in [8]

    and are listed in Fig.1.

    The ABDWT model provides transition rates for charge (hole

    in p-FET) capture and emission within a trap, Fig.2. A

    transition from a reference neutral state (E1) to the charged

    state (E2) via a thermally activated barrier (EB) constitutes the

    hole capture reaction. A backward transition signals the hole

    emission reaction. The barrier EB and state E2 lowers when a

    gate bias (VG) is applied to account for the bias dependence on

    the reaction rates [13]. The parameters for bias-dependent

    barrier lowering and thermal lowering are distinct and allows

    for decoupling of bias and T dependence on rate constants.

    Defects are distributed uniformly spatially in the dielectric for

    performing macroscopic simulations using 2WNMP.

    Appropriate model parameters (mean + spread) are assigned

    to be consistent with experimental data. Only the defects (E1)

    that transition above or below the Fermi level upon application

    of bias may take part in the capture-emission reaction and are

    otherwise assumed to remain in equilibrium . The setup for the

    ABDWT model is similar except that the defects are situated

    at the dielectric-substrate interface owing to the fact that

    spatial dependence is implicitly captured by its parameters.

    For replication of defect-centric data (RTN, TDDS), an

    individual defect is placed in the dielectric and assigned

    unique model parameters to generate 𝑘12 and 𝑘21, which yield𝜏𝐶 and 𝜏𝐸 respectively.

    III. NBTI MODELLING Fig.3-4 shows experimental VHT stress and recovery data

    from Gate First HKMG planar MOSFETs [15]. The hole

    trapping component VHT is isolated from the measured mean

    VTH data using the macroscopic BAT framework [1], which

    uses an empirical relation to compute VHT. The VHT is thus

    extracted over a range of temperatures and biases using the

    6-3

    © 2020 The Japan Society of Applied Physics117

  • BAT framework. The ABDWT model simulations are shown

    to map the T activation over the entire range (Fig.5). ABDWT

    is shown to accurately model VHT stress data over a range of

    VGSTR (Fig.6). Appropriate parameters for 2WNMP are

    selected to reproduce the stress data over the entire

    temperature range in Fig.7. It is observed that when the same

    parameters are used to model VHT stress data over a range of

    VGSTR, 2WNMP predicts a stronger bias (VGSTR) activation and

    the dataset cannot be matched (Fig.8). In Fig.9, suitable

    2WNMP parameters are chosen to model the bias activation.

    The same parameters predict a weaker T activation and cannot

    map the entire T dataset (Fig.10). Similar analysis is carried

    out for VHT extracted from RMG HKMG SOI FinFETs [16].

    ABDWT is shown to model ∆𝑉𝐻𝑇 data in Figs.11-12 whereassimultaneous realization of bias and T activation cannot be

    achieved using 2WNMP, Figs.13-14. Comparison of VHT

    recovery curves over different VGREC (Figs.15-16) and

    different stress times (Figs.17-18) is performed. It is observed

    that, for concurrent stress curves, the 2WNMP model predicts

    consistently slower recovery than ABDWT.

    IV. RTN AND TDDS VALIDATION Fig.19(a)-(d) list the distinct types of bias couplings (types

    A-D) for capture and emission time constants obtained from

    RTN studies [17]. All the different VG couplings can be

    reproduced by the ABDWT model upon selection of suitable

    parameters. The type-A and type-B bias couplings are

    reproduced by 2WNMP. The presence of a bias-dependent

    pre-factor (p) in the 2WNMP capture rate expression prevents

    C from being bias agnostic. In Fig.19(c), 2WNMP predicts a

    weak negative coupling of C as opposed to the zero coupling

    observed. A negative coupling of E, as observed in Fig.19(d),

    is realized in the weak electron-phonon coupling regime [8] of

    2WNMP. C in this regime is also negatively coupled with bias

    and it is not possible to achieve type-D coupling using

    2WNMP. The dependence of 𝜏𝐶 and 𝜏𝐸 on 𝑉𝐺 at differenttemperatures is recorded from RTN experiments in [18] and

    reproduced in Fig. 20. In Fig.21, ABDWT is shown to capture

    similar temperature activation trends across all 𝑉𝐺, owing tothe fact that the 𝜏𝐶 and 𝜏𝐸 are not strongly coupled and can betuned independently unlike in 2WNMP.

