Upload
trannga
View
217
Download
0
Embed Size (px)
Citation preview
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Bienroder Weg 54 E38108 Braunschweig
www.ist.fraunhofer.de
Dipl.-Ing. Holger Lüthje
ResearcherResearcherResearcherResearcherDiscoverer of the Fraunhofer-Lines in the solar spectrum
InventorInventorInventorInventorNew methods of working glass
EntrepreneurEntrepreneurEntrepreneurEntrepreneurDirector of a glassworks
Joseph von Fraunhofer (1787 Joseph von Fraunhofer (1787 Joseph von Fraunhofer (1787 Joseph von Fraunhofer (1787 –––– 1826) 1826) 1826) 1826)
Dipl.-Ing. Holger Lüthje
30 % Private research contracts
36 % Public funded research projects
34 % Basic funding
TheTheTheThe FraunhoferFraunhoferFraunhoferFraunhofer----GesellschaftGesellschaftGesellschaftGesellschaft
FoundationFoundationFoundationFoundation
1949 as a non-profit organization with mandate forpromote applied research
StaffStaffStaffStaffApprox. 12.500, primarily scientists and engineers
58 Research 58 Research 58 Research 58 Research facilitiesfacilitiesfacilitiesfacilities
BudgetBudgetBudgetBudgetApprox. 1.031 billion € (2004)
Dipl.-Ing. Holger Lüthje
HistoryHistoryHistoryHistory of Fraunhofer ISTof Fraunhofer ISTof Fraunhofer ISTof Fraunhofer IST
1988198819881988 Discussion of location (Lower Saxony/Bavaria/Bremen)
1989198919891989 Senate‘s Decision for Braunschweig as location
1990199019901990 Establishment in former Philips Research Laboratory in Hamburg; director of IST is Prof. Dr. Heinz Dimigen
1992199219921992 Begin of building project in Braunschweig
1994199419941994 Relocation of IST from Hamburg to Braunschweig
1999199919991999 New director is Prof. Dr. Günter Bräuer, formerly Leybold AG; in personal union director of Fraunhofer FEP
2003200320032003 Prof. Bräuer becomes head of the Institute for SurfaceTechnology (IOT) of the TU Braunschweig; Prof. Dr. Klages is appointed as Professor at IOT
2005200520052005 Extension of the IST‘s building projected, start of construction2006, completion 2008
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
• We offer to our customers innovative and tailored solutionssolutionssolutionssolutions in the field of surfaceengineering and thin films.
• In order to realize such solutions we use a wide spectrum of low and atmosphericpressure plasmas as well as electroplating technology.
• The object of our efforts is to become the leading research partner for our national national national national andandandand international international international international customerscustomerscustomerscustomers.
OurOurOurOur MissionMissionMissionMission
Dipl.-Ing. Holger Lüthje
Transfer CenterTribology
DiamondTechnology
Large AreaCoatings
AtmosphericPressure Processes
New TribologicalCoatings
Optical and EletricalCoatings
Analysis andQuality Control
DortmunderOberflächenCentrum
Magnetron Sputtering
Hollow Cathode Processes
Galvano Technology
Dr. J. Brand Dr. L. Schäfer Dr. B. Szyszka
Dr. B. Szyszka
Prof. Dr. C.-P. Klages
Dr. M. Thomas
Dr. K. Bewilogua Dr. M. Vergöhl
Dr. M. Vergöhl
Dr. P. Willich
Dipl.-Ing. H. Paschke
Microtechnologyand Sensors
Dipl.-Ing. H. Lüthje
Dr. T. Jung
Dr. A. Dietz
Atmospheric PressurePlasma Processes
Marketing andCommunication Management
Director Prof. Dr. G. Bräuer
Deputy
Secretariat
Dipl.-Ing. W. Diehl
M. GeertsemaDr. S. Kondruweit Dipl.-Volkswirt U. Kampfer
Coating and ProcessDevelopment
Dipl.-Ing. Holger Lüthje
Staff membersStaff membersStaff membersStaff members
Employees 77
thereof PhD students 4
Students 35
BudgetBudgetBudgetBudget 7.9 Mio €
Financing of contract researchFinancing of contract researchFinancing of contract researchFinancing of contract research
Basic funds 18 %
Internal programs 15 %
Public project financing 28 %
Contract financing industry 39 %
