[email protected] ENGR-25_XY-Translation-Stage_CaseStudy.ppt 1 Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods Bruce Mayer, PE

[email protected] • ENGR-25_XY-Translation-Stage_CaseStudy.ppt1

Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods

Bruce Mayer, PEDir. System Engineering

17Oct02

3x00 XY-StageTransit/Settling Time

Engr/Math/Phys 25



Effecting Planer Motion

An XYStage



Executive Summary Test Procedure

• Attach Accelerometer to 3xxx Stage• Move Stage in Short, Medium, Long Runs• Record Accelerometer OutPut With Oscope

Estimated SETTLING TIME: <15ms Olympus Stage Transit-Time Model

mS5.46mmmS37.4 dTt• d Travel Distance in mm • Tt Transit Time in mS



Goals & Logistics

Goals → For 3xxx XY-Stage Determine• Typical AntiVibration-Table Settling Time• Model: Transit-Time vs. Transit-Distance

Logistics• Test Date = 15-Oct-2002• Experimenters = B. Mayer, CEE• Test System = YYY-3xxx

– Hi-Accuracy XY-Stage– Mechanical (i.e., spring-based)

AntiVibration Table



Test Design Attach Accelerometer to XY-Stage Measure Accelerometer Output w/ Oscope Program System for Die Jumps on 200mm

wafer with KLARRF Map Die Patterns• X-Pitch = 7.8408280000e+03 µm (7.8408 mm)• Y-Pitch = 1.4138693000e+04 µm (14.1387 mm)

Die Jumps: L↔R, T↔B, UL↔LR, UR↔LL• Full Cross-Wafer (long) Moves• 4-Die Moves• Single-Die Moves



AcceleroMeter Mounting

Wafer & Chuck

OTA-3xxxStage

Major Axis = Z

Omega ACC-102 Accelerometer(100 mV/g)



Instrumentation

Fluke-199 200 MHz ScopeMeter

Omega ACC-PS1AcceleroMeterPower Supply

Cables To/FromAcceleroMeter



Stage-Move Profiles – 200mm WaferLEGEND

LONG MOVE4-DIE MOVESINGLE-DIE MOVE

174.4 mm

12.7mm50.9 mm

AVG. DISTANCE



Results & Analysis - Plots on Next Slides

AntiVibe Table Settling Time 15ms• Time Beyond Motor-Stop• S-Curve Accel & Decel Improves Settling

Time mS5.46mmmS37.4 dTt Transit-Time Model Determined by

Linear-Regression:– d Travel Distance in mm – Tt Transit Time in mS

• Full Speed = 1/[4.37 mS/mm] = 229 mm/S• Very-Short Move Time Const 47 mS



Results & Analysiscont.1

Max Z-Acceleration = 5.92g Y-Axis “Rattles” about 4-TIMES More

than the X-Axis• Suggests inquiry into the source of the

added Settling Time



OTA-3220 Stage Transit-Time Test • Oct02

t = 4.3725d + 46.494

R2 = 0.9871

0

100

200

300

400

500

600

700

800

900

0 20 40 60 80 100 120 140 160 180

Stage Travel Distance (mm)

Sta

ge

Tra

ve

l Tim

e (

mS

)

Travel-Time (mS)

Linear (Travel-Time (mS))

file = OTA3200_Stage-Settling_Time_0210.XLS

Velocity/Slope = 229 mm/S



OTA-3220 Stage Settling • Long +X Move

-125

-100

-75

-50

-25

0

25

50

75

100

125

150

-0.4 -0.2 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)

Vlo (Vdc)

Vhi (Vdc)


Ramp Up/Down

~ConstantVelocity



OTA-3220 Stage Settling • Single-Die UR-Diag Move

-350

-300

-250

-200

-150

-100

-50

0

50

100

150

200

250

300

350

400

-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)

Vlo (Vdc)

Vhi (Vdc)


Ramps Only



OTA-3220 Stage Settling • Single-Die +y Move

-250

-200

-150

-100

-50

0

50

100

150

200

250

-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)

Vlo (Vdc)Vhi (Vdc)Lt BoundaryRt boundary


Se

ttling

time

= ~

12

.8m

s



OTA-3220 Stage Settling • Single-Die +y Move

-200

-150

-100

-50

0

50

100

150

200

0.09 0.10 0.11 0.12 0.13 0.14

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)



Settling time = ~12.8ms



OTA-3220 Stage Settling • Single-Die DIAG-LR Move

-250

-200

-150

-100

-50

0

50

100

150

200

250

-0.04 -0.02 0.00 0.02 0.04 0.06 0.08 0.10 0.12 0.14 0.16

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)



Se

ttling

time

= ~

14

.4m

s



OTA-3220 Stage Settling • Single-Die DIAG-LR Move

-80

-60

-40

-20

0

20

40

60

80

0.110 0.115 0.120 0.125 0.130 0.135 0.140

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)



Settling time = ~14.4



OTA-3220 Stage Settling • 4-Die Moves

-600

-500

-400

-300

-200

-100

0

100

200

300

400

500

600

-0.10 -0.05 0.00 0.05 0.10 0.15 0.20 0.25 0.30 0.35 0.40

Time (s)

Ac

ce

lero

Me

ter

Ou

tpu

t (m

Vd

c)

4D +x Vlo 4D +x Vhi 4D -y Vlo

4D -y Vhi 4D LL=>UR Vlo 4D LL=>UR Vhi




All Done for the COURSE

See You in Fall 13



All Done for Today

An XYStage



Bruce Mayer, PELicensed Electrical & Mechanical Engineer

[email protected]

Engr/Math/Physics 25

Appendix

6972 23 xxxxf tfyyy

735

masterjslave PxhPn

1



Bruce Mayer, PEDir. System Engineering

17Oct02

Settling TimeAPPENDIX

Engr/Math/Physics 25



AcceleroMeter Instrumentation



AcceleroMeter Specifications



KLARFF Map DetailsFileVersion 1 1;

FileTimestamp 08-22-02 13:33:54;

InspectionStationID "NONE" "BITMAP" "ORB102";

SampleType WAFER;

ResultTimestamp 08-22-02 10:14:55;

LotID "QT96B2815340_3";

SampleSize 1 200;

SetupID "T96B_UP" 05-08-02 07:02:28;

StepID "RTP_ANNEAL_2";

SampleOrientationMarkType NOTCH;

OrientationMarkLocation UP;

DiePitch 7.8408280000e+03 1.4138693000e+04;

DieOrigin 0.0000000000e+00 0.0000000000e+00;

WaferID "01";

Slot 1;

SampleCenterLocation 4.3974690000e+03 7.8404710000e+03;

Documents

[email protected] ENGR-25_XY-Translation-Stage_CaseStudy.ppt 1 Bruce Mayer, PE Engineering/Math/Physics 25: Computational Methods Bruce Mayer, PE