    Fig.22 illustrates the bias dependence of 𝜏C and 𝜏E acquiredfrom TDDS measurements for a non-switching trap [2]. The

    bias dependence is reproduced by ABDWT across two

    different T using appropriate parameters. The time constants

    for the non-switching trap are also modelled using 2WNMP.

    Figs.23-24 show TDDS time constants for switching trap with

    weak [2] and strong [19] bias activation of 𝜏𝐸 in thesubthreshold region respectively. 2WNMP cannot replicate

    the switching behavior i.e. positive coupling of 𝜏E belowthreshold voltage.

    V. CONCLUSION Macroscopic frameworks of ABDWT and 2WNMP are

    used to model experimental NBTI data over a range of stress

    biases, recovery biases and temperatures. The 2WNMP model

    in its present form cannot predict T and VGSTR activation as

    ABDWT, and is unable to model extended stress dataset.

    2WNMP predicts slower VHT recovery than ABDWT.

    2WNMP cannot reproduce the available capture and emission

    time constant bias couplings observed in RTN experiments.

    Switching trap time constants obtained using TDDS are not

    modelled by 2WNMP. 𝜏𝐸 and 𝜏𝐶 exhibit weaker correlationcoming from ABDWT as compared to 2WNMP, which makes

    the former more versatile in modelling defect-centric data.

    REFERENCES [1] N. Parihar, N. Goel, S. Mukhopadhyay and S. Mahapatra, "BTI Analysis

    Tool-Modeling of NBTI DC, AC Stress and Recovery Time Kinetics,

    Nitrogen Impact, and EOL Estimation," in IEEE Trans. Electron

    Devices, vol. 65, no. 2, pp. 392-403, Feb.2018. [2] T. Grasser, et al, “On the Microscopic Origin of the Frequency

    Dependence of Hole Trapping in pMOSFETs”, IEDM, Dec. 2012, pp.

    19.6.4. [3] A. Kerber, A. Vayshenker, D. Lipp, T. Nigam and E. Cartier, "Impact of

    charge trapping on the voltage acceleration of TDDB in metal gate/high-

    k n-channel MOSFETs," 2010 IEEE International Reliability Physics Symposium, Anaheim, CA, 2010, pp. 369-372.

    [4] W. Goes, M. Waltl, Y. Wimmer, G. Rzepa and T. Grasser, "Advanced

    modeling of charge trapping: RTN, 1/f noise, SILC, and BTI," 2014SISPAD, Yokohama, 2014, pp. 77-80.

    [5] N. Tega et al., "Increasing threshold voltage variation due to random

    telegraph noise in FETs as gate lengths scale to 20 nm," 2009 Symposium on VLSI Technology, Honolulu, HI, 2009, pp. 50-51.

    [6] S. Mahapatra and Narendra Parihar, “A review of NBTI mechanisms

    and models,” Microelectron. Reliab, Volume 81, 2018, Pages 127-135. [7] Rzepa, G. et al. “Comphy - A compact-physics framework for unified

    modeling of BTI.” Microelectron. Reliab. 85 (2018): 49-65.

    [8] Grasser, T.. “Stochastic charge trapping in oxides: From random telegraph noise to bias temperature instabilities.” Microelectron.

    Reliab. 52 (2012): 39-70.

    [9] G. Rzepa et al., "Efficient physical defect model applied to PBTI in high-κ stacks," 2017 IEEE International Reliability Physics Symposium

    (IRPS), Monterey, CA, 2017, pp. XT-11.1-XT-11.6.

    [10] Anandkrishnan R, et al, “A Stochastic Modeling Framework for NBTI and TDDS in Small Area p-MOSFETs”, Simulation of Semiconductor

    Processes and Devices (SISPAD) , Austin TX, Sep. 2018, pp. 181.

    [11] D. Ielmini, et al, "A unified model for permanent and recoverable NBTI based on hole trapping and structure relaxation," 2009 IEEE

    International Reliability Physics Symposium, Montreal, QC, 2009, pp.

    26-32.

    [12] S. Desai, et al, "A comprehensive AC / DC NBTI model: Stress,

    recovery, frequency, duty cycle and process dependence," 2013 IEEE

    International Reliability Physics Symposium (IRPS), Anaheim, CA, 2013, pp. XT.2.1-XT.2.11.

