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8/9/2019 Boning Models of Process Variations in Device and Interconnects
http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 1/21
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V dd , T ox, V T W,T,H,
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 2/21
8/9/2019 Boning Models of Process Variations in Device and Interconnects
http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 3/21
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 9/21
8/9/2019 Boning Models of Process Variations in Device and Interconnects
http://slidepdf.com/reader/full/boning-models-of-process-variations-in-device-and-interconnects 10/21
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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(a) (b)
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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I L D t h i c k n e s s v a r i a t i o n ( % )
8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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8/9/2019 Boning Models of Process Variations in Device and Interconnects
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