Personal and Budget Personal and Budget Personal and Budget Personal and Budget DataDataDataData 2004200420042004
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Mechanical and Automotive Engineering
Tools
Energy, Glass and Facade
Optics, Information and Communication
Life Science and Ecology
Business Fields of Fraunhofer ISTBusiness Fields of Fraunhofer ISTBusiness Fields of Fraunhofer ISTBusiness Fields of Fraunhofer IST
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Automotive and motor components
Driving and bearing components
Light construction
Sealing technology
General mechanical engineering
Business Business Business Business FieldFieldFieldField »»»»Mechanical and Automotive EngineeringMechanical and Automotive EngineeringMechanical and Automotive EngineeringMechanical and Automotive Engineering««««
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Cutting tools
Blanking tools
Tools for chipless removal
Forming tools and dies
Molds and sintering tools
Business Business Business Business FieldFieldFieldField »»»»ToolsToolsToolsTools««««
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Thin film solar cells
Glass protection
Automotive glazing
Architectural glass
Coating of steel strip
Business Business Business Business FieldFieldFieldField »»»»Energy, Glass and FacadeEnergy, Glass and FacadeEnergy, Glass and FacadeEnergy, Glass and Facade««««
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Optical filters
Display technology
Storage media
Electronic devices
Decorative elements
Business Business Business Business FieldFieldFieldField »»»»Optics, Information and CommunicationOptics, Information and CommunicationOptics, Information and CommunicationOptics, Information and Communication««««
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Bioanalytic and diagnostic
Medical technology
Food technology
Water purification and treatment
Household
Business Business Business Business FieldFieldFieldField »»»»Life Science and EcologyLife Science and EcologyLife Science and EcologyLife Science and Ecology««««
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Atmospheric pressure processesAtmospheric pressure processesAtmospheric pressure processesAtmospheric pressure processes
• Electroplated multi-component systems
• Electrochemistry
• Atmospheric pressure plasma processes
Low pressure processesLow pressure processesLow pressure processesLow pressure processes
• Hollow cathode processes
• PACVD and hot filament CVD processes
• Magnetron sputtering
CompetenceCompetenceCompetenceCompetence FieldsFieldsFieldsFields
Dipl.-Ing. Holger Lüthje
Friction reduction and wear protectionFriction reduction and wear protectionFriction reduction and wear protectionFriction reduction and wear protection
• Diamond-like carbon coatings (DLC)
• Hard coatings
• Plasma diffusion
• Dry lubricants
Corrosion protectionCorrosion protectionCorrosion protectionCorrosion protection
SuperSuperSuperSuper----hard coatingshard coatingshard coatingshard coatings
• Diamond
• Cubic boron nitride (c-BN)
Fraunhofer Institute Surface Engineering and Thin Films
Competence FieldsCompetence FieldsCompetence FieldsCompetence Fields
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
Electrical and optical coatingsElectrical and optical coatingsElectrical and optical coatingsElectrical and optical coatings
• Optical coatings
• Transparent conductive coatings
• Diamond electrodes
Micro and Micro and Micro and Micro and nanonanonanonano technologytechnologytechnologytechnology
• Functionalizing of interfacial layers
• Micro and sensor technology
• Nano composit coatings
Coatings on plasticsCoatings on plasticsCoatings on plasticsCoatings on plastics
Analysis and TestingAnalysis and TestingAnalysis and TestingAnalysis and Testing
CompetenceCompetenceCompetenceCompetence FieldsFieldsFieldsFields
Dipl.-Ing. Holger Lüthje