    [13] N. Choudhury, N. Parihar, N. Goel, A. Thirunavukkarasu and S.

    Mahapatra, "A Model for Hole Trapping-Detrapping Kinetics During NBTI in p-Channel FETs: (Invited paper)," 2020 4th IEEE Electron

    Devices Technology & Manufacturing Conference (EDTM), Penang,

    Malaysia, 2020, pp. 1-4. [14] S. Bhagdikar and S. Mahapatra, "A Stochastic Hole Trapping-

    Detrapping Framework for NBTI, TDDS and RTN," SISPAD, Udine,

    Italy, 2019, pp. 1-4. [15] N. Parihar, R. Anandkrishnan, A. Chaudhary and S. Mahapatra, "A

    Comparative Analysis of NBTI Variability and TDDS in GF HKMG Planar p-MOSFETs and RMG HKMG p-FinFETs," in IEEE

    Transactions on Electron Devices, vol. 66, no. 8, pp. 3273-3278, Aug.

    2019. [16] N. Parihar, U. Sharma, R. G. Southwick, M. Wang, J. H. Stathis and S.

    Mahapatra, "Ultrafast Measurements and Physical Modeling of NBTI

    Stress and Recovery in RMG FinFETs Under Diverse DC–AC Experimental Conditions," in IEEE Transactions on Electron Devices,

    vol. 65, no. 1, pp. 23-30, Jan. 2018.

    [17] H. Miki, et al, “Understanding short-term BTI behavior through comprehensive observation of gate-voltage dependence of RTN in

    highly scaled high-κ / metal-gate pFETs”, Symposium on VLSI

    Technology - Digest of Technical Papers, June 2011, pp. 149. [18] H. Miki, et al, “Voltage and temperature dependence of random

    telegraph noise in highly scaled HKMG ETSOI nFETs and its impact on

    logic delay uncertainty”, in Symposium on VLSI Technology (VLSIT),pp. 138, June 2012.

    [19] T. Grasser et al., "Advanced characterization of oxide traps: The

    dynamic time-dependent defect spectroscopy," 2013 IEEE International Reliability Physics Symposium (IRPS), Anaheim, CA, 2013, pp. 2D.2.1-

    2D.2.7.

    118

  • Fig.1. Schematic of 2WNMP model depicting

    potential wells of the neutral (𝑞1) and charged (𝑞2) states.

    Fig.2. Schematic of ABDWT model. 𝐸1, 𝐸2 and 𝐸𝑏determine the energetic configuration of the trap.

    Fig.5. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines) over a range of temperatures.

    GF HKMG planar MOSFETs

    Fig.6. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines) for a range of stress

    biases.

    Fig.10. Modelling of ∆𝑉𝐻𝑇 stress data using 2WNMP parameters of Fig.9.

    2WNMP predicts weaker T activation.

    Fig.8. Modelling of ∆𝑉𝐻𝑇 stress data using 2WNMP parameters of Fig.7.

    2WNMP predicts stronger bias

    activation.

    Fig.9. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using 2WNMP (solid lines)

    for a range of biases.

    Fig.7. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using 2WNMP (solid lines)

    over a range of temperatures.

    10-7 10-5 10-3 10-1 101 1030.1

    1

    10

    100

    V

    HT (

    mV

    )

    Time (s)

    VSTR = -1.2 V VSTR = -1.45 V

    VSTR = -1.7 V VSTR = -1.9 V

    2WNMP

    10-7 10-5 10-3 10-1 101 103

    0.1

    1

    10

    100

    V

    HT (

    mV

    )

    Time (s)

    -40°C 0°C 25°C

    65°C 100°C 125°C

    2WNMP

    10-7 10-5 10-3 10-1 101 1030.1

    1

    10

    100

    V

    HT (

    mV

    )

    Time (s)

    VSTR = -1.2 V VSTR = -1.45 V

    VSTR = -1.7 V VSTR = -1.9 V

    2WNMP

    10-7 10-5 10-3 10-1 101 1030.01

    0.1

    1

    10

    100

    V

    HT (

    mV

    )

    Time (s)

