Bio-MEMS and Nanotechnology

Course Code: BMED-6004

Prof. Dr. Gyeong-Man Kim

gmkim111@gmail.com

Center of Biomedical Engineering

1 nm = 10-9 m

= 13000 km

Earth

Euro Coin

= 16 mm

Difference: 1,2 x 10-9 !!

“Nanos“ Greek: “Dwarf“

Nanotechnologyis the design, characterization, production

and applications of structures, devices and systems by controlling shape and size

at the nanometer scale.

What is Nanotechnology?

Nanotechnology

Nanotechnology is “Multidisciplinary” !

Materials Science

Physics

Chemistry

Biology

Info.Technology

MechanicalEngineering

ElectricalEngineering

NanoMedicine

What is MEMS?

Micro-Electro-Mechanical Systems

MEMS is a technology, consisted of microelectronic elements, actuators, sensors, and mechanical structures built onto a substrate, which is usually silicon.

They are developed using microfabrication techniques: deposition, patterning, and etching.

The benefits on this small scale integration brings the technology to a vast number and variety of devices.

What is Bio-MEMS?

BioMEMS is biomedical or biological applications of MEMS.

What is MEMS?

MicroElectroMechanical System

➢Micro: Small size, micro-fabricated structures

➢Electro: Electrical signal control e.g., sense, computer, etc. (In / Out)

➢Mechanical: functionality, e.g., actuate, etc. (In / Out)

➢ System: Structures, devices, system controls

MEMS is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substratethrough microfabrication technology.

• Structures support and transmit loads.

• Mechanisms transfer/transform motion AND support and transmit loads.

• Another view: both transfer and transform energy (load*motion)

• Most MEMS are sensors and actuators, i.e., they are transducers.

• Transducers are energy transformers and transmitters.

Structures & Mechanisms

MEMS

What is MEMS?

➢MEMS technology is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology.

What is MEMS?

Smartphones, tablets, cameras, gaming devices, and many other electronics have MEMS technology inside of them

http://www.chipworks.com/en/technical-competitive-analysis/resources/blog/inside-the-samsung-galaxy-s5/

➢MEMS technology is based on a number of tools and methodologies, which are used to form small structures with dimensions in the micrometer scale.

➢MEMS fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated electromechanical systems.

➢Made up of components between 1-100 µm in size.

➢Devices vary from below one µm up to several mm.

What is MEMS Technology?

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Accepted Size Range for MEMS

Components

Microelectronics:

• “brain” that receives, processes, and makes decisions

• data comes from microsensors

Microsensors:

• constantly gather data from environment

• pass data to microelectronics for processing

• can monitor mechanical, thermal, biological, chemical optical, and magnetic readings

Microactuator:

• acts as trigger to activate external device

• microelectronics will tell microactuator to activate device

Microstructures:

• extremely small structures built onto surface of chip

• built right into silicon of MEMS

MEMS Fabrication Process