SurfaceSurfaceSurfaceSurface PretreatmentPretreatmentPretreatmentPretreatment
ThinThinThinThin Film Film Film Film DevelopmentDevelopmentDevelopmentDevelopment
ProcessProcessProcessProcess Technology Technology Technology Technology (Diagnostics,
Modelling, Control)
SurfaceSurfaceSurfaceSurface Analysis and Analysis and Analysis and Analysis and ThinThinThinThin Film Film Film Film
CharacterizationCharacterizationCharacterizationCharacterization
Services of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer IST
Dipl.-Ing. Holger Lüthje
Fraunhofer Institute Surface Engineering and Thin Films
TrainingTrainingTrainingTraining
ApplicationApplicationApplicationApplication OrientedOrientedOrientedOrientedFilm Design and Film Design and Film Design and Film Design and
ModellingModellingModellingModelling
System DesignSystem DesignSystem DesignSystem Design
Technology TransferTechnology TransferTechnology TransferTechnology Transfer
Services of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer ISTServices of Fraunhofer IST
142.3
136.3
130.4
124.4
118.5
112.5
106.6
100.7
94.7
88.8
82.8
Argon-
Einlass
Turbo-Pumpen
Argon-Druck [mPa]
Dipl.-Ing. Holger Lüthje
MEMSMEMSMEMSMEMS
Smart CoatingsSmart CoatingsSmart CoatingsSmart Coatings
3333----D D D D MikroMikroMikroMikro----StrukturierungStrukturierungStrukturierungStrukturierungSensorenSensorenSensorenSensoren
TribologieTribologieTribologieTribologieSchichttechnikSchichttechnikSchichttechnikSchichttechnik
Mikro-Systemtechnik
MultifunctionelMultifunctionelMultifunctionelMultifunctionel SurfacesSurfacesSurfacesSurfaces : Smart : Smart : Smart : Smart CoatingsCoatingsCoatingsCoatings
Dipl.-Ing. Holger Lüthje
Thin film system for smart coatings
1. Wear resistant sensor / insulator layer
2. Thin film electrodes / sensor and micro structuring:
3. Tribology optimized insulator
4. (Functional wear resistant coating)
Smart Surfaces : Multifunctionel Sensorintegrated Surfaces
Dipl.-Ing. Holger Lüthje
Intelligenter Drehmeißel
Temperatur-und
Verschleißmessung auf der Spanfläche
( Kolkbereich)
Dipl.-Ing. Holger Lüthje
Temperaturmessung (Beginn des Temperaturmessung (Beginn des Temperaturmessung (Beginn des Temperaturmessung (Beginn des ZerspanensZerspanensZerspanensZerspanens))))
Ansteigende Flanke
0
100
200
300
400
500
600
700
2,1 2,2 2,3 2,4 2,5 2,6 2,7
Zeit in Sekunden
Tinnen in °C Taußen in °C
Temperaturanstieg innerhalb ca. 30 msec auf etwa 600 °C.Es sind Temperaturgradienten bis zu 1000 °C/mm möglich.(2. Sensor liegt 350 µm entfernt)
Dipl.-Ing. Holger Lüthje
InsertsInsertsInsertsInserts withwithwithwith wearwearwearwear sensorssensorssensorssensors at flank at flank at flank at flank sidessidessidessides
Dipl.-Ing. Holger Lüthje
Standweg für sensorbeschichtete HM-WSP; CK45: f=0,2mm; Schnitttiefe ap=1,3mm; Vc=250 /min
0,000
0,050
0,100
0,150
0,200
0,250
0,00
010
0000
0,00
020
0000
0,00
030
0000
0,00
040
0000
0,00
050
0000
0,00
060
0000
0,00
070
0000
0,00
080
0000
0,00
0
Standweg [mm]
VB
[m
m]
Dipl.-Ing. Holger Lüthje
Amorphous Carbon Coatings –DLC-a:CH-X
DLC (or a-C:H)- high wear resistance- high hardness
Me-DLC (or Me-C:H)- low friction- better adhesion- electrical conductivity
a-C:H:Si:O- transparancy- scratch resistance- decoration- UV protection
+ Si+ Si+ Si+ Si
a-C:H:Si- minimum friction- heat resistance + metal+ metal+ metal+ metal
a-C:H:F- surface energy ↓↑- wettability- Low adhesion
ta-C, CNx
- high hardness, low wear- Low roughness
ArcArcArcArc, , , , sputteringsputteringsputteringsputtering
CVD-Diamond
- maximum wear resistance
- maximum hardness
Modification
CarbonCarbonCarbonCarbon
Based Coatings
hydrocarbonshydrocarbonshydrocarbonshydrocarbons
+ Si,O+ Si,O+ Si,O+ Si,O
+ F,Si,O,N,B+ F,Si,O,N,B+ F,Si,O,N,B+ F,Si,O,N,B
∆∆∆∆ T + T + T + T + hydrogenhydrogenhydrogenhydrogen
of
Sensoric properties ?