    -40°C 0°C 25°C

    65°C 100°C 125°C

    2WNMP

    10-5

    10-4

    10-3

    10-2

    10-1

    100

    101

    102

    103

    104

    10-3

    10-2

    10-1

    VGSTR

    /VMEAS

    = -1.45/-0.4

    T=1250C

    W=90nm x 70nm

    VT> V

    T

    VHT

    VIT

    V

    T (

    V)

    Time (s)

    10-7 10-5 10-3 10-1 101 103

    0.1

    1

    10

    100

    V

    HT (

    mV

    )

    Time (s)

    -40°C 0°C 25°C

    65°C 100°C 125°C

    ABDWT

    10-7 10-5 10-3 10-1 101 103

    1

    10

    100 VSTR = 1.2 V VSTR = 1.45 V

    VSTR = 1.7 V VSTR = 1.9 V

    V

    HT (

    mV

    )

    Time (s)

    T = 125°C

    ABDWT

    10-6

    10-5

    10-4

    10-3

    10-2

    10-1

    100

    101

    102

    103

    104

    0.00

    0.02

    0.04

    0.06

    0.08

    0.10

    0.12

    V

    T (

    V)

    Time (s)

    VSTR

    /VMEAS

    = -1.45/-0.4

    tSTR

    =1Ks

    T=1250C

    W=90nm x 70nm

    VT> V

    T

    VHT

    VIT

    10-7 10-5 10-3 10-1 101 103

    0.1

    1

    10

    100

    10-7 10-5 10-3 10-1 101 103

    0.1

    1

    10

    100

    V

    HT (

    mV

    )

    Time (s)

    -40°C 0°C 25°C

    65°C 100°C 125°C

    V

    HT (

    mV

    )

    Time (s)

    10-7 10-5 10-3 10-1 101 103

    1

    10

    V

    HT (

    mV

    )

    Time (s)

    1.3 V 1.4 V 1.5 V 1.6 V 1.7 V

    10-7 10-5 10-3 10-1 101 103

    1

    10

    V

    HT (

    mV

    )

    Time (s)

    1.3 V 1.4 V 1.5 V 1.6 V 1.7 V

    10-7 10-5 10-3 10-1 101 103

    0.1

    1

    10

    10-7 10-5 10-3 10-1 101 103

    0.1

    1

    10

    V

    HT (

    mV

    )

    Time (s)

    -40°C 0°C 25°C

    65°C 100°C 125°C

    V

    HT (

    mV

    )

    Time (s)

    Fig.3. Individual (gray) and mean (black) measured

    ∆𝑉𝑇 traces during stress along with model calculatedmean (red) and decomposition into subcomponents.

    Device is GF HKMG planar MOSFET.

    Fig.4. Individual (gray) and mean (black) measured ∆𝑉𝑇traces during recovery along with model calculated

    mean (red) and decomposition into subcomponents

    Fig.11. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines)

    over a range of temperatures.

    Measurements are from RMG HKMG

    SOI FinFET.

    Fig.12. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using ABDWT (solid lines)

    over a range of stress biases.

    Fig.13. Modelling of ∆𝑉𝐻𝑇 stress data (symbols) using 2WNMP (solid lines)

    for a range of biases.

    Fig.14. Modelling of ∆𝑉𝐻𝑇 stress data using 2WNMP parameters used in

    Fig.13. 2WNMP predicts much weaker T

    activation.

    119

  • 𝝉𝑒

    𝝉𝒄

    Fig.16. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using 2WNMP (solid

    lines) for a range of recovery biases.

    Fig.17. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using ABDWT (solid

    lines) for a range of stress times.

    Fig.18. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using 2WNMP (solid lines)

    for a range of recovery biases.

    -

    - - - -

    Fig.15. Modelling of ∆𝑉𝐻𝑇 recovery data (symbols) using ABDWT (solid

    lines) for a range of recovery biases..

