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Bertrand ArdouinThomas Zimmer
XMOD Technologies:Hicum toolkit & extraction services
HICUM Workshop, September 2002, Monterey
XMOD: Presentation
How to choose a compact model ?
Measurement, Extraction,
Modelling Services and Consulting
Hicum “Aperitif toolkit” Simple approach
OUTLINE
HICUM Workshop, September 2002, Monterey
Where ?
XMOD is here
Laboratoire de Microélectronique IXL
HICUM Workshop, September 2002, Monterey
What ?
Co-operation and support from : � Technical University Dresden� University Bordeaux
A Start-up company in the Bipolar modelling domain :
� Offering parameter extraction software
� Provide extraction and modelling services
(parameter extraction, on wafer measurements, …)
� Hicum (SGP and VBIC models also supported)
� Single transistor and scaling approach
� Custom models for specific applications (HDL-A)
HICUM Workshop, September 2002, Monterey
What ?
0
5
10
15
20
25
30
35
40
45
0.0001 0.001 0.01 0.1Ic (A)
f T (
GH
z)
meas
hicum
NWA HP 8510C (HF, CV)
HP 4155B (DC)
C-V meter HP 4284 (C-V)
T controler -60 °C up to 200 °C
0
0.001
0.002
0.003
0 1 2Vce (V)
Ic (
A)
measurehicum
Semi-automatic prober Karl Suss PA200
On wafer measurement capabilities
HICUM Workshop, September 2002, Monterey
What ?
The “Hicum Aperitif Toolkit”Single transistor methodology
“In House” ICCAP tools for complete parameter extraction
HICUM Workshop, September 2002, Monterey
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Mextram
HICUM Workshop, September 2002, Monterey
Why ?
Efficiency: ability to model complex technologies
Simplicity:Time requirement= save money
VBIC
Gummel-PoonHicum
Mextram
Scalability not taken into account
Single transistor strategy
HICUM Workshop, September 2002, Monterey
Why ?
There’s a need for companies in this domain:
� Help to accelerate the FIRST use of Hicum and
help to establish a wide use
� Provide complete extraction services for
companies having no experience in the
bipolar domain (SiGe and III-V HBT’s)
� Provide consulting for modelling of very High
frequency devices, need of scaling, ...
Centralise Bipolar experience
HICUM Workshop, September 2002, Monterey
Goals of the “Hicum Aperitif Toolkit”
? HicumGummel-Poon
Switch
Learn a new model and new tools
Scaling approach can be complex
New test structures on the wafers
HICUM Workshop, September 2002, Monterey
Goals of the “Hicum Aperitif Toolkit”
HicumGummel-Poon
Switch
“Hicum Aperitif Toolkit” allows to use the single transistor strategy (SGP like)
Decouple Scaling from parameter extraction
No specific test structures
Simplified approach
HICUM Workshop, September 2002, Monterey
Goals of the “Hicum Aperitif Toolkit”
“Hicum Aperitif Toolkit” allows to:
A smooth transition from SGP to Hicum
Obtain efficient and physically meaningful parameter sets for Hicum(from direct extraction)
Evaluate the model without too much effort
Parameters extracted for the single transistor approach will be required for scaling (Transit time)
HICUM Workshop, September 2002, Monterey
Description of the toolkit
Probes
ICCAP measurements
toolkit
Instruments
Standard Bipolar
Measurement Database
Hicum “Aperitif” ToolkitICCAP
Gummel-Poon, VBIC,
MEXTRAMTRADICA and BIPAX
HICUM Workshop, September 2002, Monterey
Description of the toolkit
ICCAP « Hicum aperitif Toolkit »New GUI interface
HICUM Workshop, September 2002, Monterey
Description of the toolkit
Main window
Import data
Define
Select mdm file + view header
Simply select directory
Import
HICUM Workshop, September 2002, Monterey
Description of the toolkit
Temperature
Comments on technology
Define things
HICUM Workshop, September 2002, Monterey
Description of the toolkit
Extract
Extraction steps
Parameter group Edit parameters
Status
RunHICUM Workshop, September 2002, Monterey
Description of the toolkit
Export Results
Export Directory
Utilities
Create HTML documentationHICUM Workshop, September 2002, Monterey
Description of the toolkit
Optimize
Get from plots
Tune
HICUM Workshop, September 2002, Monterey
Description of the toolkit
HICUM Workshop, September 2002, Monterey
Description of the toolkit
HICUM Workshop, September 2002, Monterey
Description of the toolkit
HICUM Workshop, September 2002, Monterey
Description of the toolkit
HICUM Workshop, September 2002, Monterey
Description of the toolkit
HICUM Workshop, September 2002, Monterey
0
5
10
15
20
25
30
35
40
45
0.0001 0.001 0.01 0.1Ic (A)
f T (
GH
z)
mesures
hicum
BiCMOS SiGe 0.35 µm ST Microelectronics
fT = 45 GHz
0
10
20
30
40
50
60
70
80
90
100
110
120
1.E-08 1.E-06 1.E-04 1.E-02Ic (A)
Be
ta
meas
hicum
Parameter extraction: Results
fT (Ic) (Vce)
HICUM Workshop, September 2002, Monterey
Parameter extraction: Results
Ic (Vce)Ic (Vbe), Ib (Vbe)
0
0.001
0.002
0.003
0 1 2Vce (V)
Ic (
A)
mesurehicum
1E-10
1E-09
1E-08
1E-07
1E-06
1E-05
0.0001
0.001
0.01
0.1
0.4 0.5 0.6 0.7 0.8 0.9 1Vbe (V)
Ic, I
b (A
)
Ic (mesure)
Ic (hicum)Ib (mesure)
Ib (hicum)
BiCMOS SiGe 0.35 µm ST Microelectronics
fT = 45 GHz
HICUM Workshop, September 2002, Monterey
Parameter extraction: Results
BiCMOS SiGe 0.35 µm ST Microelectronics
fT = 45 GHz
1.E-07
1.E-06
1.E-05
1.E-04
1.E-03
1.E-02
1.E-01
1.E+00
0 0.5 1 1.5 2 2.5 3VCE (V)
g 0 (
S)
Mesures Hicum
g0 = d IC / dVce
HICUM Workshop, September 2002, Monterey
Parameter extraction: Results
fT (Ic)
0
10
20
30
40
50
60
70
80
0.0001 0.001 0.01 0.1Ic (A)
f T (
GH
z)
mesure
hicum
BiCMOS SiGe 0.25 µm ST Microelectronics
fT = 75 GHz
HICUM Workshop, September 2002, Monterey
Parameter extraction: Results
BiCMOS SiGe 0.25 µm ST Microelectronics
fT = 120 GHz
0
20
40
60
80
100
120
140
1.E-04 1.E-03 1.E-02 1.E-01IC (A)
f T (
GH
z)
HICUM Workshop, September 2002, Monterey
Conclusion
XMOD provides Software, Consulting and
Services for Bipolar Modelling community
“Hicum Aperitif Toolkit” is ready for
evaluation
Simplified approach allows to familiarise
with the model and extend its interest
Scaling and statistics planed
HICUM Workshop, September 2002, Monterey