Dipl.-Ing. Holger Lüthje
PrinziplePrinziplePrinziplePrinziple of force measurement by use of DLC filmsof force measurement by use of DLC filmsof force measurement by use of DLC filmsof force measurement by use of DLC films
Steel
Force
Carbon sensor
2,1
2,2
2,3
2,4
2,5
2,6
2,7
2,8
2,9
3
3,1
3,2
3,3
3,4
3,5
3,6
15 25 35 45 55 65 75 85 95 105 115 125 135 145 155 165 175 185
Kraft [N]
Widerstand [MOhm]
1. Zyklus
2. Zyklus
Effective variation of theelectrical resistivity vs. load
Dipl.-Ing. Holger Lüthje
∆R / R / R / R / ∆F F F F SensitivitySensitivitySensitivitySensitivity of of of of a:CHa:CHa:CHa:CH filmsfilmsfilmsfilms
1
10
100
1000
10000
100000
Em
pfin
dlic
hkei
t [O
hm/N
]
Maxima Mittelwert +Standardabweichung Minima
200V 350V 500V 650V 800V
Crossection
surface
Crossection
Dipl.-Ing. Holger Lüthje
1. Unterlegscheibe mit DiaForce®-Beschichtung
2. Zentrisch wird eine mit Laser geschnittene Metallfolienelektrode zwischen zwei beschichtete Unterlegscheiben gelegt.
3. Dieser Aufbau wird durch eine Klebung fixiert.
Intelligente UnterlegscheibeIntelligente UnterlegscheibeIntelligente UnterlegscheibeIntelligente Unterlegscheibe
LoadLoadLoadLoad Sensors Sensors Sensors Sensors designeddesigneddesigneddesigned as as as as WasherWasherWasherWasher
Dipl.-Ing. Holger Lüthje
LoadLoadLoadLoad Sensor Sensor Sensor Sensor withwithwithwith DiaForceDiaForceDiaForceDiaForce CoatingsCoatingsCoatingsCoatings
U=5V
Kraftmessdose
Substrattisch
Unterlegscheiben
mit DiaForce®-Sensorik
Stempel
TestaufbauTestaufbauTestaufbauTestaufbau
Dipl.-Ing. Holger Lüthje
Force Sensor Force Sensor Force Sensor Force Sensor
1,00E+06
2,00E+06
3,00E+06
4,00E+06
5,00E+06
6,00E+06
7,00E+06
0 200 400 600 800 1000 1200 1400
Kraft [N]
Widerstand [Ohm]
1. Belastung
1. Entlastung
2. Belastung
2. Entlastung
3. Belastung
3. Entlastung
Vollflächige belastungs-abhängige Widerstands-messung an zwei mit 6 µm DiaForce
beschichteten U-Scheiben mit Stahlfolienelektrode.
Dipl.-Ing. Holger Lüthje
Mit Laser wird die Mit Laser wird die Mit Laser wird die Mit Laser wird die strukturierte Folie strukturierte Folie strukturierte Folie strukturierte Folie ausgeschnitten.ausgeschnitten.ausgeschnitten.ausgeschnitten.
Kunststofffolie mit Elektroden Kunststofffolie mit Elektroden Kunststofffolie mit Elektroden Kunststofffolie mit Elektroden und Temperatursensor.und Temperatursensor.und Temperatursensor.und Temperatursensor.
Intelligente Unterlegscheibe zur Intelligente Unterlegscheibe zur Intelligente Unterlegscheibe zur Intelligente Unterlegscheibe zur KraftKraftKraftKraft---- und Temperaturmessung in und Temperaturmessung in und Temperaturmessung in und Temperaturmessung in Schraubverbindungen.Schraubverbindungen.Schraubverbindungen.Schraubverbindungen.
Force Sensor Force Sensor Force Sensor Force Sensor
Dipl.-Ing. Holger Lüthje
TemperaturemeasurementTemperaturemeasurementTemperaturemeasurementTemperaturemeasurement
α=∆R/(R* ∆T)
α=7,8*10-4K-1
∆R/ ∆T=1,67 Ω/K
Charakteristik des Chrom-Temperatur-mäanders:
y = 1,6651x + 2133,2
2160
2180
2200
2220
2240
2260
2280
2300
25 35 45 55 65 75 85 95
Temperatur [°C]
Widerstand [Ohm]
Dipl.-Ing. Holger Lüthje
Local DiaForce®-Sensor for Determination of the Load Distribution
88000880008800088000
88500885008850088500
89000890008900089000
89500895008950089500
90000900009000090000
90500905009050090500
91000910009100091000
91500915009150091500
92000920009200092000
92500925009250092500
93000930009300093000
93500935009350093500