    0.88 0.96 1.04 1.120.1

    1

    10

    tE tC

    Tim

    e c

    onsta

    nt (s

    )

    -Vg (V)

    0.80 0.84 0.88 0.921

    10

    100

    te tc

    Tim

    e c

    onsta

    nt (s

    )

    -Vg (V)0.88 0.96 1.04 1.12

    0.01

    1

    100

    te tc

    Tim

    e c

    onsta

    nt (s

    )

    Vg (V)0.60 0.65 0.70

    1

    10

    te tc

    Tim

    e c

    onsta

    nt (s

    )

    -Vg (V)

    10-7 10-5 10-3 10-1 101 103

    0

    10

    20

    30

    V

    HT (

    mV

    )

    Time (s)

    VREC= -0.4 V

    VREC= -0.8 V

    VREC= -1.2 V

    2WNMP

    10-7 10-5 10-3 10-1 101 103

    0

    10

    20

    30

    V

    HT (

    mV

    )

    Time (s)

    tSTR=100ms

    tSTR=1s

    tSTR=10s

    tSTR=100s

    2WNMP

    10-7 10-5 10-3 10-1 101 103

    0

    10

    20

    30

    V

    HT (

    mV

    )

    Time (s)

    tSTR=100ms

    tSTR=1s

    tSTR=10s

    tSTR=100s

    VSTR = -1.45 V, VREC = 0 V

    T = 125°C

    ABDWT

    10-7 10-5 10-3 10-1 101 103

    0

    10

    20

    30

    V

    HT (

    mV

    )

    Time (s)

    VREC= -0.4 V

    VREC= -0.8 V

    VREC= -1.2 V

    VSTR = -1.45 V, tSTR = 1000s

    T = 125°C

    ABDWT

    Fig.19(a)-(d). Panels depict various couplings of time constants to VG extracted from RTN data (symbols) [12]. (A) 𝜏𝑐 < 0, 𝜏𝑒~0, (B) 𝜏𝑐 < 0, 𝜏𝑒 > 0, (C) 𝜏𝑐~0, 𝜏𝑒~0, (D) 𝜏𝑐~0, 𝜏𝑒 <

    0. All the different couplings are reproduced using ABDWT model simulations (solid lines). 2WNMP simulations (dashed lines) can model type A and type B coupling upon selection

    of appropriate parameters. Zero coupling of 𝜏𝐶 with bias cannot be reproduced using 2WNMP and a negative coupling is observed in (c) and in (d) where 𝜏𝑐 is not shown (out of

    bounds, 𝜏𝐶 ≫ 𝜏𝐸).

    Fig.22. Modelling of TDDS capture and emission time constants (symbols) for non-

    switching trap [2] using ABDWT (left) and 2WNMP (right). Switching behavior is

    evident by the positive bias coupling of 𝜏𝑒 with 𝑉𝐺 .2WNMP in its present form isunable to replicate said coupling.

    Fig.21. Modelling of TDDS capture and emission time constants (symbols) for

    non-switching trap [2] using ABDWT (left) and 2WNMP (right). Non-switching

    nature is evident by the bias agnostic 𝜏𝐸 in the subthreshold regime.

    0.0 0.5 1.0 1.5 2.0 2.510-7

    10-5

    10-3

    10-1

    101

    103 te 125°C

    te 175°C

    tc 125°C

    tc 175°C

    Tim

    e c

    on

    sta

    nt

    (s)

    -Vg (V)0.0 0.5 1.0 1.5 2.0 2.5

    10-7

    10-5

    10-3

    10-1

    101

    103 te 125°C

    te 175°C

    tc 125°C

    tc 175°C

    Tim

    e c

    on

    sta

    nt

    (s)

    -Vg (V)

    0.0 0.5 1.0 1.5 2.0 2.510-7

    10-5

    10-3

    10-1

    101

    103

    Tim

    e c

    on

    sta

    nt

    (s)

    -Vg (V)

    te 125°C

    te 175°C

    tc 125°C

    tc 175°C

    0.0 0.5 1.0 1.5 2.0 2.510-7

    10-5

    10-3

    10-1

    101

    103

    Tim

    e c

    on

    sta

    nt

    (s)

    -Vg (V)

    te 125°C

    te 175°C

    tc 125°C

    tc 175°C

    0.5 0.6 0.710-5

    10-4

    10-3

    10-2

    10-1

    100

    Tim

    e c

    onsta

    nts

    (s)

    VG (V)

    0.45 0.50 0.55 0.60 0.65 0.7010-5

    10-4

    10-3

    10-2

    10-1

    100

    tc

    Tim

    e c

    onsta

    nt

    (s)

    Vg (V)

    te

    -1.0 -0.5 0.0 0.5 1.0 1.5 2.010-7

    10-5

    10-3

    10-1

    101

    103

    Tim

    e c

    on

    sta

    nt

    (s)

    -Vg (V)

    te125°C

    te175°C

    tc125°C

    tc175°C

    -1.0 -0.5 0.0 0.5 1.0 1.5 2.010-7

    10-5

    10-3

    10-1

    101

    103 te125°C

    te175°C

    tc125°C

    tc175°C

    Tim

    e c

    on

    sta

    nt

    (s)

    -Vg (V)

    Fig.23. Modelling of TDDS capture and emission time constants (symbols) for

    switching trap B3 [19] using ABDWT (left) and 2WNMP (right).

    Fig.20. Time constants as a function of

    VG at various temperatures from RTN

    experiments [18].

    Fig.21. ABDWT model simulated time

    constants as a function of VG at various

    temperatures.

    rap [2] using ABDWT (left) and

    2WNMP (right).

    120

    TitleCopyrightForewordCommitteeCOMMITTEE MEMBERSOrganization:International Steering Committee:Technical Program Committee:

    TimeTableProgramAbstracts01 Plenary01-101-201-3

    02 Band Structure02-102-202-302-402-502-6

    03 Computational Methodology03-103-203-303-403-503-603-7

    04 Nanowire04-104-204-304-404-5

    05 Material and Geometry Impact05-105-205-305-405-505-6

    06 Reliability06-106-206-306-406-5

    07 Power and Optoelectronic Devices07-107-207-307-407-507-607-707-8

    08 Non-Volatile Memory I08-108-2I. IntroductionII. Simulation MethodIII. Bias Optimization for Read-Out CurrentIV. Impact of Variation on Read-Out CurrentV. ConclusionAcknowledgmentReferences

    08-308-4

    09 Transport09-1INTRODUCTIONALGORITHMRESULTSCONCLUSIONS

    09-209-309-409-5

    10 Non-Volatile Memory II10-110-210-310-410-510-6

    11 High Speed Switching Devices11-111-211-311-411-511-611-711-8

    12 Emerging Devices12-112-212-312-412-512-612-7

    13 2D and Nano System I13-113-213-313-413-5

    14 FET Devices and Design Technology Co-Optimization14-114-214-314-414-514-614-714-8

    15 Machine Learning15-115-215-315-415-515-6

    16 2D and Nano System II16-116-216-316-416-515-7

    Late News

    Author IndexAB

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    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice

    /ColorImageDict > /JPEG2000ColorACSImageDict > /JPEG2000ColorImageDict > /AntiAliasGrayImages false /CropGrayImages true /GrayImageMinResolution 150 /GrayImageMinResolutionPolicy /OK /DownsampleGrayImages true /GrayImageDownsampleType /Bicubic /GrayImageResolution 300 /GrayImageDepth -1 /GrayImageMinDownsampleDepth 2 /GrayImageDownsampleThreshold 2.00333 /EncodeGrayImages true /GrayImageFilter /DCTEncode /AutoFilterGrayImages true /GrayImageAutoFilterStrategy /JPEG /GrayACSImageDict > /GrayImageDict > /JPEG2000GrayACSImageDict > /JPEG2000GrayImageDict > /AntiAliasMonoImages false /CropMonoImages true /MonoImageMinResolution 1200 /MonoImageMinResolutionPolicy /OK /DownsampleMonoImages true /MonoImageDownsampleType /Bicubic /MonoImageResolution 600 /MonoImageDepth -1 /MonoImageDownsampleThreshold 1.00167 /EncodeMonoImages true /MonoImageFilter /CCITTFaxEncode /MonoImageDict > /AllowPSXObjects false /CheckCompliance [ /None ] /PDFX1aCheck false /PDFX3Check false /PDFXCompliantPDFOnly false /PDFXNoTrimBoxError true /PDFXTrimBoxToMediaBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXSetBleedBoxToMediaBox true /PDFXBleedBoxToTrimBoxOffset [ 0.00000 0.00000 0.00000 0.00000 ] /PDFXOutputIntentProfile (None) /PDFXOutputConditionIdentifier () /PDFXOutputCondition () /PDFXRegistryName () /PDFXTrapped /False

    /CreateJDFFile false /Description >>> setdistillerparams> setpagedevice