94000940009400094000
0000 100100100100 200200200200 300300300300 400400400400 500500500500 600600600600 700700700700 800800800800 900900900900 1000100010001000 1100110011001100
Kraft [N]Kraft [N]Kraft [N]Kraft [N]
Widerstand [
Widerstand [
Widerstand [
Widerstand [ ΩΩ ΩΩ]] ]]
1. Belastung1. Belastung1. Belastung1. Belastung
1. Entlastung1. Entlastung1. Entlastung1. Entlastung
2. Belastung2. Belastung2. Belastung2. Belastung
2. Entlastung2. Entlastung2. Entlastung2. Entlastung
3. Belastung3. Belastung3. Belastung3. Belastung
3. Entlastung3. Entlastung3. Entlastung3. Entlastung
Dipl.-Ing. Holger Lüthje
Dynamische Charakterisierung der piezoresistiven Eigenschaft von F-DLC mit dem Alternating Force Tester
37
38
39
40
41
42
43
44
45
46
47
48
0 0,01 0,02 0,03 0 ,04 0,05 0,06
t [s]R [k
Ω]
f=100Hz; U(Piezo)=30-100V
Dipl.-Ing. Holger Lüthje
38
40
42
44
46
48
0 0,1 0,2 0,3 0,4 0,5 0,6 0,7 0,8 0,9 1
t [s]
R [kΩ]
f=10Hz;U(Piezo)=30-100V
Z e i t t [ s ]
2 0
3 0
4 0
5 0
6 0
7 0
8 0
9 0
1 0 0
1 1 0
0 0 , 1 0 , 2 0 , 3 0 , 4 0 , 5 0 , 6 0 , 7 0 , 8 0 , 9 1
t [ s ]
U [V
]
Dynamische Messung mit F-DLC
Anregungs-frequenz:
1 KHz
Dipl.-Ing. Holger Lüthje
Temperatursensor mit Kupferkontakten.
Vollständiger Sensoraufbau mit angelöteten Messdrähten.
Laser Structuring Laser Structuring Laser Structuring Laser Structuring
Dipl.-Ing. Holger Lüthje
Force Measurement directly in the Race Track of radial Ball Bearings
Messung am Hochlasttribometer an Kraftsensor E bei 200 N Belastung und 100 rpm Drehgeschwindigkeit;
Datum: 24.03.05
120650
120700
120750
120800
120850
120900
2 2,5 3 3,5 4 4,5 5
Zeit [s]
Widerstand [Ohm]
Dipl.-Ing. Holger Lüthje
Thermal behavior of a ball bearing
516,80
516,90
517,00
517,10
517,20
517,30
517,40
0 100 200 300 400 500 600 700 800 900 1000
Zeit [s]
Widerstand [Ohm]
Start
Ende
Linearer Widerstandsanstieg
ω= 1000 rpm
Dipl.-Ing. Holger Lüthje
Thermal behavior of DiaForce films
Thermal coefficient of resistivity:
20x10-3 1/°K - 5x10-3 1/°K
F F∂Diaforce Messung bei 120°C
0
10000
20000
30000
40000
50000
60000
70000
0 200 400 600 800 1000 1200
Kraft/N
Wid
erst
and/
Ohm
1,000
1,100
1,200
1,300
1,400
1,500
1,600
1,700
1,800
1,900
2,000
2,100
2,200
2,300
0 20 40 60 80 100 120 140 160 180 200 220
Kraft [N]
Wid
erst
and
[MΩΩ ΩΩ
]
1. Belastung
1. Entlastung
2. Belastung
2. Entlastung
3. Belastung
3. Entlastung
Compensation by measurement of resistivity at not loaded positions
20°C
120°C
Dipl.-Ing. Holger Lüthje
1. Sensorschicht: d:~7,4 µm
Diaforce®
2. Strukturierte Elektrode: d: ~0,5 µm
Chrom/Gold
3. Isolator-/Verschleißschutzschicht:
d:~4,0 µm SiCON®
Force Force Force Force ---- and and and and TemperatursensoricTemperatursensoricTemperatursensoricTemperatursensoric forforforfor 3333----DDDD----ComponentsComponentsComponentsComponents
Dipl.-Ing. Holger Lüthje
Determination of k-factor by means of lateral shift of Si-membran
K= ∆R x L / R x ∆L
Dipl.-Ing. Holger Lüthje
Tellerfeder mit DiaForce Sensoren für Zug- und DruckbelastungMesssignal bei Schwingungsbeaufschlagung
(Amplitude 80 mµ) auf einer Tellerfeder
Dipl.-Ing. Holger Lüthje
Multifunctional Thin Film SensorsMultifunctional Thin Film SensorsMultifunctional Thin Film SensorsMultifunctional Thin Film Sensors
•• Smart Surfaces: hard tribological coatings with integrated thin film sensors
direct control of mechanically treated surfaces novel steering possibilities of various machines first priorty parameters: load, temperature, wear